• Title/Summary/Keyword: 고분해능 전자현미경

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Formation of $CoSi_2$ Film and Double Heteroepitaxial Growth of $Si/epi-CoSi_2/Si$(111) by Solid Phase Epitaxy (고상 에피택시에 의한 초박막 $CoSi_2$ 형성과 $Si/epi-CoSi_2/Si$(111)의 이중헤테로 에피택셜 성장)

  • Choi, Chi-Kyu;Kang, Min-Sung;Moon, Jong;Hyun, Dong-Geul;Kim, Kun-Ho;Lee, Jeong-Yong
    • Korean Journal of Materials Research
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    • v.8 no.2
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    • pp.165-172
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    • 1998
  • Epitaxial ultrathin films of $CoSi_2$ and double heteroepitaxial structure of Si/$CoSi_2$/Si(lll) were prepared on Si(111)-$7\times{7}$ substrate by in situ solid-phase epitaxy in a ultrahigh vacuum(LHV). The phase, chemical composition, crystallinity, and the microsructure of the Si/$CoSi_2$/Si(lll) interface were investigated by 2-MeV $^4He^{++}$ ion backscattering spectrometry, X-ray diffraction, and high-resolution transmission electron microscopy. The growth mode of the Co film was the Stransky-Krastanov type with texture when the substrate temperature was room temperature. A-type $CoSi_2$ ultrathin film was grown by deposition of about 50A Co on Si(ll1)-$7\times{7}$ substrate followed by in situ annealing at $700^{\circ}C$ for 10 min. The matching face relationships were $CoSi_2$[110]//Si[110] and $CoSi_2$(002)//Si(002) with no misorientation angle. The A-type $CoSi_2$/Si(lll) interface was abrupt and coherent. The best epi-Si/epi-$CoSi_2$2(A-type)/Si(lll) structure was obtained by deposition of Si film on the CoSii at $500^{\circ}C$ followed by in situ annealing at $700^{\circ}C$ for 10 min in UHV.

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Mössbauer Studies of Manganese Iron Oxide Nanoparticles (망간-철산화물 나노입자의 뫼스바우어 분광 연구)

  • Hyun, Sung-Wook;Shim, In-Bo;Kim, Chul-Sung;Kang, Kyung-Su;Park, Chu-Sik
    • Journal of the Korean Magnetics Society
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    • v.18 no.1
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    • pp.24-27
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    • 2008
  • We have prepared $MnFe_2O_4$ nanoparticles with polyol method. The crystallographic and magnetic properties were measured by using X-ray diffraction(XRD), vibrating sample magnetometer(VSM) and $M\"{o}ssbauer$ spectroscopy. The high resolution transmission electron microscope(HRTEM) shows uniform nanoparticle-sizes with $6{\sim}8$ nm. The crystal structure is found to be single-phase cubic spinel with space group of Fd3m. The lattice constant of $MnFe_2O_4$ nanparticles is determined to be $8.418{\pm}0.001{\AA}$. $M\"{o}ssbauer$ spectrum of $MnFe_2O_4$ nanparticles at room temperature(RT) shows a superparamagnetic behavior. In VSM analysis, the diagnosis of the superparamagnetic behavior is also shown in hysteresis loop at RT. $M\"{o}ssbauer$ spectrum at 4.2K shows that the well developed two sextets are with different hyperfine field $H_{hfA}=498$(A-site) and $H_{hfB}=521$(B-site) kOe.

Thermal Behavior and Crystallographic Characteristics of an Epitaxial C49-$TiSi_2$ Phase Formed in the Si (001) Substrate by $N_2$Treatment (Si (001) 기판에서 $N_2$처리에 의해 형성된 에피택셜 C49-$TiSi_2$상의 열적 거동과 결정학적 특성에 관한 연구)

  • Yang, Jun-Mo;Lee, Wan-Gyu;Park, Tae-Soo;Lee, Tae-Kwon;Kim, Joong-Jung;Kim, Weon;Kim, Ho-Joung;Park, Ju-Chul;Lee, Soun-Young
    • Korean Journal of Materials Research
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    • v.11 no.2
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    • pp.88-93
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    • 2001
  • The thermal behavior and the crystallographic characteristics of an epitaxial $C49-TiSi_2$ island formed in a Si (001) substrate by $N_2$, treatment were investigated by X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM). It was found from the analyzed results that the epitaxial $C49-TiSi_2$ was thermally stable even at high temperature of $1000^{\circ}C$ therefore did not transform into the C54-stable phase and did not deform morphologically. HRTEM results clearly showed that the epitaxial $TiSi_2$ phase and Si have the orientation relationship of (060)[001]$TiSi_2$//(002)[110]Si, and the lattice strain energy at the interface was mostly relaxed by the formation of misfit dislocations. Furthermore, the mechanism on the formation of the epitaxial $_C49-TiSi2$ in Si and stacking faults lying on the (020) plane of the C49 Phase were discussed through the analysis of the HRTEM image and the atomic modeling.

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Mineralogical Characterization of the Chuncheon Nephrite: Mineral Facies, Mineral Chemistry and Pyribole Structure (춘천 연옥 광물의 광물학적 특성 : 광물상, 광물 화학 및 혼성 격자 구조)

  • Noh, Jin Hwan;Cho, Hyen Goo
    • Journal of the Mineralogical Society of Korea
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    • v.6 no.2
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    • pp.57-79
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    • 1993
  • Chuncheon nephrite, which was formed by the polymetasomatic alteration of dolomitic marble, can be classified into pale green, green, dark green, and grey types on the basis of their occurrence, mineralogical and textural characteristics. The nephrites consist obiefly of fibrous or hairlike(length/width ratio>10) cryptocrystalline(crystal width < $2{\mu}m$) tremolite, and include less amounts of micro-crystalline diopside, calcite, clinochlore, and sphene as impurities. The oriented and rather curved crystal aggregate, of nephritic tremolite are densely interwoven, resulting in a massive-fibrous texture which may explain the characteristic toughness of nephritic jade. The characteristic greenish color of the nephrite may be preferably related to Fe rather than Cr and Ni. However, the variation of color and tint in the Chuncheon nephrite also depends on the mineralogical and textural differences such as crystallinity, texture, and impurities. The chemical composition of the nephritic tremolite is not stoichiometric and rather dispersed especially in the abundances of Al, Mg, and Ca. Al content and Mg/Ca ratio for the nephritic tremolite are slightly increased with deepening in greenish color of the nephrite. Fe content in the nephritic tremolite is generally very low, but comparatively richer in the dark green nephrite. In nephritic tremolite, wide-chain pyriboles are irregularly intervened between normal double chains, forming a chain-width disorder. Most nephritic tremolites in the Chuncheon nephrite show various type of chain-width defects such as triple chain(jimthompsonite), quintuple chain (chesterite), or sometimes quadruple chain in HRTEM observations. The degree of chain-width disorder in the nephritic tremolite tends to increase with deepening in greenish color. Triple chain is the most common type, and quadruple chain is rarely observed only in the grey nephrite. The presence of pyribole structure in the nephritic tremolite is closely related to the increase of Al content and Mg/Ca ratio, a rather dispersive chemical composition, a decrease of relative intensity in (001) XRD reflection, and an increase in b axis dimension of unit cell. In addition, the degree and variation of chain-width disorder with nephrite types may support that an increase of metastability was formed by a rapid diffusion of Mg-rich fluid during the nephrite formation.

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Direct bonding of Si(100)/Si$_3$N$_4$∥Si (100) wafers using fast linear annealing method (선형열처리를 이용한 Si(100)/Si$_3$N$_4$∥Si (100) 기판쌍의 직접접합)

  • Lee, Young-Min;Song, Oh-Song;Lee, Sang-Hyun
    • Korean Journal of Materials Research
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    • v.11 no.5
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    • pp.427-430
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    • 2001
  • We prepared 10cm-diameter Si(100)/500 $\AA$-Si$_3$N$_4$/Si(100) wafer Pairs adopting 500 $\AA$ -thick Si$_3$N$_4$layer as insulating layer between single crystal Si wafers. Si3N, is superior to conventional SiO$_2$ in insulating. We premated a p-type(100) Si wafer and 500 $\AA$ -thick LPCVD Si$_3$N$_4$∥Si (100) wafer in a class 100 clean room. The cremated wafers are separated in two groups. One group is treated to have hydrophobic surface and the other to have hydrophilic. We employed a FLA(fast linear annealing) bonder to enhance the bond strength of cremated wafers at the scan velocity of 0.1mm/sec with varying the heat input at the range of 400~1125W. We measured bonded area using a infrared camera and bonding strength by the razor blade crack opening method. We used high resolution transmission electron microscopy(HRTEM) to probe cross sectional view of bonded wafers. The bonded area of two groups was about 75%. The bonding strength of samples which have hydrophobic surface increased with heat input up to 1577mJ/$m^2$ However, bonding strength of samples which have hydrophilic surface was above 2000mJ/$m^2$regardless of heat input. The HRTEM results showed that the hydrophilic samples have about 25 $\AA$ -thick SiO layer between Si and Si$_3$N$_4$/Si and that maybe lead to increase of bonding strength.

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Interaction of oxygen with the ordered Ni3Al(111) alloy surface: adsorption and oxide islands formation at 800 K and 1000 K (Ordered Ni3Al(111) 합금표면과 산소와의 상호작용 : 800 K와 1000 K에서의 흡착과 oxide islands 형성연구)

  • Kang, B.C.;Boo, J.H.
    • Journal of the Korean Vacuum Society
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    • v.16 no.5
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    • pp.322-329
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    • 2007
  • The interaction of oxygen with the ordered $Ni_3Al(111)$ alloy surface at 800 K and 1000 K has been investigated using LEED, STM, HREELS, UPS, and PAX. The clean $Ni_3Al(111)$ surface exhibits a "$2{\times}2$" LEED pattern corresponding to the ordered bulk-like terminated surface structure. For an adsorption of oxygen at 800 K, LEED shows an unrelated oxygen induced superstructure with a lattice spacing of $2.93\;{\AA}$ in addition to the ($1{\times}1$) substrate spots. The combined HREELS and the UPS data point to an oxygen chemisorption on threefold aluminum sites while PAX confirms an islands growth of the overlayer. Since such sites are not available on the $Ni_3Al(111)$ surface, we conclude the buildup of an oxygen covered aluminum overlayer. During oxygen exposure at 1000 K, however, we observe the growth of ${\gamma}'-Al_2O_3$ structure on the reordered $Ni_3Al(111)$ substrate surface. This structure has been identified by means of HREELS and STM. The HREELS data will show that at 800 K the oxidation shows a very characteristic behavior that cannot be described by the formation of an $Al_2O_3$ overlayer. Moreover, the STM image shows a "Strawberry" structure due to the oxide islands formation at 1000 K. Conclusively, from the oxygen interaction with $Ni_3Al(111)$ alloy surface at 800 K and 1000 K an islands growth of the aluminum oxide overlayer has been found.