• 제목/요약/키워드: $TiO_2$ layer

검색결과 1,092건 처리시간 0.026초

분광측색계, 색차계의 색 수치 값을 이용한 타이타늄 산화막의 두께 정량화 (The Quantification of TiO2 Thickness Using Color Values by Spectrophotometer and Chromameter)

  • 이다영;한아영;하동흔;유현석;김훈식;정나겸;장관섭;최진섭
    • 한국표면공학회지
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    • 제51권3호
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    • pp.157-163
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    • 2018
  • The anodic $TiO_2$ layers which are prepared in various anodization conditions exhibit their specific color depending on the thickness of $TiO_2$. In this study, the relationship between the color of $TiO_2$ layer, which is grown by PEO (Plasma electrolytic oxidation), and the thickness of the $TiO_2$ layer is investigated. To evaluate the color change of the $TiO_2$ layer, the value of color ($dE^*ab$) is measured and calculated by spectrophotometer and chromameter. As a result, it is found that $dE^*ab$ values and thickness of $TiO_2$ layers form a linear relationship with meaningful formular. This formula can be helpful to quantify the thickness of the $TiO_2$ layer by the numerical $dE^*ab$ values. In this process, the spectrophotometer shows more precise results than the chromameter dose. If fluoride ions ($F^-$) are included in the electrolyte, it will affect the $dE^*ab$ values of the $TiO_2$. layer. This is against the propensity, which is analyzed by XRD (X-ray diffraction) and XPS (X-ray photoelectron spectroscopy). It is important that the formular suggested in this study provides other metals which can be also anodized with the possibility of quantifying the thickness of the $TiO_2$ layer by the $dE^*ab$ values.

RF Magnetron Sputtering 방법으로 증착한 TiO2 / WO3 박막의 특성

  • 이동욱;김동영;서성보;손선영;양정민;김화민;이종영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.190-190
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    • 2011
  • 일반적으로 TiO2와 WO3는 광촉매 작용으로 인하여 살균력을 보이며, 친수성으로 인해 자가 세정 능력을 가져 유리 및 건축자재의 표면처리, 전자제품의 마감처리 용도로 많이 사용하고 있다. 현재 Sol-gel, CVD, Sputter, Spin-coating 방법 등으로 많은 연구가 진행되어 오고 있다. 이에 본 실험에서는 박막의 두께를 균일하게 만들 수 있는 RF-magnetron sputtering 방법을 이용하여 표면 경도와 부착력이 우수한 TiO2에 열적 특성과 화학적 특성이 안정한 WO3를 Double Layer 방식으로 증착하여 박막을 제작하였다. 광학적 특성을 알아 본 결과 가시광 영역에서 TiO2 / WO3 Double Layer 박막이 80% 이상의 높은 투과율을 나타내었으며, 박막의 표면을 확인 한 결과 TiO2 / WO3 Double Layer 박막이 더 조밀한 표면을 보였다. 또한 접촉각을 측정을 통하여 TiO2박막보다 TiO2 / WO3 double layer박막이 낮은 접촉각을 나타내었다. 이는 TiO2 표면은 소수성이나 WO3로 인해 광촉매 기능이 향상되어 공기 중의 물 분자가 해리 흡착되면서 친수성이 향상되는 것으로 사료된다. 이러한 박막은 건물의 외벽이나 자동차의 내 외장재 전자기기용 광학 필름에 자가세정, 내반사 코팅소재로 활용 가치가 높을 것으로 예상된다.

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MoS2 나노시트의 TiO2 나노선에 수직 성장을 통한 광전기화학반응 향상 (Enhanced Photoelectrochemical Reaction of MoS2 Nanosheets Vertically Grown on TiO2 Nanowires)

  • 서동범;김의태
    • 한국재료학회지
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    • 제31권2호
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    • pp.92-96
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    • 2021
  • We report the growth and enhanced photoelectrochemcial (PEC) water-splitting reactivity of few-layer MoS2 nanosheets on TiO2 nanowires. TiO2 nanowires with lengths of ~1.5 ~ 2.0 ㎛ and widths of ~50~300 nm are synthesized on fluorine-doped tin oxide substrates at 180 ℃ using hydrothermal methods with Ti(C4H9O)4. Few-layer MoS2 nanosheets with heights of ~250 ~ 300 nm are vertically grown on TiO2 nanowires at a moderate growth temperature of 300 ℃ using metalorganic chemical vapor deposition. The MoS2 nanosheets on TiO2 nanowires exhibit typical Raman and ultraviolet-visible light absorption spectra corresponding to few-layer thick MoS2. The PEC performance of the MoS2 nanosheet/TiO2 nanowire heterostructure is superior to that of bare TiO2 nanowires. MoS2/TiO2 heterostructure shows three times higher photocurrent than that of bare TiO2 nanowires at 0.6 V. The enhanced PEC photocurrent is attributed to improved light absorption of MoS2 nanosheets and efficient charge separation through the heterojunction. The photoelectrode of the MoS2/TiO2 heterostructure is stably sustained during on-off switching PEC cycle.

BaCO3-TiO2계의 고상반응에 관한 연구 (A Study on Solid Reaction of BaCO3-TiO2 System)

  • 이응상;황성연;임대영
    • 한국세라믹학회지
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    • 제24권5호
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    • pp.484-490
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    • 1987
  • Diffusion coupling experiment was done to study expansion of body and soild reaction in BaCO3-TiO2 system. Specimen of BaCO3 and TiO2 was formed with Pt-mark's method. Each specimen was fired at interval of 25℃ from 900℃ to 1000℃ for 2hrs. After that, specimen was fixed with resin and polished. Product layers of specimen were observed with SEM and EDS. The result were following; 1. Diffusion component is Ba2+, which diffuse toward TiO2. 2. Large crack between layer of BaCO3 and Ba2TiO4 was generated because of difference of thermal expansion coefficient. 3. Ba2TiO4 is formed to TiO2 body by the reaction of BaTiO3 and BaO and its structure is very porous. 4. BaTiO3 changes immediately to Ba2TiO4 by the reaction of BaO. But BaTiO3 which formed by the reaction of TiO2 and Ba2TiO4 exsists as layer because the diffusion distance of Ba2+ is far.

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TiAl계 XD45, XD47 금속간 화합물의 고온산화거동 (High Temperature Oxidation of TiAl-based XD 45 and XD47 Intermetallics)

  • 심웅식;이동복
    • 한국표면공학회지
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    • 제35권4호
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    • pp.193-198
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    • 2002
  • Alloys of XD45 (Ti45A12Nb2Mn-0.8vol%TiB$_2$) and XD47 (Ti47A12Nb2Mn-0.8vol%TiB$_2$) were oxidized between 800 and $1000^{\circ}C$ in air, and their oxidation characteristics were studied. The oxide scales consisted primarily of an outer $TiO_2$ layer, an intermediate $Al_2$$O_3$-rich layer, and an inner mixed layer of ($TiO_2$+$Al_2$$O_3$). Nb tended to present at the lower part of the oxide scale, whereas Mn at the upper part of the oxide scale. The Pt marker tests indicated that the outer oxide layer grew primarily by the outward diffusion of Ti and Mn, and the inner mixed layer by the inward transport of oxygen.

다층 구조로부터 열 확산에 의한 $PbTiO_3$ 박막의 제조 (Formation of $PbTiO_3$ Thin Films by Thermal Diffusion from Multilayrs)

  • 서도원;최덕균
    • 한국세라믹학회지
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    • 제30권6호
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    • pp.510-516
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    • 1993
  • $PbTiO_3$ thin films have been formed by rapid thermal annealing(RTA) of $TiO_2$/Pb/$TiO_2$ multilayer films deposited on Si wafers by RF sputtering. Based on the optimal depositon conditions of TiO2 and Pb, $TiO_2$/Pb/$TiO_2$ three layers were deposited for 900$\AA$ each. These films were subjected to RTA process at the temperatures ranging from $400^{\circ}C$ to $900^{\circ}C$ for 30 seconds in air, and were analyzed by X-ray diffraction and transmission electron microscopy to investigate the phases and the microstructures. As a result, perovskite $PbTiO_3$ phases was obtained above $500^{\circ}C$ with the trace of unreacted $TiO_2$. RBS analysis revealed the anisotropic behavior of diffusion that the diffusivity of Pb to the bottom $TiO_2$ layer was faster than that of Pb to the top $TiO_2$ layer. The amorphous Pb-silicate was formed between film and Si substrate due to the diffusion of Pb, but Pb-silicate existed locally at the interface and the amount of that phase was very small. Therefore the effect of bottom $TiO_2$ layer as a diffusion barrier was confirmed. $PbTiO_3$ films formed by current technique showed a relative dielectric constant of 60, and the maximum breakdown field reached 170kV/cm.

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Si 첨가가 TiAl 합금의 내산화성에 미치는 영향 (Effect of Si on the High Temperature Oxidation of TiAl Alloys)

  • 김성훈;김승언;최송천;이동복
    • 한국표면공학회지
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    • 제33권1호
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    • pp.3-9
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    • 2000
  • Arc-melted alloys of TiAl-(o.25, 0.5, 1.0at%) Si were isothermally oxidized at 800, 900 and $1000^{\circ}C$ in air for 60hr. It was found that the oxidation resistance of the prepared TiAl-Si alloys was much better than that of pure TiAl, being progressively increasing with an increase in the Si content. This was attributed to the formation of $SiO_2$in addition to ($TiO_2$+$Al_2$$O_3$) oxides which formed in TiAl alloys with and without silicon additions. However, the silica formation within the oxide layer unfortunately accelerated the oxide scale spallations. During oxidation, all the elements in the base alloy diffused outward, whereas oxygen from the atmosphere diffused inward. The oxides were primarily composed of an outer thick $TiO_2$layer, an intermediate diffuse $Al_2$$O_3$layer and an inner $TiO_2$layer. A small amount of $SiO_2$was present all over the oxide scale and some voids were found around the intermediate layer.

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TiAl-W-Zr 합금에 생성된 고온산화막 분석 (Characterization of Oxide Scales Formed on TiAl-W-Zr Alloys)

  • 우성욱;이동복
    • 한국재료학회지
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    • 제14권6호
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    • pp.394-398
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    • 2004
  • A Ti47Al1.7W-3.7Zr alloy was oxidized between $900^{\circ}C$ and $1050^{\circ}C$, and the oxide scales formed were studied. The oxide scales consisted primarily of an outer$TiO_2$ layer, an intermediate $Al_2$$O_3$-rich layer, and an inner mixed ($TiO _2$ + $Al_2$$O_3$) layer. Besides $TiO_2$ and $Al_2$$O_3$, oxidation led to the formation of some $Ti_2$AlN and TiN. Both W and Zr were preferentially segregated below the intermediate $Al_2$$O_3$-rich layer. Tungsten in the oxide scale was present as $WO_3$ and ${Ti}_{x}$$W_{1-x}$, whereas zirconium as monoclic-$ZrO_2$ and tetragonal-$ZrO_2$.

TiO2 씨앗층을 이용한 다양한 기판에서의 Co/Pd 층의 수직 자기 이방성에 대한 연구 (Perpendicular Magnetic Anisotropy in Co/Pd Layer with TiO2 Seed Layer on the Various Substrates)

  • 강물빛;윤정범;이정섭;유천열
    • 한국자기학회지
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    • 제23권1호
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    • pp.7-11
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    • 2013
  • 본 연구에서는 $TiO_2$/Co/Pd 구조의 다층박막을 마그네트론 스퍼터링으로 GaAs(100), MgO(100), MgO(111), Si(100), glass와 같은 다양한 종류의 기판에 대해 제작하여 수직 자기 이방성에 대해서 연구하였다. 산소 분압 등의 $TiO_2$ 층의 증착 조건과 기판의 종류에 따른 Co/Pd 층의 수직 자기 이방성을 측정하였다. 그 결과, $TiO_2$ 층이 5 nm 이하 일 때는 기판의 종류에 영향을 받지만, 그 이상의 두께에 대해서는 MgO(111)을 제외한 기판의 영향이 크지 않음을 확인하였고, 이는 $TiO_2$ 씨앗층의 성장조건과 계면의 거칠기, 결정방향 등과 관련이 있음을 발견하였다.

급속열처리에 의한 $TiN/TiSi_2$ 이중구조막 혈성에 대한 Ti-Si 계면의 얇은 산화막의 영향 (Effects of the thin $SiO_2$ film on the formation of $TiN/TiSi_2$ bilayer formed by rapid thermal annealing)

  • 이철진;성만영;성영권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1994년도 하계학술대회 논문집 C
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    • pp.1223-1225
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    • 1994
  • The properties of $TiN/TiSi_2$ bilayer formed by a rapid thermal anneal ing is investigated when thin $SiO_2$ film exists at the Ti-Si interface. The competitive reaction for the $TiN/TiSi_2$ bilayer occurs above $600^{\circ}C$. The thickness of the $TiSi_2$ layer decreases with increasing $SiO_2$ film thickness while the TiN layer increases at the competitive reaction. The composition of TiN layer is changed to the $TiN_xO_y$ film due to the thin $SiO_2$ layer at the Ti-Si interface while the structure of the TiN and $TiSi_2$ layers was not changed.

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