• Transactions on Electrical and Electronic Materials
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• 제18권2호
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• pp.74-77
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• 2017

In this work, we investigated the etching characteristics of TaNO thin films and the selectivity of TaNO to $SiO_2$ in an $O_2$/CF4/Ar inductively coupled plasma (ICP) system. The maximum etch rate of TaNO thin film was 297.1 nm/min at a gas mixing ratio of O2/CF4/Ar (6:16:4 sccm). At the same time, the etch rate was measured as a function of the etching parameters, such as the RF power, DC-bias voltage, and process pressure. X-ray photoelectron spectroscopy analysis showed the efficient destruction of the oxide bonds by the ion bombardment, as well as the accumulation of low volatile reaction products on the etched surface. Based on these data, the ion-assisted chemical reaction was proposed as the main etch mechanism for the $CF_4$-containing plasmas.

• 청정기술
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• 제28권2호
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• pp.117-122
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• 2022

본 연구는 80 kW 연소로에서 초 저 NO_x 버너를 개발하고 실험한 결과를 나타낸 것이다. 실험은 80 kW 단일 버너 연소로에서 진행되었으며, swirl number 변화, 총 당량비, 1차 / 2차 산화제 비율을 변경하여 진행하였다. 본 연구에서는 가스(LNG)를 보조연료로 사용하여 NO_x 생성량을 크게 감소 시킬 수 있었다. 화력발전소에서 석탄 연소 시 발생하는 NO_x의 양은 약 300 ppm이다. 그러나 본 연구에서 사용된 버너는 LNG를 혼소하여 NO_x의 양을 40 ppm까지 감소 시킬 수 있었다. 1차 산화제의 투입량이 보조 연료인 가스가 연소될 만큼만 사용하여 가스와 석탄을 동시에 투입하면 연소가스가 버너 출구에서 고온영역을 형성하여 석탄을 휘발시키므로 N 탈휘발에 포함되어 배출된다. 그러므로 이 후 석탄이 연소 되면 석탄내 포함된 N이 거의 없기 때문에 NO_x 생성량이 감소하는 것이다. 본 연구 결과를 바탕으로 실제 화력발전소 버너를 개발한다면 NO_x 생성을 연소 초기에 대량 감소시킬 수 있을 것으로 예상된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.417-420
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• 1996

We have investigated air/200ppm NO$_2$ gas-detector characteristics of using CuTBP (Copper-tetra-tert-butylphthalocyanine) chemiresistor devices. The CuTBP films were made by Langmuir-Blodgett (LB) techniques. Sensitivity, response time, recovery time, and repoducibility of the devices were measured by current-voltage characteristics. To increase sensitivity, interdigital electrode was used. It was found that a conductance G increases monotonically as the number of interdigital electrode increases, and a Sensitivity, Reproducibility is stable. As far as a current is concerned, the current when N=25 is greater than that when N=1 by 70 or so. It indicates that the number of interdigital electrodes affects the current, sensitivity and stability We have also investigated applicability of the CuTBP chemiresistor device for a gas detector.

• 한국재료학회지
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• 제26권2호
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• pp.84-89
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• 2016

We present the rectifying and nitrogen monoxide (NO) gas sensing properties of an oxide semiconductor heterostructure composed of n-type zinc oxide (ZnO) and p-type copper oxide thin layers. A CuO thin layer was first formed on an indium-tin-oxide-coated glass substrate by sol-gel spin coating method using copper acetate monohydrate and diethanolamine as precursors; then, to form a p-n oxide heterostructure, a ZnO thin layer was spin-coated on the CuO layer using copper zinc dihydrate and diethanolamine. The crystalline structures and microstructures of the heterojunction materials were examined using X-ray diffraction and scanning electron microscopy. The observed current-voltage characteristics of the p-n oxide heterostructure showed a non-linear diode-like rectifying behavior at various temperatures ranging from room temperature to $200^{\circ}C$. When the spin-coated ZnO/CuO heterojunction was exposed to the acceptor gas NO in dry air, a significant increase in the forward diode current of the p-n junction was observed. It was found that the NO gas response of the ZnO/CuO heterostructure exhibited a maximum value at an operating temperature as low as $100^{\circ}C$ and increased gradually with increasing of the NO gas concentration up to 30 ppm. The experimental results indicate that the spin-coated ZnO/CuO heterojunction structure has significant potential applications for gas sensors and other oxide electronics.

• 공업화학
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• 제10권6호
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• pp.857-862
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• 1999

아민화된 poly(ether sulfone)(APES)는 poly(ether sulfone)(PES)를 질산과 황산(촉매)의 혼산으로 니트로화한 poly(ether sulfone)(NPES)를 아민화하여 제조되었다. FT-IR의 분석 결과 1537과 $1351cm^{-1}$에서 $NO_2$의 비대칭 신축진동과 대칭 신축진동에 의한 흡수피크로 니트로화가 되었음이 확인되었다. 또한 NPES의 아민화는 $NO_2$에 의한 흡수피크가 사라지고 3470과 $3374cm^{-1}$에서 $NH_2$기에 의한 비대칭 신축진동과 대칭 신축진동의 흡수피크로 확인되었다. PES(5 g; 21.55 mmol.)에 대한 니트로화의 최적 조건은 반응시간 12시간, 반응온도 $120^{\circ}C$, 질산의 농도 28.00 mmol. 황산의 농도 52.00 mmol. 이었다. APES의 원소분석결과 반복단위당 0.89개의 아민기가 도입되었다. 실리카겔이나 활성탄소보다 흡착속도는 느리나 NO에 대한 흡착능이 우수하였고, 화학적인 흡착속도는 물리적 흡착속도보다 느리며, 화학적 흡착량이 물리적 흡착량 보다 높은 것을 알 수 있었다.

• 한국수소및신에너지학회논문집
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• 제22권6호
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• pp.925-933
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• 2011

The traditional feedstock for dimethyl ether (DME) has been natural gas obtained by pipeline from a nearby natural gas or oil field. This report focuses on other feedstock: Coal bed methane (CBM). The resource availability and suitability of CBM for DME manufacturing have been investigated. CBM in a short time has become an important industry, providing an abundant clean-burning fuel and also suggesting as a feedstock for gas industry. The use of CBM will have very little impact on the KOGAS' DME process design and economics up to 50 vol% of $CO_2$ in the CBM source. Many of the CBM sources in Asia are high in $CO_2$, but pose no difficulties for the KOGAS' DME plant. Since tri-reformer requires substantial $CO_2$ in its feed, no $CO_2$ removal from the CBM feed is needed. The $CO_2$ in the CBM means that less $CO_2$ needs to be recycled from the downstream in the process.

• 한국전기전자재료학회논문지
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• 제27권9호
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• pp.589-593
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• 2014

AlNO multi-layer thin films on aluminum substrates were prepared by DC reactive magnetron sputtering method. $Al_2O_3$/AlNO(LMVF)/AlNO(HMVF)/Al/substrate of 4 multi-layer has been prepared in an Ar and ($N_2+O_2$) gas mixture, and $Al_2O_3$ of top layer is anti-reflection layer on double AlNO(LMVF)/AlNO(HMVF) layers and Al metal of infrared reflection layer. In this study, the roughness and surface properties of AlNO thin films were estimated by field emission scanning electron microscopy(FE-SEM). The grain size of AlNO thin films increased with increasing sputtering power. The composition of thin films has been systematically investigated using electron probe microanalysis(EPMA). The optical properties with wavelength spectrum were recorded by UV-Vis-NIR spectrophotometry at a range of 200~1,500 nm. The absorptance of AlNO films shows the increasing trend with swelling ($N_2+O_2$) gas mixture in HMVF and LMVF deposition. The excellent optical performance showed above 98% of absorptance in visible wavelength region.

• 한국분무공학회지
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• 제20권3호
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• pp.149-155
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• 2015

With increasing of GDP, the registration number of passenger cars has exceeded 20 million last year in Korea. Especially, the registration number of the diesel engine vehicles has been increasing. However, the WHO(World Health Organization) IARC (International Agency for Research on Cancer) has reported that diesel engine exhaust gas is an one of HAPs, which has carcinogenic for human, and they have designated it to Group 1. To solve this problem, exhaust gas from diesel engines has to be controlled. Thus, it has been controlling by European regulatory standard in Korea. On the other hand, in order to meet the enhanced emission regulations, all manufacturing company applied $NO_x$ control device to vehicles such as EGR (Exhaust Gas Recirculation), SCR (Selective Catalytic Reduction) and so on. However, these devices (EGR, SCR) were operated by difference reaction mechanism respectively, and the composition of exhaust gas would be differenced from that of them. In this study, it was conducted to evaluate variety characteristics on changing of exhaust gas composition by each $NO_x$ control device, and the heavy duty diesel trucks were chosen as experimental vehicles. From the result, it revealed that vehicles (with EGR) were discharged higher THC as 52.5% than that of others (with SCR). However, it did not followed that trend, in the case of CO; it was discharged as 57.2% lower than that of others (with SCR). In the future, these data would be used to apply to efficient $NO_x$ control device for meeting to EURO 6.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1247-1249
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• 1997

Langmuir-Blodgett(LB) method is one of the ways of fabricating organic ultra thin films. It is well known that It has the advantage to control the alignment and orientation of the molecules in the films. Metallo-phthalocyanines (MPcs) are sensitive to electron affinitive toxic gaseous molecules, such as $NO_2$, NO, $SO_2$. In this study, thin films of octa-dodecyloxy copper-phthalocyanine were prepared by LB method and characterized by using UV/Vis absorption spectroscopy and ellipsometry. Optimal transfer condition of LB films was investigated and preliminary results of current-voltage (I-V) characteristics of these films exposed to $NO_2$ gas as a function of film thickness.

• 전자공학회논문지A
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• 제32A권7호
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• pp.85-93
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• 1995

In this study, phthalocyanine thin films were prepared by vacuum sublimation method and investigated sensing characteristics of the films. The phthalocyannies used for the prepaation of the NO$_{x}$ sensors were metal-free Pc(H$_{2}$Pc) and metal Pc(CuPc, CoPc, PbPc). And the substrate temperatures maintained during the fomation of Pc films were varied between R.T. and 200$^{\circ]C$, and the base pressure was 5${\times}10^{6}$ torr. The relationships between NO$_{2}$ sensing properties and SEM analyses as a function of substrate temperatures during the formation of the films were investigated. Among the Pc films, PbPc film showed the best sensing characteristics. Particularlly, the PbPc films prepared at 70$^{\circ]C$ of the substrage temperature showen good sensitivity of 85% to 1ppm NO$_{2}$ gas at operating temperature 190$^{\circ]C$ and response time was about 24 seconds.