• Journal of the Korean institute of surface engineering
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• v.29 no.5
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• pp.357-362
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• 1996

Several applications of radio-frequency (RF) thermal plasma to film formation are reviewed. Three types of injection plasma processing (IPP) technique are first introduced for the deposition of materials. Those are thermal plasma chemical vapor deposition (CVD), plasma flash evaporation, and plasma spraying. Radio-frequency (RF) plasma and hybrid (combination of RF and direct current(DC)) plasma are next introduced as promising thermal plasma sources in the IPP technique. Experimental data for three kinds of processing are demonstrated mainly based on our recent researches of depositions of functional materials, such as high temperature semiconductor SiC and diamond, ionic conductor $ZrO_2-Y_2O_3$ and high critical temperature superconductor $YBa_2Cu_3O_7-x$. Special emphasis is given to thermal plasma flash evaporation, in which nanometer-scaled clusters generated in plasma flame play important roles as nanometer-scaled clusters as deposition species. A novel epitaxial growth mechanism from the "hot" clusters namely "hot cluster epitaxy (HCE)" is proposed.)" is proposed.osed.

• Progress in Superconductivity and Cryogenics
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• v.6 no.3
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• pp.6-11
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• 2004

YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) films were deposited on MgO(100) and SrTiO$_3$(100) single crystal substrates by cold-wall type MOCVD method using continuous source supplying system. Under the deposition temperature of 740∼76$0^{\circ}C$, c-axis oriented YBCO films were obtained. In case of the YBCO films deposited on MgO (100) single crystal substrate, the critical temperature (T$_{c}$) was under 81 K regardless of the deposition conditions, whereas T$_{c}$ of the YBCO films deposited on SrTiO$_3$(100) single crystal substrate was 83∼84 K. The critical current (I$_{c}$) of the YBCO film deposited on SrTiO$_3$(100) single crystal substrate for 30 min was 49 A/cm-width and the critical current density (J$_{c}$) was 0.82 MA/$\textrm{cm}^2$ to film thickness of 0.6 ${\mu}{\textrm}{m}$. I$_{c}$ increased to 84.4 A/cm-width as the deposition time increased to 50 min, but J$_{c}$ decreased to 0.53 MA/$\textrm{cm}^2$ to film thickness of 1.8 ${\mu}{\textrm}{m}$.rm}{m}$.

• Progress in Superconductivity and Cryogenics
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• v.7 no.1
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• pp.13-16
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• 2005

High temperature superconductor, $\YBa_2Cu_3O_{7-x}$ (YBCO) and ferroelectric, $\Ba_{0.1}Sr_{0.9}TiO_{3}$ (BST) multilayer thin films were deposited using on MgO(100) substrates pulsed laser deposition. The thin films exhibited only (001) peaks of YBCO and 1357 The HTS thin films demonstrated excellent zero resistance temperature of 92.5 K. We designed and fabricated HTS ferroelectric phase shifter using high frequency system simulator and standard photolithography method, respectively The HTS phase shifter shows a low insertion loss (2.97 dB) and large phase change ($\162^{circ}$) with 40 V do bias at 10 GHz. The HTS phase shifter shows 54 of figure of merit. These results can be applicable to phased anay antenna system for satellite communication services.

• Journal of the Institute of Electronics Engineers of Korea TE
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• v.37 no.1
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• pp.70-78
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• 2000

In applying high-${\underline{T_c}}$ superconducting material to microwave devices, Uncertainty of electromagnetics of high-${\underline{T_c}}$ superconductor(HTS) and the temperature dependence of the substrate fits with HTS thin film cause difficulty in realization of such antenna for industrial applications. It must be noted to characteristic the HTS antenna in contrast with normal conducting counterpart for this real application. In this paper, a comparative study between HTS microstrip antennas and gold antennas was reported in terms of the return loss, the characteristic impedance, efficiency, and other various characteristics. HTS thin films were $YBa_2Cu_3O_{7-x}$ (YBCO) on MgO substrates. Superconducting microstrip antennas used in this work were to directly inset a microstrip transmission line into the 50 ${\Omega}$ region of the radiating patch. Measurement results of HTS antennas and gold antennas showed that usable antennas can be made using this architecture.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.7
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• pp.770-775
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• 2004

Although $High-T_c $superconducting HTS antennas have high efficiency and high gain, narrow bandwidth due to the high Q is the major limitation for application of satellite communication and mobile communication. Defining bandwidth as the frequency range over which standing wave ratio (SWR) is 2:1 or less, HTS antenna bandwidths are typically less than 1 %. Thus considerable effort has been focused on developing HTS antennas for broadband operation. In this work the HTS antenna array, using the bipin antenna which consisted of two triangle-radiation patches, was designed and fabricated using a ${YBa}_2{Cu}_3{O}_7x (YBCO)$ superconducting thin film on a MgO substrate for broadband operation. Also gold antennas with the same dimension as our HTS antennas were fabricated on the MgO substrate for the comparison. Experimental results for both antennas were reported in terms of radiation patterns, return losses, bandwidths and other various characteristics. The center frequency of HTS antennas was 20.28 GHz and the bandwidth obtained was significant 10 %.

• 한국초전도학회:학술대회논문집
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• v.9
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• pp.152-159
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• 1999

YBa$_2Cu_3O_{7-{\delta}}$ (YBCO) films grown on CeO$_2$-buffered r-cut sapphire substrates (CbS's) were prepared and their structural and electrical properties were measured. Post-annealed CeO$_2$ films were used as buffer layers for the experiments. It turned out that the YBCO films grown on post-annealed CbS's had the rms roughness of less than 20 ${\AA}$ and peak-to-peak roughness of about 30 ${\AA}$ when the YBCO film thickness was 3000 ${\AA}$. Meanwhile, YBCO films on in-situ grown CeO$_2$ buffer layers on r-cut sapphire substrates appeared to have the peak-to-peak roughness of more than 450 ${\AA}$. X-ray diffraction data revealed that the YBCO flms were epitaxially grown along the c-axis with the typical FWHM of(005) ${\theta}$ -2 ${\theta}$ peak about 0. 16 $^{\circ}$ and ${\Delta}$ ${\omega}$ of the (005) peak about 0.5 $^{\circ}$. T$_c$ > 87 K, ${\Delta}$T < 1 K and R(look)/R(100K) ${\ge}$3 were observed from the YBCO films. Applicability of the YBCO films for high-frequency applications was described.

• 한국초전도학회:학술대회논문집
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• v.9
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• pp.67-70
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• 1999

We have fabricated YBa$_2Cu_3O_{7-x}$ thin films by cylindrical hollow cathode sputtering. For 2 inch diameter of MgO (100) substrate, we obtained the zero resistance temperature in the range from 83 K to 86 K and thickness uniformity better than 5 % over the whole area. Also, the average deposition rate was 100nm/h which is higher than 10 times compare to conventional off-axis sputtering method. These results indicate that cylindrical hollow cathode sputtering seems to have unique capabilities for high rate and homogeneous deposition of large area thin film.

• Korean Journal of Materials Research
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• v.4 no.4
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• pp.401-405
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• 1994

The chemical composition and electrical properties were investigated for epitaxially crystallized $(Ba_{0.5}Sr_{0.5})Tio_3$ (BST) films deposited on Pt and $YBa_Cu_3O_{7-x}$(YBCO) electrodes by laser ablation technique. The crystalline quality of the heteroepitaxial BST films deposited on Pt bottom electrode was found to be better than that of BST film on YBCO electrode by the RBS analysis. Films deposited at $600^{\circ}C$ on Pt electrode showed a dielectric constant of 320 and a dissipation factor of 0.023 at 100kHz. Leakage current density of BST films on Pt electrode was smaller than that on YBCO bottom electrode. Their leakage current density was about 0.8$\mu \; A/ \textrm{cm}^2$ at an applied electric field of 0.15MV/cm.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.12
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• pp.573-577
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• 2002

We designed wideband HTS antennas which consists of two triangle -radiation patches using a $YBa_2Cu_3O_{7-X}$ (YBCO) superconducting thin film. The major limitation of high-Tc superconducting (HTS) microstrip antennas is the narrow bandwidth due to the high Q and thin substrate. Defining bandwidth as the frequency range over which standing wave ratio (SWR) 2:1 or less, HTS antenna bandwidths are typically 0.85 % to 1.1 %. Thus considerable effort has been focused on developing antennas for broadband operation. To calculate input impedance and design of the broadband HTS antennas a moment method technique was used. The HTS antenna fabricated in this work was designed for K-band, which is useful band for satellite to satellite communications. The bandwidth obtained was a significant 6.7 % and the other measured performance of our HTS antenna, including the bandwidth, radiation Pattern, efficiency, standing wave ratio (SWR) and return losses was reported.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.523-526
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• 2002

We designed wideband HTS antennas which consists of two triangle-radiation patches using a YBa$_2$Cu$_3$O$\sub$7-x/ (YBCO) superconducting thin film. The major limitation of high-Tc superconducting (HTS) microstrip antennas is the narrow bandwidth due to the high Q and thin substrate. Defining bandwidth as the frequency range over which standing wave ratio (SWR) 2:1 or less, HTS antenna bandwidths are typically 0.85% to 1.1%. Thus considerable effort has been focused on developing antennas for broadband operation. To calculate input impedance and design of the broadband HTS antennas a moment method technique was used. The HTS antenna fabricated in this work was designed for K-band, which is useful band for satellite-to-satellite communications. The bandwidth obtained was a significant 6.7% and the other measured performance of our HTS antenna, including the bandwidth, radiation Pattern, efficiency, standing wave ratio (SWR) and return losses was reported.