• Title/Summary/Keyword: $Si_3 N_4 O_3$

Search Result 1,047, Processing Time 0.034 seconds

Effect of Nitrogen, Titanium, and Yttrium Doping on High-K Materials as Charge Storage Layer

  • Cui, Ziyang;Xin, Dongxu;Park, Jinsu;Kim, Jaemin;Agrawal, Khushabu;Cho, Eun-Chel;Yi, Junsin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.33 no.6
    • /
    • pp.445-449
    • /
    • 2020
  • Non-volatile memory is approaching its fundamental limits with the Si3N4 storage layer, necessitating the use of alternative materials to achieve a higher programming/erasing speed, larger storage window, and better data retention at lower operating voltage. This limitation has restricted the development of the charge-trap memory, but can be addressed by using high-k dielectrics. The paper reviews the doping of nitrogen, titanium, and yttrium on high-k dielectrics as a storage layer by comparing MONOS devices with different storage layers. The results show that nitrogen doping increases the storage window of the Gd2O3 storage layer and improves its charge retention. Titanium doping can increase the charge capture rate of HfO2 storage layer. Yttrium doping increases the storage window of the BaTiO3 storage layer and improves its fatigue characteristics. Parameters such as the dielectric constant, leakage current, and speed of the memory device can be controlled by maintaining a suitable amount of external impurities in the device.

The Effects on Alkoxy Group and Catalyst in Hydrolysis of Silicon Alkoxide System (Silicon Alkoxide계 가수분해에서 Alkoxy Group과 촉매의 첨가에 대한 영향)

  • ;;Sumio Sakka
    • Journal of the Korean Ceramic Society
    • /
    • v.24 no.6
    • /
    • pp.561-571
    • /
    • 1987
  • In case of glass ceramics and powder preparation from the metalakoxide solutions, metalakoxide solutions with a various species of alkoxy groups have unique characteristics. Therefore, in this study, the mixing ability of homogeneous sol, gel morphology and physical properties of gels were investigated by the changes in terms of the different four alkoxy groups, CH3-, C2H5-, i-C3H7-n-C4H9-, along with the catalyst for the purpose of the observation about the homogenous transition range from sol to gel. As a result, when the fixed condition was mol ratio of H2O/Si(OR)4=2.0 and variables were batch composition and addition amount of catalyst, the characteristics of Tetra-normal-Butoxysilane and Tetra-iso-propoxysilane systems had very narrow sol-gel conversion region than Tetramethoxysilane and Tetraethoxysilane system. And silicon-alkoxide, systems having narrow sol-gel conversion region were enlarged by addition of catalyst. In viewpoint of the weight loss of gel produced by hydrolysis of silicon alkoxide systems with different four alkoxy groups, the amounts of weight loss of gel containing large molecular alkoxy groups were much more than those of small molecular alkoxy group.

  • PDF

Effect of Friction Coefficient on the Small Punch Creep Behavior of AISI 316L Stainless Steel (AISI 316L스테인리스강의 소형펀치 크리프 거동에 미치는 마찰계수의 영향)

  • Kim, Bum-Joon;Cho, Nam-Hyuck;Kim, Moon-K;Lim, Byeong-Soo
    • Korean Journal of Metals and Materials
    • /
    • v.49 no.7
    • /
    • pp.515-521
    • /
    • 2011
  • Small punch creep testing has received attention due to the convenience of using smaller specimens than those of conventional uniaxial creep tests, which enables creep testing on developing or currently operational components. However, precedent studies have shown that it is necessary to consider friction between the punch and specimen when computing uniaxial equivalent stress from a finite element model. In this study, small punch creep behaviors of AISI 316L stainless steel, which is widely used in high temperature-high pressure machineries, have been compared for the two different ceramic balls such as $Si_3N_4$ and $Al_2O_3$. The optimal range of the friction coefficient is 0.4~0.5 at $650^{\circ}C$ for the best fit between experimental and simulation data of AISI 316 L stainless steel. The higher the friction coefficient, the longer the creep rupture time is. Therefore, the type of ceramic ball used must be specified for standardization of small punch creep testing.

Preparation and Gas Permeation Performance of Pd-Ag-Cu Hydrogen Separation Membrane Using α-Al2O3 Support (α-Al2O3 지지체를 이용한 Pd-Ag-Cu 수소 분리막의 제조 및 기체투과 성능)

  • Sung Woo Han;Min Chang Shin;Xuelong Zhuang;Jae Yeon Hwang;Min Young Ko;Si Eun Kim;Chang Hoon Jung;Jung Hoon Park
    • Membrane Journal
    • /
    • v.34 no.1
    • /
    • pp.50-57
    • /
    • 2024
  • In this experiment, Pd-Ag-Cu membrane was manufactured using electroless plating on an α-Al2O3 support. Pd, Ag and Cu were each coated on the surface of the support through electroless plating and heat treatment was performed for 18 h at 500℃ in H2 in the middle of electroless plating to form Pd alloy. The surface of the Pd-Ag-Cu membrane was observed through Scanning Electron Microscopy (SEM), and the thickness of the Pd membrane was measured to be 7.82 ㎛ and the thickness of the Pd-Ag-Cu membrane was measured to be 3.54 ㎛. Energy dispersive X-ray spectroscopy and X-ray diffraction analysis confirmed the formation of a Pd-Ag-Cu alloy with a composition of Pd-78wt%, Ag-8.81wt% and Cu-13.19wt%. The gas permeation experiment was conducted under the conditions of 350~450℃ and 1~4 bar in H2 single gas and H2/N2 mixed gas. The maximum H2 flux of the hydrogen separation membrane measured in H2 single gas is 74.16 ml/cm2·min at 450℃ and 4 bar for the Pd membrane and 113.64 ml/cm2·min at 450℃ and 4 bar for the Pd-Ag-Cu membrane. In the case of the separation factor measured in H2/N2 mixed gas, separation factors of 2437 and 11032 were measured at 450℃ and 4 bar.

Study on Improvement of Heat Dissipation Characteristics of TIM Material Using Radiant Energy (복사에너지를 이용한 TIM소재의 방열 특성 향상을 위한 연구)

  • Hwang, Myungwon;Kim, Dohyung;Jung, Uoo-Chang;Chung, Wonsub
    • Journal of Surface Science and Engineering
    • /
    • v.52 no.2
    • /
    • pp.58-61
    • /
    • 2019
  • The aim of this study is to quantitatively demonstrate the possibility of heat transfer by thermal radiation by comparing heat transfer by conventional heat transfer and radiation by radiation. 1) The heat transfer was measured by using filler of TIM material with low thermal conductivity (CuS). As a result, heat transfer was easier than ceramic with high thermal conductivity ($Al_2O_3$ and $Si_3N_4$). 2) The reason for this is thought to be that the infrared wave due to radiation of the air diaphragm has moved easily. 3) From the above results, the heat dissipation of the TIM material indicates the possibility of heat transfer by thermal radiation.

Effect of soil-ameliorator mixtures on nutrient leaching in sandy paddy soil (사질답토양(砂質畓土壤)에 수종(數種) 개량제(改良劑) 시용(施用)이 양분용탈(養分溶脫)에 미치는 영향(影響))

  • Ahn, Sang-Bae;Park, Jun-Kyu;Yeon, Beong-Yeal;Yuk, Chang-Soo
    • Korean Journal of Soil Science and Fertilizer
    • /
    • v.20 no.2
    • /
    • pp.131-138
    • /
    • 1987
  • Experimental informations on the possible alternative resources of soil addition in sandy paddy soils were obtained by applying fertilizer N, P, and K to the top of 26 cm long columns containing the soil-ameliorator mixture and by determining the concentration and leaching loss of nutrients in percolated water and permeability. 1. Addition of red earth and compost to soils decreased pronouncedly the permeability. Relative magnitude of permeability was compost+slag+red earth > compost+red earth > compost > red earth > compost+slag > slag > non-added soil. 2. Concentration and leaching loss of $NH_4-N$ and $SiO_2$ were high by addition of compost-slag or red earth mixture to soils. The present of these nutrients in soils after experiment was, also, higher than that in non-added soil and in red earth to soils. 3. Those of K, Ca, and Mg were similar to $NH_4-N$ and $SiO_2$. Especially, leaching loss and present of K in soils by addition of compost to soils were higher dramatically than those of non-added soil and of red earth to soils. 4. Those of $Fe^{{+}{+}}$ in non-added soil were much higher than those by addition of compost and slag to soils. These values were the highest in 12 days after submergence, while these of $Mn^{{+}{+}}$ the lowest. 5. Concentration of $NH_4-N$ was high by addition of compost to soils, while the present of it in soils after experiment was tended to be contrary.

  • PDF

Fabrication of Hierarchical Nanostructures Using Vacuum Cluster System

  • Lee, Jun-Young;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.08a
    • /
    • pp.389-390
    • /
    • 2012
  • In this study, we fabricate a superhydrophobic surface made of hierarchical nanostructures that combine wax crystalline structure with moth-eye structure using vacuum cluster system and measure their hydrophobicity and durability. Since the lotus effect was found, much work has been done on studying self-cleaning surface for decades. The surface of lotus leaf consists of multi-level layers of micro scale papillose epidermal cells and epicuticular wax crystalloids [1]. This hierarchical structure has superhydrophobic property because the sufficiently rough surface allows air pockets to form easily below the liquid, the so-called Cassie state, so that the relatively small area of water/solid interface makes the energetic cost associated with corresponding water/air interfaces smaller than the energy gained [2]. Various nanostructures have been reported for fabricating the self-cleaning surface but in general, they have the problem of low durability. More than two nanostructures on a surface can be integrated together to increase hydrophobicity and durability of the surface as in the lotus leaf [3,5]. As one of the bio-inspired nanostructures, we introduce a hierarchical nanostructure fabricated with a high vacuum cluster system. A hierarchical nanostructure is a combination of moth-eye structure with an average pitch of 300 nm and height of 700 nm, and the wax crystalline structure with an average width and height of 200 nm. The moth-eye structure is fabricated with deep reactive ion etching (DRIE) process. $SiO_2$ layer is initially deposited on a glass substrate using PECVD in the cluster system. Then, Au seed layer is deposited for a few second using DC sputtering process to provide stochastic mask for etching the underlying $SiO_2$ layer with ICP-RIE so that moth-eye structure can be fabricated. Additionally, n-hexatriacontane paraffin wax ($C_{36}H_{74}$) is deposited on the moth-eye structure in a thermal evaporator and self-recrystallized at $40^{\circ}C$ for 4h [4]. All of steps are conducted utilizing vacuum cluster system to minimize the contamination. The water contact angles are measured by tensiometer. The morphology of the surface is characterized using SEM and AFM and the reflectance is measured by spectrophotometer.

  • PDF

a Study on the Optimal Location Evaluation of Airport Terminal Facilities combinded the Accessibility Theory and Spatial Analysis Model of GIS in Seoul Metropolitan Area (접근성이론과 GIS공간분석기법의 접목을 통한 도시시설의 최적입지 평가방법 연구 - 수도권 도심공항터미널 입지후보지 평가를 중심으로 -)

  • Kim, Hwang-Bae;Kim, Si-Gon
    • 한국공간정보시스템학회:학술대회논문집
    • /
    • 2000.06a
    • /
    • pp.189-201
    • /
    • 2000
  • 접근성이란 특정 목적을 가진 통행자가 한 지점에서 다른 지점으로 얼마나 쉽게 갈 수 있는가 를 나타내는 척도를 말한다. 따라서 접근성은 주로 공간적인 거리나 시간이 가장 중요한 요인으로 작용하며 최근에는 공간적 거리보다는 접근시간이 더 중요한 접근성 척도로 사용되고 있다. 본 연구는 GIS공간분석기법과 접근성이론을 접목하여 도시시설의 적정후보지 평가방법을 정립한 후 현재 검토되고 있는 수도권 도심공항터미널 입지 후보지 중 어떤 후보지가 이용들의 총통행시간을 최소화하는 후보 지인가에 대해 평가해보았다. 평가 결과 다음과 같은 사실을 밝힐 수 있었다. 첫째, 수도권 전체로 볼 때 평균접근시간이 가장 양호한 후보지는 쌍문터미널(현 간이 도심공항터미널)이고, 2위는 현 삼성동 도심공항터미널과 강남고속터미널, 3위는 동서울터미널과 남서울터미널 순으로 나타났다. 둘째, 수도권전체 이용자들의 총통행시간을 최소로 하는 도심공항터미널 후보지는 접근성이 가장 양호한 쌍문동터미널이 아니라 현 서울역이 1위이고, 2위는 강남고속 터미널, 3위는 용산 역으로 나타났다. 셋째, 터미널 후보지간의 가중평균접근 시간은 도심인 서울시내에 입지한 후보지와 수도권 외곽에 입지 한 후보지간에 큰 차이가 없으나 총 이용자 접근시간은 서울시에 입지한 후보지보다 외곽의 후보지가 훨씬 높게 나타나 뚜렷한 차별성을 보이고 있다. 넷째, 최적후보지 1,2,3순위 모두 서울도심과 강남도심에 입지한 지역들로 나타나 교통의 접근성 보다는 아직 인구밀집도가 주요 도시시설의 입지결정에 주요한 결정요인 되는 것으로 나타났다.해석 시스템을 구축할 예정이다. 추후에는 하수도 관망해석 컴포넌트와 하수도 업무 컴포넌트와의 통합부분에 대한 연구가 진행되어야 할 것이다.7.0로 하고 표준(標準) EDTA 용액(溶液)을 소량(少量)넣고 8N-KOH로 pH $12{\sim}13$으로 하고 N-N 희석분말(稀釋粉末)을 지시약(指示藥) 으로써 표준(標準) EDTA 용액(溶液)으로 적정(滴定)하여 Ca 치(値)를 얻었다. Ca와 Mg의 합계결정치(合計決定値)와 Ca 적정치(滴定値) 차(差)로 Mg 치(値)를 얻었다. 음(陰) ion 구분(區分)으로부터 상법(常法)에 의하여 $MgNH_4PO_4$의 침전(沈澱)을 만들어서 HCl에 녹키고 일정량(一定量)의 표준(標準) EDTA 용액(溶液)을 넣어 pH 7.0로 한다음 완충액(緩衝液)으로 pH 10으로 하고 BT 지시약(指示藥)을 써서 표준(標準) Mg $SO_4$용액(溶液)으로 적정(滴定)하여 P 치(値)를 얻었다. 본법(本法)으로 Na-phytate를 분석(分析)한 결과(結果) Na-phytate의 분자식(分子式)을 $C_6H_6O_{24}P_6Mg_4CaNa_2{\cdot}5H_2O$라고 하였을 때의 이론치(理論値)에 비(比)하여 P가 98.9% Cark 97.1%, Mg가 99.1%이고 통계처리(統計處理)한 결과분석치(結果分析値)와 이론치(理論値)는 잘 일치(一致)된다. 그러나 종래법(從來法)에 의(依)한 분석치(分析値)는 이론치(理論値)에 비(比)하여 P가 92.40%, Cark 86.80

  • PDF

High Voltage β-Ga2O3 Power Metal-Oxide-Semiconductor Field-Effect Transistors (고전압 β-산화갈륨(β-Ga2O3) 전력 MOSFETs)

  • Mun, Jae-Kyoung;Cho, Kyujun;Chang, Woojin;Lee, Hyungseok;Bae, Sungbum;Kim, Jeongjin;Sung, Hokun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.32 no.3
    • /
    • pp.201-206
    • /
    • 2019
  • This report constitutes the first demonstration in Korea of single-crystal lateral gallium oxide ($Ga_2O_3$) as a metal-oxide-semiconductor field-effect-transistor (MOSFET), with a breakdown voltage in excess of 480 V. A Si-doped channel layer was grown on a Fe-doped semi-insulating ${\beta}-Ga_2O_3$ (010) substrate by molecular beam epitaxy. The single-crystal substrate was grown by the edge-defined film-fed growth method and wafered to a size of $10{\times}15mm^2$. Although we fabricated several types of power devices using the same process, we only report the characterization of a finger-type MOSFET with a gate length ($L_g$) of $2{\mu}m$ and a gate-drain spacing ($L_{gd}$) of $5{\mu}m$. The MOSFET showed a favorable drain current modulation according to the gate voltage swing. A complete drain current pinch-off feature was also obtained for $V_{gs}<-6V$, and the three-terminal off-state breakdown voltage was over 482 V in a $L_{gd}=5{\mu}m$ device measured in Fluorinert ambient at $V_{gs}=-10V$. A low drain leakage current of 4.7 nA at the off-state led to a high on/off drain current ratio of approximately $5.3{\times}10^5$. These device characteristics indicate the promising potential of $Ga_2O_3$-based electrical devices for next-generation high-power device applications, such as electrical autonomous vehicles, railroads, photovoltaics, renewable energy, and industry.

SIMS Protein imaging with nanoparticle tagged antibody for simultaneous omic imaging

  • Lee, Seon-Yeong;Mun, Dae-Won
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2015.08a
    • /
    • pp.230.1-230.1
    • /
    • 2015
  • One of the major problems of biological ToF-SIMS imaging is the lack of protein and peptide imaging. Most of biological story telling is mianly based on proteins. The biological implication of lipid ToF-SIMS imaging would be much higher if protein imaging is provided together. Utilizing high secondary ion yields of metals, proteins can be ToF-SIMS imaged with nanoparticle tagged proteins. Nanoparticles such as Fe3O4, SiO2, PbS were used for imaing NeuN, MCH, Orexin A, ${\alpha}$ synucline, TH(Tryosine Hydroxylase) in mouse tissues with a spatial resolution of ${\sim}2{\mu}m$ using a TOF-SIMS. Lipids and neurotransmitters images obtained simultaneously with protein images were overlayed for more deeper understanding of neurobiology, which is not allowed by any other bioimaging technqiues. The protein images from TOF-SIMS were compared with confocal fluorescence microscopy and NanoSIMS images. A new sample preparation method for imaging single cell membranes in a tissue using the vibrotome technique to prepare a tissue slice without any fixation and freeze drying will be also presented briefly for Hippocampus and Hypothalamus tissues.

  • PDF