• 제목/요약/키워드: $UV/O_2$

검색결과 2,205건 처리시간 0.032초

Fabrication of Organic-Inorganic Nano Hybrid Superlattice Thin Films by Molecular Layer Deposition

  • Cho, Bo-Ram;Yang, Da-Som;Sung, Myung-M.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.115-115
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    • 2011
  • Nano hybrid superlattices consisting of organic and inorganic components have great potential for creation of new types of functional material by utilizing the wide variety of properties which differ from their constituents. They provide the opportunity for developing new materials with new useful properties. Herein, we fabricated new type of organic-inorganic nano hybrid superlattice thin films by a sequential, self-limiting surface chemistry process known as molecular layer depostion (MLD) combined with atomic layer deposition (ALD). An organic layer was formed at $150^{\circ}C$ using MLD with repeated sequintial adsorption of Hydroquinone and Titanium tetrachloride. A $TiO_2$ inorganic nanolayer was deposited at the same temperature using ALD with alternating surface-saturating reactions of Titanium tetrachloride and water. Using UV-Vis spectroscopy, we confirmed visible light absorption by LMCT. And FTIR spectroscopy and XPS were employed to determine the chemical composition. Ellipsometry and TEM analysis were also used to confirm linear growth of the film versus number of MLD cycles at all same temperature. In addition, p-n junction diodes domonstrated in this study suggest that the film can be suitable for n-type semiconductors.

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수지처리에 의한 PET직물의 심색화 (Increase in Color Depth of Polyester Fabric by Resin Treatment)

  • 김재호;김혜진;김동욱;홍승표;김상진;김희동;김현아;허만우
    • 한국염색가공학회지
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    • 제26권3호
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    • pp.187-194
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    • 2014
  • To improve the deep coloring effect of PET fabrics, the alkali treated and black dyed PET fabrics were treated with 2 kinds of low refractive compounds such as acrylic resin and silicone resin. The color depth effect of treated PET fabrics was evaluated as lightness(L) change by UV-visible spectrophotometer. As the weight loss of PET fiber treated with alkali increased, the color depth of PET fabrics increased. Lightness(L) of PET fabrics treated with deep coloring agent was lower than that of untreated PET fabrics. The optimum concentration of treated PET with deep coloring agent was 4% o.w.s. The deep coloring effect of PET fabrics treated with silicone resin was higher than one treated with acrylic resin. PET fabrics treated with silicone resin only might be more appropriate process than PET fabrics treated with acrylic and silicone resin for giving deep coloring effect for polyester fabrics.

형광물질을 이용한 대기 중 오존 Passive Sampler의 개발 (Development of a Passive Sampler using a Fluorescence Material for the Ambient Ozone)

  • 임봉빈;정의석;김선태
    • 한국대기환경학회지
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    • 제20권4호
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    • pp.483-491
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    • 2004
  • The purpose of this study is to develop an ozone passive sampler and to evaluate its performance p-Acetamidophenol using as the reagent for ozone reacts specifically with the ambient ozone to produce a fluorescence material (p-acetamidopheonl dimer). The volume of absorbent solution and the extraction time determined at suitable conditions for measuring ozone were 100$\mu$L and 60 min, respectively. The changes of fluorescence were observed with incresing the storage period of passive samplers in ambient air. but the cool storage in a refrigerator did not remarkably influence the increase of fluorescence. The measurement for the precision oi the passive sampling was carried out with duplicate measurement of passive samplers. The intra-class correlation coefficients of passive samplers using dry and wet filters were 0.992 and 0.962, respectively The results from field validation tests indicated practical agreement (dry filter: r=0.963, wet filter: r=0.995) between the passive sampler and an UV photometric $O_3$ analyzer. The limit of quantification of ozone passive samplers with sampling time of 8 hr (wet filter) and 24 hr (dry filter) were 8.0 ppb and 2.7 ppb, respectively.

산소 가스 유량비 변화에 따른 ITO 박막의 전기적 특성에 관한 연구 (A Study on the Electrical Properties of ITO Thin Films with Various Oxygen Gas Flow Rate)

  • 최동훈;금민종;전아람;한전건
    • 한국표면공학회지
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    • 제40권3호
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    • pp.144-148
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    • 2007
  • To prepare the transparent electrode for electronic devices such as flat panel or flexible displays, solar cells, and touch panels; tin doped $In_2O_3$ (ITO) films with low resistivity and a high transparency were fabricated using a facing target sputtering (FTS) system at the various oxygen gas flow rate. The carrier concentration and mobility of ITO films were measured by Hall Effect measurement. And the transmittance was measured using the UV-VIS spectrometer. As a result, we can obtain the ITO thin films prepared at 10% oxygen gas flow ratio, thickness 150 nm with transmittance 85% and resistivity $8.1{\times}10^{-4}{\Omega}cm$ and surface roughness 5.01 nm.

Synthesis of New Uraci1-5-Sulphonamide-p-Phenyl Derivatives and Their Effect on Biomphalaria alexandrina Snail's Nucleoproteins

  • Fathalla, O.A.;Gad, H.S.M.;Maghaby, A.S.
    • Archives of Pharmacal Research
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    • 제23권2호
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    • pp.128-138
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    • 2000
  • In continuation of the previous work (Fathalla, 1992) on the synthesis of some heterocycles containing uracil moiety, we report herein the incorporation of uracil moiety into cyan-opyridine thione, thiosemecarbazone, semicarbazone, cyanopyridine, ami nocyano pyridine, isoxazoline, pyrazoline, pyrimidine, triazolo pyrimidine, pyran, selena and thiazole derivatives which might modify their biological activities. The biological studies revealed that the chemical compound III f showed high molluscicdal activity than other compounds. The profile of the nucleoprotein extracted from chemically (compound IIIc, e, f and g) treated or UV-irradiated B.alexandrina snails did not show appreciable differences when compared to non-treated (native) snails by using SDS-PAGE, where no obvious qualitative or quantitative differences were observed. Immunization of experimental animals with the nucleoprotein extracted from native, chemically (compound III f & g) treated or physically treated B.alexandrina snails induced significant protection against challenge with normal S.mansoni cercariae, as compared to the non-immunized challenged control. As well as , a decrease in the number of granuloma formation and the size range of granuloma was also observed in immunized animals. It is concluded that, compounds III f and g have a potent molluscicidal activity. They also induced chemical modification comparable to that induced by physical treatment in the snail's nucleoprotein, which could possibly be used in immunization against S. mansoni infection.

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전자빔 조사에 따른 Flexible ITO Film의 특성 향상에 대한 연구

  • 황진예;남상훈;김용환;송기문
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.581-581
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    • 2013
  • ITO (Indium Tin oxide)는 비화학 양론적 조성을 띄는 n-type 반도체 특성이 있으며 가시광 영역(380~780 nm)의 파장에 대한 높은 광 투과도(>85%)를 가지며 비교적 높은 전도도(${\sim}10^4/{\Omega}-cm$)를 갖고 화학적 안정성이 우수하여 투명전극 박막으로 많이 사용되어왔다. 또한, PET film은 전기절연성, 내후성이 우수하고, 85%의 투과율을 보이는 특성에 의하여 Flexible display의 기판으로 많은 연구가 진행되고 있다. 이와 같은 PET film에 ITO를 증착하여 광 투과도와 전기전도도가 우수한 Flexible display의 투명전극으로 많은 연구 개발이 이루어지고 있다. Flexible ITO 박막의 특성을 향상하기 위해서는 $200^{\circ}C$ 이상의 열처리 공정이 필요하지만, PET는 약 $200^{\circ}C$ 이상에서 열 변형이 일어나므로 열처리 공정이 어렵고 이러한 문제점을 해결하기 위해 ITO/PET film에서 PET film의 변형 없이 ITO 박막의 표면에 전자빔 형태로 조사하여 박막의 물성을 개선하는 연구가 진행되고 있다 [1]. 본 연구에서는 ITO/$SiO_2$가 증착된 PET film에 전자빔을 조사하여 ITO 박막의 물성 변화를 관찰하였고, 전자빔 에너지 변화 및 전자빔 조사 시간에 따라 ITO film의 전기적, 광학적 특성 변화를 분석하였다. 구조적 특성은 XRD (X-ray diffraction), 전기적 특성은 4-point probe, Hall measurement를 이용하였으며, 가시광영역의 광 투과도는 UV-Vis spectrometer로 측정하였다. 전기 광학적 특성 변화는 Figure of Merit (FOM) 수치로 분석하였다. 이 실험으로 PET film에 직접적인 열을 가하지 않으면서 ITO 박막의 표면에 전자빔을 조사 하여, 박막의 전기전도도 및 광 투과율, 결정성 향상 등을 관찰할 수 있었다.

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Growth and Characterization of Graphene Controlled by Cooling Profile Using Near IR CVD

  • 박윤재;임영진;김진환;최현광;전민현
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.207-207
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    • 2013
  • 기존의 그래핀 성장에 관한 연구는 열화학기상증착법(Chemical vapor deposition; CVD)을 이용한다. 그래핀 성장 제어 요소로는 촉매 기판인 전이 금속[Ru, Ir, Co, Re, Pt, Pd, Ni, Cu], 기판 전처리 과정, 수소/메탄 가스 혼합비, 작업 진공 상태, 기판온도[$800{\sim}1,000^{\circ}C$, 냉각 속도 등으로 보고 되고 있다. 그래핀 성장 원리는 Cu 촉매 기판에 메탄 가스를 $1,000^{\circ}C$ 온도에서 분해해서 탄소를 고용 시킨 후 급랭하는 도중에 석출되는 탄소에 의해 그래핀 시트가 형성되는 것으로 알려져 있다. 기존의 CVD를 열원을 이용할 경우 내부 챔버에 생기는 잠열에 의해 cooling profile의 제어가 용이하지 않다. 본 연구에서는 근적외선(Near Infrared; NIR) 열원을 이용한 CVD로 챔버 내부 잠열을 최소화하고, 냉각 공정을 Natural, Linear, Convex cooling type으로 디자인해서 cooling profile 제어가 그래핀 성장에 미치는 영향을 연구 하였다. 이렇게 성장된 그래핀을 임의의 기판(SiO2, Glass, PET film) 위에 습식방법으로 전이 시킨 후, 전기적 구조적 및 광학적 특성을 면저항(four-point probe), 전계방사 주사전자현미경(Field Emission Scanning Electron Microscope; FE-SEM), 마이크로 라만 분광법(Micro Raman spectroscopy) 및 광학현미경(optical microscope), 투과도(UV/Vis spectrometer)의 측정으로 잠열이 최소화된 NIR-CVD에서 cooling profile에 따른 그래핀 성장을 평가하였다.

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유도결합 플라즈마(ICP) Sputtering에 의한 평판 디스플레이(FPD)용 ITO 박막의 저온 증착 (Low Temperature Deposition of ITO Thin Films for Flat Panel Displays by ICP Assisted DC Magnetron Sputtering)

  • 구범모;정승재;한영훈;이정중;주정훈
    • 한국표면공학회지
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    • 제37권3호
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    • pp.146-151
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    • 2004
  • Indium tin oxide (ITO) is widely used to make a transparent conducting film for various display devices and opto-electric devices. In this study, ITO films on glass substrate were fabricated by inductively coupled plasma (ICP) assisted dc magnetron sputtering. A two-turn rf coil was inserted in the process chamber between the substrate and magnetron for the generation of ICP. The substrates were not heated intentionally. Subsequent post-annealing treatment for as-deposited ITO films was not performed. Low-temperature deposition technique is required for ITO films to be used with heat sensitive plastic substrates, such as the polycarbonate and acrylic substrates used in LCD devices. The surface roughness of the ITO films is also an important feature in the application of OLEDs along with the use of a low temperature deposition technique. In order to obtain optimum ITO thin film properties at low temperature, the depositions were carried out at different condition in changing of Ar and $O_2$ gas mixtures, ICP power. The electrical, optical and structural properties of the deposited films were characterized by four-point probe, UV/VIS spectrophotometer, atomic force microscopy(AFM) and x-ray diffraction (XRD). The electrical resistivity of the films was -l0$^{-4}$ $\Omega$cm and the optical transmittance in the visible range was >85%. The surface roughness ( $R_{rms}$) was -20$\AA$.>.

콤비네이숀 마그네트론 스퍼터링법에 의한 IGZO 투명전도막의 제조 (Fabrication of IGZO Transparent Conducting thin Films by The Use of Combinational Magnetron Sputtering)

  • 정재혜;이세종;조남인;이재열
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.425-425
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    • 2008
  • The transparent conducting oxides(TCOs) are widely used as electrodes for most flat panel display devices(FPDs), electrodes in solar cells and organic light emitting diodes(OLED). Among them, indium oxide materials are mostly used due to its high electrical conductivity and a high transmittance in the visible spectrum. The present study reports on a study of the electrical and optical properties of IGZO thin films prepared on glass and PET substrates by the combinational magnetron sputtering. We use the targets of IZO and Ga2O3 for the deposition process. In some case the deposition process is coupled with the End-Hall ion-beam treatment onto the substrates before the sputtering. In addition we control the deposition rate to optimize the film quality and to minimize the surface roughness. Then we investigate the effects of the Ar gas pressure and RF power during the sputtering process upon the electrical, optical and morphological properties of thin films. The properties of prepared IGZO thin films have been analyzed by using the XRD, AFM, a-step, 4-point probe, and UV spectrophotometer.

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박스 캐소드 스퍼터로 성장시킨 전면 발광 OLED용 상부 InZnO 캐소드 박막의 전기적, 광학적, 구조적 특성 연구 (Electrical, Optical and Structural Properties of Indium Zinc Oxide Top Cathode Grown by Box Cathode Sputtering for Top-emitting OLEDs)

  • 배정혁;문종민;김한기
    • 한국전기전자재료학회논문지
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    • 제19권5호
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    • pp.442-449
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    • 2006
  • Electrical, optical, and structural properties of indium zinc oxide (IZO) films grown by a box cathode sputtering (BCS) were investigated as a function of oxygen flow ratio. A sheet resistance of $42.6{\Omega}/{\Box}$, average transmittance above 88% in visible range, and root mean spare roughness of $2.7{\AA}$ were obtained even in the IZO layers grown at room temperature. In addition, it is shown that electrical characteristics of the top-emitting organic light emitting diodes (TOLEDs) with the BCS grown-IZO top cathode layer is better than that of TOLEDs with DC sputter grown IZO top cathode, due to absence of plasma damage effect. Furthermore the effects of oxygen flow ratio in IZO films are investigated, based on x-ray photoelectron spectroscopy (XPS), ultra violet/visible (UV/VIS) spectro-meter, scanning electron microscopy (SEM), and atomic force microscopy (AFM) analysis results.