• 제목/요약/키워드: $SrTiO_2$

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$(Sr_{1-x}{\cdot}Ca_x)TiO_3$세라믹의 유전특성에 미치는 $Nb_2O_5$ 첨가영향 (Effect of $Nb_2O_5$ Addition on the Dielectric Properties of $(Sr_{1-x}{\cdot}Ca_x)TiO_3$ Ceramic)

  • 김진사;정익형;최운식;김중혁;이준웅
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 추계학술대회 논문집
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    • pp.256-259
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    • 1996
  • $(Sr_{1-x}{\cdot}Ca_x)TiO_3+yNb_2O_5$($0.05{\leq}x{\leq}0.2$, 0.004$1350[^{\circ}C]$ in a reducing atmosphere($N_2$ gas). Dielectric propertries were investigated with contents of $Nb_2O_5$. The grain size and dielectric constant increase with increase $Nb_2O_5$, but decrease in $Nb_2O_5$ exceed($Nb_2O_5=0.6[mol%]$). Also, the temperature characteristics of the dielectric loss factor exhibited a stable value within 0.5[%]. The capacitance characteristics appeals a stab]e value in ${\pm}10[%]$.

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Dy2O3를 첨가한 (Ba,Sr,Ca)TiO3 후막의 구조 및 전기적 특성 연구 (Structural and Electrical Properties of (Ba,Sr,Ca)TiO3 Thick Films doped with Dy 2O3)

  • 노현지;박상만;윤상은;이성갑
    • 한국전기전자재료학회논문지
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    • 제20권8호
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    • pp.680-684
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    • 2007
  • In this study, we investigated the effects of structural and electrical properties of $(Ba_{0.6},\;Sr_{0.3},\;Ca_{0.1})TiO_3$ thick films with variation $Dy_2O_3$ contents. $(Ba_{0.6},\;Sr_{0.3},\;Ca_{0.1})TiO_3$ powders, prepared by the sol-gel method, were mixed organic vehicle. The BSCT thick films doped with 0.1, 0.3, 0.5, 0.7 mol% $Dy_2O_3$ were fabricated by the screen-printing techniques on the alumina substrates and the structural and dielectric properties were investigated with variation of $Dy_2O_3$ doping contents. All BSCT thick films were sintered at $1420^{\circ}C$, for 2hr. In the TG-DTA analysis, the formation of the polycrystalline perovskite phase was observed at around $670 ^{\circ}C$. In the XRD analysis, all BSCT thick films showed the cubic perovskite structure. The average thickness of BSCT thick films was approximately $65{\mu}m$. The Curie temperature decreased with increasing $Dy_2O_3$ amount. The relative dielectric constant and dielectric loss of BSCT thick films doped with $Dy_2O_3$ 0.1 mol% were 6267 and 2.6 %, respectively.

$(Sr{\cdot}Pb)TiO_3$계 세라믹의 전기전도 및 절연파괴 특성에 관한 연구 (A Study on the Electrical Conduction and D.C. Breakdown Properties of $(Sr{\cdot}Pb)TiO_3$ Series Ceramic)

  • 정일형;최운식;김충혁;이준웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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    • pp.321-324
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    • 1991
  • In this study, $(Sr{\cdot}Pb)TiO_3$ series ceramics which is used in high voltage were fabricated by the mixed oxide method, and the electrical conduction mechanism and D.C. breakdown voltage characteristics of the specimens in accordance with the contents of $Bi_2O_3{\cdot}3TiO_2$ were investigated. As a result, the leakage current was increased with the contents of $Bi_2O_3{\cdot}3TiO_2$ and the measuring temperature. At room temperature, the leakeage current was showed a tendency of saturating when D.C. electrical field of $l5{\sim}30$[kV/cm] was applied to the specimen. As a result of breakdown voltage characteristics. breakdown strength was decreased when the contents of $Bi_2O_3{\cdot}3TiO_2$ were increased. On the other hand, in the temperature region below $60[^{\circ}C]$, the electronic breakdown was occured, and in the temperature region from 60 to $200[^{\circ}C]$, the thermal breakdown was occured by the Joule heat and the dissipation factor.

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(Ba,Sr,Ca)$TiO_3$ 후막의 전기적 특성에 미치는 $Dy_2O_3$첨가의 영향 (The influence of doping $DY_2O_3$ on electrical properties of (Ba,Sr,Ca)$TiO_3$ thick films)

  • 노현지;이성갑;이영희;남성필
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2008년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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    • pp.173-174
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    • 2008
  • 페로브스카이트 구조의 (Ba,Sr,Ca)$TiO_3$ 분말에 $Dy_2O_3$ 불순물을 첨가하여 첨가량에 따른 영향을 연구하였다. 시편의 제작은 Screen-printing을 이용하여 후막으로 제작하였으며, 구조적인 특성과 전기적인 특성을 관찰하였다. XRD 회절 분석을 통하여 $Dy_2O_3$가 첨가된 모든 시편에서 이차상이 없는 전형적인 페로브스카이트 구조를 나타내었다. 시편의 미세구조를 관찰한 결과 grain size는 $Dy_2O_3$ 첨가량이 증가 할수록 감소하였으며, 기공은 증가하는 것을 알 수 있었다. 후막의 두께는 $Dy_2O_3$ 첨가량에 영향을 받지 않았으며 평균 두께는 $69{\mu}m$이었다. 큐리 온도는 $Dy_2O_3$ 첨가량에 따라 감소하였으며, 유전 손실은 상온 이상에서 1%이하로 크게 감소하였다.

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Modified Rf Magnetron Sputtering에 의해 Pt/Ti/SiO$_2$/Si 기판위에 제조된 강유전체 SrBi$_2$Ta$_2$O$_9$ 박막의 미세구조 및 전기적 특성 연구 (Microstructure and Electric Properties of Ferroelectric SrBi$_2$Ta$_2$O$_9$ Thin Films Deposited by Modified Rf Magnetron Sputtering Technique)

  • 양철훈;윤순길
    • 한국세라믹학회지
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    • 제35권5호
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    • pp.472-478
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    • 1998
  • Ferroelectric SrBi2Ta2O9(SBT) films were deposited on Pt/Ti/SiO2/Si substrates at 50$0^{\circ}C$ using a sintered SBT target Bi and Ta targets by modified rf magnetron sputtering and then were annealed at 80$0^{\circ}C$ for 10min in oxygen ambinet(760 torr) The composition of the SBT films could be easily controlled using the mul-ti-targets. The film composition of {{{{ {Sr }_{0.8 } {Bi }_{2.9 } {Ta}_{2.0 } {O }_{9 } }} was obtained with SBTd sputtering power of 100 W Bi of 25W and Ta of 10 W. A 250nm thick SBT films exhibited a dense and uniform microstructure and showed the remanent polarization(Pr) of 14.4 $\mu$C/cm2 and the coercive field({{{{ {E }_{c } }})of 60 kV/cm at applied voltage of 5 V. The SBT films show practically no polarization fatigue up to {{{{ {10 }_{10 } }} cycles under 5V bipolar pulse. The retention characteristics of the SBT films looked very promising and the leakage current density of the SBT films was about 1.23$\times${{{{ {10 }^{-7 } }}A/c{{{{ {m }^{2 } }} at 120kV/cm.

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기판온도에 따른 (Ba,Sr)TiO$_3$ 박막의 구조와 유전특성 (The Structure and Dielectric Properties of the (Ba,Sr)TiO$_3$ Thin Films with the Substrate Temperature)

  • 이상철;이문기;이영희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권11호
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    • pp.603-608
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    • 2000
  • $(Ba, Sr)TiO_{3}$[BST] thin films were fabricated on the Pt/TiO$_2$/SiO$_2$/Si substrate by the RF sputtering. The structure and dielectric properties of the BST thin films with the substrate temperature were investigated. Increasing the substrate temperature, The BST phase increased and barium multi titanate phases decreased. Increasing the frequency, the dielectric constant decreased and the dielectric loss increased. The dielectric constant and dielectric loss of the BST thin films deposited at 50$0^{\circ}C$ were 300 and 0.018, respectively at 1 kHz. The leakage current density of the BST thin films deposited at 50$0^{\circ}C$ was $10^{-9}$ A/$\textrm{cm}^2$ with applied voltage of 3V. Because of the high dielectric constant(300), low dielectric loss(0.018) and low leakage current($10^{-9}$ A/$\textrm{cm}^2$), BST thin films deposited at 50$0^{\circ}C$ is expecting for the application of DRAM.

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$SrTiO_3$ 장벽층을 이용한 경사형 모서리 접합의 터널링 자기저항 특성연구 (Tunneling Magnetoresistance of a Ramp Edge Junction with $SrTiO_3$ Barrier Layer)

  • Lee, Sang-Suk;Kim, Young-Il;Hwang, Do-Guwn;Kim, Sun-Wook;Kungwon Rhie;Rhee, Jang-Roh
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2002년도 동계연구발표회 논문개요집
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    • pp.174-175
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    • 2002
  • A ramp-type tunneling magnetoresistance (TMR) junction having structure NiO(60 nm)/pinned Co(10 nm)MiO(60 nm)/barrier SrTiO$_3$(2-10 nm)/free NiFe(10 nm) with the 15 degree slope was investigated. We obtained nonlinear I(V) characteristics for ramp-type tunneling junctions that have distinctive difference with and without applied magnetic field. In the barrier SrTiO$_3$ thickness of 4 nm, the TMR was about 52% at a bias voltage of 50 mV. (omitted)

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Ar/$O_2$ 비에 따른 (Ba,Sr)$TiO_3$ 박막의 구조 및 전기적 특성 (Structural and Electrical Properties of (Ba,Sr)$TiO_3$[BST] Thin Films with Ar/$O_2$ ratio)

  • 신승창;이문기;류기원;배선기;이영희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 추계학술대회 논문집
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    • pp.243-246
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    • 1998
  • (Ba, Sr)TiO$_3$[BST] thin films were fabricated on Pt/SiO$_2$/Si substrate by RF sputtering technique. The structural, dielectric and electrical properties of BST thin films were investigated with Ar/O$_2$ ratio. Dielectric constant and dielectric loss of the BST thin film were about 1020 and 2.0[%], respectively. (at RF power 80W, post annealing temperature $650^{\circ}C$, deposition pressure of 5mTorr and Ar/O$_2$=80/20). For the BST(Ar/O$_2$=80/20) thin film with Polarization switching cycles of 10$^{10}$ , remanent polarization and coercive field were 0.084[$\mu$C/cm$^2$], 1.954[kV/cm], respectively.

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Electrical/Dielectric Characterization of 2-Dimenisonal Electron Gas Layers Formed between LaAlO3 and SrTiO3

  • Park, Chan-Rok;Kwon, Kyeong-Woo;Do, Woo-ri;Park, Da-Hee;Baek, Senug-Hyub;Kim, Jin Sang;Hwang, in-Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.366.2-366.2
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    • 2014
  • Impedance spectroscopy allows for simultaneous characterization of interface-controlled materials and/or devices in terms of electrical and dielectric aspects. Recently, there have tremendous interests in 2-dimensional electron gas layers (2DEGs) involving $LaAlO_3$ and $SrTiO_3$ whose features incorporates extremely high mobility and carrier concentrations along with metallic responses unlike the constituents, $LaAlO_3$ and $SrTiO_3$. Impedance spectroscopy offers the following unique features, such as simultaneous determination of conductivity and dielectric constants, identification of electrical origins among bulk-, grain boundary-, and electrode-based responses. Impedance spectroscopy was applied to the 2DEG $LaAlO_3/SrTiO_3$ system, in order to extract the electrical and dielectric information operating in the 2DEG system. The unique responses of the 2DEG system are investigated in terms of temperature and device structures. The underlying mechanism of the 2DEG system is proposed with the aim to optimizing the high-mobility 2DEG responses and to expedite the associated devices towards the high-density integrated chips.

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