• Title/Summary/Keyword: $O_2$ Sensor

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Measurement of the Shape of the Cold Neutron Source Vertical Hole by Ultrasonic Wave Sensor (초음파센서를 이용한 냉중성자원 수직공 형상측정)

  • Park, Guk-Nam;Choe, Chang-Ung;Sim, Cheol-Mu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.9 s.180
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    • pp.2167-2173
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    • 2000
  • The HANARO (High-flux Advanced Neutron Application Reactor) has operated since 1995. The Cold Neutron(CN) hole was implanted in the reflector tank from the design stage. Before a vacuum chamber and a moderator cell for the cold neutron source are installed into the CN hole, it is necessary to measure the exact size of the inside diameter and thickness of the CN hole to prevent the interference problem. Due to inaccessibility and high radiation field in the CN hole, a mechanical measurement method is not permitted. The immersion ultrasonic technique is considered as the best method to measure the thickness and the diameter. The 4 axis manipulator of the 2 channel of a sensor module was fabricated. The transducer of 10 MHz results in 0.03 nun of resolution. The inside diameter and thickness for 550 points of the CN hole were measured using 2 channel ultrasonic sensors. The results showed that the thickness is in the range of 13-6.7 mm and inside diameter is in the range of o 156-165. These data will be a good reference in the design of a cold neutron source facility.

NOx Gas Detecting Properties of the Nitrocellulose/MWCNT Thin Film Coated on the Glass Substrate (유리 기판 위에 제작된 Nitrocellulose/MWCNT 박막의 질소가스 검출특성)

  • Lee, Won Jae;Choi, Myung Kyu;Jang, Kyung Uk
    • Journal of the Semiconductor & Display Technology
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    • v.11 no.1
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    • pp.55-59
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    • 2012
  • NOx is one of the toxin gases, which is mainly causing the optic-chemical smog phenomena, and decreasing in the function of nose and taste. Especially, NO is easily reacting with $O_3$, and then becoming the $NO_2$. $NO_2$ is mainly causing the acidulation rain. So, we should develop the NOx gas sensing system to detect NOx gas. In this paper, we present the microstructure and the NOx gas detecting properties of the nitrocellulose/MWCNT thin film coated by the air-spray on the glass substrate. The nitrocellulose/MWCNT-based gas sensors have been studied detecting NOx molecules of a ppm-level at the temperature range of $30{\sim}120^{\circ}C$. The resistance of the sensors decreases when the sensors are exposed to NOx gas. As a results, we obtained the nitrocellulose/MWCNT sensors with the sensitivity of 0.6%/sec under the 0.8 ppm of NOx gas concetration. Also, we get the activation energy of 0.202eV from the sensor for the 0.3 ppm of NOx gas concentration.

Comparative Study on the Interface and Interaction for Manipulating 3D Virtual Objects in a Virtual Reality Environment (가상현실 환경에서 3D 가상객체 조작을 위한 인터페이스와 인터랙션 비교 연구)

  • Park, Kyeong-Beom;Lee, Jae Yeol
    • Korean Journal of Computational Design and Engineering
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    • v.21 no.1
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    • pp.20-30
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    • 2016
  • Recently immersive virtual reality (VR) becomes popular due to the advanced development of I/O interfaces and related SWs for effectively constructing VR environments. In particular, natural and intuitive manipulation of 3D virtual objects is still considered as one of the most important user interaction issues. This paper presents a comparative study on the manipulation and interaction of 3D virtual objects using different interfaces and interactions in three VR environments. The comparative study includes both quantitative and qualitative aspects. Three different experimental setups are 1) typical desktop-based VR using mouse and keyboard, 2) hand gesture-supported desktop VR using a Leap Motion sensor, and 3) immersive VR by wearing an HMD with hand gesture interaction using a Leap Motion sensor. In the desktop VR with hand gestures, the Leap Motion sensor is put on the desk. On the other hand, in the immersive VR, the sensor is mounted on the HMD so that the user can manipulate virtual objects in the front of the HMD. For the quantitative analysis, a task completion time and success rate were measured. Experimental tasks require complex 3D transformation such as simultaneous 3D translation and 3D rotation. For the qualitative analysis, various factors relating to user experience such as ease of use, natural interaction, and stressfulness were evaluated. The qualitative and quantitative analyses show that the immersive VR with the natural hand gesture provides more intuitive and natural interactions, supports fast and effective performance on task completion, but causes stressful condition.

Polymeric Waveguide Bio Sensors with Bragg Gratings (브래그 격자 광도파로형 바이오 센서)

  • Lee, Jae-Hyun;Kim, Gyeong-Jo;Oh, Min-Choel
    • Korean Journal of Optics and Photonics
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    • v.17 no.1
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    • pp.54-59
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    • 2006
  • Biophotonic sensors based on polymer waveguide with Bragg reflection grating are demonstrated in this work. Waveguide Bragg reflectors were designed by using the effective index method and the transmission matrix method. The grating pattern was formed by exposing the laser interference pattern on a photoresist. On top of the inverted rib waveguide, the Bragg reflection grating was inscribed by the O2 plasma etching. In order to perform the bio-molecule detection experiment, a calixarene molecule was self-assembled on top of thin Au film deposited on the waveguide Bragg reflector. To measure the response of the sensor, several PBS solutions with different concentrations of potassium ion from 1 pM to $100\;{\mu}M$ were dropped on the sensor surface. The shift of Bragg reflection wavelength was observed from the fabricated sensor device, which was proportional to the concentration of potassium ion ranging from 1 pM to 108 pM.

Effects of Process Variables on the Microstructure and Gas Sensing Characteristics of Magnetron Sputtered $\textrm{SnO}_2$Thin Films (마그네트론 스퍼터링 증착 조건에 따른 $\textrm{SnO}_2$ 박막의 미세구조와 가스검지특성 변화)

  • Kim, Jong-Min;Moon, Jong-Ha;Lee, Byung-Teak
    • Korean Journal of Materials Research
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    • v.9 no.11
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    • pp.1083-1087
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    • 1999
  • Microstructures and the gas-sensing characteristics of the $\textrm{SnO}_2$ thin films were studied, which were deposited at various conditions (rf power, sample temperature, $\textrm{O}_2$/Ar ratio) by the rf magnetron sputtering. As a result, six typical microstructures were derived, such as amorphous(A), amorphous mixed with polycrystalline grains (A+P), polycrystalline with random crystalographic orientation (P), fine columnar (FC), coarse columnar (CC) and Zone T (T) with dense fiberous structure. Typically, A, A+ P, and P structures were formed when no $\textrm{O}_2$ was added to the sputter gas, whereas FC, CC, and T structures were obtained when $\textrm{O}_2$ was added. The A structure formed at low rf power and low temperature, the A+P at high rf power and low temperature, and the P at high rf power and high temperature. The FC structure was obtained at low rf power and low temperature. the CC at low rf power and high temperature, and the T at high rf power and low temperature. Results of the gas-sensing test of the sensor chips fabricated from the typical films indicated that the fine columnar microstructure shows the highest sensitivity both at $300^{\circ}C$ and $400^{\circ}C$. It was proposed that this is due to the high specific surface area of the micro-columns.

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Planar microchip-based lactate biosensor (평면 소자형 락테이트 바이오센서)

  • Ha, Jeonghan;Huh, Hwang;Kang, Tae Young;Lee, Yong Seok;Yoon, Soon Ho;Shin, Jungwon;Nam, Hakhyun;Cha, Geun Sig
    • Analytical Science and Technology
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    • v.19 no.6
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    • pp.482-489
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    • 2006
  • Two electrode-based lactate biosensor was prepared by immobilizing lactate oxidase (LOD) obtained from pediococcus species in a poly(vinyl alcohol). Hydrogen peroxide ($H_2O_2$) produced by the reaction of lactate and LOD was detected on the Pt-black that was electrochemically deposited on the Au electrode. Sensors fabricated with Pt-black deposited Au electrode provided a high current of $H_2O_2$ oxidation at a substantially lowered applied potential (+300 mV vs. Ag/AgCl), resulting in reduced interferences from easily oxidizable species such as ascorbic acid, acetaminophen, and uric acid. An outer membrane is formulated by adjusting water uptake of hydrophilic polyurethane (HPU). The sensor performance was evaluated in vitro with both flow-through arrangement and static mode. The sensor showed a linear range from 0.1 mM to about 9.0 mM in 0.05 M phosphate buffer (pH 7.6) containing 0.05 M NaCl. Storing the sensors prepared in this work at $4^{\circ}C$ buffer solution while not in use, they provided same electrochemical performance for more than 25 days.

Fabrication and characteristics of TFEL device using phosphor layer ZnS:Mn/$ZnS:TbF_{3}$ slatted structure (ZnS:Mn/$ZnS:TbF_{3}$ 적층구조의 형광층을 이용한 TFEL소자의 제작 및 그 특성)

  • Park, Kyung-Vin;Kim, H.W.;Bae, S.C.;Kim, Y.J.;Cho, K.H.;Kim, K.W.
    • Journal of Sensor Science and Technology
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    • v.6 no.1
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    • pp.63-71
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    • 1997
  • The thin-film eletroluminescent (TFEL) device having the stacked structure of ZnS:Mn/$ZnS:TbF_{3}$ has been fabricated. Insulate layers used (Pb,La)$TiO_{3}$ and $SiO_{2}$ thin films. The emission color was white. The TFEL device employing ZnS:Mn/$ZnS:TbF_{3}(8000{\AA})$ stacked phosphor layers showed the threshold voltage of $78V_{rms}$. And the brightness of the TFEL device was $400{\mu}W/cm^{2}$ at the applied voltage of $100V_{rms}$. The emission spectrum of TFEL device had a wavelength from 450nm to 620nm. The manufactured devices can be a practical use as a TFEL devices of red, green and blue by using the color filters.

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Fabrication and NOx sensing Characteristics of $WO_{3}$ doped with $SnO_{2}$ and Pt Thick Film Devices ($SnO_{2}$과 Pt를 첨가한 $WO_{3}$후막센서의 제조 및 NOx감응 특성)

  • Lee, D.S.;Han, S.D.;Park, K.B.;Sim, K.S.;Lee, D.D.;Son, Y.M.
    • Journal of Sensor Science and Technology
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    • v.5 no.5
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    • pp.47-54
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    • 1996
  • Highly sensitive $WO_{3}$ doped with $SnO_{2}$ and Pt thick-film sensors for NOx gas were fabricated. The sensors had a maximum sensitivity at operating temperature of $250^{\circ}C$, but the optimum operation temperature, considering recovery desorption time, was at $330^{\circ}C$. These sensors improved sensitivity, response and recovery time, selectivity and stability, as compared to $WO_{3}$ sensors. The good linearity of sensitivity as a function of the gas concentration exhibited the possibility to be used for concentration meter.

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Virtual Metrology for predicting $SiO_2$ Etch Rate Using Optical Emission Spectroscopy Data

  • Kim, Boom-Soo;Kang, Tae-Yoon;Chun, Sang-Hyun;Son, Seung-Nam;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.464-464
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    • 2010
  • A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

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Fabrication and Evaluation of a Total Organic Carbon Analyzer Using Photocatalysis

  • Do Yeon Lee;Jeong Hee Shin;Jong-Hoo Paik
    • Journal of Sensor Science and Technology
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    • v.32 no.3
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    • pp.140-146
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    • 2023
  • Water quality is crucial for human health and the environment. Accurate measurement of the quantity of organic carbon in water is essential for water quality evaluation, identification of water pollution sources, and appropriate implementation of water treatment measures. Total organic carbon (TOC) analysis is an important tool for this purpose. Although other methods, such as chemical oxygen demand (COD) and biochemical oxygen demand (BOD) are also used to measure organic carbon in water, they have limitations that make TOC analysis a more favorable option in certain situations. For example, COD requires the use of toxic chemicals, and BOD is time-consuming and can produce inconsistent and unreliable results. In contrast, TOC analysis is rapid and reliable, providing accurate measurements of organic carbon content in water. However, common methods for TOC analysis can be complex and energy-intensive because of the use of high-temperature heaters for liquid-to-gas phase transitions and the use of acid, which present safety risks. This study focuses on a TOC analysis method using TiO2 photocatalysis, which has several advantages over conventional TOC analysis methods, including its low cost and easy maintenance. For TiO2, rutile and anatase powders are mixed with an inorganic binder and spray-coated onto a glass fiber substrate. The TiO2 powder and inorganic binder solutions are adjusted to optimize the photocatalytic reaction performance. The TiO2 photocatalysis method is a simple and low-power approach to TOC analysis, making it a promising alternative to commonly used TOC analysis methods. This study aims to contribute to the development of more efficient and cost-effective approaches for water quality analysis and management by exploring the effectiveness and reliability of the developed equipment.