• Transactions of the Korean Society of Automotive Engineers
• /
• v.23 no.5
• /
• pp.515-523
• /
• 2015

In this paper, we fabricated and evaluated the gas sensor for the detection of CO gas and $NO_X$ gas among the vehicle exhaust emission gasses. The $SnO_2$ (tin dioxide) layer is used as the detection material, and the thin-film type and the nano-fiber type layers are deposited with various thicknesses using sputtering method and electro spinning method, respectively. The experiments are performed in the chamber where the gas concentration is controlled with mass flow controller. The fabricated devices are applied to the CO and $NO_X$ gas, where the device with the thinner $SnO_2$ layer shows better sensitivity. The nano-fiber has the larger surface area, and the shorter response time and recovery time are obtained. From the experimental results, both types of gas sensors successfully detect CO and $NO_X$ gases, which can be applied to measure those gases from the vehicle emissions.

• Korean Journal of Materials Research
• /
• v.10 no.11
• /
• pp.778-783
• /
• 2000

Effects of the $Al_2$O$_3$surface protective layer, deposited on the SnO$_2$sensing layer by aerosol flame deposition (AFD) method, on the sensing properties of SnO$_2$thin film ags sensors were investigated.Effects of Pt doping to the $Al_2$O$_3$surface protective layer on the selectivity of CH$_4$ gas were also investigated. 0.3$\mu\textrm{m}$ thick SnO$_2$thin sensing layers on Pt electrodes were prepared by R.F. magnetron sputtering with R.F. power of 50 W, at working pressure of 4mTorr, and at 20$0^{\circ}C$ for 30 min. $Al_2$O$_3$surface protective layers on SnO$_2$layers were prepared by AFD using a diluted aluminum nitrade (Al(NO$_3$).9$H_2O$) solution. The sensitivity of CO gas in the SnO$_2$gas sensor with an $Al_2$O$_3$surface protective layer was significantly decreased. But that of CH$_4$gas remained almost same with pure SnO$_2$gas sensor. This result shows that the selectivity of CH$_4$gas is increased because of the $Al_2$O$_3$surface protective layer. In the case of SnO$_2$gas sensors with Pt-doped $Al_2$O$_3$surface protective layers, low sensing property to CO gas and high sensing property to CH$_4$were observed. This results in the increasing of selectivity of CH$_4$gas selectivity are discussed.

• Transactions on Electrical and Electronic Materials
• /
• v.10 no.4
• /
• pp.135-139
• /
• 2009

$H_2S$ micro-gas sensors have been developed employing $SnO_2$:CuO composite thin films. The films were prepared by e-beam evaporation of Sn and Cu metals on silicon substrates, followed by oxidation at high temperatures. Results of various studies, such as scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) reveal that $SnO_2$ and CuO are mutually non-reactive. The CuO grains, which in turn reside in the inter-granular regions of $SnO_2$, inhibit grain growth of $SnO_2$ as well as forming a network of p-n junctions. The film showed more than a 90% relative resistance change when exposed to $H_2S$ gas at 1 ppm in air at an operating temperature of $350^{\circ}C$ and had a short response time of 8 sec.

• Journal of the Korean Ceramic Society
• /
• v.27 no.8
• /
• pp.1004-1010
• /
• 1990

SnO2-ThO2-PdCl2-In2O3 gas sensing ceramic systems were studied in order to lowr the operating temperatures and reduce the dependence of ambient temperatures and humidities. Sensing materials were coated by brush on the alumina tube followed by the impregnation of solidfier(ethylsilicate). Coated species were dried and sintered at 75$0^{\circ}C$ for 30min. carbon monoxide gas detecting sensitiviteis were measured in various ambinet temperatures and humidities. In the composition of 94SnO2-5ThO2-PdCl2 system carbon monoxide gas detecting sensors showed the highest detecting sensitivities and the lowest operating temperature(15$0^{\circ}C$). As the ambient temperatures and humidities were increased, sensitivities were decreased. Because the oscillation effects were observed at high humidities, it was suggested that the sensitivities of sensors depend greatly on the humidities.

• Korean Journal of Materials Research
• /
• v.34 no.5
• /
• pp.235-241
• /
• 2024

Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NO_x), and two odor gases, ammonia (NH₃) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO₂ for CO, In₂O₃ for NO_X, Ru-WO₃ for NH₃, and hybridized SnO₂-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

• Journal of the Korean Institute of Gas
• /
• v.11 no.1 s.34
• /
• pp.29-33
• /
• 2007

This study investigates the use of $TiO_{2},\;Pd,\;Pt$, and In which greatly improves a sensitivity to trimethylamine gas. The metal-$SnO_{2}$ thick films were prepared by screen-printing method onto $Al_{2}O_{3}$ substrates with platinum electrode. The sensing characteristics were investigated by measuring the electrical resistance of each sensor in a test box as a function of detecting gas concentration. This was then used to detect trimethylamine, dimethylamine, and ammonia vapours within the concentration range of 100-1000ppm. The gas sensing properties of metal-$SnO_{2}$ mixed thick films depended on the content and variety of metal. It was found that sensitivity and selectivity of the films dopped with 1 wt% Pd and 10 wt% $TiO_{2}$ for trimethylamin gas showed the best result at $250^{\circ}C$.

• Journal of Sensor Science and Technology
• /
• v.17 no.1
• /
• pp.69-74
• /
• 2008

VOCs (Volatile Organic Compound) sensors were fabricated using $SnO_2$nanowires-based thin films and its gas sensing behaviors were studied. The $SnO_2$ nanowires synthesized from a thermal evaporation process were dispersed in a solution and the sensor film was prepared by dropping the slurry on the substrate with the electrodes and an embedded heater. The gas response (Ra/Rg, Ra: resistance in air, Rg: resistance in gas) to $30{\sim}40$ ppm Benzene, Ethyl Benzene, o-xylene were in the range of $39{\sim}42$, which were significantly higher than those to 50 ppm of CO, $CH_4$ and $C_3H_8$ ($12{\sim}19$).

• Journal of Sensor Science and Technology
• /
• v.29 no.6
• /
• pp.407-411
• /
• 2020

In this study, we propose an array-type gas sensor with high selectivity and response using multiple oxide semiconductors. The sensor array was composed of SnO₂ and In₂O₃, and the detection characteristics were improved by using Pt, Au, and Pd catalysts. All samples were deposited directly on the Pt interdigitated electrode (IDE) through the e-beam evaporator glancing angle deposition (GAD) method. They grew in the form of well-aligned nanorods at off-axis angles. The prepared SnO₂ and In₂O₃ nanorod samples were exposed to CH₃COCH₃, C₇H₈, and NO₂ gases in a 300℃ dry condition. Au-decorated SnO₂, Au-decorated In₂O₃, and Pd-decorated In₂O₃ exhibited high selectivity for CH₃COCH₃, C₇H₈, and NO₂, respectively. They demonstrated a high detection limit of the sub ppb level computationally. In addition, measurements from each sensor were executed in the 40% relative humidity condition. Although there was a slight reduction in detection response, high selectivity and distinguishable detection characteristics were confirmed.

• Journal of Sensor Science and Technology
• /
• v.18 no.1
• /
• pp.54-62
• /
• 2009

${Co_3}{O_4}$ and ${Co_3}{O_4}$-based thick films with additives such as ${Co_3}{O_4}-{Fe_2}{O_3}$(5 wt.%), ${Co_3}{O_4}-{SnO_2}$ (5 wt.%), ${Co_3}{O_4}-{WO_3}$(5 wt.%) and ${Co_3}{O_4}$-ZnO(5 wt.%) were fabricated by screen printing method on alumina substrates. Their structural properties were examined by XRD and SEM. The sensitivities to iso-${C_4}H_{10}$, $CH_4$, CO, $NH_3$ and NO gases were investigated with the thick films heat treated at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. From the gas sensing properties of the films, the films showed p-type semiconductor behaviors. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed higher sensitivity to i-${C_4}H_{10}$ and CO gases than other thick-films. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed the sensitivity of 170 % to 3000 ppm iso-${C_4}H_{10}$ gas and 100 % to 100 ppm CO gas at the working temperature of $250^{\circ}C$. The response time to i-${C_4}H_{10}$ and CO gases showed rise time of about 10 seconds and fall time of about $3{\sim}4$ minutes. The selectivity to i-${C_4}H_{10}$ and CO gases was enhanced in the ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film.

• Journal of Sensor Science and Technology
• /
• v.14 no.2
• /
• pp.63-68
• /
• 2005

The nano-grained Pd or Pt-doped $SnO_{2}$ thin films were deposited on the alumina substrate at ambient temperature or $300^{\circ}C$ by using an R.F. magnetron sputtering system and then annealed at $650^{\cir}C$ for 1 hour or 4 hours in air. The crystallinity and microstructure of the annealed films were analyzed. A grain size of the thin films was 30 nm to 50 nm. As a result of gas sensitivity measurements to an alcohol vapor of $36^{\circ}C$, the 2 wt.% Pt-doped $SnO_{2}$ thin-film sensor deposited at $300^{\circ}C$ and annealed at $650^{\circ}C$ for 4 hours showed the highest sensitivity.