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A bilayer diffusion barrier of atomic layer deposited (ALD)-Ru/ALD-TaCN for direct plating of Cu

  • Kim, Soo-Hyun;Yim, Sung-Soo;Lee, Do-Joong;Kim, Ki-Su;Kim, Hyun-Mi;Kim, Ki-Bum;Sohn, Hyun-Chul
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.239-240
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    • 2008
  • As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

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Phosphorus Modified Co/Al2O3 Fischer-Tropsch Catalyst for a Slurry Phase CSTR with Enhanced Hydrothermal and Mechanical Stability (수열특성 및 기계적 안정성의 개선으로 슬러리상 CSTR에 적합한 P 첨가 알루미나 기반의 Fischer-Tropsch 합성용 코발트 촉매)

  • Jung, Gyu-In;Ha, Kyoung-Su;Park, Seon-Ju;Kim, Du-Eil;Woo, Min-Hee;Jun, Ki-Won;Bae, Jong-Wook;Kang, Yong
    • Korean Chemical Engineering Research
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    • v.50 no.2
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    • pp.229-237
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    • 2012
  • Phosphorus was incorporated into Co/$Al_2O_3$ catalyst for FTS by impregnating an acidic precursor, phosphoric acid, in ${\gamma}-Al_2O_3$ support to improve the mechanical strength, the hydrothermal stability of the catalyst particle, and the catalytic performance as well. Surface characterization techniques such as FT-IR revealed that $AlPO_4$ phase was generated on the surface of the P-modified catalyst. The addition of phosphorus was found to alleviate the interaction between cobalt and alumina surface, and to increase reducibility of catalyst. The catalytic activity such as $C_{5+}$ productivity and turnover frequency (TOF) was calculated to evaluate catalytic performance. The influence of calcination temperature of the $Al_2O_3$ containing 2 wt.% P on the catalytic performance was also investigated. Through hydrothermal stability test and XRD analysis, the P-modified catalyst had strong resistant to the pressurized and hot $H_2O$. The mechanical strength of the P-modified catalyst was also examined through an in-house fluidized-bed vessel, and it was found that the catalyst fragmentation could be successfully suppressed with P. Taken as a whole, the best performance was shown to be at 1~2 wt.% P in alumina and at the calcination temperature of $500^{\circ}C$.

Temperature-dependent Oviposition Model and Life Table Parameters of Paromius exiguus (Distant) (Hemiptera: Lygaeidae) Growing on Rice (벼에서 흑다리긴노린재 [Paromius exiguus (Distant)] (Hemiptera: Lygaeidae) 산란모델 및 생명표)

  • Park, Chang-Gyu;Park, Hong-Hyeon;Seo, Bo Yoon
    • Korean journal of applied entomology
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    • v.56 no.4
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    • pp.387-394
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    • 2017
  • Temperature-dependent oviposition model and life table parameters of Paromius exiguus (Distant), the causal agent of 'pecky' rice grain were examined at eight constant temperatures (17.5, 20, 22.5, 25, 27.5, 30, 32.5, and $35{\pm}^{\circ}C$) and a photoperiod of 14:10 (L:D) h. Unit functions of the oviposition model were developed and life table parameters were estimated. The longevity of P. exiguus adults decreased with increasing temperature (123.8 days at $17.5^{\circ}C$ and 23.6 days at $32.5^{\circ}C$). Total fecundity was highest at $30^{\circ}C$ (585.2 eggs/female) and lowest at $17.5^{\circ}C$ (21.5 eggs/female). In order to develop a temperature-dependent oviposition model, adult aging-rate, temperature-dependent fecundity, age-specific survival rate, and age-specific cumulative oviposition rate equations were estimated. All unit equations ($r^2=0.92{\sim}0.98$) except for the temperature-dependent fecundity equation ($r^2=0.83{\sim}0.85$), described oviposition characteristics of P. exiguus adequately. Life table parameters of P. exiguus were estimated at various constant temperatures. Net reproduction rate ($R_0$) was highest at $30^{\circ}C$ (118.21). Mean generation time (T) was shortest at $32.5^{\circ}C$ (32.99 days) and doubling time (Dt) was shortest at $30^{\circ}C$ (5.69 days). The highest values of intrinsic rate of increase ($r_m$) and finite rate of increase (${\lambda}$) were 0.122 and 1.129 at $30^{\circ}C$, respectively.

Comparison of physiochemical property, phytochemical contents, and biological activity of soy sauce added with bitter melon powder (여주분말 함유 간장의 이화학적 특성, phytochemical 함량 및 생리활성 비교)

  • Hwang, Chung Eun;Lee, Dong Hee;Joo, Ok Soo;Lee, Hee Yul;Kim, Su Cheol;Park, Kyung Sook;Um, Bong Sik;Cho, Kye Man
    • Food Science and Preservation
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    • v.24 no.8
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    • pp.1138-1148
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    • 2017
  • In this study, contetnts of phenolic acid and isoflavone, and biological activities of soy sauce were compared the soy sauce added bitter melon powder (BMPs). After the fermentation, pHs were decreased from 5.83 (0% BMP), 5.47 (5% BMP), and 5.32 (10% BMP) to 5.28, 5.36, and 5.16 at 90 days, whereas the acidities of soy sauce were increased from 0.06%, 0.07%, and 0.09% to 0.30%, 0.28%, and 0.36% at 90 days, respectively. In addition, the salinities of soy sauce were decreased, while viable cell numbers including Bacillus and yeast were increased. The contents of total phenolic, isoflavone-aglycone, and phenolic acid and antioxidant and ${\alpha}$-glucosidase inhibition activities were significantly increased for 90 days, while the isoflavone-glycoside contents were decreased. In Particular, soy sauce with 10% BMP at 90 days showed the highest contents of glutamic acid (GA, 9,876.09 mg/100 mL) and ${\gamma}$-aminobutyric acid (GABA, 325.02 mg/100 mL) contents than among other samples. Additionally, the radical scavenging activities (DPPH, ABTS, ${\cdot}OH$, and FRAP) and ${\alpha}$-glucosidase inhibition activities of soy sauce with 10% BMP at 90 days were shown to be high 96.07%, 97.27%, 59.47%, 1.98%, and 79.96%, respectively.

Effects of Additives on the Improvement of Frozen Dough Quality (첨가물이 냉동반죽의 품질향상에 미치는 영향)

  • Lee, Young-Chun;Jeong, Hyung-Won;Yoon, Suk-Kwon
    • Korean Journal of Food Science and Technology
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    • v.36 no.2
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    • pp.217-225
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    • 2004
  • This study was carried out to reduce the loss of frozen dough quality during frozen storage. Using response surface method, ascorbic acid 160.4 ppm, L-cysteine 63.1 ppm, and SSL 0.6% were found to be optimum, with xanthan gum 0.3% (formula A) and Ultra tex-3 5% (formula B) added as cryoprotectants. During frozen storage at $-20^{\circ}C$, control rapidly deteriorated after 4 weeks, while formulas A and B showed slight deterioration with immutable quality after 10 weeks.

Factors Required to Sustain Pastoral Farming Systems and Forage Supply In Winter-Cold Zones in Canada (캐나다의 동계한냉지역에 있어서 초지개발과 조사료 공급의 활성화에 필요한 요인)

  • Kunelius, H.T.;Fraser, Joanna
    • Journal of The Korean Society of Grassland and Forage Science
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    • v.12 no.3
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    • pp.3-12
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    • 1992
  • Forage grasses and legumes ar$\varepsilon$ the mam component of livestock diets in Canada. There are over 30 million ha of grassland in Canada and there is a large, undeveloped land base in fringe areas suitable for forage production. The short growing s season limits the grassland farming to the southern p parts of Canada. The win!er season is long and in most parts of Canada cold temperatures, fr$\varepsilon$ezmg, and thawing, and diseases exert sever$\varepsilon$ stress on overwintering forage plants. The development of persistent cultivars is essential for sustained production particularly in the fringe areas with short growmg s$\varepsilon$ason. The seasonality of dry matter production is a result of high growth rates in early summ$\varepsilon$r and low dry matter accumulation in late summer and fall. Innovative management practIces a and cultivars with improved regrowth capacity are n necessary to overcome such skewed production pattern and to extend effiectlVe grazmg season l Improved pasture production is an important part of reducing costs in livestock operations and remaining competitive. It is suggested that applying available technology would increase pasture productivity and reduce d$\varepsilon$pendence on stored feeds thus improving profitability of small producers in particeular. Reducing nutrient losses during harv$\varepsilon$stmg, s storage, and feeding is essential for improved production efficiency during confinement. The devclopment of low cost and labor saving methods of ensiling is critical for improved efficiency and profitability of forage based enterprises Livestock industries must respond to consumer preferences for low fat and cholesterol foods. Research and development of entire production systems is emphasized for dev$\varepsilon$loping viabl$\varepsilon$ enterprises. It is increasingly difficult to secure resources for r$\varepsilon$search, education, and extension, and alliane$\varepsilon$s and cooperation must expand among organizations with interests in forage based livestock systems.

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The Impact of Cooking on the Antioxidative and Antigenotoxic Effects of Rice (호화과정이 백미, 현미, 발아현미의 항산화 및 항유전 독성 활성에 미치는 영향)

  • Kim, So-Yun;Seo, Bo-Young;Park, Eunju
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.42 no.9
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    • pp.1370-1377
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    • 2013
  • Rice is widely grown in Asia and is one of the major dietary staples in the world. Also, rice contains antioxidants which can prevent from oxidative stress related diseases, including cancer, atherosclerosis, and diabetes. Because the rice is consumed cooked, the effect of the cooking process on the antioxidative and antigenotoxic properties of rice is lacking. The aim of this study was to determine the effects of cooking on the antioxidant and antigenotoxic effects of white rice (WR), brown rice (BR), and germinated brown rice (GBR). The antioxidant activities were measured for total phenolic content (TPC), DPPH radical scavenging activity (DPPH RSA), total antioxidant capacity (TRAP), and oxygen radical absorbance capacity (ORAC). The highest TPC was found in uncooked BR (18.4 mg gallic acid equivalent/100 g). After cooking, the TPC of WR significantly increased, while the TPC of BR and GBR were reduced by 47.7% and 36.7%, respectively. The $IC_{50}$ for DPPH RSA was not significantly different in uncooked rice, while the DPPH RSA of WR and GBR decreased after cooking and the DPPH RSA of BR significantly increased. TRAP values in BR and GBR increased after cooking, while the value of WR decreased. The ORAC values of uncooked WR, BR, and GBR were 5.3, 4.3, and $3.9{\mu}M$ trolox equivalent at the concentration of $50{\mu}g/mL$. After cooking, the ORAC value of BR remained unchanged, while the value of GBR increased and the value of WR decreased. The antigenotoxic activities of WR, BR, and GBR were determined by measuring the inhibitory effects of $H_2O_2$-induced DNA damage on human leukocytes using the comet assay. The results showed that all rice tested showed a significant antigenotoxic effect against oxidative stress, except for the cooked white rice. Overall, our results indicate the addition of brown rice and/or germinated brown rice to cooked white rice is a good option for improving the benefits of rice.

Development of Effective Cryopreservation Method for Mammalian Embryo (포유류 초기 배아의 효율적인 동결 보존 방법에 관한 연구)

  • Kim, Hyun;Cho, Young Moo;Ko, Yeoung-Gyu;Kim, Sung Woo;Seong, Hwan-Hoo;Yamanouchi, Keitaro
    • Journal of Embryo Transfer
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    • v.29 no.3
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    • pp.241-248
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    • 2014
  • This study was carried out to evaluate the effects of embryonic stage, cryoprotectant, and freezing-thawing method on the rates of survival and development of the cryopreserved mouse early embryo and finally to establish the cryopreservation method of surplus embryos obtained during assisted reproductive technology (ART). Two to eight cell embryos were obtained from oviducts of mated $F_1$ hybrid female mice superovulated by PMSG and hCG. Two-step EG, DMSO and 4-step EG, DMSO were used as cryoprotectant and dehydration and rehydration method of embryos, and slow-cooling or rapid-cooling method was used as frozen program. The survival rates of embryos were measured after thawing and rehydration, and the developmental rates of embryos were compared and observed during culturing embryos for 24, 48, 72, 96 hrs. As for the survival and development rates of embryos according to embryonic stage, the survival rate of 2 cell stage in EG and DMSO was significantly higher than 4~8 cell (65.4% versus 61.2%, 81.1% versus 72.5%) (p<0.01, p<0.01), but the development rates of 4~8 cell embryos in EG and DMSO were significantly higher than 2 cell embryos for whole culture period (p<0.01) and the development rates of 4~8 cell embryos in EG were significantly higher than 2 cell embryos in DMSO (p<0.01). As for the survival and development rates of embryos according to cryoprotectant, the survival rate of 2 cell embryo in DMSO was significantly higher than that in EG(77.0% versus 64.4%) (p<0.01), whereas the development rate of embryos was not differ till 24 hrs. The development rate from morular to hatching blastocyst, however, was sinificantly higher in EG than in DMSO during 48 hr (p<0.01). The survival rate of 4~8 cell embryo was 62.5% in EG and 73.3% in DMSO. The development rates of embryo in EG were significantly higher for whole culture periods (p<0.01, 0.05). In respect to the effect of freezing and thawing program on the survival and development rates of embryos, method of slow cooling and rapid thawing was more effective than that of rapid cooling and rapid thawing. The survival rate of embryo in 2 cell stage was higher than in 4~8 cell stage, and EG appears more effective cryoprotectant than DMSO because EG showed better development rates of embryos in 2 and 4~8 cell stage. Moreover, slow cooling and rapid thawing method was considered as the best cryopreservation program.

The Role of Factors Controlling the Accumulation of Biogenic Amines in Various Cheeses as Milk-Based Products: A Review (낙농유제품인 치즈에 축적된 생체 아민의 다양한 영향 인자에 관한 연구: 총설)

  • Chon, Jung-Whan;Kim, Dong-Hyeon;Kim, Hyun-Sook;Song, Kwang-Young;Lim, Jong-Soo;Choi, Dasom;Kim, Young-Ji;Lee, Soo-Kyung;Seo, Kun-Ho
    • Journal of Dairy Science and Biotechnology
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    • v.32 no.2
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    • pp.77-92
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    • 2014
  • Fermented foods have often been implicated as causative agents in poisoning due to toxic levels of biogenic amines. Cheese, a milk-based fermented food, is the product most likely to contain potentially harmful levels of biogenic amines, such as tyramine, histamine, putrescine, and so on. Recently, the risk awareness of a dietary uptake of high loads of biogenic amines has increased. Hence, we here review the published literature on several factors known to affect the biosynthesis of biogenic amines and their accumulation in milk-based foods. Furthermore, with regard to risk analysis, we discuss the control of factors related to the synthesis and accumulation of biogenic amines as a means to reduce their incidence in milk-based products, and thus to increase food safety.

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Effect of Herd-mix Feeding System formulated by Energy Requirement Levels on the Performance of Lactating Cows (에너지 요구수준에 의하여 조제한 자가배합사료 사양체계가 젖소의 산유능력에 미치는 영향)

  • Sung, H.G.;Kim, D.K.
    • Journal of Animal Science and Technology
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    • v.46 no.5
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    • pp.773-782
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    • 2004
  • The objective of this work was to establish an approaching method for TMR feeding system in the farm situation by testing the effects of herd-mix feeding system on the performance of lactating cows. Fifty six Holstein cows were fed for the experimental period of 16 months. Prior to test the herd-mix feeding system, animals were kept on conventional feeding system for 4 months, separate feeding of forage with concentrate, then provided 3 types of herd-mix rations formulated by mean level of energy concentration requirement of higher 1/2 ranker in each herd for remaining 12 months to compare the effect on milk yield performance of animals with conventional feeding system by using a switch-over method. The herd-mix feeding system influenced substantially upon the improvements of milk yield(P<0.01) and milk fat percentage(P<0.05). In all of lactational ages, milk yield and milk fat were enhanced by the herd-mix feeding system. Especially, actual milk yield(AMY) and milk fat in the 1st lactating cows, and AMY and 4.0% fat corrected milk yield(FCM) in the 2nd lactating cows were increased signiticantly by the herd-mix feeding system(P<0.05). In the early and mid-stage of lactation, the herd-mix feeding system showed higher AMY and FCM compared with the conventional feeding system although the milk fat was not different. AMY, milk fat and FCM in the late-stage of lactation were increased generally by the herd-mix feeding system. Especially, milk fat and FCM obtained by the herd-mix feeding system were significantly higher than those by the conventional feeding system(P<0.01). The herd-mix feeding system showed a good type of milking curve with a higher persistency of FCM(93.24%) than in conventional one(92.69%). The income over feed cost with the herd-mix feeding system was lA-fold higher than that with the conventional feeding method. In conclusion, the results of this work suggest that the herd-mix feeding system based on a correct level of energy concentration of TMR and well-determined feed ingredients increases not only milk yield of dairy herd by enhancing the performance of cows in early to mid stage of lactation with improved milk persistency but also gross income of dairy farm.