• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.85-85
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• 2007

최근 귀금속중의 하나인 Ruthenium(Ru)은 높은 일함수, 누설전류에 대한 높은 저항성등의 톡성으로 인해 캐패시터의 하부전극으로 각광받고 있다. 하부전극으로 증착된 Ru은 일반적으로 각 캐패시터의 분리와 평탄화를 위해 건식식각이 이루어진다. 하지만, 건식식각 공정중 유독한 $RUO_4$ 가스가 발생할 수 있으며, 불균일한 캐패시터 표면을 유발할 수 있다. 이러한 문제점들을 해결하기 위해 CMP 공정이 필요하게 되었다. 하지만, Ru은 화학적으로 매우 안정하기 때문에 Ru CMP 슬러리에 대한 연구가 필요하게 되었으며, 이에 대한 연구가 활발히 진행되고 있다. 본 연구에서는 Ru CMP 공정에서 Chemical A가 에칭제 및 산화제로 사용된 슬러리의 pH 변화와 pH 적정제에 따른 영향을 살펴보았다. Ru wafer를 이용하여 static etch rate, passivation film thickness와 wettability를 pH와 pH 적정제에 따라 비교해 보았다. 또한, pH 적정제로 $NH_4OH$와 TMAH를 이용하여 pH별 슬러리를 제작하고 CMP 공정을 실시하여 Ru의 removal rate을 측정하였다. $NH_4OH$와 TMAH의 경우 각각 130. 100 nm/min의 연마율이 측정된 pH 6에서 가장 높은 연마률을 보였으며, TMAH의 경우가 pH 전 구간에서 $NH_4OH$에 비해 낮은 연마율이 측정되었다. TEOS 에 대한 Ru의 선택비를 측정해 본 결과, $NH_4OH$의 경우 pH 8~9. TMAH의 경우 pH 6~7에서 높은 selectivity를 얻을 수 있었다.

• Journal of Energy Engineering
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• v.13 no.1
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• pp.75-81
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• 2004

ZZFCa sorbents for hot gas desulfurization in IGCC were prepared by adding calcium oxide to ZZF sorbent in order to improve its attrition resistance in this study. ASTM attrition test for the sorbent was performed at several different weight percentages of CaO to investigate the attrition characteristics of ZBFCa sorbents as a function of CaO content. Attrition index of ZZF without CaO was 28.3% and its collected attrition index was 10.8％. ZZFCa-3 containing 3 wt% CaO showed the lowest attrition index (AI=17.3％, CAI=8.8％) in the test. From the results of SEM morphologies and particle size distribution measurements, ZZFCa-3 maintained a fine shape and a desirable average particle size even after attrition test. In the experiments of sulfidation/regeneration for ZZFCa-3 sorbent concentration of hydrogen sulfide in coal gas was lowered from 10000 ppm to below 1 ppm. Sulfur removing capacity was about 28.8 g S/100 g sorbent. Neither formation of CaSO$_4$ was observed in XRD measurement nor SO$_2$ slippage was observed during sulfidation process.

• Resources Recycling
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• v.30 no.1
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• pp.66-76
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• 2021

Electric arc furnace dust (EAFD) contains compounds, such as oxides and chlorides, including large quantities of Zn, Pb and Fe. An efficient and stable method for the extraction of metal elements from EAFD is the Rotary Kiln Process. This method is used to recover Zn in the form of crude ZnO (approximately 60%) via the addition of a reducing agent (coke, anthracite) and limestone (for basicity control) to EAFD. This process is commonly used in industry as well as in research and development. Currently, this method is used in many Korean commercial plants, producing approximately 150,000 tons of Crude ZnO per year. The majority of Zn is found in crude ZnO (approximately 76%). In addition components such as Pb, Cd, Sn, In, Fe, Cl, and F are present as oxides, chlorides, and alkaline compounds. This elements have an adverse effect on the zinc smelting process. Therefore, a refining process that eliminates these impurities is essential. In this study, we developed a process technology that efficiently separates Zn and Pb from byproducts (mainly chlorides). A bag filter was used to collect Zn and Pb generated during the dry purification process of crude ZnO. Pure components were recovered as metals or metal carbonate.

• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.82-87
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• 1998

In the oxidation process of the $NH_3/O_2$ oxidation method, adding $NH_3$ gas to $O_2$ gas, the detected outlet gases in the reaction quartz chamber are N2, $O_2$ and $H_2O$ and in addition, a very small quantity of $CO_2$, NO and $NO_2$ are detected. Two kinds of species ($O_2$ and H2O) contribute to oxidation, so the growth rate is determined by oxidation temperature and by also partial pressure of the NH3 and $O_2$ gases. The slop of growth rate is identified to be medial and in parallel between that of the dry and wet oxidation. Auger electron spectroscopy (AES) indicates that $NH_3/O_2$ oxide film has a certain stoichiomerty of $SiO_2$, this oxidation method restrains the generation of defects in the $SiO_2/Si$ interface, minimizing fixed charges. The breakdown voltage of $NH_3/O_2$ oxide film (470$\AA$) is 57.5 volts, and the profile of the C-V curve including flat band voltage (0.29 volts) agree with the ideal curve.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.174.1-174.1
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• 2016

무전해 도금법은 외부 전원을 인가하지 않고 환원제를 이용하여 자발적으로 금속 도금층을 형성시키는 기술로, 용액내의 환원제가 산화될 때 방출되는 전자가 금속 이온에 전이하여 금속을 코팅하는 기술이다. 그 중에서도 Cu 무전해도금은 박막 형성의 용이성 및 간단한 제조 공정으로 인한 제조 원가 절감 등의 장점으로 인해 반도체 소자 배선부분에서 건식방식으로 발생되는 한계점들에 대한 해결 기술로 주목받고 있다. 또한, 이 기술은 금속 이온이 환원제에 의해 금속으로 석출되기 때문에, 피도금물이 무전해 도금액과 균일하게 접촉하고 있으면 균일한 도금 두께를 얻을 수 있는 장점이 있어서 복잡하고 다양한 형상의 제품에 적용이 가능하다. 본 연구에서는 플라스틱, PCB 등 다양한 기판에 도금 환원제, 온도 및 시간 등 도금변수를 변경하여 Cu 도금막을 형성한 후 그 특성을 평가하였다. 도금층 두께 분석을 위해 field emission scanning electron microscope (FE-SEM), energy-dispersive spectroscopy (EDS)를 사용하였으며, 박리성 평가를 위해 cross-cutting test를 실시하였다. 실험 결과, 두께 $1{\sim}3{\mu}m$ 급의 균일한 도금층이 형성된 것을 확인하였으며, $85^{\circ}C/85%$ 고온고습 조건에서 168시간 후 박리성 평가 결과, 결함 없는 양호한 표면을 나타내었다.

• Journal of Energy Engineering
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• v.12 no.4
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• pp.302-308
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• 2003

The peformence tests of zinc-based desulfurization sorbents using the yellow earth as support for the hot gas clean up were carried out. The zinc-based sorbent with 25 wt％ yellow earth was prepared, and their properties such as the reaction rate, the sulfur capacity and the attrition resistance, were investigated. The reactivity tests for hot gas desulfurization was performed at middle temperatures (sulfidation/regeneration：480$^{\circ}C$/580$^{\circ}C$). During multi-cyclic desulfurization, the deactivation of zinc-based sorbent was decreased by the addition of yellow earth, and their efficiency was enhanced. The ZnO/yellow earth sorbent had high reactivity, good regenerability, long-term durability (about 19 gS/100 g sorbent for 10-cycles) and high attrition resistance (AI=19.1％). It was concluded that the peroperties of zinc-based sorbent were improved by metal oxides (Fe$_2$O$_3$, Na$_2$O, MnO$_2$, etc) in the yellow earth. From these results, it was confirmed that the desulfurization properties of zinc-based sorbents at middle temperatures could be improved by the yellow earth using as support.

• Journal of Climate Change Research
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• v.2 no.2
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• pp.107-113
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• 2011

In this research, we described the experimental results for the improvement of Potassium based sorbents. These sorbents have been actually used in the 0.5 MW $CO_2$ capture plant located in Hadong #3 Power Plant. Firstly, we had shaped two kinds of sorbents using a spray dryer. These sorbents applied magnetite & copper oxide as an additive. And the magnetite sorbent was evaluated more excellent relatively in the attrition index. Secondly, We had obtained TGA multicycle experimental results of the improved Potassium based sorbent which applied magnetite as an additive. Consequently, $CO_2$ sorption capacity had been sustained 5.5 wt% after 2nd cycle and attrition index was very excellent as 0.5%. Finally, we had investigated the characteristics of the sorbent following in properties of supporters. As a result, the sorption capacity of the KMO sorbent used base material as a supporter was appeared as 7.2 wt%.

• Nuclear industry
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• v.17 no.1 s.167
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• pp.82-88
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• 1997

한국원자력연구소와 삼양제넥스연구소는 최근 제지$\cdot$섬유 및 식품 공업 등에 널리 사용되고 있는 공업용 전분을 방사선을 이용하여 새롭게 생산하는 방법을 세계최초로 개발하였다. 본 기술의 내용은 전분에 산화 보조제 첨가와 방사선 조사를 병행하여 점도 안정성이 우수하고 경제성이 높은 고점도에서 중점도 및 저점도까지의 필요에 따라 요구되는 변성 전분을 건식으로 제조하는 기술로서, 변성 전분의 생산성 향상 및 생산비 절감 효과와 함께 환경 공해 없이 변성 전분을 생산할 수 있어 국내 전분 공업에서 크게 이용될 것으로 전망된다. 또한 방사선 조사로 오염 유기체에 의한 손실을 방지하여 $10\~20\%$ 정도의 간접 증산 효과와 전분 추출 시간 단축에 따라 가공 에너지 절감, 그리고 환경 규제 물질인 아황산 용액의 농도를 감소시켜 작업자의 건강 보호와 환경 보전에도 크게 이바지할 수 있으며, 전분 추출률 증대에 따른 수입 절감 효과도 크게 기대된다.

• Resources Recycling
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• v.18 no.4
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• pp.14-23
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• 2009

In terms of resources recycling and resolving waste disposal problems, it is very important to recover precious metals like Au, Ag and Pd and valuable metals like Cu, Sn and Ni from the scraps of waste electrical and electronic equipment(WEEE) that consists of detective electrical and electronic parts discarded during manufacturing electrical and electronic equipments and waste electrical and electronic parts generated during disassembling them. In general, the scraps of WEEE are composed of various metals and alloys as well as refractory oxides and plastic components. Precious and valuable metals from the scraps of WEEE can be recovered by gas-phase-volatilization, hydrometallurgical, or pyrometallurgical processes. However, the gas-phase-volatilization and hydrometallurgical processes have been suggested but not yet commercialized. At the present time, most of the commercial plants for recovering precious and valuable metals from the scraps of WEEE adopt pyrometallurgical processes. Therefore, in this paper, the technical and environmental aspects on the important pyrometallurgical processes through literature survey are reviewed, and the scale-up result of a new pyrometallurgical process for recovering the precious and valuable metals contained in the scraps of WEEE using waste copper slag is presented.

• Clean Technology
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• v.20 no.3
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• pp.212-217
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• 2014

In order to regenerate the sulfidated desulfurization sorbent, oxygen is used as the oxidant agent on the regeneration process. The small amount of oxygen un-reacted in regeneration process is flowed into direct sulfur recovery process. However, the reactivity for $SO_2$ reduction can be deteriorated with the un-reacted oxygen by various reasons. In this study, the deactivation effects of un-reacted oxygen contained in the off-gas of regeneration process flowed into direct sulfur recovery process of hot gas desulfurization system were investigated. Sn-Zr based catalysts were used as the catalyst for $SO_2$ reduction. The contents of $SO_2$ and $O_2$ contained in the regenerator off-gas used as the reactants were fixed to 5.0 vol% and 4.0 vol%, respectively. The catalytic activity tests with a Sn-Zr based catalyst were for $SO_2$ reduction performed at $300-450^{\circ}C$ and 1-20 atm. The un-reacted oxygen oxidized the elemental sulfur produced by $SO_2$ catalytic reduction and the conversion of $SO_2$ was reduced due to the production of $SO_2$. However, the temperature for the oxidation of elemental sulfur increased with increasing pressure in the catalytic reactor. Therefore, it was concluded that the decrease of reactivity at high pressure is occurred by catalytic deactivation, which is the re-oxidation of lattice oxygen vacancy in Sn-Zr based catalyst with the un-reacted oxygen on the catalysis by redox mechanism. Meanwhile the un-reacted oxygen oxidized CO supplied as the reducing agent and the temperature in the catalyst packed bed also increased due to the combustion of CO. It was concluded that the rapidly increasing temperature in the packed bed can induce the catalytic deactivation such as the sintering of active components.