Microstructure and Ferroelectric Properties of PZT Thin Films Deposited on various Interlayers by R.F. Magnetron Sputtering (R.F. Magnetron Sputtering으로 다양한 Interlayer 층위에 형성시킨 PZT 박막의 미세구조와 강유전 특성)
-
- Journal of the Korean Ceramic Society
- /
- v.39 no.8
- /
- pp.742-749
- /
- 2002