• 센서학회지
• /
• 제31권5호
• /
• pp.348-352
• /
• 2022

Hydrogen gas (H₂) which is odorless, colorless is attracting attention as a renewable energy source in varions applications but its leakage can lead to disastrous disasters, such as inflammable, explosive, and narcotic disasters at high concentrations. Therefore, it is necessary to develop H₂ gas sensor with high performance. In this paper, we confirmed that H₂ gas detection ability of SnO₂ based H₂ gas sensor along with thermal treatment effect of SnO₂. Proposed SnO₂ based H₂ gas sensor is fabricated by MEMS technologies such as photolithgraphy, sputtering and lift-off process, etc. Deposited SnO₂ thin films are thermally treated in various thermal treatement temperature in range of 500-900 ℃ and their H₂ gas detection ability is estimatied by measuring output current of H₂ gas sensor. Based on experimental results, fabricated H₂ gas sensor with SnO₂ thin film which is thermally treated at 700 ℃ has a superior H₂ gas detection ability, and it can be expected to utilize at the practical applications.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.66-66
• /
• 2011

Anodic titanium dioxide (TiO2) nanotubes are very attractive materials for gas sensors due to its large surface to volume ratios. The most widely known method for fabrication of TiO2 nanotubes is anodic oxidation of metallic Ti foil. Since the remaining Ti substrate is a metallic conductor, TiO2 nanotube arrays on Ti are not appropriate for gas sensor applications. Detachment of the TiO2 nanotube arrays from the Ti Substrate or the formation of electrodes onto the TiO2 nanotube arrays have been used to demonstrate gas sensors based on TiO2 nanotubes. But the sensitivity was much lower than those of TiO2 gas sensors based on conventional TiO2 nanoparticle films. In this study, Ti thin films were deposited onto a SiO2/Si substrate by electron beam evaporation. Samples were anodized in ethylene glycol solution and ammonium fluoride (NH4F) with 0.1wt%, 0.2wt%, 0.3wt% and potentials ranging from 30 to 60V respectively. After anodization, the samples were annealed at $600^{\circ}C$ in air for 1 hours, leading to porous TiO2 films with TiO2 nanotubes. With changing temperature and CO concentration, gas sensor performance of the TiO2 nanotube gas sensors were measured, demonstrating the potential advantages of the porous TiO2 films for gas sensor applications. The details on the fabrication and gas sensing performance of TiO2 nanotube sensors will be presented.

• 한국식품위생안전성학회지
• /
• 제32권6호
• /
• pp.447-454
• /
• 2017

본 연구의 목적은 식품 제조 중 표백 및 살균에 사용되는 과산화수소($H_2O_2$)의 잔류 농도 검출에 활용 될 수 있는 유리탄소전극 기반의 바이오센서의 개발이다. 미국 FDA 및 국내 식품의학안전처 등 식품 용 과산화수소(food grade $H_2O_2$)는 국내외적으로 35% $H_2O_2$ 수용액으로 규정한다. 연구에서 개발한 바이오센서는 감응 물질로 사용된 horseradish peroxidase를 graphene oxide와 aniline과 함께 biocomposite를 형성시킨 후 중성 pH에서 본 연구에서 새롭게 개발된 전기화학적 증착법을 수행하여 개발되었다. 센서구조 및 특성 평가를 위하여 SEM, 순환 전압 전류법 등을 수행하였으며 본 연구에서 개발된 바이오센서는 $10-500{\mu}M$ 농도의 $H_2O_2$에 대하여 직선상의 농도 의존적인 반응을 나타내었으며 최저 검출 한계는 $0.12{\mu}M$으로 산출되었다. 본 연구에서 개발된 센서의 전략적 가치는 향후 오징어포, 건어물 등 널리 유통되는 식품 중에 함유된 식품용 $H_2O_2$ 미량을 현장에서 쉽게 분석 할 수 있어서 비용-효과적 측면에서 그 가치가 우수하다는 것을 제시한다.

• 한국세라믹학회지
• /
• 제27권5호
• /
• pp.638-644
• /
• 1990

The C3H8 gas sensitivities of SnO2, Pd-SnO2, Pt-SnO2 gas sensor are looked over with the impregnation method of PdCl2, H2PtCl6 solution on SnO2. The Cl- ion due to incomplete decomposition of PdCl2 at 80$0^{\circ}C$ for 30 min decrease the C3H8 gas sensitivity of SnO2, and the sensitivity is increased by the impreganation of H2PtCl6 solution on SnO2 because of its lower decomposition temperature compared with PdCl2. The C3H8 gas sensitivities of Pd-SnO2, Pt-SnO2 impregnated slightly after 1st sintering are larger than that of pure SnO2 sensor because very small amount of Cl- ion exist in sample due to smaller amount of impregnaiton.

• 한국결정성장학회지
• /
• 제20권5호
• /
• pp.221-226
• /
• 2010

메칠멜캅탄($CH_3SH$) 가스를 검출하는 수정진동자(QCM) 가스센서를 QCM의 전극에 $TiO_2$ 나노입자와 전해질 폴리머를 증착하여 제조하였다. LBL-SA법에 의해 제조된 $TiO_2$/PSS 박막은 높은 비표면적을 나타내었고, 가스센서의 감도를 증가시켰다. 1.0 ppm의 농도를 갖는 메칠멜캅탄에 노출된 TEA 혹은 $TiO_2$/PSS 막이 증착된 QCM의 주파수 변이는 각각 약 9 Hz, 2 Hz 였다. ($TiO_2$/PSS) 박막의 증착수가 늘어남에 따라 제조된 박막의 비표면적이 증가하게 되어 QCM 센서의 주파수 변이도 점차적으로 증가하였다. 추가적으로 메칠멜캅탄 가스의 농도가 0.5 ppm에서 2.0 ppm으로 높아짐에 따라 QCM 센서의 주파수 변화도 증가되었다. 본 연구에서는, ($TiO_2$/PSS) 박막이 증착된 QCM 센서의 표면구조의 변화와 센서 특성을 측정하였다.

• 센서학회지
• /
• 제30권4호
• /
• pp.191-195
• /
• 2021

Pure ZnFe₂O₄ and Fe₂O₃-ZnFe₂O₄ hetero-composite spheres were prepared by ultrasonic spray pyrolysis of a solution containing Zn- and Fe-nitrates. Additionally, the sensing characteristics of these spheres in the presence of 5 ppm ethanol, benzene, p-xylene, toluene, and CO (within the temperature range of 275-350 ℃) were investigated. The Fe₂O₃-ZnFe₂O₄ hetero-composite sensor with a cation ratio of [Zn]:[Fe]=1:3 exhibited a high response (resistance ratio = 140.2) and selectivity (response to p-xylene/response to ethanol = 3.4) to 5 ppm p-xylene at 300 ℃, whereas the pure ZnFe₂O₄ sensor showed a comparatively lower gas response and selectivity. The reasons for the superior response and selectivity to p-xylene in Fe₂O₃-ZnFe₂O₄ hetero-composite sensor were discussed in relation to the electronic sensitization due to charge transfer at Fe₂O₃-ZnFe₂O₄ interface and Fe₂O₃-induced catalytic promotion of gas sensing reaction. The sensor can be used to monitor harmful volatile organic compounds and indoor air pollutants.

• 한국전기전자재료학회논문지
• /
• 제25권2호
• /
• pp.91-95
• /
• 2012

ZnO thin films were deposited on p-type 4H-SiC substrate by pulsed laser deposition. ZnO nanowires were formed on p-type 4H-SiC substrate by furnace. Ti/Au electrodes were deposited on ZnO thin film/SiC and ZnO nanowire/SiC structures, respectively. Structural and crystallographical properties of the fabricated ZnO thin film/SiC and ZnO nanowire/SiC structures were investigated by field emission scanning electron microscope and X-ray diffraction. In this work, resistance and sensitivity of ZnO thin film/SiC gas sensor and ZnO nanowire/SiC gas sensor were measured at $300^{\circ}C$ with various CO gas concentrations (0%, 90%, 70%, and 50%). Resistance of gas sensor decreases at CO gas atmosphere. Sensitivity of ZnO nanowire/SiC gas sensor is twice as big as sensitivity of ZnO thin film/SiC gas sensor.

• 한국전기전자재료학회논문지
• /
• 제25권1호
• /
• pp.33-36
• /
• 2012

In this study, the thickness effects of $Al_2O_3$ layer on the sensing properties of $SiO_2/Al_2O_3$ (OA) stacked membrane were investigated using electrolyte-insulator-semiconductor (EIS) structure for high quality pH sensor. The $Al_2O_3$ layers with a respective thickness of 5 nm, 15 nm, 23 nm, 50 nm, and 100 nm were deposited on the 5-nm-thick $SiO_2$ layers. The electrical characteristics and sensing properties of each OA membranes were investigated using metal-insulator-semiconductor (MIS) and EIS devices, respectively. As a result, the OA stacked membrane with 23-nm-thick $Al_2O_3$ layer shows the excellent characteristics as a sensing membrane of EIS sensor, which can enhance the signal to noise ratio.

• 한국안전학회지
• /
• 제30권6호
• /
• pp.117-121
• /
• 2015

$O_2$-deficiency related accidents occur every year and the most effective way to prevent them is to measure $O_2$ concentration in air with a properly-calibrated $O_2$ monitoring device before entering low-$O_2$ areas. An electro-chemical sensor, Texas Instrument gas platform, and iPhone are used to construct a smartphone-based $O_2$ monitoring device. The smartphone based $O_2$ measuring approach offers advantages of small size, accessibility, internet-connectivity, and programmability in comparison to conventional $O_2$ measuring devices. Multiple gas sensors can be conveniently interfaced to single smartphone, allowing for creating a network of gas sensors distributed across workplaces and remote monitoring via existing mobile communication network. To check proper function of the $O_2$ monitoring device the sensor was exposed to shallow and deep human breaths. The readings decreased immediately after being exposed to exhalation and recovered during inhalation to a calibrated level of 20.9%. When readings decreased below a preset warning value of 19.5%, a low $O_2$ warning was successfully activated on the smartphone.

• 한국군사과학기술학회지
• /
• 제6권3호
• /
• pp.54-61
• /
• 2003

$SnO_2$ gas sensor for the detection DMMP, simulant of nerve gas was fabricated and its characteristics were examined. Sensing materials were $SnO_2$ added by TEX>$\alpha$-$Al_{2}O_{3}$ with 0∼20wt.% and $In_{2}O_{3}$ with 0∼3wt.% and were physically mixed each material. They were deposited by screen printing method on alumina substrate. The sensor was consisted of sensing electrode with interdigit(IDT) type in front and a heater in back side. Its dimension was 7$\times$10$\times$0.6$\textrm{mm}^2$. Crystallite size 8t phase identification, specific surface area and morphology of fabricated $SnO_2$ powders were analyzed by X-ray diffraction(XRD), surface area analyzer(BET) and by a scanning electron microscope(SEM), respectively. Sensor was measured as flow type and sensor resistance change was monitored as real time using LabVIEW program. The best sensitivities were 75% at adding 4wt.% TEX>$\alpha$-$Al_{2}O_{3}$, operating temperature $300^{\circ}C$ and 87% at adding 2wt.% $In_{2}O_{3}$, operating temperature $350^{\circ}C$ to DMMP 0.5ppm. Response and recovery times were about 1 and 3 min., respectively. Repetition measurement was very good with $\pm$3% in full scale. As a result, operating temperature was lower TEX>$\alpha$-$Al_{2}O_{3}$ than $In_{2}O_{3}$, but sensitivity was higher $In_{2}O_{3}$ than $\alpha$-$Al_{2}O_{3}$.