• Title/Summary/Keyword: $SiO_2/Si$ interface

Search Result 593, Processing Time 0.027 seconds

Study on Improvement of Heat Dissipation Characteristics of TIM Material Using Radiant Energy (복사에너지를 이용한 TIM소재의 방열 특성 향상을 위한 연구)

  • Hwang, Myungwon;Kim, Dohyung;Jung, Uoo-Chang;Chung, Wonsub
    • Journal of the Korean institute of surface engineering
    • /
    • v.52 no.2
    • /
    • pp.58-61
    • /
    • 2019
  • The aim of this study is to quantitatively demonstrate the possibility of heat transfer by thermal radiation by comparing heat transfer by conventional heat transfer and radiation by radiation. 1) The heat transfer was measured by using filler of TIM material with low thermal conductivity (CuS). As a result, heat transfer was easier than ceramic with high thermal conductivity ($Al_2O_3$ and $Si_3N_4$). 2) The reason for this is thought to be that the infrared wave due to radiation of the air diaphragm has moved easily. 3) From the above results, the heat dissipation of the TIM material indicates the possibility of heat transfer by thermal radiation.

Magnetoresistance Characteristics of Magnetic Tunnel Junctions Consisting of Amorphous CoNbZr Alloys for Under and Capping Layers

  • Chun, Byong Sun;Lee, Seong-Rae;Kim, Young Keun
    • Journal of Magnetics
    • /
    • v.9 no.1
    • /
    • pp.13-16
    • /
    • 2004
  • Magnetic tunnel junctions (MTJs) comprising amorphous CoNbZr layers have been investigated. $Co_{85.5}Nb_8Zr_{6.5}$(in at. %) layers were employed to substitute the traditionally used Ta layers with an emphasis given on under-standing underlayer effect. The typical junction structure was $SiO_2/CoNbZr$ or Ta 2/CoFe 8/IrMn 7.5/CoFe 3/Al 1.6 + oxidation/CoFe 3/CoNbZr or Ta 2 (nm). For both as-deposited state and after annealing, the CoNbZr-underlayered structure showed superior surface smoothness up to the tunnel barrier than Ta-underlayerd one (rms roughness of 0.16 vs. 0.34 nm). CoNbZr-based MTJs was proven beneficial for increasing thermal stability and increasing $V_h$ (the bias voltage where MR ratio becomes half) characteristics than Ta-based MTJs. This is because the CoNbZr-based junctions offer smoother interface structure than the Ta-based one.

Low Temperature Thermal Oxidation using ECR Oxygen Plasma (ECR 산소 플라즈마를 이용한 저온 열산화)

  • 이정열;강석원;이진우;한철희;김충기
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.32A no.3
    • /
    • pp.68-77
    • /
    • 1995
  • Characteristics of electron cyclotron resonance (ECR) plasma thermal oxide grown at low-temperature have been investigated. The effects of several process parameters such as substrate temperature, microwave power, gas flow rate, and process pressure on the growth rate of the oxide have been also investigated. It was found that the plasma density, reactive ion species, is strongly related to the growth rate of ECR plasma oxied. It was also found that the plasma density increases with microwave power while it decreases with decreasing O2 flow rate. The oxidation time dependence of the oxide thichness showed parabolic characteristics. Considering ECR plasma thermal oxidation at low-temperature, the linear as well as parabolic rate constants calculated from fitting data by using the Deal-Grove model was very large in comparison with conventional thermal oxidation. The ECR plasma oxide grown on (100) crystalline-Si wafer exhibited good electrical characteristics which are comparable to those of thermal oxide: fixed oxide charge(N$_{ff}$)= 7${\times}10^{10}cm^{-2}$, interface state density(N$_{it}$)=4${\times}10^[10}cm^{-2}eV^{-1}$, and breakdown field > 8MV/cm.

  • PDF

Microstructural, Mechanical, and Durability Related Similarities in Concretes Based on OPC and Alkali-Activated Slag Binders

  • Vance, Kirk;Aguayo, Matthew;Dakhane, Akash;Ravikumar, Deepak;Jain, Jitendra;Neithalath, Narayanan
    • International Journal of Concrete Structures and Materials
    • /
    • v.8 no.4
    • /
    • pp.289-299
    • /
    • 2014
  • Alkali-activated slag concretes are being extensively researched because of its potential sustainability-related benefits. For such concretes to be implemented in large scale concrete applications such as infrastructural and building elements, it is essential to understand its early and long-term performance characteristics vis-a'-vis conventional ordinary portland cement (OPC) based concretes. This paper presents a comprehensive study of the property and performance features including early-age isothermal calorimetric response, compressive strength development with time, microstructural features such as the pore volume and representative pore size, and accelerated chloride transport resistance of OPC and alkali-activated binder systems. Slag mixtures activated using sodium silicate solution ($SiO_2$-to-$Na_2O$ ratio or $M_s$ of 1-2) to provide a total alkalinity of 0.05 ($Na_2O$-to-binder ratio) are compared with OPC mixtures with and without partial cement replacement with Class F fly ash (20 % by mass) or silica fume (6 % by mass). Major similarities are noted between these binder systems for: (1) calorimetric response with respect to the presence of features even though the locations and peaks vary based on $M_s$, (2) compressive strength and its development, (3) total porosity and pore size, and (4) rapid chloride permeability and non-steady state migration coefficients. Moreover, electrical impedance based circuit models are used to bring out the microstructural features (resistance of the connected pores, and capacitances of the solid phase and pore-solid interface) that are similar in conventional OPC and alkali-activated slag concretes. This study thus demonstrates that performance-equivalent alkali-activated slag systems that are more sustainable from energy and environmental standpoints can be proportioned.

Study on the Electrical Characteristics of Solution-processed ZrInZnO Thin-film Transistors (액상공정으로 제작된 ZrInZnO 박막 트랜지스터의 전기적 특성에 관한 연구)

  • Jeong, Tae-Hoon;Kim, Si-Joon;Yoon, Doo-Hyun;Jeong, Woong-Hee;Kim, Dong-Lim;Lim, Hyun-Soo;Kim, Hyun-Jae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.24 no.6
    • /
    • pp.458-462
    • /
    • 2011
  • Soution-processed ZrInZnO (ZIZO) thin-film transistors (TFTs) with varying Zr content were fabricated. The ZIZO TFT (Zr=20 at. %/Zn) has an optimal performance with the saturation field effect mobility of 0.77 $cm^2/Vs$, the threshold voltage (Vth) of 2.1 V, the on/off ratio of $4.95{\times}10^6$, and subthreshold swing (S.S) of 0.73 V/decade. Using this optimized ZIZO TFT, the positive and negative gate bias stress according to annealing temperature was also investigated. While the Vth shifts dramatically after 1,000 s of both gate bias stresses, variations in the S.S are negligible. It suggests that electrons or holes are tem porarily trapped in the gate insulator, the semiconductor, or the interface between both layers.

Characteristics of Silicon Oxide Films Grown by Rapid Thermal Oxidation (급속일산화법에 의한 실리콘 산화막의 특성)

  • 이귀연;양두영;이재용
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.28A no.12
    • /
    • pp.59-64
    • /
    • 1991
  • Thin (25-103$\AA$) SiO$_2$ films are grown using the rapid thermal oxidation processing at temperatures of 105$0^{\circ}C$-115$0^{\circ}C$ for 5-30 sec, in order to investigate the characteristics of ultra thin oxide. For measuring the thickness of oxide TEM, ellipsometry, and C-V method which is taken in the condition of small surface band bending are used and compared. When neglecting the small deviation affected by both interface state and moisture charge effect, those three methods described above give similar results. In order to examine the effect of rapid thermal annealing, part of samples are annealed in N$_2$ ambient. MOS capacitors are fabricated and the characteristics of I-V and C-V are measured. Measurements show that the activation energy of initial thickness of oxide grown during the ramp-up time is of 1.125eV and the activation energy of the oxidation rate is of 0.98eV. As oxidation temperature is increased, dielectric breakdown field E$_{BD}$ is decreased due to the increase of fixed charge density N$_f$ However, E$_{BD}$ is shown to be decreased as increasing the thickness of oxide. The increase of N$_f$ in the early stage of thermal annealing results in the decrease of E$_{BD}$.

  • PDF

Microstructure and Thermal Stability of High Permittivity Ta2O5 (Ta2O5 고유전박막의 미세조직과 열적안정성)

  • Min, Seok-Hong;Jung, Byung-Gil;Choi, Jae-Ho;Kim, Byoung-Sung;Kim, Dae-Yong;Shin, Dong-Woo;Cho, Sung-Lae;Kim, Ki-Bum
    • Korean Journal of Materials Research
    • /
    • v.12 no.10
    • /
    • pp.814-819
    • /
    • 2002
  • TiN and TaN films as electrode materials of reactive sputtered $Ta_2$$O_{5}$ were prepared by sputtering to compare their thermal stabilities with $Ta_2$$O_{5}$ The microstructural change of $Ta_2$$O_{5}$ films with annealing was also investigated. As- deposited $Ta_2$$O_{5}$ film on $SiO_2$ was amorphous and annealing of 80$0^{\circ}C$ for 30 min made it transform to $\beta$-Ta$_2$O$_{5}$ crystalline which contains amorphous particles with the size of a few nm. Crystallization temperature of Ta$_2$Ta_2$$O_{5}$ on TaN is higher than that on TiN electrode. The interface between TaN and Ta$_2$O$_{5}$ maintained stably even after vacuum annealing up to $800^{\circ}C$ for 1 hr, but TiN interacted with $Ta_2$$_O{5}$ and so interdiffusion between TiN and $Ta_2$$O_{5}$ occurred by vacuum annealing of 80$0^{\circ}C$ for 1 hr. It indicates that TaN is thermally more stable with $Ta_2$$O_{5}$ than TiN.N.

Fabrication and Characteristics of Infrared Photodiode Using Insb Wafer with p-i-n Structure (p-i-n 구조의 InSb 웨이퍼를 이용한 적외선 광다이오드의 제조 및 그 특성)

  • Cho, Jun-Young;Kim, Jong-Seok;Son, Seung-Hyun;Lee, Jong-Hyun;Choi, Sie-Young
    • Journal of Sensor Science and Technology
    • /
    • v.8 no.3
    • /
    • pp.239-246
    • /
    • 1999
  • A highly sensitive photovoltaic infrared photodiode was fabricated for detecting infrared light in $3{\sim}5\;{\mu}m$ wavelength range on InSb wafer with p-i-n structure grown by MOCVD. Silicon dioxide($SiO_2$) insulating films for the junction interface and surface of photodiode were prepared using RPCVD because InSb has low melting point and evaporation temperature. After formation of In ohmic contacts by thermal evaporation, the electrical properties of the photodiode were characterized in dark state at 77K. A product of zero-bias resistance and area($R_0A$) showed $1.56{\times}10^6\;{\Omega}{\cdot}cm^2$ that satisfied BLIP(background limited infrared photodetector) condition. When the photodiode was tested under infrared light, the normalized detectivity of about $10^{11}\;cm{\cdot}Hz^{1/2}{\cdot}W^{-1}$ was obtained. we successfully fabricated a unit cell with InSb IR array with good quantum efficiency and high detectivity.

  • PDF

Analysis of Multi-layered Thin Film Using ATR FT-IR and pyro-GC/MS (ATR FT-IR과 pyro-GC/MS를 이용한 다층박막필름의 분석)

  • Park, Sung Il;Lee, Jung-Hyun;Lee, Myung Cheon
    • Journal of Adhesion and Interface
    • /
    • v.20 no.3
    • /
    • pp.102-109
    • /
    • 2019
  • The material constitution of multi-layered thin film coated on the PET base film was analyzed using ATR FT-IR and pyro GC/MS combination. The cross section of the film was acquired by cracking the film after dipping in liquid nitrogen and was observed using optical microscope. Total thickness of the coated film was $70{\mu}m$ and three layers were observed. Since each layers were too thin to analyze directly except the surface layer, analyzable area of each layers were exposed by using a proper solvent and were investigated using ATR FT-IR and pyro GC/MS. Results shows that three layers were commonly consisted of urethane-acrylate copolymers. Also, inorganic and/or metal inclusions detected by XPS and SEM-EDAX were exhibited by nano size $SiO_2$ particles in layer(1) and aluminum flakes in layer(2).

A Novel High-speed CMOS Level-Up/Down Shifter Design for Dynamic-Voltage/Frequency-Scaling Algorithm (Dynamic-Voltage/Frequency-Scaling 알고리즘에서의 다중 인가 전압 조절 시스템 용 High-speed CMOS Level-Up/Down Shifter)

  • Lim Ji-Hoon;Ha Jong-Chan;Wee Jae-Kyung;Moon Gyu
    • Journal of the Institute of Electronics Engineers of Korea SD
    • /
    • v.43 no.6 s.348
    • /
    • pp.9-17
    • /
    • 2006
  • We proposed a new High-speed CMOS Level Up/Down Shifter circuits that can be used with Dynamic Voltage and Frequency Scaling(DVFS) algorithm, for low power system in the SoC(System-on-Chip). This circuit used to interface between the other voltage levels in each CMOS circuit boundary, or between multiple core voltage levels in a system bus. Proposed circuit have advantage that decrease speed attenuation and duty ratio distortion problems for interface. The level up/down shifter of the proposed circuit designed that operated from multi core voltages$(0.6\sim1.6V)$ to used voltage level for each IP at the 500MHz input frequency The proposed circuit supports level up shifting from the input voltage levels, that are standard I/O voltages 1.8V, 2.5V, 3.3V, to multiple core voltage levels in between of $0.6V\sim1.6V$, that are used internally in the system. And level down shifter reverse operated at 1Ghz input frequency for same condition. Simulations results are shown to verify the proposed function by Hspice simulation, with $0.6V\sim1.6V$ CMOS Process, $0.13{\mu}m$ IBM CMOS Process and $0.65{\mu}m$ CMOS model parameters. Moreover, it is researched delay time, power dissipation and duty ration distortion of the output voltage witch is proportional to the operating frequency for the proposed circuit.