• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1990년도 추계학술대회 논문집 학회본부
• /
• pp.85-87
• /
• 1990

Silicon nitride film was deposited on a silicon wafer using a laser CVD(LCVD) technique, which is based on direct photolysis of $SiH_4/NH_3$ gas mixture by ArF laser beam(${\lambda}=193\;nm$). The refractive index of deposited SiN film is 1.9 at the temperature of $300^{\circ}C$, pressure of 5 torr. The breakdown field strength of LCVD SiN film was 10MV/cm. In IR spectrum, the absorption peak of Si-H, N-H, and Si-N is detected and it is shown that hydrogen is included in SiN film. From analysis of absorption band. it is calculated that density of Si-H, N-H bond is higher than $5{\times}10^{22}cm^{-3}$. LCVD MIS capacitor and PECVD MIS capacitor have injection-type hysteresis but it is known that hysteresis loss of LCVD MIS capacitor is smaller than that of PECVD MIS capacitor. It means that Interface state density of LCVD capacitor is smaller than that of PECVD capacitor. In addition, the flatband voltage($V_{FB}$) of LCVD is smaller than that of PECVD capacitor. And it means that fixed charged density($Q_{FIX}$) of LCVD capacitor is smaller than that of PECVD MIS capacitor.

• 한국재료학회지
• /
• 제24권4호
• /
• pp.194-200
• /
• 2014

Metallic Cr film coatings of $1.2{\mu}m$ thickness were prepared by DC magnetron sputter deposition method on c-plane sapphire substrates. The thin Cr films were ammoniated during horizontal furnace thermal annealing for 10-240 min in $NH_3$ gas flow conditions between 400 and $900^{\circ}C$. After annealing, changes in the crystal phase and chemical constituents of the films were characterized using X-ray diffraction (XRD) and energy dispersive X-ray photoelectron spectroscopy (XPS) surface analysis. Nitridation of the metallic Cr films begins at $500^{\circ}C$ and with further increases in annealing temperature not only chromium nitrides ($Cr_2N$ and CrN) but also chromium oxide ($Cr_2O_3$) was detected. The oxygen in the films originated from contamination during the film formation. With further increase of temperature above $800^{\circ}C$, the nitrogen species were sufficiently supplied to the film's surface and transformed to the single-phase of CrN. However, the CrN phase was only available in a very small process window owing to the oxygen contamination during the sputter deposition. From the XPS analysis, the atomic concentration of oxygen in the as-deposited film was about 40 at% and decreased to the value of 15 at% with increase in annealing temperature up to $900^{\circ}C$, while the nitrogen concentration was increased to 42 at%.

• Asian-Australasian Journal of Animal Sciences
• /
• 제14권10호
• /
• pp.1405-1408
• /
• 2001

Ca salt of soybean oil (PSO) and that of mustard oil plus mahua oil (PMOMO) (50:50) were prepared using double decomposition method, and further tested for their fatty acid composition and degree of saponification. Furthermore, the different levels of protected fat of PSO and PMOMO were evaluated in wheat straw based total mixed ration (TMR) in vitro. Results indicated that capric, lauric, myristic, palmitic, steric, oleic, linoleic, leinolenic acids were traces, traces, traces, 10.00, 2.00, 25.00, 58.50, 5.0% in PSO while the corresponding values in PMOMO were 1.08, 0.28, 0.45, 16.9, 12.95, 44.38, 17.46 and 6.50%, respectively. The degree of saponification of both protected fat supplements was more than 80%. Six treatment combinations were tested I.e., blank without feed and fat supplement (T1); control diet with out fat supplement (T2); control diet plus bypass fat supplement (PSO) so that diet contain 5% fat (T3); control diet plus bypass fat supplement (PSO) so that diet contain 7.5% fat (T4); two more diets viz. T5 and T6 were formulated using bypass fat supplement from PMOMO containing 5 and 7.5% fat respectively. TMR was prepared using 50% concentrate mixture and 50% wheat straw. Result indicated that TVFA, $NH_3-N$,TCA-N, total-N and total gas production were increased in treatment diets at 7.5% level of supplementation, however, fermentation pattern remain similar at 5.0% level of supplementation with respect to control diet. Nevertheless, IVDMD and IVOMD values remained unchanged, rather non-significant at both fat levels and with the both fat sources. On the basis of results it was concluded that Ca-salt of Soybean oil or Mustard plus Mahua oil did not show any negative effect either on digestibility or on microbial protein synthesis in rumen, hence the dietary fat upto 7.5% level in total mixed ration based on wheat straw, could be safely used without any adverse effect on rumen fermentation.

• 한국재료학회지
• /
• 제26권1호
• /
• pp.47-53
• /
• 2016

Silicon nitride ($SiN_x:H$) films made by plasma enhanced chemical vapor deposition (PECVD) are generally used as antireflection layers and passivation layers on solar cells. In this study, we investigated the properties of silicon nitride ($SiN_x:H$) films made by PECVD. The passivation properties of $SiN_x:H$ are focused on by making the antireflection properties identical. To make equivalent optical properties of silicon nitride films, the refractive index and thickness of the films are fixed at 2.0 and 90 nm, respectively. This limit makes it easier to evaluate silicon nitride film as a passivation layer in realistic application situations. Next, the effects of the mixture ratio of the process gases with silane ($SiH_4$) and ammonia ($NH_3$) on the passivation qualities of silicon nitride film are evaluated. The absorption coefficient of each film was evaluated by spectrometric ellipsometry, the minority carrier lifetimes were evaluated by quasi-steady-state photo-conductance (QSSPC) measurement. The optical properties were obtained using a UV-visible spectrophotometer. The interface properties were determined by capacitance-voltage (C-V) measurement and the film components were identified by Fourier transform infrared spectroscopy (FT-IR) and Rutherford backscattering spectroscopy detection (RBS) - elastic recoil detection (ERD). In hydrogen passivation, gas ratios of 1:1 and 1:3 show the best surface passivation property among the samples.

• 한국대기환경학회지
• /
• 제33권1호
• /
• pp.64-74
• /
• 2017

In this study, we have analyzed relationship between the measured Water Soluble Organic Carbon (WSOC) concentrations and the estimated aerosol water content of $PM_{10}$ (particulate matter with an aerodynamic diameter of less than or equal to $10{\mu}m$) for the period between September 2006 and August 2007 at Seoul, Korea. Water content of $PM_{10}$ was estimated by using a gas/particle equilibrium model, Simulating composition of Atmospheric Particles at Equilibrium 2 (SCAPE2). The WSOC concentrations showed low correlation with Elemental Carbon (EC), but Water Insoluble Organic Carbon (WISOC) were highly correlated with EC. It seemed that hydrophilic groups were produced by secondary formation rather than primary formation. As with the previous studies, WSOC showed good correlation with secondary ions ($NO_3{^-}$, $SO_4{^{2-}}$, $NH_4{^+}$), especially WSOC was highly correlated with $NO_3{^-}$ that is a secondary ion formed by photochemical oxidation from more local sources than $SO_4{^{2-}}$. No apparent correlation between the measured WSOC and estimated water content was observed. However, WSOC showed good correlation with estimated water content when it was assumed that relative humidity was higher than the deliquescence relative humidity of the system. In conclusion, WSOC is correlated with water content by hygroscopic ions and it is expected that nitrate play an important role among the water content and WSOC.

• 대한기계학회논문집
• /
• 제17권6호
• /
• pp.1556-1571
• /
• 1993

본 연구에서는 소규모 실험장치(6.6kW)를 이용하여 $NO_x$ 저감방법 중에 가장 효율적인 방법이라 알려진 공기 및 연료의 단계적 연소법 (air and fuel staged combustion)을 이용하여, Fuel-N을 함유하고 있는 연료의 $NO_x$ 의 배출특성을 규명함 은 물론 최적 저 $NO_x$ 연소기술 향상방안을 제시하고자 한다.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
• /
• pp.630-630
• /
• 2013

Recently, atomically smooth hexagonal boron nitride(h-BN) known as a white graphene has drawn great attention since the discovery of graphene. h-BN is a III-V compound and has a honeycomb structure very similar to graphene with smaller lattice mismatch. Because of strong covalent sp2bonds like graphene, h-BN provides a high thermal conductivity and mechanical strength as well as chemical stability of h-BN superior to graphene. While graphene has a high electrical conductivity, h-BN has a highly dielectric property as an insulator with optical band gap up to 6eV. Similar to the graphene, h-BN can be applied to a variety of field, such as gate dielectric layers/substrate, ultraviolet emitter, transparent membrane, and protective coatings. However, up until recently, obtaining and controlling good quality monolayer h-BN layers have been too difficult and challenging. In this work, we investigate the controlled synthesis of h-BN layers according to the growth condition, time, temperature, and gas partial pressure. h-BN is obtained by using chemical vapor deposition on Cu foil with ammonia borane (BH3NH3) as a source for h-BN. Scanning Transmission Electron Microscopy (STEM, JEOL-JEM-ARM200F) is used for imaging and structural analysis of h-BN layer. Sample's surface morphology is characterized by Field emission scanning electron microscopy (SEM, JEOL JSM-7100F). h-BN is analyzed by Raman spectroscopy (HORIBA, ARAMIS) and its topographic variations by Atomic force microscopy (AFM, Park Systems XE-100).

• Environmental Engineering Research
• /
• 제18권4호
• /
• pp.229-234
• /
• 2013

This study aimed to develop a new dust collecting system equipped with an activated carbon (A.C.) coated electrode. Before fabrication, pre-treatment of A.C. was performed to remove metal ions within the A.C. to enlarge its specific surface area. Then, pre-treated A.C., black carbon, polyvinyl acetate (PVAc), and methanol were mixed to make a gel compound, which was coated onto aluminum plates to fabricate electrodes. The optimal mixing ratio of A.C., black carbon, PVAc, and methanol was found to be 10 g: 2 g: 3 g: 20 mL. After fabrication, the electrodes were used in the batch-type experiment for $NH_3$ and $H_2S$ removal. The reduction rates of the gases were high at the beginning and slowly reduced with time. Dust collection experiments were conducted in continuous flow, with various voltages applied. Compared to 5 kV, dust removal efficiency was 1.5 times higher when 10 kV was applied. Increasing the number of electrodes applied also increased the collecting efficiency. The correlation coefficient between actual collecting efficiency and trend line was higher than 99%. Consequently, the novel dust collection system equipped with A.C. coated electrode appears to be a promising substitute for existing dust-control devices.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2009년도 춘계학술발표대회
• /
• pp.22.2-22.2
• /
• 2009

Currently, metal silicides become increasingly more essential part as a contact material in complimentary metal-oxide-semiconductor (CMOS). Among various silicides, NiSi has several advantages such as low resistivity against narrow line width and low Si consumption. Generally, metal silicides are formed through physical vapor deposition (PVD) of metal film, followed by annealing. Nanoscale devices require formation of contact in the inside of deep contact holes, especially for memory device. However, PVD may suffer from poor conformality in deep contact holes. Therefore, Atomic layer deposition (ALD) can be a promising method since it can produce thin films with excellent conformality and atomic scale thickness controllability through the self-saturated surface reaction. In this study, Ni thin films were deposited by thermal ALD using bis(dimethylamino-2-methyl-2-butoxo)nickel [Ni(dmamb)2] as a precursor and NH3 gas as a reactant. The Ni ALD produced pure metallic Ni films with low resistivity of 25 $\mu{\Omega}cm$. In addition, it showed the excellent conformality in nanoscale contact holes as well as on Si nanowires. Meanwhile, the Ni ALD was applied to area-selective ALD using octadecyltrichlorosilane (OTS) self-assembled monolayer as a blocking layer. Due to the differences of the nucleation on OTS modified surfaces toward ALD reaction, ALD Ni films were selectively deposited on un-coated OTS region, producing 3 ${\mu}m$-width Ni line patterns without expensive patterning process.

• 한국지하수토양환경학회:학술대회논문집
• /
• 한국지하수토양환경학회 2001년도 제3회 부산.경남지부 심포지엄
• /
• pp.14-28
• /
• 2001

As basic study for purpose bioremedation in oil-contaminated environment, Primarily, we isolated biosurfactant producer- strains utilized of oil-agar plate, and measured surface tension and emulsifying activity. We investigated in oil-contaminated soil and sea water. In this laboratory, Pseudomonas sp. EL-012S strain isolated from oil-contaminated soil was able to product novel biosurfactant under the optimal culture condition. Its condition was n-hexadecane 2.0%, NH$_4$NO$_3$0.4%, Na$_2$HPO$_4$0.6%, KH$_2$PO$_4$0.4%, MgSO$_4$.7$H_2O$ 0.02%, CaCl$_2$.2$H_2O$ 0.001%, FeSO.7$H_2O$ 0.001%, initial pH 7.0 and aeration at 3$0^{\circ}C$, respectively. This biosurfactant was produced in both late-exponential and early-stationary phase. The biosurfactant from Pseudomonas sp. EL-012S was composed of carbohydrate, lipid and protein. The purified-biosurfactant was examined two (biosurfactant type I, II) with the silica gel G60 column chromatography and the purified biosurfactant confirmed thin layer chromatography, high performed liquid chromatography and gas chromatography. The biosurfactant type I involved in carbohydrate-lipid-protein characteristics lowered surface tension of water to 27dyne/cm and interfacial tension 4.5dyne/cm aginst to n-hexadecane and the biosurfactant type B involved in carbohydrate lipid characteristics lowered surface tension of water to 30dyne/cm and interfacial tension 8dyne/cm against to n-hexadecane. Specially type I had the properties such as strong emulsifying activity, emulsion stability, pH-stability, thermo-stability, high cleaning activity and forming ability.