• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.342-342
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• 2007

원자층 증착(Atomic Layer Deposition: ALD) 방법은 반응물질들을 펄스형태로 챔버에 공급하여 기판 표면에 반응물질의 표면 포화반응에 의한 화학적 흡착과 탈착을 이용한 박막증착기술이다. ALD법은 박막의 조성 정밀제어가 쉽고, 파티클 발생이 없으며, 대면적의 박막 증착시 균일성이 우수하고, 박막 두께의 정밀 조절이 용이한 장점이 있다. 원자층 증착 공정에서 짧은 시간 안에 소스를 충분히 공급하기 위한 방법으로는 소스 온도를 증가시켜 전구체의 증기압을 높여 반응기로의 유입량을 증가시키는 방법, 전구체의 공급시간을 늘리는 방법 등을 들 수 있다. 그러나 전구체 온도를 상승시키는 경우, 공정 조건의 변화가 요구되며 전구체의 변질에 의하여 형성된 막이 의도하는 막 특성을 만족시키지 못하게 되는 문제점이 발생될 우려가 있다. 그리고 전구체를 충분히 공급하기 위하여 전구체의 공급시간을 늘이는 방법을 사용하면, 원하는 두께의 막을 형성하기 위하여 소요되는 공정시간이 증가된다. 이를 해결하기 위해 수송가스를 이용한 버블러 형태의 전구체 공급 장치를 사용하지만 이 또한 전구체의 수명을 단축시키는 단점을 가지고 있다. 본 논문에서는 위의 문제점을 극복할 수 있는 새로운 개념의 수송가스 도움 전구체 공급 장치를 소개한다. 본 연구에서 사용된 수송가스 도움 전구체 공급 장치를 가지는 ALD 장비는 Lucida-D200 (NCD Technology사)이며 기판으로는 8인치 실리콘 웨이퍼를 사용하였으며 (TEMA)Zr을 사용하여 ZrO2 박막을 성장하였다. 수송가스 도움 전구체 공급 장치를 사용한 경우, 그렇지 않은 경우 보다 $30^{\circ}C$ 이상 전구체 온도를 낮출 수 있으며, 또한 증착 속도를 약 2배정도 증가시킬 수 있었다. 이들 박막들은 XRD, XPS, AFM 등을 이용하여 결정구조, 결합에너지, 표면 거칠기 등의 특성을 관찰하였다. 그리고 C-V, I-V 측정을 이용해 정전용량, 유전율, 누설전류 등의 전기적 특성을 평가하였다.

• Journal of the Korean Institute of Gas
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• v.20 no.4
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• pp.50-57
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• 2016

According to the urban gas business legislation, cathodic protection systems should be applied for buried steel gas pipelines to prevent corrosion. In advanced countries including United States, the criteria for Cathodic Protection Potential is at least -850mV with respect to a saturated copper/copper sulfate electrode(CSE) when the CP applied, and the IR drops must be considered for valid interpretation. However, the IR drop through the pipe to soil boundary has been neglected in Korea. According to KGS code, a reference electrode must be placed in proximity to gas pipelines possible when measuring the CP potential. In this study, we have installed several solid reference electrodes around the buried pipeline(1.2m depth), lower surface(0.5m depth), and the surface individually in order to measure the CP potentials through the each reference electrode and find out the IR drops according to the location of each reference electrode. We have found the IR drop is the greatest when measuring the CP potential through the electrode placed on the ground and the IR drop is the smallest through the electrode installed near pipeline. Therefore, we have suggested the solid reference electrode should be installed as close as possible to buried pipeline in order to measure the correct CP potential without IR drop. We have also suggested the amendment of CP criteria considering IR drop.

• Journal of the Korean Society of Groundwater Environment
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• v.1 no.1
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• pp.6-9
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• 1994

Previously reported Ar/N$_2$ratios in groundwater have been measured by single ion monitoring (Barnes et al., 1975; Vogel et al., 1981; Mariotti et al., 1988). The detector geometry and flared flight tube in VG Optima isotopic ratio mass spectrometer appeared to be fortuitously aligned for the simultaneous measurement of Ar/N$_2$ratios. Method development included mechanical adjustments to optimize the mass spectrometer for Ar/N$_2$ratio measurements followed by development of a preparation system for the extraction of air-saturated water samples. Samples containing known Ar/N$_2$ratios were used to assess accuracy and precision, and to test the applicability of methods for measurements of aqueous Ar/N$_2$ratios. The results indicated that the prepared air-saturated water samples were almost identical to the predicted Ar/N$_2$ratios (p ＜0.001). Groundwater samples were collected from on-going research sites, Shelton and Grand Island, Nebraska. Samples from the Grand Island sludge injection site form a lower boundary for worldwide reported Ar/N$_2$ratios. These lower Ar/N$_2$ratios can be explained by the production of nitrogen gas from this site, where denitrification was reported previously.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.5
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• pp.516-520
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• 1999

Mechanical alloying (MA) by planetary type ball mill of pure iron powders was carried out under the ammonia gas atmosphere. The powders of metastable iron nitrides was synthesized up to the nitrogen content of 23 at% N. The observed phases are identified as the super-saturated bcc solid solution for the nitrogen concentration below 14.5 at% N and the non-equilibrium hcp phase stable at high temperature for 20.8 at.% N. Magnetization of Fe-N powders gradually decreases with increasing the N concentration on contrast to the enhancement reported for the bct iron nitrides. Neutron diffraction experiments also provide detailed information concerning the local atomic structure surrounding the nitrogen atoms. The coordination number of Fe atom around a nitrogen atom for the iron nitride containing 9.5 at% N turns out to be 3.9 atoms. This suggests that a nitrogen atom is situated at a center of the tetrahedron formed by iron atoms.

• Korean Chemical Engineering Research
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• v.44 no.5
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• pp.468-475
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• 2006

For the filtration of super compactible cake, the high filtration pressure can not improve filtration rate. As the high pressure, in this case, decreases the cake porosity adjacent to filter medium and thus forms 'dense skin' which decreases the rate of liquid flow in a great extent. Actually, there was no method to improve filtration rate for the filtration with super compactible cake. We propose the saturation of $CO_2$ gas into the suspension before the filtration operation for improving the filtration rate. The dissolved $CO_2$ gas transforms itself into gas phase in the dense skin through which the pressure changes dramatically. The gas secures its space inside the dense skin, and finally forms the flow passages which improve the filtration rate.

• Journal of Soil and Groundwater Environment
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• v.14 no.6
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• pp.87-94
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• 2009

Surfactant-enhanced air sparging (SEAS) was developed to suppress the surface tension of groundwater prior to air sparging resulting in higher air saturation and larger contact area between NAPL and gas during air sparging. Larger contacting interface between NAPL and gas means faster mass transfer of contaminants from NAPL to gas phase. This new technique, however, is limited to relatively volatile contaminants because vaporization is its basic mechanism of mass transfer. In this study, SEAS was tested at an elevated temperature for a semi-volatile n-decane, which is expected not to be a good candidate of SEAS application due to its low vapor pressure at ambient temperature. Three sparging experiments were conducted using 1-dimensional column (5 cm id, 80 cm length) packed with sand; (1) ambient temperature ($23^{\circ}C$), column saturated with distilled water, (2) SEAS at ambient temperature ($23^{\circ}C$), for n-decane contaminated sand, (3) SEAS at elevated temperature ($73^{\circ}C$), for n-decane contaminated sand. Higher air saturation was achieved by SEAS compared to that by air sparging without surfactant application. The n-decane removal efficiency of SEAS at elevated temperature was significantly higher(> 10 times) than that of ambient SEAS. The n-decane concentrations in the gas effluent from column during SEAS at $73^{\circ}C$ are found to be 10 times of those measured at ambient temperature. Thus, SEAS technique can be applied for removal of semi-volatile contaminants provided that an appropriate technique for elevating aquifer temperature is available.

• Korean Chemical Engineering Research
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• v.45 no.3
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• pp.304-309
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• 2007

In this study, the "Multi Well Plate-type cell Apparatus" was designed and setup for performing the producing experiments of methane hydrate by depressurization, heat stimulating methods. In order to characterizing the producing mechanism of hydrate through porous materials, the experiments for various producing methods have been conducted with the aid of the apparatus which has high permeability. In the experimental result of depressurization method, the pressure is temporarily increased unlikely conventional gas reservoir due to the sourcing effect of hydrate dissociation in the pore. Meanwhile, the temperature is decreased because of the endothermic reaction while hydrate is dissociated. In the experimental results of heat stimulating method, the dissociation in depressurization method is more slowly processed than that in thermal method, and hence, its gas production is lower. In the case of production right after heating, hydrate is dissociated only near injecting point and the permeability becomes greater at that area only. It infers that the more gas is produced during relatively earlier producing period. Since then, the hydrate is more slowly dissociated than the case of production after heating and soaking. This time, the performances of pressure and production obtained by thermal method have been analyzed in order to investigate the effect of soaking time on gas recovery. As a result, the gas recoveries in the case of 2 min and 4 min soaking are higher than case in 6 min soaking. This is reason that hydrate is reformed due to the decrease of temperature. It is expected that the experimental results obtained in this work may be more clearly explained by utilizing the lower permeable porous system with the greater hydrate saturation.

• Korean Chemical Engineering Research
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• v.47 no.4
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• pp.446-452
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• 2009

The behavior of a one-step fixed bed reactor which directly synthesizes dimethyl ether(DME) from Natural Gas was simulated. In the reactor, the prevention of the occurrence of hot spots which can cause deactivation of catalysts is pivotal, since methanol synthesis and dehydration reaction involved in the synthesis of DME are highly exothermic. Therefore, we simulated and compared performance of the reactor with counter-current cooling and pool boiling system that can be applied to a commercial plant. As a result, we found that counter-current cooling system is more effective in terms of CO conversion and DME productivity. However, pool boiling system can operate in a small temperature gradient that can decrease problems caused by hot spot. And, the system can operate in a safer range.

• Journal of Korea Water Resources Association
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• v.34 no.5
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• pp.439-448
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• 2001

A two-dimensional finite difference numerical model was developed in order to simulate two-phase fluid flow in a single fracture. In the model, variation of viscosity with pressure and that of relative permeability with water saturation can be treated. For the numerical solution, IMPES method was used, from which the pressure and the saturation of water and gas were computed one by one. Seven cases of model test using parallel plates for a single fracture were performed in order to obtain the characteristic equation of relative permeability which would be used in the numerical model. it was difficult to match the characteristic curves of relative permeability from the model tests with the existing emperical equations, consequently a logistic equation was proposed. As the equation is composed of the parameters involving aperture size, it can be applied to any fracture.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.459-459
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• 2007

VHF ICP (Very High Frequency Inductively Coupled Plasma) 반응기에서 반응기 압력, 수증기 유량, 플라즈마 출력, 반응기온도 등의 공정변수에 따른 수증기 분해특성과 수소생성거동을 실험하였다. 플라즈마 분해 특성은 OES(Optical Emission Spectroscopy)를 사용하여 분석하였으며, QMS(Quadrapole Mass Spectroscopy)를 이용하여 배기가스 성분을 분석하여, 수증기 분해거동 및 수소생성 효율을 조사하였다. 본 연구실에서 설계한 초고주파 유도결합 플라즈마는 고밀도 플라즈마 생성과 낮은 압력에서도 안정된 플라즈마 발생 특징을 나타내었다. 플라즈마 출력의 증가에 따른 수증기의 분해와 수소생성 거동은 개시영역, 선형증가영역, 포화영역의 세 영역으로 구분되는 특징을 나타내었다. 유량 및 압력의 증가에 따라 포화에 필요한 플라즈마의 출력이 증가되는 경향을 나타내었다. 본 실험의 온도범위에서는 온도 증가에 따른 수증기 분해 및 수소생성 증가효과는 플라즈마 출력의 영향에 비하여 매우 미미한 정도로 플라즈마의 높은 에너지 전달효과를 확인할 수 있었다. 따라서, 낮은 반응기 온도에서도, 유량 및 압력에 따른 포화 플라즈마조건을 설정할 경우, 높은 에너지 효율의 수소 제조가 가능함을 알 수 있었으며, 물분해 플라즈마를 이용한 저온 산화물 박막증착에의 적용도 기대된다.