• Transactions on Electrical and Electronic Materials
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• v.15 no.1
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• pp.49-54
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• 2014

In this study, we carried out an investigation of the etch characteristics of silicon (Si) film, and the selectivity of Si to $SiO_2$ in $SF_6/O_2$ plasma. The etch rate of the Si film was decreased on adding $O_2$ gas, and the selectivity of Si to $SiO_2$ was increased, on adding $O_2$ gas to the $SF_6$ plasma. The optical condition of the Si film with this work was 1,350 nm/min, at a gas mixing ratio of $SF_6/O_2$ (=130:30 sccm). At the same time, the etch rate was measured as functions of the various etching parameters. The X-ray photoelectron spectroscopy analysis showed the efficient destruction of oxide bonds by ion bombardment, as well as the accumulation of high volatile reaction products on the etched surface. Field emission auger electron spectroscopy analysis was used to examine the efficiency of the ion-stimulated desorption of the reaction products.

• International Journal of Contents
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• v.4 no.2
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• pp.1-6
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• 2008

Pre schools with state of the art facilities that would provide not just academic excellence but also ensure the safety and provide efficient healthcare to their pupils relative to Atopic Dermatitis with Asthma is the main objective of this research One of the most promising applications of sensor networks is for human healthcare monitoring. Due to recent technological advances in sensor, low power microelectronics and miniaturization, and wireless networking enable the design and proliferation of this wireless sensor networks capable of autonomously monitoring and controlling environments. Thus, this research presents the utilization of such microelectronic sensor and plots the hardware and software architecture of a wireless sensor network system with real-time pupil monitoring that integrates vital sign sensors, location sensor and allergen sensor. This proposed architecture for wearable sensors can be used as active tags which can track pupil's location within the school's premises, identify possible atopic dermatitis with asthma allergens, it would monitor and generate a health status report of the pupil.

• Journal of Sensor Science and Technology
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• v.5 no.1
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• pp.1-8
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• 1996

High-sensitive pyroelectric infrared sensors have been fabricated with La-modified $PbTiO_{3}$(PLT) thin plates. The PLT thin plates have the composition of $(Pb_{0.9}La_{0.1}Ti_{0.75}O_{3})_{0.75}(PbO)_{0.25}$. Thickness of the thin plates is $100\;{\mu}m$. Top side electrodes exposed to IR are vacuum evaporated Ni-Cr, and bottom side electrodes are Ag. Each one takes the area of $1{\times}2\;mm^{2}$. The thin plates have a large resistivity of $6.41{\times}10^{10}{\Omega}{\cdot}cm$ and a relative dielectric constant of 341. They have a high figure of merit of $4.0{\times}10^{-11}\;Ccm/J$ due to its high pyroelectric coefficient of $4.45{\times}10^{-8}\;C/cm^{2}K$. The sensors show such a large voltage responsivity as 2501 V/W. That they can find practical applications like the pyroelectric infrared detectors.

• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.418-422
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• 2022

α-pinene is a natural volatile organic compound secreted by coniferous trees to protect themselves from attacks by insects, microorganisms, and viruses. Recently, studies have reported that α-pinene possesses pharmacological effects on various biological reactions such as anxiolytic, sleep-enhancing, anti-nociceptive, and inflammatory activity. Thus, forest bathing has recently received great attention as a novel therapy for treating severe diseases as well as psychological issues. However, appropriate places and timings for effective therapies are still veiled, because on-site monitoring of α-pinene gas in forests is barely possible. Although portable chemosensors could allow real-time analysis of α-pinene gas in forests, the α-pinene sensing properties of chemosensors have never been reported thus far. Herein, we report for the first time, the α-pinene sensing properties of an oxide semiconductor gas sensor based on rhombohedral In₂O₃ (h-In₂O₃) nanoparticles prepared by a microwave-assisted hydrothermal reaction. The h-In₂O₃ nanoparticle sensor showed a high response to α-pinene gas at ppm levels, even under humid conditions (for example, relative humidity of 50 %). The purpose of this research is to identify the potential of oxide semiconductor gas sensors for implementing portable devices that can detect α-pinene gas in forests in real-time.

• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.402-407
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• 2012

We report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of $3-5{\mu}m$ and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a $V_2O_5$-based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as $CH_4$, $CO_2$, $N_2O$ and CO in the spectral range of $3-5{\mu}m$. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.565-568
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• 2000

This paper describes on the temperature characteristics of a SDB(silicon-wafer direct bonding) SOI(silicon-on-insulator) Hall sensor. Using the buried oxide $SiO_2$ as a dielectrical isolation layer, a SDB SOI Hall sensor without pn junction isolation has been fabricated on the Si/$SiO_2$/Si structure. The Hall voltage and the sensitivity of the implemented SOI Hall sensor show good linearity with respect to the applied magnetic flux density and supplied current. In the temperature range of 25 to $300^{\circ}C$, the shifts of TCO(temperature coefficient of the offset voltage) and TCS(temperature coefficient of the product sensitivity) are less than $\pm 6.7$$\times$$10^{-3}$/$^{\circ}C$ and $\pm 8.2$$\times$$10^{-4}$/$^{\circ}C$respectively. These results indicate that the SDB SOI structure has potential for the development of a silicon Hall sensor with a high-sensitivity and hip high-temperature operation.

• Electrical & Electronic Materials
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• v.1 no.4
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• pp.311-318
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• 1988

초음파센서(수신기)에 응용가능한 압전세라믹스를 제조하기 위하여 Ba변조된 Pb(ZR, Ti)O$_{3}$계 세라믹스에 MnO$_{2}$를 첨가하여 첨가량과 소성온도에 따른 영향을 조사하였다. 또한 제조된 압전세라믹스를 이용하여 초음파 수신기를 제작하여 수신특성을 확인하여 보았다. 그 겨로가 MnO$_{2}$가 0.4(wt%)첨가되었을 때 압전 g정수가 가장 크고 수신감도가 우수한 것으로 밝혀졌다.

• Journal of Sensor Science and Technology
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• v.26 no.3
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• pp.204-208
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• 2017

Highly uniform and well-dispersed Zeolitic Imidazolate Framework-7 (ZIF-7) particles were prepared by the precipitation of $Zn^{2+}$ using benzimidazole, which were converted into ZnO nanoparticles by heat treatment at $500^{\circ}C$ for 24 h. The ZIF-7 derived ZnO nanoparticles showed abundant mesopores, high surface area, and good dispersion. The gas sensing characteristics toward 5 ppm acetone, ethanol, trimethylamine, ammonia, p-xylene, toluene, benzene, and carbon monoxide and carbon dioxide were investigated at $350-450^{\circ}C$. ZIF-7 derived ZnO nanoparticles exhibited high response to 5 ppm acetone ($R_a/R_g=57.6$; $R_a$: resistance under exposure to the air, Rg: resistance under exposure to the gas) at $450^{\circ}C$ and negligible cross-responses to other interference gases (trimethylamine, ammonia, p-xylene, toluene, benzene, carbon monoxide, carbon dioxide) and relatively low responses to ethanol. ZIF derived synthesis of metal oxide nanoparticles can be used to design high performance acetone sensors.

• Korean Journal of Materials Research
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• v.25 no.12
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• pp.655-658
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• 2015

The development of glucose biosensors has been attracting much attention because of their importance in monitoring glucose in the human body; such sensors are used to diagnose diabetes and related human diseases. Thanks to the high selectivity, sensitivity to glucose detection, and relatively low-cost fabrication of enzyme-immobilized electrochemical glucose sensors, these devices are recognized as one of the most intensively investigated glucose sensor types. In this work, ZnO nanofibers were synthesized using an electrospinning method with polyvinyl alcohol zinc acetate as precursor material. Using the synthesized ZnO nanofibers, we fabricated glucose biosensors in which glucose oxidase was immobilized on the ZnO nanofibers. The sensors were used to detect a wide range of glucose from 10 to 700 M with a sensitivity of $10.01nA/cm^2-{\mu}M$, indicating that the ZnO nanofiber-based glucose sensor can be used for the detection of glucose in the human body. The control of nanograins in terms of the size and crystalline quality of the individual nanofibers is required for improving the glucose-sensing abilities of the nanofibers.

• Korean Journal of Materials Research
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• v.30 no.8
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• pp.399-405
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• 2020

In the present investigation we show the effect of Al doping on the length, size, shape, morphology, and sensing property of ZnO nanorods. Effect of Al doping ultimately leads to tuning of electrical and optical properties of ZnO nanorods. Undoped and Al-doped well aligned ZnO nanorods are grown on sputtered ZnO/SiO₂/Si (100) pre-grown seed layer substrates by hydrothermal method. The molar ratio of dopant (aluminium nitrate) in the solution, [Al/Zn], is varied from 0.1 % to 3 %. To extract structural and microstructural information we employ field emission scanning electron microscopy and X-ray diffraction techniques. The prepared ZnO nanorods show preferred orientation of ZnO <0001> and are well aligned vertically. The effects of Al doping on the electrical and optical properties are observed by Hall measurement and photoluminescence spectroscopy, respectively, at room temperature. We observe that the diameter and resistivity of the nanorods reach their lowest levels, the carrier concentration becomes high, and emission peak tends to approach the band edge emission of ZnO around 0.5% of Al doping. Sensing behavior of the grown ZnO nanorod samples is tested for H₂ gas. The 0.5 mol% Al-doped sample shows highest sensitivity values of ~ 60 % at 250 ℃ and ~ 50 % at 220 ℃.