• Electrical & Electronic Materials
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• v.8 no.3
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• pp.278-284
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• 1995

Thin fihn SnO$_{2}$ Gas Sensor was fabricated by electron-beam evaporation system and the target made by general firing method for the purpose of detecting gas components in air, especially methane gas. SnO$_{2}$ thin film was prepared on the polished alumina substrate which Pt interdigital electrode was precoated. The effects of annealing temperature and substrate temperature on the structural properties of SnO$_{2}$ thin film on glass were investigated using the X-ray diffraction. The good crystalline structure is formed when substrate temperature is 150[.deg. C] and annealing condition is 550[.deg. C], 1[hour]. And the sensing properties at various thickness of the SnO$_{2}$ thin film and the effects of PdCI$_{2}$ addition were also investigated. The good result is showed when the thickness is below 1000[.angs.] and the quantity of PdCI$_{2}$ addition is 4[wt%]. The thickness of SnO$_{2}$ thin film was measured by .alpha.-step and Elliopsometer.

• Journal of the Korean Institute of Telematics and Electronics T
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• v.36T no.1
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• pp.19-24
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• 1999

$In_2O_3$-based thick films for the ozone detection of ppb range have been investigated. The $In_2O_3$ sensing layer is quite sensitive to ozone, but the saturated stable sensitivity cannot be obtained at the ozone exposure of 100 ppb for 5 min. The addition of $Fe_2O_3$ into $In_2O_3$ indicates some improvement in response time and sensitivity, but it seems the improvement is not good enough for real applications. Firing of $In_2O_3$:$Fe_2O_3$ powder induces remarkable improvement in response and recovery, although the sensitivity decrease. The sensing layer fired at $1300^{\circ}C$ and operated $550^{\circ}C$ shows excellent properties of fast response time, saturated stable sensitivity and rapid recovery characteristics to 100 ppb ozone exposure for 5 min. Especially, it shows the reproducibility of the sensor signal for repeated measurements and the linearity between the ozone concentration and the sensor resistance. The preliminary results clearly demonstrated that the sensor can be successfully applied for the ozone detection of ppb range.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.942-945
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• 2003

Nerve gas sensor based on tin oxide was fabricated and its characteristics were examined. Target gas was dimethylmethylphosphonate($C_3H_9O_3P$, DMMP) that is simulant gas of nerve gas. Sensing material was $SnO_2$ added ${\alpha}-Al_2O_3$ with $4{\sim}20wt.%$ and was physically mixed. And then it was deposited by screen printing method on alumina substrate. Sensor device was consisted of sensing electrode with interdigit(IDT) type in front and heater in back side. Total size of device was $7{\times}10{\times}0.6mm^3$. Crystallite size of fabricated $SnO_2$ were characterized by X-ray diffraction(XRD, Rigaku) and morphology of the $SnO_2$ powders was observed by a scanning electron microscope(SEM, Hitachi). Fabricated sensor was measured as flow type and sensor resistance change was monitored real time using LabVIEW program. The best conditions as added $Al_2O_3$ amounts and operating temperature changes were 4wt.% and $300^{\circ}C$ in DMMP 0.5ppm, respectively. The sensitivity was over 75%. Response and recovery times were about 1 and 3 min., respectively. Repetition measurement was very good with ${\pm}3%$ in full scale.

• Journal of Sensor Science and Technology
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• v.6 no.5
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• pp.369-375
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• 1997

$V_{2}O_{5}/ThO_{2}/Pd$-doped $SnO_{2}$ sensor has a good selectivity and stability to CO at high sensor temperature of about $500^{\circ}C$, and shows rapid response. In particular, many kinds of interference gases, such as $NO_{x}$, $C_{3}H_{8}$, $CH_{4}$ and $SO_{2}$ have been found to give only a slight influence on the sensor selectivity to CO gas sensitivity by doped $V_{2}O_{5}$ (3.0 wt.%). For the sensor we used well-known thick film technological route with $V_{2}O_{5}$(3.0 wt.%), Pd(1.0 wt.%) and $ThO_{2}$(l.5 wt.%) as catalytic materials. In the case of mixed $NO_{x}$-CO gases, as combustion exhaust gas, only CO detection by $SnO_{2}$ type semiconductor sensor is generally very difficult because of $NO_{x}$ interference. The developed sensors can use to measure the exhausting gas of the automobile or the boiler for the Air-to-Fuel ratio control.

• Journal of IKEEE
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• v.13 no.4
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• pp.37-42
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• 2009

In this study, nanopower ZnO and $SnO_2$ as sensing materials were prepared by hydrazine and hydrothermal routes, respectively, and were doped with Pd, Ru catalyst. The CO and $NO_2$ sensors were fabricated by coating of sensing materials on the MEMS-based structure with electrodes and heaters. The 0.1 wt% Pd doped $SnO_2$ sensor and Ru doped ZnO sensor showed the high sensor response to CO 30 ppm and $NO_2$ 1 ppm, respectively. The sensor signal was stable. This can be used for the detection of pollutant gases emitted from gasoline engine.

• Journal of the Korean Society of Safety
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• v.5 no.2
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• pp.32-39
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• 1990

The ${\gamma}$-Fe$_2$O$_3$ compounds were oxidized in the furance after gas detecting sensor made molding as the Fe$_3$O$_4$ the synthesized Fe$_3$O$_4$, by ferrous sulfate and sodium hydroxide. Their sensities on carbon monoxide, ethyl alcohol and L. P. G. were measured at various temperatures, respectively. And then their electrical resistivities, thermal properties (D.T.A. ＆ T.G.A.), were examined about their having an effet on the gas-sensing in company with the effect of pure ${\gamma}$-Fe$_2$O$_3$ and the detecting sensor ${\gamma}$-Fe$_2$O$_3$, which reacts with $K_2$CO$_3$ in the hydrothermal coundition, and the electrical conductive mechanism was reflected simultaneously. It was observed that the electrical conductivities and response ratios showed highest value at the endothermic temperature part, 300~35$0^{\circ}C$ of D.T.A.―curve. Consequently, the response ratios and response times of the hydrothermal detecting sensor were higher than that of pure detecting sensor, the specific surface areas were the highest at the endothermic range of D.T.A.-curve. These response ratios of detecting sensor for $K_2$CO$_3$, process at hydrothermal condition on carbon monoxide appeared higher than that on ethyl alcohol and in case of L.P.G. last.

• Journal of the Korean Applied Science and Technology
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• v.31 no.2
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• pp.190-196
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• 2014

The sol-gel method was used to prepare binary metal oxide ($IrO_2-RuO_2$) pH sensor. The electrodes that mole percent compositions (mol%) of $IrO_2$ and RuO2 were 70:30 and 30:70 were selected. The characterizations of Nernstian response over pH range, response rate, interference on alkaline metals and reproducibility were investigated. Also the electroanalytical properties of these electrodes were evaluated in comparison with a commercial glass pH electrode. The composition of $IrO_2:RuO_2$ 70:30 mol% was chosen as better electrode formulation. The electrode was not susceptible to the action of interfering ions such as $Li^+$, $Na^+$ and $K^+$.

• Journal of Sensor Science and Technology
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• v.11 no.2
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• pp.77-83
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• 2002

In order to get low cost and portability, semiconductor gas sensor need to have low operating temperature and high sensitivity. $Fe_2O_3$ based sensors which were doped with metal oxide catalysts($MoO_3$, $V_2O_5$, $TiO_2$, and CdO) were fabricated by screen printing method. To improve electrical stability of sensors, the $Fe_2O_3$ sensors were annealed in $N_2$ at $700^{\circ}C$ for 2 hours. The $V_2O_5$ doped $Fe_2O_3$ sensor showed about $80{\sim}90%$ sensitivity at alcohol 1,000 ppm and have good selectivity to hydrocarbon gas and tobacco odors. The fabricated sensor and PIC-chip were employed for portable alarm system.

• Journal of Sensor Science and Technology
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• v.17 no.1
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• pp.61-68
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• 2008

The sensing characteristics of new oxide sensing materials, NiO, NiO-YSZ and CuO, were evaluated at the temperature of $700^{\circ}C$ in 10 % $O_2$containing atmosphere. Through simultaneous response to $NO_2$ and NO, the sensing mechanism of oxide electrode was studied and the relation of EMF and NO/$NO_2$ concentrations was elucidated. Moreover, for highly sensitive NOx sensor, modified mixed potential sensor which has at least two oxide electrodes was proposed.

• Korean Journal of Materials Research
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• v.33 no.5
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• pp.195-204
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• 2023

Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NO_x), ammonia (NH₃), and formaldehyde (HCHO), as well as binary mixed-gas systems. Four gas sensing materials for different target gases, Pd-SnO₂ for CO, In₂O₃ for NO_x, Ru-WO₃ for NH₃, and SnO₂-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were then fabricated using a micro sensor platform. The gas sensing behavior and sensor response to the gas mixture were examined for six mixed gas systems using the experimental data in MEMS gas sensor arrays in sole gases and their mixtures. The gas sensing behavior with the mixed gas system suggests that specific adsorption and selective activation of the adsorption sites might occur in gas mixtures, and allow selectivity for the adsorption of a particular gas. The careful pattern recognition of sensing data obtained by the sensor array made it possible to distinguish a gas species from a gas mixture and to measure its concentration.