• 한국세라믹학회지
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• 제21권1호
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• pp.5-10
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• 1984

$eta$-Sialon synthesis was investigated via the simulataneous reduction and nitriding of Wando pyrophyllite. When Wando pyrophyllite-graphite-$Si_3N_4$ seed mixture was heated at 135$0^{\circ}C$ for as long as 10 hours in 80% $N_2$-20%$H_2$ atomsphere $eta$-$Si_3N_4$ solid solution was mainly formed together with a small amount of $\alpha$-$Si_3N_4$ The value z of the forming $Si_{6-x}Al_2O_2N{8-z}$ was decreased with heating time.

• 분석과학
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• 제6권2호
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• pp.207-215
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• 1993

소결첨가제($3Al_2O_3{\cdot}5Y_2O_3$, YAG)를 질화규소에 공침방법으로 첨가하여, 통상적인 기계적 혼합 방법으로 준비된 혼합분말에 대한 혼합균일성과 소결 및 기계적 특성을 조사, 비교하였다. 준비된 혼합분말들을 SIMS를 사용하여 분말 표면과 내부의 조성을 비교분석한 결과, 공침법을 사용할 경우 소결첨가제가 $Si_3N_4$ 표면에 피복된 상태로 존재하고 있음을 나타내어 기계적 혼합에 비해 우수한 균일혼합효과를 얻을 수 있음을 확인하였다. 공침법에 의한 균일혼합효과는 $Si_3N_4$ 분말소결체의 소결밀도 및 미세구조의 개선을 수반하여 기계적 강도의 향상을 이룰 수 있음을 확인하였다.

• 한국세라믹학회지
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• 제33권3호
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• pp.321-326
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• 1996

Thermal fatigue test and stress analysis of Si3N4 and metal swirl chamber were carried out to investigate the reliability of the swirl chambers. Conditions of the thermal fatigue test were severer than those in real engine and FEM was used to analize the stress distribution in the swirl chambers. Fatigue cracks of the maximum length 2.4 mm and deformation were occurred at the corner of the jet in metal swirl chamber but not observed in Si3N4 swirl chamber. Maximum tensile stress in Si3N4 swirl chamber calculated by FEM was 300 MPa.

• Bulletin of the Korean Chemical Society
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• 제22권2호
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• pp.159-163
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• 2001

Si3N4 powder has been analyzed by inductively coupled plasma atomic emission spectrometry (ICP-AES). The sample was dissolved by high-pressure acid digestion with HF, H2SO4 (1+1), and HNO3 mix ture. This technique is well suited for the impurity analysis of Si3N4 because the matrix interference is eliminated. A round-robin samples trace elements, such as Ca, W, Co, Al, Fe, Mg, and Na, were determined. For the direct analysis, slurry nebulization of 0.96 mm Si3N4 powder also has been studied by ICP-AES. Emission intensities of Fe were measured as ICP operational conditions were changed. Significant signal difference between slurry particles and aqueous solution was observed in the present experiment. Analytical results of slurry injection and high-pressure acid digestion were compared. For the use of aqueous standard solution for calibration, k-factor was determined to be 1.71 for further application.

• The Korean Journal of Ceramics
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• 제5권4호
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• pp.317-323
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• 1999

Si3N4-TiC composites have been known as electrically conductive ceramics. $Si_3N_4-TiC$ composites with 2 wt% $Al_2O_3$ and 4 wt% $Y_2O_3$ were hot pressed in $N_2$ environment. The mechanical properties including hardness, fracture toughness, and flexural strength and tribological properties were investigated as a function of TiC content. $Si_3N_4-40$ vol% TiC composite was hot pressed at $1,750^{\circ}C$, $1,800^{\circ}C$, and $1,850^{\circ}C$ for 1, 3 and 5 hours in $N_2$ gas. Mechanical and tribolgical properties depended on microstructures, which were controlled by hte TiC content, hot press temperature, and hot press holding time. However, mechanical properties and tribological behaviors were degraded by the chemical reaction between TiC and N. The chemically reacted products such as TiCN, SiC, and $SiO_2$ were detered by the X-ray diffraction analysis.

• The Korean Journal of Ceramics
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• 제4권4호
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• pp.377-381
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• 1998

Wear behaviors of unidirectionally oriented $Si_3N_{4w)/Si_3N_4$ composites, sintered at different temperatures with different alignments of whiskers, have been studied in parallel and perpendicular sliding directions with respect to the orientation of the whiskers by using a ball-on-disk reciprocating sliding apparatus. The results show that wear rate in parallel direction is much greater than that in perpendicular direction. With decreasing alignment of the whiskers, the wear rate decreases in parallel sliding direction and increases in perpendicular direction. With increasing sintering temperature, the wear rate increases obviously in both parallel and perpendicular directions.

• 한국세라믹학회지
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• 제28권2호
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• pp.130-140
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• 1991

The powders of the system Si3N4-Y2O3-AlN were prepared using Si(OC2H5)4 and YCl3.6H2O together with commercial AlN powder. $\alpha$-Si3N4 was prepared by the carbothermal reduction and nitridation of the hydrolyzed gel at 135$0^{\circ}C$ for 10h in N2 atmosphere. YCl3.6H2O was observed to be changed to Y2O3 during the reaction. $\alpha$-Sialon(X=0.2, 0.4, 0.6) ceramics were obtained by hot-pressing the Si3N4-Y2O3-AlN mixture at 178$0^{\circ}C$ for 1h under 30 MPa. The content of $\alpha$-Sialon increased with increasing metal solubility(x value) and $\alpha$-Sialon single phase was obtained at the metal solubility of 0.6. With increasing metal solubility, flexural strength, fracture toughness and thermal shock resistence were decreased, while the microhardness was increased. Large elongated $\beta$-Si3N4 grains were mainly observed at lower metal solubility. Mechanical prorerties of the sintered ceramics with X=0.2 were measured as follows : flexural strength ; 650 MPa, fracture toughness ; 3.63 MN/m3/2, hardness ; 14.7 GPa, thermal shock resistence temperature ; 58$0^{\circ}C$.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.130-130
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• 2018

산업 발전으로 특수합금들이 발달함에 따라 가공할 수 있는 새로운 절삭공구소재들이 개발되어지고 있다. 또한 공구소재보다 코팅개발이 상대적으로 더욱 효과적이기 때문에 코팅 기술 개발이 활발히 진행되고 있다. 일본에서는 새로운 코팅층 물질 개발보다는 기존의 코팅물질을 조합하거나 개량하여 성능을 향상시키는 추세이다. TiAlSiN 박막은 스퍼터링과 음극 아크 소스를 이용한 hybrid 공정을 이용하여 코팅 후 특성을 평가하였다. Ti-50at.%Al의 조성을 갖는 TiAl 합금 타겟은 음극 아크 소스를 이용하여 코팅하였다. 공정 가스는 Ar과 N2의 혼합 가스를 사용하였으며 공정 압력은 $1.0{\times}10^{-2}Torr$이었다. 음극 아크 소스에 인가된 전류는 70 A이었다. TiAlSiN 박막의 Si 함량을 조절하기 위해서 Si은 스퍼터링으로 코팅하였으며 스퍼터링 소스에 인가되는 전력의 세기를 0.29 kW ~ 1.05 kW까지 변화시켰다. 코팅 공정에 사용된 Si 타겟의 순도는 4N이다. TiAlSiN 박막의 Si 함량은 스퍼터링 전력에 따라 3.4 ~ 14.4at%까지 변화하는 것을 확인하였다. TiAlSiN 코팅층의 경도는 초미소 경도계를 이용하여 측정하였으며, Si 함량이 증가하면 TiAlSiN 박막의 경도도 증가하는 것을 확인할 수 있다. TiAlSiN 박막의 Si 함량이 9.2at.%일 때 3000 Hv 이상의 경도를 보였다. TiAlSiN 코팅층의 Si 함량이 14.4at%로 높아지면 경도가 낮아지는 현상을 보였다. TiAlSiN 박막의 Si 함량이 증가하면 내산화성이 향상되는 현상을 확인할 수 있었다.

• 한국광학회지
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• 제30권1호
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• pp.15-22
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• 2019

소산파 기반 집적광학 바이오센서에 적합한 $Si_3N_4$ 립-광도파로 구조에 대한 해석적 분석을 통해서 단일모드 도파조건을 도출하였다. 두-모드 간섭현상을 이용하는 집적광학 바이오센서 구조를 제시하고, 단일모드와 두-모드(감지영역)에 해당되는 립-광도파로 제원인 폭, 립 및 코어 두께 각각에 대해서 $3{\mu}m$, 2 nm, 150 nm와 $3{\mu}m$, 20 nm, 340 nm를 제안하였으며, FMM 전산해석을 통해서 감지영역의 두-모드들에 대한 광학적 특성들을 검토하였다.

• 한국전기전자재료학회논문지
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• 제22권5호
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• pp.386-389
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• 2009

The electrical characteristics and annealing effects of tunneling dielectrics stacked with $SiO_2$ and $Si_{3}N_{4}$ were investigated. I-V characteristics of band gap engineered tunneling gate stacks consisted of $Si_{3}N_{4}/SiO_2/Si_{3}N_{4}$ (NON), $SiO_2/Si_{3}N_{4}/SiO_2$ (ONO) dielectrics were evaluated and compared with $SiO_2$ single layer using the MOS (metal-oxide-semiconductor) capacitor structure. The leakage currents of engineered tunneling barriers (ONO, NON stacks) are lower than that of the conventional $SiO_2$ single layer at low electrical field. Meanwhile, the engineered tunneling barriers have larger tunneling current at high electrical field. Furthermore, the increased tunneling current through engineered tunneling barriers related to high speed operation can be achieved by annealing processes.