• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 1997.10a
• /
• pp.129-134
• /
• 1997

현재 외부 가압 공기베어링이 사용되어지는 분야는 PCB 기판, 엔진의 연료분사노즐 등의 고속가공용 스핀들, 전자 기기, 광학 기기 등에 사용되는 초정밀 부품가공용 스핀들, 정밀 측정 기기, 의료 기기, 저온 팽창기등 상대운동을 하는 많은 분야에서 이용되고 있으며, 이들 분야의 고속화 및 고정밀화 추세에 따라 고속에서의 안정성과 높은 운전정밀도가 보장된 외부 가압 공기 베어링이 요구되고 있다. 정밀 스핀들 시스템에 공기베어링이 사용되는 이유는 윤활제인 공기의 압축성에 기인된 평균화효과로 인하여 어느 정도 형상오차가 존재하더라도 축의 회전 시 떨림 진폭이 흡수되어 높은 운전정밀도를 유지하며 운전이 가능하기 때문이다. 그러나, 공기의 압축성에 의한 평균화효과로 어느 정도의 떨림 진폭은 흡수되나 형상오차에 의한 떨림 진폭은 작은 크기라도 여전히 남아있게 된다. 따라서, 초정밀 가공 기기나 정밀 측정 기기 등 높은 운전정밀도가 요구되는 곳에 공기베어링이 사용될 경우에 있어서 형상오차는 운전정밀도에 영향을 미치는 중요한 인자가 된다. 본 연구에서는 각각 두 개의 오비 가압 공기 저널 및 스러스트 베어링으로 구성된 스핀들 시스템에 대한 축과 베어링의 직각도 오차가 운전정밀도에 미치는 영향에 대해 해석하고 결과를 고찰하여 스핀들 시스템에 있어서 형상 공차에 대한 기초 설계자료를 제시하고자 한다.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1555-1558
• /
• 2005

In this study, we measured cylindricity and Runout of the air bearing spindle, and tested PCB(printed circuit boards) drilling with 0.4mm micro drill at 90,000rpm and 110,000rpm in order to obtain drilling hole error. Results are as follows; The air bearing spindle's Runout was not so high within $10\mu{m}$ from 20,000rpm to 80,000rpm but it grew after 80,000rpm. Drilling hole size error was 9% at 80,000rpm and 12% at 110,000rpm because of spindle's Run out. Drilled hole shape falsified more 110,000rpm than 90,000rpm.

• 전기의세계
• /
• v.48 no.6
• /
• pp.29-35
• /
• 1999

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.4 s.181
• /
• pp.29-36
• /
• 2006

Micro drilling by high-speed air bearing spindle is very useful manufacturing technology in electronic industry For the design of high speed air bearing spindle, there are considered stability of air bearing spindle, allowable load of air bearing, run out and tooling system design for micro drill's attach and remove. According to suggested details, we designed and manufactured high-speed air bearing spindle and carried out performance estimation such as run out, temperature change in running air bearing spindle, stiffness, chucking torque. Results are follows; Run out was measured under $5{\mu}m$ at air bearing spindle revolution $20,000\sim125,000rpm$. High speed air bearing spindle's temperature rose about $20^{\circ}C$ after 5 minutes from running and then was fixed. Allowable thrust load of spindle was 17kgf. Chucking torque of collet was 15kgfcm.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.3 s.168
• /
• pp.15-20
• /
• 2005

This paper describes the PCB drilling using an ultra high-speed air bearing spindle system and micro drill. For this research, we have developed the ultra high-speed air bearing spindle of 125,000 rpm and made an experiment for the application possibility in the PCB drilling. In order to estimate the drilling performance, we have investigated the size and damage of drilled hole, and the wear of drill at 90,000rpm. Results are as follows; we have confirmed the possibility in the PCB drilling of air bearing spindle. In case of micro-drilling PCB at $0.1mm\sim0.3mm$, the increase in the number of drilling has resulted in a bigger size of holes and also a bigger size of damage. It has been found that the wear of micro drill tends to concentrate in the main cutting edge.

• Tribology and Lubricants
• /
• v.39 no.1
• /
• pp.28-34
• /
• 2023

Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.10a
• /
• pp.411-412
• /
• 2006

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.10 no.5
• /
• pp.31-38
• /
• 2001

This paper deals with the micro turning property of setting angle using diamond tool. The bed of the system has used the granite which has the thermal and vibrational characteristics superior to the cast iron bed for the common machine tool. To minimize the inner and outer vibration of the fuming system, an air pad system was manufactured and tested. The aero-static spindle system which has the excellent rotation accuracy was designed and manufactured. As a result of the micro-cutting test on aluminum alloy, tool setting angel have effected on surface roughness. From the results, the micro-cutting conditions hope to provide the useful actual data using in industrial fields.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2006.11a
• /
• pp.128-135
• /
• 2006

This paper presents a finite element method to analyze the free vibration of a flexible HDD composed of the spinning disk-spindle system with fluid dynamic bearings(FDBs), the head-suspension-actuator with pivot bearings, and the base plate with complicated geometry. Experimental modal testing shows that the proposed method well predicts tue vibration characteristics of a HDD. This research also shows that even the vibration motion of the spinning disk corresponding to half-speed whirl and the pure disk mode are transferred to a head-suspension-actuator and base plate through the air bearing and the pivot bearing consecutively. The proposed method can be effectively extended to investigate the forced vibration of a HDD and to design a robust HDD against shock.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.17 no.1 s.118
• /
• pp.24-32
• /
• 2007

This paper presents a finite element method to analyze the free vibration of a flexible HDD composed of the spinning disk-spindle system with fluid dynamic bearings(FDBs), the head-suspension-actuator with pivot bearings, and the base plate with complicated geometry. Experimental modal testing shows that the proposed method well predicts the vibration characteristics of a HDD. This research also shows that even the vibration motion of the spinning disk corresponding to half-speed whirl and the pure disk mode are transferred to a head-suspension-actuator and base plate through the air bearing and the pivot bearing consecutively. The proposed method can be effectively extended to investigate the forced vibration of a HDD and to design a robust HDD against shock.