• 제목/요약/키워드: $TiO_2$ layer

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이종 접합 구조를 갖는 TiO2/WO3 이중 박막의 광유기 친수 특성 (Photoinduced Hydrophilicity of Heterogeneous TiO2/WO3 Double Layer Films)

  • 오지용;이병로;김화민;이창현
    • 한국전기전자재료학회논문지
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    • 제28권11호
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    • pp.715-720
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    • 2015
  • The photoinduced hydrophilicity of $TiO_2/WO_3$ double layer films was fabricated by using a conventional rf-magnetron sputtering method. The photoinduced hydrophilic reaction of the $TiO_2$ surface was enhanced by the presence of $WO_3$ under the $TiO_2$ layer by irradiation of a 10 W cylindrical fluorescent light bulb. However, when the $TiO_2$ and $WO_3$ layers were separated by an insulating layer, the surface did not appeared high hydrophilic, under the same light bulb. The enhanced photoinduced hydrophilic reaction can be explained by the charge transfer between $TiO_2$ and $WO_3$ layers. It was also demonstrated that visible light passing through the $TiO_2$ layer could excite $WO_3$. Thus, visible light can be used for the hydrophilic reaction in the present $TiO_2/WO_3$ system.

Effects of Cr and Nb on the nigh Temperature Oxidation of TiAl

  • D.B. Lee;K.B. Park;M. Nakamura
    • 소성∙가공
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    • 제8권3호
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    • pp.319-319
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    • 1999
  • From isothermal and cyclic oxidation tests on thermomechanically treated Ti-5%Al, Ti47%Al-4%Cr, and Ti-48%Al-2%Cr-2%Nb alloys at 800, 900, 1000℃ in air, it was found that Ti-48%Al-2%Cr-2%Nb and Ti-47%Al-4%Cr had the best and the worst oxidation resistance, respectively. The oxide scales consisted primarily of TiO₂and Al₂O₃, with and without a small amount of dissolved Cr and 7b ions, depending on the alloy composition. These ions were slightly enriched inside the inner oxide layer, and strongly enriched around the scale-matrix interface. The outer TiO₂-rich layer was formed by the outward diffusion of Ti ions, while the inner (TiO₂+A1₂O₃,) mixed layer was formed by the inward transport of oxygen. The outward movement of Al ions farmed the intermediate Al₂O₃-rich Iayer, above talc prepared alloys.

Mo, Nb첨가가 TiAl합금의 산화에 미치는 영향 (Effect of Mo and Nb on High Temperature Oxidation of TiAl Alloys)

  • 김재운;이동복
    • 한국재료학회지
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    • 제14권9호
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    • pp.614-618
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    • 2004
  • Alloys of $Ti46\%Al-2\%Mo-2\%Nb$ were oxidized between 800 and $1000^{\circ}C$ in air, and their oxidation characteristics were studied. The alloys displayed good oxidation resistance due mainly to the beneficial effects of Mo and Nb. The oxide scales formed consisted primarily of an outer $TiO_2$ layer, an intermediate $Al_{2}O_3-rich$ layer, and an inner mixed layer of ($TiO_{2}+Al_{2}O_3$). Molybdenum and niobium dissolved in the scale effectively improved oxidation resistance. They were mainly distributed in the inner mixed layer of ($TiO_{2}+Al_{2}O_3$).

Improved Energy Conversion Efficiency of Dye-sensitized Solar Cells Fabricated using Open-ended TiO2 Nanotube Arrays with Scattering Layer

  • Rho, Won-Yeop;Chun, Myeoung-Hwan;Kim, Ho-Sub;Hahn, Yoon-Bong;Suh, Jung Sang;Jun, Bong-Hyun
    • Bulletin of the Korean Chemical Society
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    • 제35권4호
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    • pp.1165-1168
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    • 2014
  • We prepared dye-sensitized solar cells (DSSCs) with enhanced energy conversion efficiency using open-ended $TiO_2$ nanotube arrays with a $TiO_2$ scattering layer. As compared to closed-ended $TiO_2$ nanotube arrays, the energy conversion efficiency of the open-ended $TiO_2$ nanotube arrays was increased from 5.63% to 5.92%, which is an enhancement of 5.15%. With the $TiO_2$ scattering layer, the energy conversion efficiency was increased from 5.92% to 6.53%, which is an enhancement of 10.30%. After treating the open-ended $TiO_2$ nanotube arrays with $TiCl_4$, the energy conversion efficiency was increased from 6.53% to 6.89%, a 5.51% enhancement, which is attributed to improved light harvesting and increased dye adsorption.

Ti-Si 계면의 얇은 산화막이 TiN/TiS$i_2$ 이중구조막 형성에 미치는 영향 (Effects of the thin SiO$_{2}$ film at the Ti-Si interface on the formation of TiN/TiS$i_2$ bilayer)

  • 이철진;성만영;성영권
    • 대한전기학회논문지
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    • 제45권2호
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    • pp.242-248
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    • 1996
  • The properties of TiN/TiSi$_{2}$ bilayer formed by a rapid thermal annealing is investigated when thin SiO$_{2}$ film exists at the Ti-Si interface. The competitive reaction for the TiN/TiSi_2 bilayer occurs above 600 .deg. C. The thickness of the TiSi$_{2}$ layer decreases with increasing SiO$_{2}$ film thickness and also decreases with increasing anneal temperture When the competitive reaction for the TiN/TiSi$_{2}$ bilayer is occured by rapid thermal annealing, the composition of TiN layer represents TiN$_{x}$O$_{y}$ due to the SiO$_{2}$ layer at the Ti-Si interface but the structures of the TiN and TiSi$_{2}$ layers were not changed.d.d.

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TiAl합금의 고온산화에 미치는 V효과 (Effect of V on High Temperature Oxidation of TiAl Alloy)

  • 장유동;;이동복
    • 한국표면공학회지
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    • 제36권4호
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    • pp.329-333
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    • 2003
  • The high-temperature oxidation behavior of Ti39Al-10V alloy that consisted primarily of $\beta$-Ti, ${\gamma}$-TiAl, and $\alpha_2$ $-Ti_3$Al phases was studied. The relatively thick and porous oxide scales formed consisted primarily of an outermost, thin TiO$_2$ layer, and an outer, thin $Al_2$$O_3$-rich layer, and an inner, very thick (TiO$_2$, $Al_2$$O_3$) mixed layer. Vanadium was present uniformly throughout the oxide scale. The formation and subsequent evaporation of V-oxides such as VO, $VO_2$, and $V_2$O$_{5}$ deteriorated oxidation resistance and scale adherence of the TiAl alloy significantly.y.

ALD 방법으로 제조된 나노급 $TiO_2$에 의한 자외선 차단효과 연구 (UV Absorption of Nano-thick $TiO_2$ Prepared Using an ALD)

  • 한정조;송오성;류지호;윤기정
    • 한국산학기술학회논문지
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    • 제8권4호
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    • pp.726-732
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    • 2007
  • ALD (atomic layer deposition)법을 이용하여 두께를 달리한 $10{\sim}50nm-TiO_{2-x}/quartz$ 구조의 UV 기능성 박막을 형성시켰다. 박막의 두께는 우선 $10nm-TiO_{2-x}$를 성막한 후 엘립소미터로 두께를 확인하였고 나머지 두께는 증착시간을 선형적으로 조절하여 완성하였다. $TiO_2$ 박막 두께에 따른 생성상과 파장대별 흡수도, 가시광선의 투과율을 각각 X선 회절기, UV-VIS-IR 분석기, 접사용 디지털 카메라를 써서 확인하였다. ALD 법으로 제조된 $TiO_{2-x}$는 벌크 $TiO_2$에 비해 비정질 (amorphous)이면서 비정량적인 $TiO_{2-x}$ 형태임을 확인하였다. 380 nm와 415 nm의 흡수단을 보여 $3.0{\sim}3.2eV$의 밴드갭을 가지는 기존의 벌크 $TiO_2$와는 달리, 제작된 $TiO_{2-x}$ 박막은 197 nm와 250 nm의 부근에서 흡수단을 보이는 특징이 있었다. 따라서 장파장대의 자외선을 차단하는 기능을 가진 기존의 벌크 $TiO_2$와는 달리 ALD로 제작된 나노급 $TiO_2$는 단파장대의 자외선을 흡수할 수 있는 기능성이 있었고, 아울러 가시광선대에서 우수한 투과도를 보였다. 새로이 제안된 ALD를 이용한 나노급 $TiO_{2-x}$ 박막은 가시광선의 투과도는 향상시키면서 단파장대의 자외선을 효과적으로 흡수하는 기능성을 가졌음을 확인하였다.

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비행시간형 직층돌 이온산란 분광법을 사용한 MgO(001) 면에 성장된 TiO막의 구조해석 (Structure Analysis of TiO Film on the MgO(001) Surface by Time-Of-Flight Impact-Collision Ion Scattering Spectroscopy)

  • 황연;이태근;박병규
    • 한국결정학회지
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    • 제13권2호
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    • pp.57-62
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    • 2002
  • MgO(001)면 위에 Ti 금속을 증착시킨 후 400℃에서 산소에 노출시킴으로써 헤테로 에피탁시 TiO 막을 성장시켰다. 성장된 TiO막의 원자구조를 비행시간형 직충돌 이온산란 분광법을 사용하여 해석하였다. MgO(001)면에 성장된 에피탁시 TiO막은 다음과 같은 구조를 갖고 있음이 밝혀졌다. Ti및 O 원자가 MgO 원자의 위에 위치하여 면내방향의 격자상수는 MgO의 격자상수와 일치하고, TiO막의 표면은 3차원적 섬 형상이 없는 평활한 구조를 가지고 있다.

자외선 활성화 원자층 성장 기술을 이용한 상온에서 TiO2 박막의 제조 (Fabrication of TiO2 Thin Films Using UV-enhanced Atomic Layer Deposition at Room Temperature)

  • 이병훈;성명모
    • 한국진공학회지
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    • 제19권2호
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    • pp.91-95
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    • 2010
  • 상온에서 고품질의 $TiO_2$ 박막을 제조하기 위하여 titanium isopropoxide [Ti(OCH$(CH_3)_2)_4$, TIP]와 $H_2O$을 이용한 자외선 활성화 원자층 증착(UV-enhanced atomic layer deposition: UV-ALD) 기술을 개발하였다. UV-ALD 기술은 상온에서 자체제어 표면 반응(self-limitting surface reaction)을 통해 균일하고 고품위 등방 특성을 갖는 순수한 $TiO_2$ 박막 증착이 가능하였다. ALD 반응 시 조사되는 자외선은 Si 기질 위에 우수한 접착력을 가지는 고품질의 $TiO_2$ 박막을 얻는데 효과적이었다. UV-ALD 기술은 높은 단차비(aspect ratio)를 가지는 trench 기질 위에 균일한 $TiO_2$ 박막을 증착하는 데에 적용되었다.

$NbC_xC_{1-x}/Y_2O_3$ 박막코팅을 이용한 $Al_2O_3/Ti$ 계면특성향상 - (1) 스퍼터링 및 열안정성 (Enhanced $Al_2O_3/Ti$ Interfacial Properties Using $NbC_xC_{1-x}/Y_2O_3$ Interlayers - (1) Sputtering and Thermal Stability)

  • 문철희
    • 한국세라믹학회지
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    • 제34권8호
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    • pp.908-913
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    • 1997
  • Multilayer NbCxC1-x/Y2O3/Ti were sputter-coated on the alumina substrate, starting with a 0.7 ㎛ thick NbCxC1-x layer grown on substrate, followed by 0.7 ㎛ thick Y2O3 layer and 1 ㎛ thick Ti layer. To find out the optimum conditions for thickness uniformity and adhesion, sputtering works have been done with the variation of sputtering power and Ar pressure. After vacuum annealing at 950℃ and 1000℃, the thermal stability of the NbCxC1-x/Y2O3/Ti coated alumina substrates has been investigated by peel off test. The coating scheme didn't cause any debonded layer after an annealing at 950℃ for 3hrs. However, it was peeled off after annealing at 1000℃ for 3hr. It was found that the thermal stability of Al2O3/NbCxC1-x/Y2O3/Ti coating scheme changed with the NbCxC1-x composition.

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