Selectivity and Characteristics of $\beta$ -SiC Thin Film Deposited on the Masked Substrate
(기판-Mask 재료에 따른 $\beta$ -SiC 박막 증착의 선택성과 특성 평가)
-
- Journal of the Korean Ceramic Society
- /
- v.36 no.1
- /
- pp.55-60
- /
- 1999