Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.02a
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- Pages.115-115
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- 2011
Fabrication of Organic-Inorganic Nano Hybrid Superlattice Thin Films by Molecular Layer Deposition
- Cho, Bo-Ram (Department of Chemistry, Hanyang University) ;
- Yang, Da-Som (Department of Chemistry, Hanyang University) ;
- Sung, Myung-M. (Department of Chemistry, Hanyang University)
- Published : 2011.02.09
Abstract
Nano hybrid superlattices consisting of organic and inorganic components have great potential for creation of new types of functional material by utilizing the wide variety of properties which differ from their constituents. They provide the opportunity for developing new materials with new useful properties. Herein, we fabricated new type of organic-inorganic nano hybrid superlattice thin films by a sequential, self-limiting surface chemistry process known as molecular layer depostion (MLD) combined with atomic layer deposition (ALD). An organic layer was formed at
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