Microstructure and Mechanical Properties of Ti-Si-C-N Coatings Synthesized by Plasma-Enhanced Chemical Vapor Deposition (PECVD 로 합성된 Ti-Si-C-N 코팅막의 미세구조 및 기계적 성질)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2008.11a
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- pp.83-85
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- 2008