• Journal of Sensor Science and Technology
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• v.11 no.1
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• pp.18-27
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• 2002

$LaFeO_3$-based thick films with 2wt.%, 5wt.% and 10wt.% $Al_2O_3$ additives were fabricated by screen printing method on $Al_2O_3$ substrates. Structural, electrical and ammonia gas sensing characteristics of the thick films with different heat treatment temperatures were examined. From XRD results, the compound of $LaFeO_3$ and $Al_2O_3$ was not found until the heat treatment at $1200^{\circ}C$. SEM microphotograph showed similar grain growth despite the amount of $Al_2O_3$ additives with the heat treatment. Thick films with high activation energy and low resistance in the electrical properties showed high sensitivity for gases. Thick films with 2wt % $Al_2O_3$ additives heat-treated at $1200^{\circ}C$ showed the sensitivities of 210% for 100 ppm $NH_3$ gas at the working temperature of $350^{\circ}C$. The thick films showed food selectivity to $NH_3$ gas.

• Journal of Sensor Science and Technology
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• v.1 no.2
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• pp.173-181
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• 1992

Tantalum pentoxide($Ta_{2}O_{5}$) thin films on p-type (100) silicon wafer were fabricated by RF reactive sputtering. Physical properties and structure of the specimens were examined by XRD and AES. From the C-V analysis, the dielectric constant of $Ta_{2}O_{5}$ films was in the range of 10-12 in the reactive gas atmosphere in which 10% of oxygen gas is mixed. The ratio of Ta : 0 was 1 : 2 and 1 : 2.49 by AES and RBS examination, respectively. The heat-treatment at $700^{\circ}C$ in $O_{2}$ ambient led to induce crystallization. When the heat-treatment temperature was $1000^{\circ}C$, the dielectric constant was 20.5 in $O_{2}$ ambient and 23 in $N_{2}$ ambient, respectively. The crystal structure of $Ta_{2}O_{5}$ film was pseudo hexagonal of ${\delta}-Ta_{2}O_{5}$. The flat band voltage shift(${\Delta}V_{FB}$) of the specimens and the leakage current density were decreased for higher oxygen mixing ratio. The maximum breakdown field was 2.4MV/cm at the oxygen mixing ratio of 10%. The $Ta_{2}O_{5}$ films will be applicable to hydrogen ion sensitive film and gate oxide material for memory device.

• Journal of Sensor Science and Technology
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• v.4 no.1
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• pp.35-42
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• 1995

Conventional ball-milling technique was used to synthesize NASICON powders. The NASICON powders were made from three kinds of component powders : coarse($ZrO_{2}$, $Na_{3}PO_{4}$, $SiO_{2}$), fine ($ZrO_{2}$, $Na_{3}PO_{4}$, $SiO_{2}$) and fine ($ZrSiO_{4}$, $Na_{3}PO_{4}$) powders. The fine component powders were easily reacted to form the desired product at $1100^{\circ}C$ or higher, whereas incomplete reaction due to the coarse component powders occurred even at $1170^{\circ}C$. The finer the grain size of the starting powders was, the higher the bulk density of NASICON electrolyte after sintering was observed. Almost single phase NASICON electrolytes with more than 95% of the theoretical density, $3.27g/cm^{3}$, could be fabricated by sintering for $40{\sim}60$ hours at temperatures between 1150 and $1170^{\circ}C$.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.21 no.4
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• pp.143-148
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• 2021

A systematic study of Bloch surface wave (BSW), which is created by guided mode resonance (GMR) of dielectric multilayer structures with a grating profile, is presented to analyze the sensing performance of bio-sensors. The effect of structural parameters on optical behavior is evaluated by using Babinet's principle and modal transmission-line theory. The sensitivity of designed bio-sensors is proportional to the grating constant at wavelength spectrum, and inversely proportional to the normal wave vector of incident electromagnetic wave at angular spectrum. Numerical results for two devices with SiO/SiO₂ and TiO₂/SiO₂ multilayer dielectric stacks are presented, showing that BSW can be exploited for the realization of efficient diffraction-based bio-sensors from infrared to visible-band range.

• Korean Journal of Materials Research
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• v.28 no.1
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• pp.32-37
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• 2018

We report on the efficient detection of NO gas by an all-oxide semiconductor p-n heterojunction diode structure comprised of n-type zinc oxide (ZnO) nanorods embedded in p-type copper oxide (CuO) thin film. The CuO thin film/ZnO nanorod heterostructure was fabricated by directly sputtering CuO thin film onto a vertically aligned ZnO nanorod array synthesized via a hydrothemal method. The transport behavior and NO gas sensing properties of the fabricated CuO thin film/ZnO nanorod heterostructure were charcterized and revealed that the oxide semiconductor heterojunction exhibited a definite rectifying diode-like behavior at various temperatures ranging from room temperature to $250^{\circ}C$. The NO gas sensing experiment indicated that the CuO thin film/ZnO nanorod heterostructure had a good sensing performance for the efficient detection of NO gas in the range of 2-14 ppm under the conditions of an applied bias of 2 V and a comparatively low operating temperature of $150^{\circ}C$. The NO gas sensing process in the CuO/ZnO p-n heterostructure is discussed in terms of the electronic band structure.

• Journal of Sensor Science and Technology
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• v.3 no.1
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• pp.40-45
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• 1994

$112^{\circ}$ rot. x-cut $LiTaO_{3}$ wafer was used as the substrate of SAW gas sensor. Dual delay line SAW device with IDTs which consist of the reference delay line and the sensing delay line was fabricated using photolithigraphy. Each IDTs had 10 finger pairs and finger spacing is 10 microns. One delay line channel is the reference, while the second is the sensing channel with Pb-phthalocyanine film in the propagation path. Pb-phthalocyanine film which is p-type organic semiconductor was evaporated in $10^{-5}$ torr vacuum using shadow mask selectively. Dual delay line oscillator was constructed by using the rf amplifier and AGC. Frequency of the IDTs had the range of $87{\sim}$89 MHz oscillation frequency. Oscillation frequency shifts were investigated as a function of the temperature and the concentration of $NO_{2}$ gas.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.5
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• pp.81-86
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• 2019

Metal oxide/graphene composites have been known as promising functional materials for advanced applications such as high sensitivity gas sensor, and high capacitive secondary battery. In this study, tin dioxide ($SnO_2$) nanostructures were grown on chemically synthesized graphene nanosheets using a two-zone horizontal furnace system. The large area graphene nanosheets were synthesized on Cu foil by thermal chemical vapor deposition system with the methane and hydrogen gas. Chemically synthesized graphene nanosheets were transferred on cleaned $SiO_2$(300 nm)/Si substrate using the PMMA. The $SnO_2$ nanostuctures were grown on graphene nanosheets at $424^{\circ}C$ under 3.1 Torr for 3 hours. Raman spectroscopy was used to estimate the quality of as-synthesized graphene nanosheets and to confirm the phase of as-grown $SnO_2$ nanostructures. The surface morphology of as-grown $SnO_2$ nanostructures on graphene nanosheets was characterized by field-emission scanning electron microscopy (FE-SEM). As the results, the synthesized graphene nanosheets are bi-layers graphene nanosheets, and as-grown tin oxide nanostructures exhibit tin dioxide phase. The morphology of $SnO_2$ nanostructures on graphene nanosheets exhibits complex nanostructures, whereas the surface morphology of $SnO_2$ nanostructures on $SiO_2$(300 nm)/Si substrate exhibits simply nano-dots. The complex nanostructures of $SnO_2$ on graphene nanosheets are attributed to functional groups on graphene surface.

• Journal of Sensor Science and Technology
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• v.27 no.3
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• pp.170-174
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• 2018

In this paper, the $TiO_2$/glucose oxidase (GOD) mixture has synthesized through simple and low-cost fabrication methods. The physical properties of the mixture were proved using an FT-IR/NIR spectrometer, an X-Ray diffractometer, and a Raman spectrometer. GOD maintained its bioactivity during all fabrication process. The current characteristics of the glucose biosensor were proportional to the glucose concentration and effective surface area of square pyramid on a silicon substrate. The maximum current change was measured in a pH 7.0 buffer solution. The simple and low-cost fabrication process and surface treatment can be used widely in previous research for improvements in effective surface area.

• Journal of the Korean Vacuum Society
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• v.17 no.2
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• pp.130-137
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• 2008

$La_{0.7}Sr_{0.3}MnO_3$ films were deposited on $SiO_2$/Si and Si substrates annealed at $350^{\circ}C$ by rf magnetron sputtering. The oxygen gas flow rates were varied as 0, 40, and 80 sccm. Without post annealing process, $La_{0.7}Sr_{0.3}MnO_3$ thin films on $SiO_2$/Si and Si substrates were polycrystalline with (100), (110), and (200) growth planes. The grain size of $La_{0.7}Sr_{0.3}MnO_3$ thin films was increased with increasing oxygen gas flow rate. The sheet resistance of $La_{0.7}Sr_{0.3}MnO_3$ thin films was decreased with oxygen flow rate due to the increased grain size which induced a reduction of grain boundary. TCR (temperature coefficient of resistance) values of $La_{0.7}Sr_{0.3}MnO_3$ thin films were obtained from -2.0% to -2.2%.

• Journal of The Korean Dental Society of Anesthesiology
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• v.12 no.1
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• pp.17-23
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• 2012

Background: This study evaluated pulp vitality of anterior permanent teeth using pulse oximetry (PO), which is already used for monitoring of patient's $SpO_2$ and pulse rates (PR). Also we compared with ice tests and electric pulp test (EPT). Methods: 9 teeth, endodontic treated, were selected as non-vital teeth group. 17 vital teeth were selected as control group. Our aim is to compare sensitivity, specificity, positive predictive value (PPV) and negative predictive value (NPV) of ice test, electric pulp test and pulse oximetry, respectively. Pulse oximetry has two test results, $SpO_2$ and pulse rates. Also we calculated correlation and statistical significances by Pearson's test between EPT and pulse oximetry. Results: Sensitivity, specificity, PPV, NPV were calculated on each tests. Ice test has results of 1.00, 0.89, 0.94 and 1.00, respectively. EPT has results of 0.94, 0.78, 0.89 and 0.88 respectively. $SpO_2$ has results of 0.94, 1.00, 1.00 and 0.90, respectively. PR has results of all 1.00. Conclusions: PO showed relatively accurate, stable and objective results on both $SpO_2$ and PR. Percentage of ability of accurate diagnosis for vital teeth is 94% for ice test, 89% for EPT, 100% for $SpO_2$ and PR. Percentage of ability of accurate diagnosis for non-vital teeth is 100% for ice test, 88% for EPT, 90% for $SpO_2$ and 100% for PR. In additions, PR could be more accurate and significant tests than $SpO_2$.