• 한국산업보건학회지
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• 제25권3호
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• pp.294-300
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• 2015

Objectives: The aim of this study is to identify physicochemical properties such as chemical composition, size, shape and crystal structure of powder byproducts generated from a metallization process and its 1st scrubber in the semiconductor industry. Methods: Powder samples were collected from inner chambers during maintenance of the W-plug process equipment (using tungsten hexafluoride as a precursor material) and its 1st scrubber. The chemical composition, size and shape of the powder particles were determined by field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM) equipped with an energy dispersive spectroscope (EDS). The crystal structure of the powders was analyzed by X-ray diffraction (XRD). Results: From the SEM-EDS and TEM-EDS analyses, O and W were mainly detected, which indicates the powder byproducts are tungsten trioxide ($WO_3$), whereas Al, F and Ti were detected as low peaks. The powder particles were spherical and nearly spherical, and the particle size collected from the process equipment and its 1st scrubber showed 10-20 nm (agglomerates: 55-90 nm) and 16-20 nm (agglomerates: 80-120 nm) as primary particles, respectively. The XRD patterns of the yellow powder byproducts exhibit five peaks at $23.8^{\circ}$ $33.9^{\circ}$ $41.74^{\circ}$ $48.86^{\circ}$ and $54.78^{\circ}$ which correspond to the (200), (220), (222), (400), and (420) planes of cubic $WO_3$. Conclusions: We elucidated the physicochemical characteristics of the powder byproducts collected from W-plug process equipment and its 1st scrubber. This study should provide useful information for the development of alternative strategies to improve the working environment and workers' health.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2005년도 춘계학술강연 및 발표대회강연 및 발표논문 초록집
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• pp.33-34
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• 2005

• Korean Chemical Engineering Research
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• 제51권3호
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• pp.313-318
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• 2013

$V_2O_5-WO_3/TiO_2$ 촉매의 질소산화물 환원반응에 있어서 $V_2O_5$ 함량이 NO 환원 및 $N_2O$ 생성에 미치는 영향을 조사하기 위하여 분말촉매를 사용한 미분반응기에서 실험 연구를 수행하였다. 고정된 비율의 $WO_3$와 $TiO_2$에 $V_2O_5$ 함량을 1에서 8 wt%까지 변화시킨 촉매에서 NO 환원반응과 암모니아 산화반응 특성이 조사되었다. $V_2O_5-WO_3/TiO_2$ 촉매에서 NO 환원 반응은 $200^{\circ}C$ 이하에서도 상당량 진행되지만, $V_2O_5$ 함량을 1 wt% 촉매의 경우 700 ppm의 NO를 99.9%이상 전환시키는 최저 반응온도가 $340^{\circ}C$에서 아주 좁은 활성 온도창으로 일어났다. 그리고 이 활성온도는 촉매의 $V_2O_5$ 함량이 증가됨에 따라 점점 저온 쪽으로 이동하여, 6 wt% 촉매의 경우 $220{\sim}340^{\circ}C$에서 높은 활성을 보였다. $V_2O_5$ 함량이 8 wt% 촉매의 경우 전 온도 구간에서 6 wt% 촉매보다 낮은 NO 환원율을 보였다. 그러나 반응온도 $340^{\circ}C$ 이상에서는 촉매의 $V_2O_5$ 함량이 증가함에 따라 NO 전환율이 감소하였다. 이는 $V_2O_5-WO_3/TiO_2$ 촉매의 NO 환원을 위한 촉매 활성점 상당 크기 이상의 $V_2O_5$ 입자와 관계되는 것으로 판단되며 촉매 입자가 클수록 $320^{\circ}C$ 이상에서 암모니아 산화에 의해 발생되는 $N_2O$ 생성을 고려하여야 한다. $V_2O_5-WO_3/TiO_2$ 촉매는 배기가스 중의 질소산화물 제거를 위하여 현재 통상적으로 $350{\sim}450^{\circ}C$의 영역에서 운전되고 있으나, 고온 영역에선 2차 오염물인 $N_2O$의 발생을 피할 수 없고 에너지 소비량이 많으므로, $250{\sim}320^{\circ}C$의 저온 영역에서 적합한 촉매로써 $V_2O_5$ 함량이 높은 $V_2O_5-WO_3/TiO_2$ 촉매의 사용이 권장되었다.

• 한국재료학회지
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• 제24권5호
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• pp.249-254
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• 2014

Due to their unique properties, tungsten borides are good candidates for the industrial applications where certain features such as high hardness, chemical inertness, resistance to high temperatures, thermal shock and corrosion. In this study, conditions were investigated for producing tungsten boride powder from tungsten oxide($WO_3$) by self-propagating high-temperature synthesis (SHS) followed by HCl leaching techniques. In the first stage of the study, the exothermicity of the $WO_3$-Mg reaction was investigated by computer simulation. Based on the simulation experimental study was conducted and the SHS products consisting of borides and other compounds were obtained starting with different initial molar ratios of $WO_3$, Mg and $B_2O_3$. It was found that $WO_3$, Mg and $B_2O_3$ reaction system produced high combustion temperature and radical reaction so that diffusion between W and B was not properly occurred. Addition of NaCl and replacement of $B_2O_3$ with B successfully solved the diffusion problem. From the optimum condition tungsten boride($W_2B$ and WB) powders which has 0.1~0.9 um particle size were synthesized.

• 한국분말재료학회지
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• 제9권3호
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• pp.167-173
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• 2002

A new approach to produce nanostructured WC/Co composite powders by a mechanochemical process was made to improve the mechanical properties of advanced hardmetals. Homogeneous spherical W-Co salt powders were made by spray drying of aqueous solution from ammonium metatungstate($(NH_4)_6(H_2W_{12}O_{40})\cdo4H_2O$,AMT) and cobalt nitrate hexahydrate (Co(NO$_3$)$_2$.6$H_2O$). spray dried W-Co salt powders were calcined for 1 hr at $700^{\circ}C$ in atmosphere of air. The oxide powder was mixed with carbon black by ball milling and this mixture was heated with various temperatures and times in $H_2$. The $WO_3/CoWO_4$ composite oxide powders were obtained by calcinations at $700^{\circ}C$. The primary particle size of W/Co composite oxide powders by SEM was 100 nm. The reduction/carburization time decreased with increasing temperatures and carbon additions. The average size of WC particle carburized at $800^{\circ}C$ by TEM was smaller than 50 nm.

• Bulletin of the Korean Chemical Society
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• 제19권8호
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• pp.856-862
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• 1998

Vanadium oxide catalyst supported on ZrO2-WO3 was prepared by adding the Zr(OH)4 powder into a mixed aqueous solution of ammonium metavanadate and ammonium metatungstate followed by drying and calcining at high temperatures. The characterization of prepared catalysts was performed using solid-state 51V NMR and FTIR. In the case of calcination temperature at 773 K, for the samples containing low loading V2O5 below 18 wt % vanadium oxide was in a highly dispersed state, while for samples containing high loading V2O5 equal to or above 18 wt % vanadium oxide was well crystallized due to the V2O5 loading exceeding the formation of monolayer on the surface of ZrO2-WO3. The ZrV2O7 compound was formed through the reaction Of V2O5 and ZrO2 at 873 K and the compound decomposed into V2O5 and ZrO2 at 1073 K, which were confirmed by FTIR and 51V NMR.

• 한국세라믹학회지
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• 제39권3호
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• pp.321-326
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• 2002

착체중합법을 사용하여 nano-size의 ZnWO$_4$ powder를 제조하였다. 금속이온물질로서 znic nitrate와 tungstic acid를 사용하였으며 용매는 ethylene glycol을 사용하였다. 300$^{\circ}$C부터 600$^{\circ}$C의 온도 영역에서 하소한 분말에 대해 열분해 및 결정화 과정, 분말의 형상, 입도 변화 양상을 분석하였다. 일반적인 고상합성시에 필요한 온도보다 현저히 낮은 온도인 400$^{\circ}$C에서 ZnWO$_4$상이 생성되었으며, 600$^{\circ}$C에서 완전한 경정상을 얻을 수 있었다. 합성된 분말은 400$^{\circ}$C와 500$^{\circ}$C에서 원형과 silk-worm 형태가 혼합된 입자 형상을 나타내었고, 600$^{\circ}$C에서보다 균질한 양상을 나타내었다. 합성된 분말의 입자 크기는 400$^{\circ}$C∼600$^{\circ}$C의 온도영역에서 19.9∼24.2nm 정도로 매우 미세하였으며, 하소 온도가 증가함에 따라 분말의 결정상과 입도가 증가하는 것을 확인하였다.

• 한국분말재료학회지
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• 제23권5호
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• pp.372-378
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• 2016

This study focuses on the development of an alkaline leaching hydrometallurgy process for the recovery of tungsten from WC/Co hardmetal sludge, and an examination of the effect of the process parameters on tungsten recovery. The alkaline leaching hydrometallurgy process has four stages, i.e., oxidation of the sludge, leaching of tungsten by NaOH, refinement of the leaching solution, and precipitation of tungsten. The WC/Co hardmetal sludge oxide consists of $WO_3$ and $CoWO_4$. The leaching of tungsten is most affected by the leaching temperature, followed by the NaOH concentration and the leaching time. About 99% of tungsten in the WC/Co hardmetal sludge is leached at temperatures above $90^{\circ}C$ and a NaOH concentration above 15%. For refinement of the leaching solution, pH control of the solution using HCl is more effective than the addition of $Na_2S{\cdot}9H_2O$. The tungsten is precipitated as high-purity $H_2WO_4{\cdot}H_2O$ by pH control using HCl. With decreasing pH of the solution, the tungsten recovery rate increases and then decrease. About 93% of tungsten in the WC/Co hardmetal sludge is recovered by the alkaline leaching hydrometallurgy process.

• 한국재료학회지
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• 제12권12호
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• pp.930-934
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• 2002

Nanosized $WO_3$ powders were synthesized by the sol-precipitation process using $WCl_{6}$ as the starting material, ethanol as a solvent and $NH_4$OH solution as a precipitant, followed by a washing-drying treatment and calcination. The effects on the powder crystallinity and microstructure of calcination temperature were investigated with XRD and FE-SEM. The $WO_3$ powders calcined at $500^{\circ}C$ and $700^{\circ}C$ showed good crystallinity and their mean particle size was 30nm and 70nm, respectively. These powders were used for the preparation of pastes which were printed as thick films on alumina substrates with comb-type Pt electrodes. The particle size strongly influenced the $NO_2$ gas sensing property of the thick films. A significant reduction in the $NO_2$ sensitivity was observed for the film prepared from larger particle size, having thus a larger grain size. For the film having a smaller grain size, on the other hand, the higher $NO_2$ sensitivity was observed and the sensitivity increased with $NO_2$ concentration.

• 한국분말재료학회지
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• 제11권2호
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• pp.111-117
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• 2004

The oxidation behavior of 91 WC-9Co hardmetal in weight percentage has been studied in the present work as a part of the development of recycling process. The morphological and compositional changes of the WC-Co hardmetal with oxidation time at 90$0^{\circ}C$ were analyzed by using surface observation and X-ray diffraction. respective]y. As the oxidation time increased, the WC-Co hardmetal was continuously expanded to form porous oxide mixtures of $CoWO_4$ and $WO_3$. The morphology of porous oxide mixture was basically dependent on initial shape of the WC-Co hardmetal. From thermo-gravimetric (TG) analysis, it was found that the oxidation rate was increased with increasing oxidation temperature and oxygen content in the flowing atmospheric gas. The fraction of oxidation versus time curves showed S-curve relationship at a given of oxidation temperature. These oxidation behaviors of the WC-Co hardmetal were discussed in terms of previously proposed kinetic models.