• Journal of the Korean Ceramic Society
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• v.38 no.4
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• pp.365-369
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• 2001

플라즈마 화학증착법(PECVD)에 의해 실리콘 (100) 기판 위에 3C-SiC막을 증착하였다. 증착반응시 유입가스비, R$_{x}$[=CH$_4$/(CH$_4$+H$_2$)]에 따른 증착막의 결정성에 대해 검토하였다. 증착된 3C-SiC막의 결정성은 R$_{x}$ 값이 감소할수록 더욱 향상되었으며, 형성된 결정상은 (111) 면으로 최대의 우선배향성을 가졌다. Nanoindentation 방법을 이용하여 3C-SiC막의 압입깊이에 따른 경도 및 탄성계수를 측정하였으며, 유입가스비(R$_{x}$)의 변화에 따라서 막의 경도 및 탄성계수가 뚜렷이 변화하였다.

• Polymer(Korea)
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• v.30 no.6
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• pp.563-567
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• 2006

Poly(vinyl alcohol) (PVA) and gelatin (GEL) blend membranes were prepared by solution casting method under a high electric field. SEM observation of the membrane showed that gelatin rich domains were elongated and oriented to the direction of the applied electric field in PVA matrix. This can be attributed to the electrostatic emulsifying effects due to a reduction in interfacial tension. In addition, it was observed through WAXD and swelling measurements that the degree of crystallinity of membranes increased with applied electric field strength. This may be interpreted to be caused by the orientation effect of GEL domains in the blend membrane, and the self-annealing effect due to some heat generated from high electric field during casting.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1542-1545
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• 2002

Experimental works were performed to implement the hetero-epitaxial growth of diamond films on the (100)- and (111)-oriented Si substrates. The deposition process used to prepare diamond films consisted of a bias-enhanced nucleation(BEN) step, accompanied with a growth step using a microwave plasma CVD system. The highly oriented diamond films were deposited under the growth condition of relatively low methane concentrations and high temperatures. Material properties and surface morphologies of deposited diamond films were improved by the addition of carburization step into the deposition process.

• Journal of the Korean Institute of Telematics and Electronics
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• v.19 no.4
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• pp.6-14
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• 1982

Both the power increasing of a television broadcasting channel for the purpose of minimiaing weak signal areas and depressing of radiation pattern to prevent some interference in known quadrants may be needed in TV broadcasting. This study shows that, the two needs mentioned above are solvable by adjusting the phases of feeding points, or redesigning the lengths of feeder lines between transmitter outend and feeder inputs in super gain antenna. A theoretical study on lengths of coaxial cables and a practical procedure of designing cable lengths, which is simple and inexpensive to apply, is presented.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.174-178
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• 2004

본 논문에서는 P-type (100)Si 기판위에 RF magnetron sputtering법으로 완충층용 MgO 박막을 $500\AA$ 증착한 후 제작된 MgO/Si 기판위에 BST 박막을 증착하였다. 증착 시 기판온도는 $400^{\circ}C$ 작업가스 $AR:O_2:=80:20$, 작업진공 10mtorr에서 RF 파워를 25W, 50W, 75W로 변화하면서 증착하여 최적의 RF 파워조건을 확립하였다. XRD 측정결과 25W에서 증착된 BST 박막은 배향성이 보이지 않는 비정질 형태로 성장되었고 50W에서 증착된 박막의 결정특성이 가장 양호하였다. I-V측정결과 모든 샘플에서 $\pm150KV/cm$에서 $10^{-7}A/\textrm{cm}^2$이하의 양호한 누설전류특성을 나타내었고 C-V측정 결과 역시 50W에서 증착된 BST 박막의 비유전율이 약 305로서 가장 우수한 특성을 보여주었다.

• Journal of the Korean institute of surface engineering
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• v.31 no.4
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• pp.217-222
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• 1998

The Facing Targets Sputtering(FTS) system has several advantages for preparing films over a wide range of working gas pressure on plasma-free substrates. Co-Cr thin films seem to be one of the most promising media for perpendicular magnetic recording system. In this study, the capabillities of the system fordepositing C0-Cr films have been investigated. Under various Ar gas pressure, films with morphologically dense microstructure and good c-axis orientation were deposited, even when the incident angle $\psi_x$ of sputtered part icles to the film plane was below abount $50^{\circ}C$. this may imply that the shadowing effect by obique incidence of particle can be compensated by rapid surface diffusion owing to the high kinetic energy of particles arriving at the growing film. It has been confirmed that the FTS system is very useful for perparing Co-Cr thin films recorging media.

• Korean Journal of Crystallography
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• v.2 no.2
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• pp.1-6
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• 1991

ZnO thin films were deposited on p-Si(100) and Coming glass 7059 by f magnetron sputtering mothod. The effect of deposition parameters on the electrical, structural and optical properties were investigated. Highly c-axis oriented ZnO thin films were deposited at high rf power. Standard deviation(σ) of X-ray rocking curve of peak at 26θ=34,4˚ ranged from 6.8˚ to 7.2˚, depending on the deposition condition. ZnO thin films deposited on glass substrate eihibited 80% transmittance in the visible range, regardless of the deposition parameters. Resistivity of ZnO thin films was significantly affected by f power and Ar pressure, and ranged widely from 3×102 to 2×109 Ω.

• Polymer(Korea)
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• v.27 no.4
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• pp.313-322
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• 2003

The morphology of poly(ethylene terephthalate) (PET)/poly(m-xylene adipamide) (MXD-6) blends, which was prepared by adding compatibilizer and interchange reaction agent, was investigated. The morphological change in the stretched blend films was also studied. The stretched film showed a dispersed MXD-6 fibril. This fibril became finer with increasing draw ratio (DR). The addition of compatibilizer and interchange reaction agent had no effect on the improvement of interfacial adhesion but caused a defect between the continuous phase and the dispersed phase, leading to the formation of irregular fibril. The change in the superstructure of blends with composition and draw ratio was examined with light scattering (LS). The H$\sub$v/ LS patterns showed a double-cross type pattern consisting of a broad rod-like pattern and a sharp cross streak. On the basis of the model calculation of the H$\sub$v/ pattern, it was found that the appearance of the double-cross type pattern was attributed to the stacking of crystals oriented along the draw direction. The crystals were gradually oriented to the stretching direction with draw ratio. As a result, the high level of orientation was obtained fur the sample of draw ratio is 6.0.

• Proceedings of the Korean Fiber Society Conference
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• 2003.04a
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• pp.64-67
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• 2003

Poly(trimethylene terephthalate)(이하 PTT)는 1941년 Caligo Printing Ink사의 Whinfield와 Dickson에 의해 중합 방법이 보고[1]된 이후 상업화를 위한 많은 학문적 연구가 이어져왔다. 그럼에도 불구하고 아직 PET에 비하여 기초 연구가 미비하며 상업적으로 사용하기에는 많은 불안정한 요소들을 가지고 있다. 앞선 연구자들이 밝힌바와 같이 PTT의 결정구조는 2개의 단량체가 1개의 unit cell을 이루면서 결정격자 내에서 O-C $H_2$-C $H_2$-C $H_2$-O가 trans-gauche-gauche-trans형의 coiled spring처럼 형성되어 좋은 elastic recovery와 뛰어난 신축성, 염색성 등 우수한 물성을 가지며 전반적인 성질은 PET와 Nylon의 중간성질을 뛰고 있지만 [2,3] 유리전이온도 (Tg : dir 4$0^{\circ}C$)와 냉결정화오도 ( $T_{ c cold}$ : dir 55$^{\circ}C$)사이의 차이가 15$^{\circ}C$ 정도이므로 섬유상에 많은 경시변화가 일으켜 구조적 불안정성을 가지게 한다 [4]. (중략)

• Journal of the Korea Institute of Information and Communication Engineering
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• v.7 no.2
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• pp.255-262
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• 2003

In this paper, an investigation on the ZnO film deposition using radio-frequency magnetic sputtering techniques on aluminum bottom electrode for film bulk acoustic wave resonator (FBAR) filter applications and the temperature effects on the ZnO film growth is presented. The investigation on how much impact the actual process temperature may have on the crystal growth is more meaningful if it is considered that the piezoelectricity property of ZnO films plays a dominant role in determining the resonance characteristics of FBAR devices and the piezoelectricity is determined by the degree of the c-axis preferred orientation of the deposited ZnO films. In this experiment, it was found that the growth of ZnO crystals has a strong dependence on the deposition temperature ranged from room temperature to $350^{\circ}C$ regardless of the RF powers applied and there exist 3 temperature regions divided by 2 critical temperatures according to the degree of the c-axis preferred orientation. Overall, below $200^{\circ}C$, ZnO deposition results in columnar grains with a highly preferred c-axis orientation. With this ZnO film, a multilayered FBAR structure could be realized successfully.