• Title/Summary/Keyword: 계속 사용 의도

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대면적 플라즈마 공정에서 자장이 내장형 선형 유도결합형 플라즈마 특성에 미치는 영향에 관한 연구

  • 경세진;이영준;김경남;염근영
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.05a
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    • pp.55-55
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    • 2003
  • 최근 높은 해상도의 평판 디스플레이 장치 특히 차세대 TFT-LCD를 개발하기 위해서는 건식식각공정의 개발이 필수 불가결하며 이는 플라즈마 공정장치의 대면적화가 가능해야 한다. 따라서 산업계는 이러한 제조 조건에 알맞는 대면적 플라즈마 반응기 개발을 추구하고 있다. 이를 위해서는 건식식각공정의 개발이 필수 불가결하며 이를 위해선 플라즈마 공정장 치의 대면적화가 가능해야 한다. 이러한 대면적 공정을 위해서는 낮은 공정압력, 고밀도, 높은 플라즈마 균일도가 요구된다. 또한 이러한 대면적 고밀도 플라즈마에의 적용을 위하여 새로운 유도결합형 플라즈마 소오스의 개발이 진행되고 있으며, 안정적인 300mm웨이퍼 공정을 위하여 여러 형태의 안테나가 연구되어지고 있다. 그러나 차세대 TFT-LCD에 적용 가 능하게끔 기존의 ICP 소오스를 직접적으로 대면적화 하는데 있어서는 안테나의 인덕턴스의 값이 키지며, 유전물질의 두께 증가 및 그에 따른 재료비의 상슴에 의해 그 한계점을 나타 내었다. 본 연구에서는 차세대 TFT-LCD 및 POP 대면적 공정에 적용 가능한 고밀도 플라즈마를 발생시키기 위해서 내장형 유도결합형 선형 안테나를 사용하였다. 내장형 유도결합형 선형 안테나가 가지고 있는 고유의 정전기적 결합효과를 최소화시키기 위해 직사각형모양의 플라즈마 챔버(830mm*1,020mm)에서 영구자석을 사용하였다. 영구자석을 사용하여 외부자 장을 인가하였을 때가, 그럴지 않은 때보다 RF 안테나에 걸리는 코일의 전압을 낮춰주었으며, 영구자석의 배열에 따라 코일의 인덕턴스의 값이 크게 변함을 알 수 있었다. 그리고, 최적화된 자장의 배열은 플라즈마의 이온밀도를 증가시켰으며, 플라즈마 균일도 또한 10% 이 내로 유지됨을 알 수 있었다. 따른 식각 메커니즘에 대하여 알아보고자 하였다. $CF_4/Cl_2$ gas chemistry 에 첨 가 가스로 $N_2$와 Ar을 첨 가할 경 우 텅 스텐 박막과 하부 layer 간의 etch selectivity 증가는 관찰되지 않았으며, 반면에 첨가 가스로 $O_2$를 사용할 경우, $O_2$의 첨가량이 증가함에 따라 etch s selectivity 는 계속적으로 증가렴을 관찰할 수 있었다. 이는 $O_2$ 첨가에 따라 형성되는 WOF4 에 의한 텅스텐의 etch rates 의 감소에 비하여, $Si0_2$ 등의 형성에 의한 poly-Si etch rates 이 더욱 크게 감소하였기 때문으로 사료된다. W 과 poly-Si 의 식각 특성을 이해하기 위하여 X -ray photoelectron spectroscopy (XPS)를 사용하였으며, 식각 전후의 etch depth 를 측정하기 위하여 stylus p pmfilometeT 를 이용하였다.X> 피막이 열처리 전후에 보아는 기계적 특성의 변화 양상은 열역학적으로 안정한 Wurzite-AlN의 석출에 따른 것으로 AlN 석출상의 크기에 의존하며, 또한 이러한 영향은 $(Ti_{1-x}AI_{x})N$ 피막에 존재하는 AI의 함량이 높고, 초기에 증착된 막의 업자 크기가 작을 수록 클 것으로 여겨진다. 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로

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A Study on the Interpretation of Cultural Heritage Sites for Public Education (대중교육을 위한 문화유적의 해석(Interpretation)에 관한 기본연구)

  • Han, Sang-U
    • KOMUNHWA
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    • no.68
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    • pp.41-57
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    • 2006
  • The purpose of this study is to review educational value of cultural heritage sites first and then, to examine the importance of interpretation and interpretation methods and process briefly to utilize cultural heritage sites as important resources for public education and cultural tourism. The educational value of cultural heritage sites is not limited to provide visitors with various information on historical facts and events related to the cultural heritage site, but to provide the public with a new recognition of the importance of the preservation of cultural heritage sites by understanding the site well. In order to utilize the educational value of the cultural heritage site, interpretation must be emphasized as an important element of cultural heritage sites management and much attention should be given on the development and practice of interpretation programs in each cultural heritage site. In order to develop an interpretation program of the site, a specific target audience must be defined first to find most resonable scope and direction of an interpretation program and then, site specific interpretation themes (or a theme) should be developed from the interpretive topic. According to these defined elements, an interpretation program(s) is established by using various interpretation methods and techniques in order to provide visitors with useful information and knowledge on the site efficiently. Interpretation methods and techniques are various as defined by various ways and most effective methods or techniques are employed as a specific interpretation program is presented most effectively. The evaluation processes in planing stage, during developing stage, and after completion of interpretation program development are important processes to find out any problems of planed interpretation program and to revise or update the interpretation program. Conclusively, the direction of cultural heritage sites management in Korea has focused on the conservation and restoration of cultural heritage sites to preserve the original conditions of cultural heritage sites so far. This direction on current practice on cultural heritage sites management should he changed to more active utilization of the sites and interpretation of the sites is a way to accomplish the this goal.

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A study on the Bending Property of Structural Size Skin-Timber (대단면 스킨팀버의 휨 성질에 관한 연구)

  • Kim, Gwang-Chul
    • Journal of the Korean Wood Science and Technology
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    • v.40 no.1
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    • pp.26-37
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    • 2012
  • Recently, the demand and supply on the Hanok have been increased. However, Hanok should be requested larger section of structural members because of excessive roof weight. So, structural skin-timber was manufactured to get a lightweight structural member. The structural skin-timber has exterior shape with larger section but a great volume of wood be removed. The reduced strength of structural skin-timber can be supplemented by hybridizaion of structural member. Japanese larch and Domestic pine were used to manufacture the structural skin-timber. Structural skin-timbers of rectangular shape and cylinder shape were manufactured and tested to evaluate the bending properties. The intended strength property could not be obtained because member had been suffered severe damage by precision deficiency of manufacturing machine. However, if precision of manufacturing machine would be improved and additional hybridizaion of structural skin-timber would be done, lightweight structural member will be able to be manufactured. Structural skin-timber did not showed statistical significancy between two species, so it is possible to use pine mixed with larch. Only MOR of larch showed statistical significancy between rectangular shape and cylinder shape, so it is necessary to use of those as separate things. However, the rest of skin-timber can be judged mixed using because of non statistical significancy. The objective of this study was the development of lightweight larger structural member with relatively strength. If hybrid member of skin-timber could be developed with wood-ceramics, lightweight steel and more, it can be possible to be used as a building material of Hanok, interior material, post & beam construction material and more.

Automatic Speech Style Recognition Through Sentence Sequencing for Speaker Recognition in Bilateral Dialogue Situations (양자 간 대화 상황에서의 화자인식을 위한 문장 시퀀싱 방법을 통한 자동 말투 인식)

  • Kang, Garam;Kwon, Ohbyung
    • Journal of Intelligence and Information Systems
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    • v.27 no.2
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    • pp.17-32
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    • 2021
  • Speaker recognition is generally divided into speaker identification and speaker verification. Speaker recognition plays an important function in the automatic voice system, and the importance of speaker recognition technology is becoming more prominent as the recent development of portable devices, voice technology, and audio content fields continue to expand. Previous speaker recognition studies have been conducted with the goal of automatically determining who the speaker is based on voice files and improving accuracy. Speech is an important sociolinguistic subject, and it contains very useful information that reveals the speaker's attitude, conversation intention, and personality, and this can be an important clue to speaker recognition. The final ending used in the speaker's speech determines the type of sentence or has functions and information such as the speaker's intention, psychological attitude, or relationship to the listener. The use of the terminating ending has various probabilities depending on the characteristics of the speaker, so the type and distribution of the terminating ending of a specific unidentified speaker will be helpful in recognizing the speaker. However, there have been few studies that considered speech in the existing text-based speaker recognition, and if speech information is added to the speech signal-based speaker recognition technique, the accuracy of speaker recognition can be further improved. Hence, the purpose of this paper is to propose a novel method using speech style expressed as a sentence-final ending to improve the accuracy of Korean speaker recognition. To this end, a method called sentence sequencing that generates vector values by using the type and frequency of the sentence-final ending appearing in the utterance of a specific person is proposed. To evaluate the performance of the proposed method, learning and performance evaluation were conducted with a actual drama script. The method proposed in this study can be used as a means to improve the performance of Korean speech recognition service.

Improvement of Net Structure and Operating System in Purse Seine Fishery for Gizzard-shad, Konosirus Punctatns(I) -Underwater Geometry and Behaviour of fish School to the Net - (전어 선망 어구 및 조업 시스템 개발(I) -어구의 수중 형상 및 전어 어군의 대망 행동-)

  • 장덕종;신형호;김동수;김진건
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.38 no.2
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    • pp.156-163
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    • 2002
  • In order to development the construction and dimension of fishing gear for gizzard shad coastal purse seine, first of all investigated to the sinking speed and underwater geometry of net, behaviour of fish school to the net during the fishing operation In the field. The results obtained are summarized as follows; 1. Average sinking speed of net was 13cm/sec in bunt, 9.0cm/sec and 9.5cm/sec in 170m and 280m of center, 4.9cm/sec in end wing side, therefore was fastest in start of shooting and decreased gradually during the shooting process. 2. The most of leadline was reached in bottom from the shooting immediately to hauling time and the mean depth of timber bar used equipment for the escaping prevention of fish school was within the 2.7m. 3. The fish school of gizzard shad was appearanced higher density and remained to the most time in bottom than the surface and repeated to vortical movement, and its tendency to distinct in rapid time of tide current. 4. Behaviour of fish school in the net was showed to the vortical movement by sinking and rising immediately with the shooting of net and then divide with the two shape to follow round the wall of net and no patterns straightly movement in the net, and tendency easily catched in fish school of the wall of net. 5. Escaping of fish school in the gap of wing side was to busy after that seting the timber bar, therefore its function for escaping prevention of fish school was very lowed. 6. Escaping behaviour of fish school was differenced with the depth of fishing ground, the above 20m escaped to busy through the below in ledline because the sinking speed of fish school is fast than the net.

Appraisal or Re-Appraisal of the Japanese Colonial Archives and the Colonial City Planing Archives in Korea: Theoretical Issues and Practice (일제시기 총독부 기록과 도시계획 기록의 평가 혹은 재평가 - 이론적 쟁점과 평가의 실제 -)

  • Lee, Sang-Min
    • The Korean Journal of Archival Studies
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    • no.14
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    • pp.3-51
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    • 2006
  • In this paper, I applied known theories of appraisal and re-appraisal to the Japanese Colonial Archives and the Colonial City Planing Archives in Korea. The purpose of this application to some of sample archives was to develop a useful and effective approach to appraise the archives which were not appraised before they were determined to be "permanent" archives by the Japanese colonial officials. The colonial archives have lost their context and "chain of custody." A large portion of their volume also disappeared. Only thirty thousands volumes survived. The appraisal theories and related issues applied to and tested on these archives are; "original natures" of archives defined by Sir. Hillary Jenkinson, Schellenburg's information value appraisal theory, the re-appraisal theory based on economy of preservation and prospect for use of the archives, function-based appraisal theory and documentation theory, the special nature of the archives as unique, old and rare colonial archives, the intrinsic value of the archives, especially the city planing maps and drawings, and finally, the determination of the city planing archives as permanent archives according to the contemporary and modern disposal authority. The colonial archives tested were not naturally self-proven authentic and trustworthy records as many other archives are. They lost their chain of custody and they do not guarantee the authenticity and sincerity of the producers. They need to be examined and reviewed critically before they are used as historical evidence or any material which documented the contemporary society. Rapport's re-appraisal theory simply does not fit into these rare historical archives. The colonial archives have intrinsic values. Though these archives represent some aspects of the colonial society, they can not document the colonial society since they are just survived remains or a little part of the whole archives created. The functions and the structure of the Government General of Korea(朝鮮總督府) were not fully studied yet and hardly can be used to determine the archival values of the archives created in some parts of the colonial apparatus. The actual appraisal methods proved to be effective in the case of colonial archives was Schellenburg's information value appraisal theory. The contextual and content information of the colonial archives were analysed and reconstructed. The appraisal works also resulted in full descriptions of the colonial archives which were never described before in terms of archival principles.