• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.128-128
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• 1999

산소이온 전도체로 잘 알려진 Yttira-Stabilizd Ziroconia(TSZ)는 연료전지, oxygen pumps, chemical gas sensor 등 다양한 electrochemical divices에 이용되는 고체 전해질의 하나이다. 특히 YSZ는 oxygen 및 oxygen과 평형상태에 있는 gas들을 검출하는 sensor의 electrolyte로서 가장 많이 쓰이고 있다. 현재 상용화되어 있는 YSZ Sensor는 전통적인 bulk 형태의 ceramic으로 제작된 것으로 충분한 ionic conductivity를 얻기 위해서는 $600^{\circ}C$이상의 operating temperature를 필요로 하나 YSZ를 박막으로 제조시 낮은 operating temperature를 뿐만 아니라 sensor의 소형화, 낮은 ohmic loss 및 다양한 응용이 가능한 장점을 가질 수 있다. 본 실험에서는 산소 이온 전도체로서 8mol%-YSZ 고체전해질을 RF-magnetron bias sputtering 법을 이용하여 증착하였다. 제조된 YSZ 박막을 이용한 산소감응 센서셀 구조는 SiO2/Ni-NiO/Pt/YSZ/Pt-기판이다. 센서셀의 정상상태에서의 기전력(electromotive force ; EMF)을 산소분압(Po:1.013$\times$103Ta ~1.013$\times$105Pa)과 측정온도(30$0^{\circ}C$~$700^{\circ}C$)를 변화시키며 측정하였다. 이론적인 기전력과 측정값 사이의 편차는 Po:1.565$\times$104Pa 이하의 산소분압에서는 컸지만 이 이상의 분압에서는 이론치에 근접한 값을 가졌다. 증착한 YSZ와 Ni-NiO 박막의 구조는 X-ray diffractometer(XRD)를 이용하여 결정구조를 알아 보았고, TSZ 박막의 표면 morphology 관찰은 Scanning electron microscopy(SEM) 이용하였다. 박막의 조성분석은 X-ray energy dispersive analysis(EDX)을 사용하였다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.10
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• pp.671-677
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• 2001

A RuO$_2$ Schottky photo-detector was designed and fabricated with GaN layers on the sapphire substrate. For good absorption of UV light, an epitaxial structure with undoped GaN(0.5 ${\mu}{\textrm}{m}$)/n￣-GaN(0.1${\mu}{\textrm}{m}$)/n＋-GaN(1.5${\mu}{\textrm}{m}$) was grown by MOCVD. The structure had the carrier concentrations of 3.8$\times$10$^{18}$ cm￣$^3$, the mobility of 283$\textrm{cm}^2$/V.s. After ECR etching process for mesa structure with the diameter of about 500${\mu}{\textrm}{m}$, Al ohmic contact was formed on GaN layer. After proper passivation between the contacts with Si$_3$/N$_4$, was formed on undoped GaN layer. The fabricated Schottky diode had a specific contact resistance of 1.15$\times$10$^{-5}$ ［$\Omega$.$\textrm{cm}^2$］. It has a low leakage current of 305 pA at -5 V, which was attributed by stable characteristics of RuO$_2$ Schottky contact. In optical measurement, it showed the high UV to visible extinction ratio of 10$^{5}$ and very high responsivity of 0.23 A/W at the wavelength of 365nm.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.188-196
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• 1998

The sensing and electrical characteristics of $WO_{3}$-based n-type semiconductor gas sensors are investigated. In normal air condition, $TiO_{2}$(4 wt. %)-doped $WO_{3}$-based sensor fabricated without any binder shows the grain boundary ( GB ) potential barrier height of 0.26 V. Sensors fabricated with alumina, PVA and silica sol binders show 0.17, 0.22 and 0.26 V of GB potential barrier height, respectively. In the ambience of 120 ppm $NO_{x}$ concentration, the GB potential barrier height of the sensor fablicated without binder is increased to 0.59 V. The sensors were fabricated with alumina, PVA, silica sol binders show 0.43, 0.66 and 0.52 V of potential barrier, respectively. Thus the variation of the potential barrier at GB is largest in the sensor fabricated with the PVA binder. This is found to be the main reason why the sensor fabricated with the PVA binder shows the best sensitivity. It is also found that the decrease of sensitivity at a temperature higher than the optimum operation temperature is due to the temperature dependence of the sensor resistance in normal air condition rather than the desorption of the adsorbed $NO_{x}$ gas particles. In the ambience of 250 ppm CO concentration, the GB potential barrier heights of the sensors fabricated without binder and with PVA binder are about 0.2 V showing negligible change compared to the case of normal air ambience. This fact indicates that these sensors are good candidates for the selective detection of $NO_{x}$ gas in the mixture of CO and $NO_{x}$ gases.

• Carbon letters
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• v.13 no.4
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• pp.254-259
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• 2012

Nanoporous non-woven carbon fibers for a gas sensor were prepared from a pitch/polyacrylonitrile (PAN) mixed solution through an electrospinning process and their gas-sensing properties were investigated. In order to create nanoscale pores, magnesium oxide (MgO) powders were added as a pore-forming agent during the mixing of these carbon precursors. The prepared nanoporous carbon fibers derived from the MgO pore-forming agent were characterized by scanning electron microscopy (SEM), $N_2$-adsorption isotherms, and a gas-sensing analysis. The SEM images showed that the MgO powders affected the viscosity of the pitch/PAN solution, which led to the production of beaded fibers. The specific surface area of carbon fibers increased from 2.0 to $763.2m^2/g$ when using this method. The template method therefore improved the porous structure, which allows for more efficient gas adsorption. The sensing ability and the response time for the NO gas adsorption were improved by the increased surface area and micropore fraction. In conclusion, the carbon fibers with high micropore fractions created through the use of MgO as a pore-forming agent exhibited improved NO gas sensitivity.

• Journal of Sensor Science and Technology
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• v.10 no.4
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• pp.222-231
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• 2001

The material properties of $SnO_2$ were investigated as a function of the amount of $Fe_2O_3$, the partial pressure of oxygen, the concentration of CO gas, and temperature. $Fe_2O_3$-doped $SnO_2$ thick films were prepared by the screen printing technique on alumina substrate. The specimens sintered at $700^{\circ}C$ for 6 hours showed little difference of the grain size and narrow distribution with the content of $Fe_2O_3$. The electrical conductance of undoped $SnO_2$ is high at low firing temperature and at low partial pressure of oxygen. The electrical conductance of $Fe_2O_3-$-doped $SnO_2$ is increased with measurement temperature, but decreased with the content of $Fe_2O_3$. The dependence of oxygen partial pressure is decreased with dopant addition. The highest sensitivity and the good properties of response speed and repeatability for CO gas were observed on the specimen with 0.1 mol% $Fe_2O_3$ at $350^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.8
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• pp.646-650
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• 2012

Multifunctional structures with two kinds of materials have been intensively investigated in order to improve their electrical characteristic with two functions simultaneously. However, the research regarding of multifunctional ceramic sensor is still in a preliminary stage and how to integrate them with low-cost and high-yield mass production process remains a challenge issue. In this study, we fabricated the multifunctional ceramic sensor composed of temperature and gas sensors. Moreover, we investigated the CO sensing properties of three dimensional nanostuctured $Nb_2O_5$ thin film gas sensors fabricated with silica ($SiO_2$ nanosphere (${\O}$= 750 nm). Compared to plain films, the nanostructured films show enhanced gas sensing of greater sensitivity and a faster response. This result reveals that significantly increased sensitivity is an increase in the effective surface area for the adsorption of gas molecules.

• Journal of the Korean Ceramic Society
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• v.39 no.9
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• pp.840-845
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• 2002

As an ozone gas sensor, the semiconductor gas sensor which is cheap, portable and simple in use and has a high sensitivity and an excellent selectivity, has been known as an alternative. In the present study, ITO ($In_2O_3 95%,\;SnO_2$ 5%) thin films were deposited on the alumina substrate by using R.F. magnetron sputtering method. The substrate temperature was 300$^{\circ}C$ and 500$^{\circ}C$, respectively and then some specimens were annealed at 500$^{\circ}C$ for 4h in air. ITO gas-sensing films formed crystallines before and after annealing. As results of gas sensitivity measurements to an ozone gas, the sensor deposited at 300$^{\circ}C$ and then annealed has the highest sensitivity (sensible below 1 ppm). As the operating temperature increased gradually, the sensitivity decreased but the response time and stability improved.

• Journal of Korean Society for Geospatial Information Science
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• v.18 no.2
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• pp.21-28
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• 2010

Air pollution monitoring has attracted a lot of interests because it affects directly to the human life quality. The most of the current air pollution monitoring stations use the expensive and bulky instruments and are only installed in the specific area. Therefore, it is difficult to install them to as many places as people need. In this work, we constructed a low price and small size Radio Frequency(RF) sensor system to solve this problem. This system also had the measurement range similar to the ones used in the air pollution forecast systems. This system had the sensor unit to measure the air quality, the central processing unit for air quality data acquisition, the power unit to supply the power to every units, and the RF unit for the wireless transmission and reception of the data. This system was easy to install in the field. We also added a GPS unit to track the position of the RF-sensor in real time by wireless communication. For the various measurements of the air pollution, we used CO, $O_3$, $NO_2$ sensors as gas sensors and also installed a dust sensor.

• Journal of the Korean Ceramic Society
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• v.36 no.3
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• pp.301-306
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• 1999

CO2 감지용 La2O3-SnO2 계 후막형 소자를 제조하여 CO2가스에 대한 기초 감지 특성을 조사하였고, 감지 분말의 입자크기와 제조방법에 따른 감도 변화를 고찰하였다. 후막 소자는 40$0^{\circ}C$의 작동온도와 4wt.%의 La2O3가 첨가되 srjt에서 가장 좋은 감도를 나타내었고, 낮은 습도영역에서 우수한 감지 특성을 보였다. 분말 혼합법에 의해 제조된 소자에 있어서 La2O3와SnO2 분말의 입자가 미세할수록 우수한 감도를 나타내었고, La2O3의 입도가 SnO2의 입도 보다 감도에 더 큰 영향을 주었다. SnO2 후막 표면에 La 용액을 코팅하여 제조된 센서는 가장 우수한 CO2 감도특성을 보였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.8
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• pp.688-693
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• 2000

In this paper an optical voltage sensor and an optical current sensor which can be used for the measurement of impulse voltage and current are implemented. BSO single crystal is utilized as a voltage sensor(Pockels effect cell). An rare earth doped YIG is used as a current sensor(Faraday effect cell). A new signal processing technique is adopted not only to avoid the influences o external optical fiber pertubations of transmitting optical fiber but also to improves the frequency response characteristics of the fiber-optic voltage and current sensors. Experimental results show that optical voltage sensor has maximum 2.5% error within the voltage range from 0V to 500V. and optical current sensor has maximum 2.5% error within the current range and that of optical current sensor is about 1.5% within temperature range from -2$0^{\circ}C$ to 6$0^{\circ}C$. The proposed optical sensors have good frequency response characteristics within the frequency range from DC to 10MHz.