• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.8
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• pp.658-662
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• 2001

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the SOI(Si-on-insulator) membrane and trench structures, in which MGO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$ layer. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 250 nV at N$_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time($\tau$:63%) was about 42 msec when input flow was step-input. The results indicated that micro-flowsensors with the SOI membrane and trench structures have properties of a high-resolution and ow consume power.

• Journal of the Korean Ceramic Society
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• v.37 no.9
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• pp.871-878
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• 2000

본 연구는 3mol% Pb(Sb$_{1}$2/Nb$_{1}$2/)O$_3$가 첨가된 상경계 영역의 Pb(Zr,Ti)O$_3$(PSN-PZT) 세라믹스에 대하여 RT66A와 광섬유센서를 이용하여, 교류강전계 하에서 압전 및 유전특성을 조사하였다. PSN-PZT 세라믹스의 압전 및 유전 특성에 미치는 non-180$^{\circ}$분역 재배열의 영향을 평가하기 위하여 RT66A와 MTI-2000 Fotonic$^{TM}$ sensor를 이용하여 인가전계와 주파수의 함수로 전계유기변위를 측정하였다. 그 결과, 교류강전계 하에서 전계유기변위는 강전계, 저주파수에서 큰 이력현상을 나타내고, 전계유기변위로부터 결정된 유효압전상수는 주파수가 감소할수록 증가하는 거동을 나타내고 있으며, 이러한 거동은 non-180$^{\circ}$분역 재배열의 영향으로 해석되었다.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1472-1474
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• 1994

In this paper, $TiO_2-V_2O_5$ thin films are fabricated by Sol-Gel method and their humidity-sensing characteristics have been investigated. The microstructure of specimen is porous. The humidity-sensing characteristics of thin films are good according to increasing heat treatment temperature and decreasing measurement frequency.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.10
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• pp.475-480
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• 2006

Vanadium oxide thin films (VOx) have been deposited by RF magnetron sputtering from $V_2O_5$ target under different oxygen partial pressure ratios(0%, 10%) and substrate temperatures$(27^{\circ}C,\;400^{\circ}C)$. Crystallographic structure and morphology of the films are studied by XRD and SEM. Humidity-sensing properties of resistive sensors having interdigitated electrode structure are characterized through electrical conduction measurements. The films deposited at room temperature are amorphous whereas the ones deposited above foot are polycrystalline. The sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide thin films deposited with $0%O_2$ partial pressure at $400^{\circ}C$ exhibit greater sensitivity to humidity change than others.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.6
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• pp.240-245
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• 2002

In this paper, a novel optical measuring system for the measurement of nonuniform electric field was proposed. The electric field distorted by the discharges was detected through proposed optical measuring system based on the Pockets effect and Mach-Zehnder interferometer. In order to produce distorted electric field, corona discharge was generated from needle-plane electrode in air and detected by optical measuring system. This optical measuring system is constructed by He-Ne laser, single mode optical fiber, $2{\times}2$ 50/50 beam splitter, $LiNbO_3$ Pockets cell, photo detector and PC. In this system, output signal of Pockels sensor is measured by digital oscilloscope and transferred to the PC for recording and statistical processing. Through this paper, a promising possibilities of proto-type optical measuring system were evinced.

• Proceedings of the KSRS Conference
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• 2003.11a
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• pp.1445-1456
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• 2003

The ASTER TIR (thermal infrared radiometer) sensor has 5 spectral bands over 8 to 12 ${\mu}$m region. Rock type classification using the ASTER TIR nighttime data was performed in the Erta Ale range of the Ethiopian Rift Valley. Erta Ale range is the most important axial volcanic chain of the Afar region. The petrographic diversity of lava erupted in this area is very important, ranging from magnesian transitional basalt to rhyolites. We tried to classify the rock types based on the spectral behavior of each volcanic rock types in thermal infrared range and estimated SiO$_{2}$ content with emission data by the ASTER TIR.

• Bulletin of the Korean Chemical Society
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• v.27 no.6
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• pp.835-840
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• 2006

Dimethyl 1-(4-nitrobenzoyl)-8-oxo-2,8-dihydro-1H-pyrazolo[5,1-a]isoindole-2,3-dicarboxylate has been used as an ionophore and o-nitrophenyloctyl ether as a plasticizer in order to develop a poly(vinyl chloride)-based membrane electrode for calcium ion detection. The sensors exhibit significantly enhanced response towards calcium(II) ions over the concentration range $8.0{\times}10^{-7}\;1.0{\times}10^{-1}$ M at pH 3.0-11 with a lower detection limit of $5.0 {\times}10^{-7}$ M. The sensors display Nernstian slope of 29.5 ${\pm}$ 0.5 mV per decade for Ca(II) ions. Effects of plasticizers, lipophilic salts and various foreign common ions are tested. It has a fast response time within 10 s over the entire concentration range and can be used for at least 2 months without any divergence in potentials. The proposed electrode revealed good selectivity and response for $Ca^{2+}$ over a wide variety of other metal ions. The selectivity of the sensor is comparable with those reported for other such electrodes. The proposed sensor was successfully applied as an indicator electrode for the potentiometric titration of a Ca(II) solution, with EDTA.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.109-110
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• 2006

In bio applications, high temperature coefficient of resistance (TCR) at $30^{\circ}C{\sim}40^{\circ}C$ is especially important for a temperature sensor. In this work, single phase-vanadium dioxide ($VO_2$) thin films for temperature sensor were fabricated by reactive DC magnetron sputtering and post-annealing method. VOx thin films deposited by reactive sputtering in a controlled $Ar/O_2$ atmosphere can be transformed into single phase-$VO_2$ films by post-annealing in $N_2$ atmosphere. The grown $VO_2$ thin films have a moderate resistance at room temperature and very high TCR at room temperature and transition temperature, respectively 2.88%/K and 15.8%/K. A detailed structural characterization is performed by SEM, XRD and RBS. SEM morphology image indicates that grains of fabricated $VO_2$films are homogeneous and ball-like in shape. A fact that the films contain only single phase-$VO_2$ is obtained by XRD and RBS analysis. After deposition, the sensors were fabricated by micromachining technology. Silicon nitride membrane and black nickel were used for a thermal isolation structure and absorption layer. In the vicinity of room temperature, the TCR of sensors was enough high to apply for bio sensors.

• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.203-209
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• 2008

Thick film formaldehyde (HCHO) gas sensors were fabricated by using $La_1_{-x}Sr_xMO_3$ (M= Fe, Co, Mn) ceramics. The powders of $La_1_{-x}Sr_xMO_3$ (M=Fe, Co, Mn) were synthesized by conventional solid-state reaction method. By using the $La_1_{-x}Sr_xMO_3$ (M=Fe, Co, Mn) paste, the thick-film formaldehyde sensors were prepared on the alumina substrate by silkscreen printing method. The experimental results revealed that $La_1_{-x}Sr_xMO_3$ (M= Fe, Co, Mn) ceramic powder has a perovskite structure and the thick-film sensor shows excellent gas-sensing characteristics to formaldehyde gas (sensitivity of $La_{0.8}Sr_{0.2}FeO_3$, S= 14.7 at operating temperature of $150^{\circ}C$ in 50 ppm HCHO ambient).

• Korean Journal of Optics and Photonics
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• v.12 no.4
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• pp.294-299
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• 2001

Recently great efforts and investment have been made in order to develop a structural health monitoring technology using fiber optic sensors. Therefore, in this study, we have focused on the development of a fiber optic BOTDA (Brillouin Optical Time Domain Analysis) sensor system in order to measure strains distributed on large structures by an optical fiber. The fiber optic BOTDA sensor was constructed simply, with only two electro-optic modulators. The results of strain measurement tests of an optical fiber showed that the strain can be determined accurately from the Brillouin frequency shift measurement on the strain induced range of 10 m in the total fiber length of 4.8 kIn using 200 averaged signals. Also, the strain sensitivity of Samsung single mode fiber was 4.81 MHz/O.Ol % under the test. test.