Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.02a
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- Pages.114-114
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- 2011
Fabrication of Organic-Inorganic Nanohybrid Semiconductors for Flexible Electronic Device
Abstract
We report a high-performance and air-stable flexible and invisible semiconductor which can be substitute for the n-type organic semiconductors. N-type organic-inorganic nanohybrid superlattices were developed for active semiconducting channel layers of thin film transistors at low temperature of
Keywords
- Organic-inorganic nanohybrid semiconductors;
- Molecular layer deposition;
- Atomic layer deposition;
- ZnO;
- Organic thin film transistors