• Title/Summary/Keyword: $SiO_2$ coating

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Effects of Annealing Conditions on the Properties of Bi1-xLaxTi3O12 Thin Films (열처리 조건이 Bi1-xLaxTi3O12 (x=0.75) 박막의 특성에 미치는 효과)

  • Park Moon Heum;Kim Sang Su;Gang Min Ju;Ha Tae Gon
    • Korean Journal of Materials Research
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    • v.14 no.10
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    • pp.701-706
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    • 2004
  • Bismuth layered structure ferroelectric thin films, La-substituted $Bi_{4}Ti_{3}O_{12}$ ($Bi_{1-x}La_{x}Ti_{3}O_{12}$, x=0.75, BLT) were prepared on the $Pt(111)/Ti/SiO_2/Si(100)$ substrates by a sol-gel spin coating process. The thin films were annealed in various conditions, i.e., oxygen, nitrogen and vacuum atmospheres for various annealing time. We investigated the annealing condition effects on the grain orientation and ferroelectric properties. The measured XRD patterns revealed that the BLT thin films showed only $Bi_{4}Ti_{3}O_{12}$-type phase with random orientation. $La^{3+}$ ion substitution for $Bi^{3+}$ ion in perovskite layers of $Bi_{4}Ti_{3}O_{12}$ decreased the degree of c-axis orientation and increased the remanent polarization ($2P_{r}$). The remanent polarization ($2P_{r}$) and the coercive field ($2E_{c}$) of the BLT thin film annealed at $650^{\circ}C$ for 5 min in oxygen atmosphere were $87{\mu}C/cm^2$ and 182 kV/cm, respectively, at an applied electric field of 240 kV/cm. For all of the BLT thin films annealed in various conditions, the fatigue resistance was shown. The improvement of ferroelectric properties with La substitution in $Bi_{4}Ti_{3}O_{12}$ could be attributed to the changes in space charge densities and grain orientation in the thin film.

Dielectric and Structural of PST Thin Films with annealing temperature prepared by Sol-gel method for Phase shifters (Phase shifters 응용을 위한 Sol-gel 법으로 제작된 $(Pb_{0.5},Sr_{0.5})TiO_3$ 박막의 열처리 온도에 따른 구조 및 유전 특성)

  • Hwang, Jln-Ho;Kim, Kyoung-Tae;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.809-812
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    • 2004
  • (Pb,Sr)TiO3 (PST) thin films were fabricated by using the alkoxide-based sol-gel method. The PST stock solution was made and then spin-coated onto a PUTi/SiO2/Si substrate. The coating and drying procedures were repeated several times, and the PST thin films were sintered at 450-650 C for 1 h. All PST thin films showed dense and homogeneous structures without the presence of any rosette structure. The thicknesses of the PST thin films were approximately 200 nm. The dielectric constant and the dielectric loss of the PST thin films sintered at 550 C were about 404 and 0.0023, respectively. The leakage current density of the PST thin film sintered at 550 C was 3.13 x 10-8 A/cm2 at 1 V.

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Effect of Heat-treatment Conditions on Orientation, Structures and Resistances of LaNiO3 Thin Films by Sol-gel process (열처리조건이 LaNiO3 졸-겔 박막의 배향성과 구조 및 저항성에 미치는 영향)

  • 박민석;김대영;서병준;김강언;정수태
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.8
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    • pp.859-865
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    • 2004
  • LaNiO$_3$(LNO) thin films on (100) Si substrates are prepared by sol-gel method on heat treatment conditions, such as heat transfer direction, pyrolysis and annealing process, and annealing temperatures and times. The effect of heat treatment conditions on the (100) orientations, structures and resistances of the thin films are investigated by XRD, SEM(FESEM), and a lout probe method. Highly (100) orientation factor(0.97), a pseudocubic crystalline structure with a dense and uniform microstructure could be formed by the following conditions: 1) the heat transfer direction is from Si substrate to LNO, 2) the pyrolysis and annealing process are alternated, 3) the annealing temperature is $650^{\circ}C$ and 4) the annealing times is 3 minutes. The sheet resistance of thin films decreased with increasing of a annealing temperature and time, and a number of coating.

Fabrication and Characterization of Silica Coated Fe3O4 Nanoparticles in Reverse Micro Emulsion (마이크로에멀젼법을 이용하여 실리카 코팅된 나노 Fe3O4 분말의 합성과 분석연구)

  • Yu, Ri;Kim, Yoo-Jin;Pee, Jae-Hwan;Hwang, Kwang-Taek;Yang, Hee-Seung;Kim, Kyung-Ja
    • Journal of the Korean Ceramic Society
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    • v.47 no.2
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    • pp.113-116
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    • 2010
  • The silica coated $Fe_3O_4$ nanoparticles have been synthesized using a micro-emulsion method. The $Fe_3O_4$ nanoparticles with the sizes 6 nm in diameter were synthesized by thermal decomposition method. Hydrophobic $Fe_3O_4$ nanoparticles were coated silica using surfactant and tetraethyl orthosilicated (TEOS) as a $SiO_2$ precursor. Shell thickness of silica coated $Fe_3O_4$ can be controlled (11~20 nm) through our synthetic conditions. The $Fe_3O_4$ and silica coated $Fe_3O_4$ nano powders were characterized by transmission electron microscopy (TEM), x-ray diffraction (XRD) and vortex magnetic separation (VMS).

Self-patterning Technique of Photosensitive La0.5Sr0.5CoO3 Electrode on Ferroelectric Sr0.9Bi2.1Ta2O9 Thin Films

  • Lim, Jong-Chun;Lim, Tae-Young;Auh, Keun-Ho;Park, Won-Kyu;Kim, Byong-Ho
    • Journal of the Korean Ceramic Society
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    • v.41 no.1
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    • pp.13-18
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    • 2004
  • $La_{0.5}Sr_{0.5}CoO_3$ (LSCO) electrodes were prepared on ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$(SBT) thin films by spin coating method using photosensitive sol-gel solution. Self-patterning technique of photosensitive sol-gel solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. Lanthanum(III) 2-methoxyethoxide, Stronitium diethoxide. Cobalu(II)2-methoxyethoxide were used as starting materials for LSCO electrode. UV irradiation on LSCO thin films lead to decrease solubility by M-O-M bond formation and the solubility difference allows us to obtain self-patternine. There was little composition change of the LSCO thin films between before leaching and after leaching in 2-methoxyethanol. The lowest resistivity of LSCO thin films deposited on $SiO_2$/Si substrate was $1.1{\times}10^{-2}{\Omega}cm$ when the thin film was ennealed at $740^{\circ}C$. The values of Pr/Ps and 2Pr of LSCO/SBT/Pt capacitor on the applied voltage of 5V were 0.51, 8.89 ${\mu}C/cm^2$, respectively.

Nanotexturing and Post-Etching for Diamond Wire Sawn Multicrystalline Silicon Solar Cell (다이아몬드 와이어에 의해 절단된 다결정 실리콘 태양전지의 나노텍스쳐링 및 후속 식각 연구)

  • Kim, Myeong-Hyun;Song, Jae-Won;Nam, Yoon-Ho;Kim, Dong-Hyung;Yu, Si-Young;Moon, Hwan-Gyun;Yoo, Bong-Young;Lee, Jung-Ho
    • Journal of the Korean institute of surface engineering
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    • v.49 no.3
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    • pp.301-306
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    • 2016
  • The effects of nanotexturing and post-etching on the reflection and quantum efficiency properties of diamond wire sawn (DWS) multicrystalline silicon (mc-Si) solar cell have been investigated. The chemical solutions, which are acidic etching solution (HF-$HNO_3$), metal assisted chemical etching (MAC etch) solutions ($AgNO_3$-HF-DI, HF-$H_2O_2$-DI) and post-etching solution (diluted KOH at $80^{\circ}C$), were used for micro- and nano-texturing at the surface of diamond wire sawn (DWS) mc-Si wafer. Experiments were performed with various post-etching time conditions in order to determine the optimized etching condition for solar cell. The reflectance of mc-Si wafer texturing with acidic etching solution showed a very high reflectance value of about 30% (w/o anti-reflection coating), which indicates the insufficient light absorption for solar cell. The formation of nano-texture on the surface of mc-Si contributed to the enhancement of light absorption. Also, post-etching time condition of 240 s was found adequate to the nano-texturing of mc-Si due to its high external quantum efficiency of about 30% at short wavelengths and high short circuit current density ($J_{sc}$) of $35.4mA/cm^2$.

Doped Sol-gel TiO2 Films for Biological Applications

  • Gartner, M.;Trapalis, C.;Todorova, N.;Giannakopoulou, T.;Dobrescu, G.;Anastasescu, M.;Osiceanu, P.;Ghita, A.;Enache, M.;Dumitru, L.;Stoica, T.;Zaharescu, M.;Bae, J.Y.;Suh, S.H.
    • Bulletin of the Korean Chemical Society
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    • v.29 no.5
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    • pp.1038-1042
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    • 2008
  • Mono and multilayer TiO2(Fe, $PEG_{600}$) films were deposited by the dip-coating on $SiO_2$/glass substrate using sol-gel method. In an attempt to improve the antibacterial properties of doped $TiO_2$ films, the influence of the iron oxides and polyethilenglycol ($PEG_{600}$) on the morphological, optical, surface chemical composition and biological properties of nanostructured layers was studied. Complementary measurements were performed including Spectroscopic Ellipsometry (SE), Scanning Electron Microscopy (SEM) coupled with the fractal analysis, X-Ray Photoelectron Spectroscopy (XPS) and antibacterial tests. It was found that different concentrations of Fe and $PEG_{600}$ added to coating solution strongly influence the porosity and morphology at nanometric scale related to fractal behaviour and the elemental and chemical states of the surfaces as well. The thermal treatment under oxidative atmosphere leads to films densification and oxides phase stabilization. The antibacterial activity of coatings against Escherichia Coli bacteria was examined by specific antibacterial tests.

Effect of process conditions on crystal structure of Al PEO coating. I. Unipolar pulse and coating time (알루미늄 PEO 코팅의 결정상에 미치는 공정 조건에 대한 연구 I. Unipolar 펄스와 코팅시간)

  • Kim, Bae-Yeon;Ham, Jae-Ho;Lee, Deuk Yong;Kim, Yong-Nam;Jeon, Min-Seok;Kim, Kiyoon;Choi, Ji-Won;Kim, Sung Youp;Kim, Kwang Youp
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.2
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    • pp.59-64
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    • 2014
  • Crystallographic phases of Plasma electrolytic oxidized Al alloy, A1050, were investigated. The electrolyte of PEO was $Na_2Si_2O_3$ and KOH. Unipolar pulse, $ 2000{\mu}sec$ with $400{\mu}sec+420V$ impulse, were applied for 2 min, 5 min, 15 min, and 30 min. ${\gamma}-Alumina$, as well as ${\alpha}-alumina$, was main crystal phase. ${\gamma}-Alumina$ was appeared in the beginning, then the amount of ${\alpha}-alumina$ was increased with time, but the amount of ${\gamma}-Alumina$ remained constant without any increasing. So, it is concluded that plasma gas produce ${\gamma}-Alumina$ at the first, and then ${\gamma}-Alumina$ transform ${\alpha}-alumina$ finally. During the transformation, high temperature of micro plasma gives transformation energy.

반사방지 VF2-TrFE 박막을 이용한 태양전지 특성

  • Jeong, Sang-Hyeon;Yeon, Je-Min;Min, Gwan-Hong;;Yu, Jeong-Jae;Kim, Gwang-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.315.2-315.2
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    • 2013
  • 본 논문에서는 반사방지 VF2-TrFE 박막을 이용한 MIS Solar cell을 제작하여 전기적, 구조적 특성을 평가하였다. ALD법을 이용하여 고유전율의 화학적 안정성이 우수한 산화알루미늄을 절연층으로 한 Al/Al2O3/Si(100)을 제작하였으며 cell의 효율을 향상시키기 위해 spin coating법을 이용하여 VF2-TrFE 반사방지막을 증착시켰다. 제작된 반사방지 VF2-TrFE 박막 MIS solar cell은 MIS 커패시터의 전류밀도-전계 특성, 커패시턴스-전압 특성과 반사방지막 열처리 조건에 따른 태양전지 효율을 Solar simulator 및 Quantum Efficiency system으로 측정하였다.

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A Study on Microstructure and Tribological Behavior of Superhard Ti-Al-Si-N Nanocomposite Coatings (초고경도 Ti-Al-Si-N 나노복합체 코팅막의 미세구조 및 트라이볼로지 거동에 관한 연구)

  • Heo, Sung-Bo;Kim, Wang Ryeol
    • Journal of the Korean institute of surface engineering
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    • v.54 no.5
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    • pp.230-237
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    • 2021
  • In this study, the influence of silicon contents on the microstructure, mechanical and tribological properties of Ti-Al-Si-N coatings were systematically investigated for application of cutting tools. The composition of the Ti-Al-Si-N coatings were controlled by different combinations of TiAl2 and Ti4Si composite target powers using an arc ion plating technique in a reactive gas mixture of high purity Ar and N2 during depositions. Ti-Al-Si-N films were nanocomposite consisting of nanosized (Ti,Al,Si)N crystallites embedded in an amorphous Si3N4/SiO2 matrix. The instrumental analyses revealed that the synthesized Ti-Al-Si-N film with Si content of 5.63 at.% was a nanocomposites consisting of nano-sized crystallites (5-7 nm in dia.) and a three dimensional thin layer of amorphous Si3N4 phase. The hardness of the Ti-Al-Si-N coatings also exhibited the maximum hardness value of about 47 GPa at a silicon content of ~5.63 at.% due to the microstructural change to a nanocomposite as well as the solid-solution hardening. The coating has a low friction coefficient of 0.55 at room temperature against an Inconel alloy ball. These excellent mechanical and tribological properties of the Ti-Al-Si-N coatings could help to improve the performance of machining and cutting tool applications.