Fabrication and Characterization of the ITO/Au/ITO Thin Film Gas Sensor by RF Magnetron Sputtering and electron Irradiation (RF 스퍼터와 전자빔 조사를 이용한 ITO/Au/ITO 가스센서 제조 및 특성 평가)
-
- Journal of the Korean Society for Heat Treatment
- /
- v.24 no.2
- /
- pp.87-91
- /
- 2011