A Study on the Reistivity and Temperature Coefficient of Resistivity of Stacked $TaN_x$ /Cr Cermet Thin Film
($TaN_x$ /Cr Cermet 적층 박막의 비저항 및 저항온도계수에 관한 연구)
-
- Journal of the Korean Vacuum Society
- /
- v.3 no.2
- /
- pp.190-197
- /
- 1994