• Title/Summary/Keyword: $O_2$ Sensor

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백금 미세발열체를 이용한 유량센서의 제작 (The Fabrication of Flow Sensors Using Pt Micro Heater)

  • 노상수;정귀상
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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    • pp.609-611
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    • 1997
  • Pt thin films flow sensors were fabricated by using aluminum oxide films as medium layer and their characteristics were investigated after annealing at $600^{\circ}C$ for 60min. Aluminum oxide improved adhesion of Pt thin films to $SiO_2$ layer without any chemical reactions to Pt thin films under high annealing temperatures. Output voltages increased as gas flow rate and gas conductivity increased because heat loss of heater, which was integrated with a sensing resistor in the flow sensor, increased. Output voltage of flow sensor fabricated on membrane structure was 101mV at $O_2$ flow rate of 2000sccm, heating power of 0.8W while flow sensor fabricated on Si substrate without membrane had output voltage of 78mV under the same conditions.

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A Comparative Study of Gas Sensing Properties of Au-loaded ZnO and Au@ZnO Core-shell Nanoparticles

  • Majhi, Sanjit Manohar;Dao, Dung Van;Lee, Hu-Jun;Yu, Yeon Tae
    • 센서학회지
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    • 제27권2호
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    • pp.76-81
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    • 2018
  • Au@ZnO core-shell nanoparticles (NPs) were prepared by a simple method followed by heat-treatment for gas sensor applications. The advantage of the core-shell morphology was investigated by comparing the gas sensing performances of Au@ZnO core-shell NPs with pure ZnO NPs and different wt% of Au-loaded ZnO NPs. The crystal structures, shapes, sizes, and morphologies of all sensing materials were characterized by XRD, TEM, and HAADF-STEM. Au@ZnO core-shell NPs were nearly spherical in shape and Au NPs were encapsulated in the center with a 40-45 nm ZnO shell outside. The gas sensing operating temperature for Au@ZnO core-shell NPs was $300^{\circ}C$, whereas it was $350^{\circ}C$ for pure ZnO NPs and Au-loaded ZnO NPs. The maximum response of Au@ZnO core-shell NPs to 1000 ppm CO at $300^{\circ}C$ was 77.3, which was three-fold higher than that of 2 wt% Au-loaded ZnO NPs. Electronic and chemical effects were the primary reasons for the improved sensitivity of Au@ZnO core-shell NPs. It was confirmed that Au@ZnO core-shell NPs had better sensitivity and stability than Au-loaded ZnO NPs.

Pyroelectric Characteristics of 0-3 PbTiO3/P(VDF/TrFE) Nanocomposites Thin Films for Infrared Sensing

  • 권성열
    • 한국재료학회지
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    • 제17권4호
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    • pp.236-238
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    • 2007
  • [ 0-3PbTiO_3/P$ ](VDF/TrFE) nanocomposites thin films for passive pyroelectric infrared sensor have been fabricated by two-step spin coating technique. 65 wt% VDF and 35 wt% TrFE was formed to a P(VDF/TrFE) poder Nano size $PbTiO_3$ powder was used. 0-3 connectivity of $PbTiO_3$(VDF/TrFE) composites film is achieved and also observed by SEM photography successfully. The dielectric constant, and pyroelectric coefficient measured and compared with P (VDF/TrFE). A very low dielectric constant (13.48 at 1 kHz) and high enough pyroelectric coefficient (3.101 $nC/cm^2$.k at $50^{circ}C$) neasured. This nanocomposites can be used for a new pyroelectric infrared sensor for better performance.

ZnO를 기반으로한 에탄올 가스 센서 (ZnO-based Ethanol Gas Sensor)

  • 최동한
    • 센서학회지
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    • 제22권6호
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    • pp.444-449
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    • 2013
  • ZnO-based ethanol gas sensors were fabricated by the painting method and their electrical and ethanol gas sensing characteristics were investigated. The ZnO-Pt (1 wt.%) film heat treated at $400^{\circ}C$, for 2 hrs. in air showed the highest sensitivity to ethanol gas in air at an operating temperature of $250^{\circ}C$ The sensitivity of the gas sensors to 1000 ppm ethanol in air at $250^{\circ}C$ was 8.7 and rising time and falling time of the gas sensors were 3.12 minutes and 25 minutes, respectively.

접촉 연소식 가스센서의 제조 및 계측특성 (Fabrication of Catalytic Conbustion type Sensor and its Measuring Characteristics)

  • 이대식;한상도;명광식;이상호;손영목;이종도
    • 센서학회지
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    • 제4권4호
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    • pp.16-22
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    • 1995
  • 메탄, 프로판가스를 검출하기 위하여 ${\gamma}-Al_{2}O_{3}$ 담체에, Pd 촉매를 섞어서 접촉연소식 센서 및 digital 계측기를 제작한 후 그 소자특성 및 계측기로서 응용가능성을 조사하였다. 본 연구에서 제조된 센서는 인가전압 2 V에 소모전력은 700mW가 나왔고, 출력전압변화는 1,000ppm의 프로판의 경우 약 700mV, 메탄의 경우 500mV 변화를 나타냈다. 계측기에서는 2,400ppm을 10회 반복적으로 주입시켜 측정하였다. 그 결과로, ${\pm}25ppm({\pm}1%)$의 오차를 보였고, 감도, 선형성, 재현성이 우수한 것을 볼 수 있었다.

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Dependence of Thermal Annealing Conditions on Photoluminescence in $SiO_2$ films

  • Lee, Jae-Hee;Lee, Weon-Sik;Kim, Kwang-Il
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.102-102
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    • 1999
  • Visible photoluminescence(PL) in si-implanted SiO2 films on crystaline silicon were observed. Thermal oxide films of 1 ${\mu}{\textrm}{m}$ thickness on P-type crystal silicon were made and si+ ions were implanted with 200keV acceleration voltage on ti. Argon laser (wavelength 488nm) and PM tube were used for PL measurements. As annealing time increased at low temperature, the visible PL intensity are increased and the peak positions are changed. On the other hand, with increasing annealing time at high temperature, the visible PL intensity are disappeared. From the PL peaks and intensity changes, XRD results, and TEM observations, we will discuss the origin of PL in Si+-implanted SiO2 films with oxygen righ defects and silicon rich defects.

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$RuO_2$ 후막저항을 이용한 압력센서의 출력특성 개선 (Sensing Mechanism Property of $RuO_2$ Thick Film Resistor.)

  • 이성재;박하용;민남기
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.350-351
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    • 2006
  • Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, capacitive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. Some elastic materials exhibit a change in bulk resistivity when they are subjected to displacement by an applied pressure. This property is referred to as piezoresistivity and is a major factor influencing the sensitivity of a piezoresistive strain gage. The effect of thick film resistors was first noticed in the early 1970, as described by Holmes in his paper in 1973.

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화재감지센서 활용을 위한 적층헝 PTC서미스터의 특성에 관한 연구 (A Study on the Characteristics of the Multilayer-Type PTC Thermistor for Fire Detection Sensor)

  • 추순남;백동현
    • 한국화재소방학회논문지
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    • 제19권2호
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    • pp.75-80
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    • 2005
  • 적충형 PTC 서미스터의 특성연구를 위해 $(0.90Ba+0.05Sr+0.05Ca)TiO_3+0.01TiO_3+0.01SiO_2+0.0008MnO_2+0.0018Nb_2O_5$와 같은 실험조성식을 설정한 후 표면실장(SMD) 적층형 PTC 시편을 제작하였다. 그 결과 상온 비저항 값을 크게 낮출 수 있고 용도에 따라 전류용량을 크게 할 수 있었으나 적층화로 인해 peak 비저항이 크게 낮아지고 열용량이 커짐으로써 스위칭(switching)시간이 늦어지는 점을 확인하였다. 전압-전류 특성에서는 적층수가 증가할수록 초기 최대전류값이 증가하며 큐리점에 대응하여 저항값이 급격히 커지는 전이전압(전계)도 증가함을 보였다. 그러나 인가전압(전계)을 증가시킬 경우 peak 비저항값을 높일 수 있어 스위칭시간을 줄일 수 있다 이 소자는 화재감지기의 센서로 활용될 수 있다.

Phosphor Particle 혼합형 Hybrid 선량계의 방사선치료 Quality Assurance에 대한 적용가능성 평가 (Feasibility Study of Phosphor Particle Blended Hybrid Dosimeter for Quality Assurance in Radiation Therapy)

  • 신요한;한무재;정재훈;조흥래;박성광
    • 한국방사선학회논문지
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    • 제13권3호
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    • pp.333-338
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    • 2019
  • 방사선치료 분야에서는 치료의 안전성을 검증하기 위한 Quality Assurance(QA) 절차가 매우 중요하게 여겨진다. 그러나 일반적으로 이에 사용되는 선량계들의 다양한 문제점 때문에, 이를 대체하기 위한 선량계 연구가 활발히 진행되고 있다. 본 연구에서는 형광체로부터 방출된 visible light(VL)에 의한 Sensitivity 극대화를 위해, 뛰어난 형광 효율을 가지는 형광체인 $Gd_2O_2S:Tb$를 요오드화납(Lead(II) Iodide; $PbI_2$)에 다양한 weight percent(wt%)로 혼합한 Blended hybrid sensor를 제작하였다. 이후 Blended sensor 및 Pure $PbI_2$ sensor의 고에너지 방사선에 대한 반응특성을 비교 및 평가하였다. 민감도 평가결과, 3wt%는 sensor에서 타 sensor들과 40% 이상 차이나는 최댓값이 나타났으며, 이를 제외한 센서에서 wt%의 증가에 따른 점차적 민감도 감소추세를 확인하였다. 또한, 재현성 평가에서는 Pure $PbI_2$ sensor가 coefficient of variation(CV)>0.015의 큰 편차를 보인 반면, blended sensor는 모두 CV<0.015 이하의 결과를 보였다.