• Journal of Sensor Science and Technology
• /
• v.18 no.6
• /
• pp.417-422
• /
• 2009

The problems associated with the synthesis, characterization and application of $SnO_2$-Au nanocomposites for the optimization of conductometric gas sensors have been discussed in this report. Nanocomposites have been synthesized on the surface of $SnO_2$ films using successive ionic layer deposition(SILD) method. It has been shown that the proposed approach to surface modification of metal oxide films is an excellent method for the optimization of the operating characteristics of $SnO_2$-based gas sensors, being developed for the detection of reducing gases as well as ozone.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.18 no.10
• /
• pp.917-923
• /
• 2005

In this paper, effect of catalytic configuration on the sensing properties of $SnO_2$ nanoparticle gas sensitive thick film was investigated. Two types of catalytic configuration, mono and binary, were made on the $SnO_2$ nanoparticle. In case of mono catalytic system, $3 wt\%$ Pd or Pt catalyst was doped onto the $SnO_2$ nanoparticle, respectively. In case of binary catalytic system, Pd and Pt was doped simultaneously with concentration ratio of 1:2 to 2:1 onto the $SnO_2$ nanoparticle. After doping, gas sensitive thick film was printed on alumina substrate and heat-treated at 450 to $600^{\circ}C$. Gas sensing properties was evaluated using 500 to 10,000 ppm $CH_4$ gas. As a result, gas sensitive thick film with binary catalytic system showed unstable phenomena that the gas sensitivity was changed according to aging time. In contrary, the mono catalytic system showed relatively stable phenomena despite of aging time. Especially, gas sensitive thick film doped with $3 wt\%$ Pt catalyst and heat-treated at $500^{\circ}C$ showed good sensing properties such as 0.57 of $R_{3500}/R_{1000}$ and very small variation within $3.5\%$ after aging for 5 hours, and response time was very short less than 20 seconds.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.272-272
• /
• 2014

SnO thin films, 100 nm in thickness, were deposited on glass substrates by RF magnetron sputtering. A stack structure of $SnO_2/SnO$, where few nanometers of $SnO_2$ were determined on the SnO thin film by X-ray photoelectron spectroscopy. In addition, XPS depth profile analysis of the pristine and heat treated thin films were introduced. The electrical behavior of the as-sputtered films during the annealing was recorded to investigate the working conditions for the SnO sensor. Subsequently, The NH3 sensing properties of the SnO sensor at operating temperature of $50-200^{\circ}C$ were examined, in which the p-type semiconducting sensing properties of the thin film were noted. The sensor shows good sensitivity and repeatability to $NH_3$ vapor. The sensor properties toward several gases like $H_2S$, $CH_4$ and $C_3H_8$ were also introduced. Finally, a sensing mechanism was proposed and discussed.

• Korean Journal of Materials Research
• /
• v.26 no.12
• /
• pp.741-750
• /
• 2016

Nanofibers(NFs), because of their high surface area and nanosized grains, have appropriate morphologies for use in chemiresistive-type sensors for gas detection applications. In this study, a highly sensitive and selective CO gas sensing material based on Au-decorated $SnO_2$ NFs was fabricated by electrospinning. $SnO_2$ NFs were synthesized by electrospinning and subsequently decorated with various amounts of Au nanoparticles(NPs) by sputtering; this was followed by thermal annealing. Different characterizations showed the successful formation of Au-decorated $SnO_2$ NFs. Gas sensing tests were performed on the fabricated sensors, which showed bell-shaped sensing behavior with respect to the amount of Au decoration. The best CO sensing performance, with a response of ~20 for 10 ppm CO, was obtained at an optimized amount of Au (2.6 at.%). The interplay between Au and $SnO_2$ in terms of the electronic and chemical sensitization by Au NPs is responsible for the great improvement in the CO sensing capability of pure $SnO_2$ NFs, suggesting that Au-decorated $SnO_2$ NFs can be a promising material for fabricating highly sensitive and selective chemiresistive-type CO gas sensors.

• Journal of Sensor Science and Technology
• /
• v.20 no.6
• /
• pp.428-433
• /
• 2011

We report on the building of a micro sensor array based on typical semiconductor fabrication processes aimed at monitoring selectively a specific gas in ambient of other gases. Chemical sensors can be applied for an electronic nose and/or robots using this technique. Microsensor array was fabricated on the same chip using 0.6${\mu}m$ CMOS technology, and unique gas sensing patterns were obtained by principal component analysis from the array. $SnO_2$/Pt sensor for CO gas showed a high selectivity to buthane gas and humidity. $SnO_2$ sensor for hydrogen gas, however, showed a low selectivity to CO and buthane gas. We can obtain more distinguishable patterns that provide the small sensing deviation(the high seletivity) toward a given analyte in the response space than in the chemical space through the specific parameterization of raw data for chemical image formation.

• Applied Chemistry for Engineering
• /
• v.8 no.2
• /
• pp.332-338
• /
• 1997

$SnO_2$ as raw material of sensor for $NO_2$ detection was prepared by precipitating $SnCl_4$ solution with aqueous ammonia followed by calcining in air. The characterization of $SnO_2$ was carried out using FT-IR and XRD, and $SnO_2$ thick film sensor was fabricated by screen-printing method. The particle size of $SnO_2$ calcined at higher temperature increased due to the growth of crystalline. $SnO_2$ sensor fabricated by using $SnO_2$ sample calcined at $1000^{\circ}C$ followed by heat treatment at $700^{\circ}C$ exhibited excellent sensing characteristics and selectivity for $NO_2$ gas at the operating temperature of $250^{\circ}C$.

• Korean Journal of Materials Research
• /
• v.20 no.4
• /
• pp.223-227
• /
• 2010

Recently, one-dimensional semiconducting nanomaterials have attracted considerable interest for their potential as building blocks for fabricating various nanodevices. Among these semiconducting nanomaterials,, $SnO_2$ nanostructures including nanowires, nanorods, nanobelts, and nanotubes were successfully synthesized and their electrochemical properties were evaluated. Although $SnO_2$ nanowires and nanobelts exhibit fascinating gas sensing characteristics, there are still significant difficulties in using them for device applications. The crucial problem is the alignment of the nanowires. Each nanowire should be attached on each die using arduous e-beam or photolithography, which is quite an undesirable process in terms of mass production in the current semiconductor industry. In this study, a simple process for making sensitive $SnO_2$ nanowire-based gas sensors by using a standard semiconducting fabrication process was studied. The nanowires were aligned in-situ during nanowire synthesis by thermal CVD process and a nanowire network structure between the electrodes was obtained. The $SnO_2$ nanowire network was floated upon the Si substrate by separating an Au catalyst between the electrodes. As the electric current is transported along the networks of the nanowires, not along the surface layer on the substrate, the gas sensitivities could be maximized in this networked and floated structure. By varying the nanowire density and the distance between the electrodes, several types of nanowire network were fabricated. The $NO_2$ gas sensitivity was 30~200 when the $NO_2$ concentration was 5~20ppm. The response time was ca. 30~110 sec.

• Journal of Sensor Science and Technology
• /
• v.18 no.3
• /
• pp.217-221
• /
• 2009

Different methods of material engineering, used for improvement of solid state gas sensors parameters are reviewed in this report. The wide possibilities of material engineering in optimization of gas sensing properties were demonstrated on the example of $SnO_2,\;TiO_2\;and\;In_2O_3$-based sensors.

• Korean Journal of Materials Research
• /
• v.4 no.3
• /
• pp.295-300
• /
• 1994

This paper is aimed to study the effect of Pd activator, the annealing temperature, and operating temperatures on the response characteristics of the $SnO_2/Al_2O_3$ sensor. The resistance of device has shown minimum value when annealing temperature and operating temperature of device are $550^{\circ}C$ and $350^{\circ}C$ respectively in ethanol gas. And the response characteristics of the device showed the best results when lwt% Pd was added to SnOz especially in low concentration of ethanol gas.

• Journal of the Korean Ceramic Society
• /
• v.40 no.11
• /
• pp.1073-1077
• /
• 2003

The Sn $O_2$-based gas sensors can detect inflammable and toxic gases of low concentration by the modulation of surface resistance, but they lack in selectivity on the whole. To give selectivity to the Sn $O_2$-based gas sensors, studies on the sensing mechanism, selective gas sensing materials and signal processing techniques are demanded. Ethanol (C$_2$ $H_{5}$OH) and acetonitrile ($CH_3$CN) were confirmed to undergo catalytic oxidation on Sn $O_2$ by gas chromatography. PdCl$_2$-doped Sn $O_2$ showed excellent sensitivity to ethanol and acetonitrile, while La$_2$ $O_3$-doped Sn $O_2$ showed excellent sensitivity to ethanol, but poor sensitivity to acetonitrile. Using these two sensors and pattern recognition, the selectivity to acetonitrile is greatly enhanced. The minimum detection level of acetonitrile was 15 ppm in air and 20 to 100 ppm when exposed to interfering gases together with acetonitrile.