• 대한환경공학회지
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• 제31권11호
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• pp.1019-1024
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• 2009

가시광 활성을 갖는 anatase 결정구조의 $TiO_2-_xN_x$ 나노입자를 암모니아 수용액에서 $TiCl_4$ 가수분해에 의해 제조하였다. 제조한 시료의 특성은 XRD, TEM, $N_2$-sorption 및 DRS로 분석하였다. 질소를 $TiO_2$에 도핑함으로써 광흡수 영역이 순수한 TiO2에 해당하는 390 nm에서 가시광 영역인 530 nm까지 이동하였다. DRS 분석결과로부터 $TiO_2-_xN_x$의 밴드갭이 감소하는 것을 유추할 수 있었다. 광촉매 활성은 가시광 조사하에서 congo red 분해로부터 평가하였다. 질소의 도핑 농도가 적절한 광촉매가 광촉매 활성이 가장 높게 나타났다. 이러한 결과로부터 질소 도핑이 광촉매 활성의 향상에 중요한 역할을 함을 확인할 수 있었다.

• Bulletin of the Korean Chemical Society
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• 제33권7호
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• pp.2309-2314
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• 2012

Ag deposited N-$TiO_2$ composite nanoparticles were prepared via $NH_3$ plasma treatment. X-ray diffraction, UV-vis spectroscopy, photoluminescence, and X-ray photoelectron spectroscopy were used to characterize the prepared $TiO_2$ samples. The plasma treatment did not change the phase composition and particle sizes of $TiO_2$ samples, but extended its absorption edges to the visible light region. The photocatalytic activities were tested in the degradation of an aqueous solution of a reactive dyestuff, methylene blue, under visible light. The photocatalytic activities of Ag deposited N-$TiO_2$ composite nanoparticles were much higher than Ag-$TiO_2$, N-$TiO_2$, and P25. A possible mechanism for the photocatalysis was proposed.

• 한국재료학회지
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• 제5권2호
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• pp.169-177
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• 1995

Cu와 Si사이의 확산방지막으로 1000$\AA$ 두께의 TiN의 특성에 대하여 면저항 측정, 식각패임자국 관찰, X선 회절, AES, TEM 등을 이용하여 조사하였다. TiN 확산방지막은 $550^{\circ}C$, 1시간의 열처리 후에 Cu의 안쪽 확산으로 인해 Si(111)면을 따라 결정결함(전위)을 형성하고, 전위 주위에 Cu 실리사이드로 보이는 석출물들을 형성함으로써 파괴되었다. Al의 경우와는 달리 Si 패임자국이 형성되지 안흔 것으로부터 TiN확산방지막의 파괴는 Cu의 안쪽 확산에 의해서만 일어나는 것을 알 수 있었다. 또한, Al의 경우에는 우수한 확산방지막 특성을 보여주었던 충진처리된 TiN가 Cu의 경우에는 거의 효과가 없는 것을 알 수 있었다. 이것은 Al의 경우에는 TiN의 결정립계에 존재하는 $TiO_{2}$가 Al과 반응하여 $Al_{2}O_{3}$를 형성함으로써 Al의 확산을 방해하는 화학적 효과가 매우 크지만, Cu의 경우에는 CuO 또는 $Cu_{2}O$와 같은 Cu 산화물은$TiO_{2}$에 비해서 열역학적으로 불안정하기 때문에 이러한 화학적 효과를 기대할 수 없으며, 따라서 충진처리 효과가 거의 없는 것으로 이해된다.

• 한국광학회지
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• 제11권5호
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• pp.323-329
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• 2000

[공기 $ISiO_2ITiNI$ 유리]설계의 반사율이 가시광선 영역에서 0이 되는 TiN의 이상적인 복소수 굴절률을 계산하였다. TiN과 $SiO_2$의 각 층의 두께 변화에 따른 2층 무반사 코팅의 반사율을 전사모의하였으며, 그 결과 TiN의 두께를 조절함으로써 최저 반사율 영역의 폭과 반사율을 변화시킬 수 있었고, $SiO_2$층의 두께를 조절함으로써 반사율이 최저가 되는 중심을 이동시킬 수 있었다. RF 마크네트론 스퍼터링 방법으로 증착한 TiN 박막의 화학적, 구조적, 전기적 특성은 각각 Rutherford backscattering spectroscopy (RBS), atomic force microscope(AFM), 4점 탐침 측정기를 이용하였다. 또한 TiN 박막과 2층 무반사 코팅의 광학적 특성은 분광광도계와 variable angle spectroscopic ellipsometer(VASE)를 이용하여 조사하였다. AFM 측정 결과 TiN 박막의 rms 거칠기는 $9~10\AA$으로 비교적 박막의 표면은 균일하고, 높은 기판온도에서 증착한 TiN 박막의 비저항은 4점 탐침측정 결과 $360~730\mu$\Omega $ cm로 매우 낮으며, RBS측정 결과 Ti:O:N=1:0.65:0.95 비율로 산소가 포함되어 있음을 알았다. 이러한 TiN 박막의 특성과 전산모의 바탕으로 증착한 TiN층을 이용한 2층 무반사 무정전 코팅[공기 $ISiO_2ITiNI$ 유리]의 반사율은 440~650 nm영역에서 0.5% 미만이었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.131-131
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• 2012

We present our recent temperature-programmed desorption (TPD) study on catalytic reductions of $NO_x$ such as NO, $NO_2$, and $N_2O$ over rutile $TiO_2$(110) surfaces. Our results indicate that $NO_2$/NO readily reacts to give NO/$N_2O$ desorption at the substrate temperature as low as 100 K/70 K. Interestingly, $N_2O$, however, does not dissociate into $N_2$ and $O_{BBO}$ over the oxygen vacancy on the $TiO_2$(110) surface. Successive reduction of NO and $NO_2$ into $N_2O$ and NO, respectively, leaves oxygen atoms on the $TiO_2$(110) surface in a form of $O_{ad}$, which can induce additional reductive channels of NO and $NO_2$ at higher temperatures up to 400 K. During the repeated TPD cycles of $NO_x$, our x-ray photoelectron spectroscopy (XPS) analysis indicates that no N atom accumulates on the $TiO_2$ surface.

• Bulletin of the Korean Chemical Society
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• 제33권1호
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• pp.199-203
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• 2012

A modified sol-gel method and $N_2$-plasma treatment were used to prepare bulk and surface doped N-$TiO_2$, respectively. XRD, TEM, UV-vis spectroscopy, $N_2$ adsorption, Elemental Analyzer, Photoluminescence, and XP spectra were used to characterize the prepared $TiO_2$ samples. The N doping did not change the phase composition and particle sizes of $TiO_2$ samples, but increased the visible light absorption. The photocatalytic activities were tested in the degradation of an aqueous solution of a reactive dyestuff, methylene blue, under visible light. The photocatalytic activity of surface doped N-$TiO_2$ prepared by $N_2$-plasma was much higher than that of bulk doped N-$TiO_2$ prepared by sol-gel method. The possible mechanism for the photocatalysis was proposed.

• Environmental Engineering Research
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• 제13권4호
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• pp.171-176
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• 2008

Studies on visible-light-driven photocatalysis of air pollutants at indoor air quality (IAQ) levels have been limited. Current study investigated visible-light derived photocatalysis with N-doped and S-doped titanium dioxide ($TiO_2$) for the control of benzene at indoor levels. Two preparation processes were employed for each of the two types of photocatalyst: urea-Degussa P-25 $TiO_2$ and titania-colloid methods for the N-doped $TiO_2$; and titanium isopropoxid- and tetraisopropoxide-thiourea methods for the S-doped $TiO_2$. Furthermore, two coating methods (EDTA- and acetylacetone-dissolving methods) were tested for both the N-doped and S-doped $TiO_2$. The two coating methods exhibited different photocatalytic degradation efficiency for the N-doped photocatalysts, whereas they did not exhibit any difference for the S-doped photocatalysts. In addition, the two doping processes showed different photocatalytic degradation efficiency for both the S-doped and N-doped photocatalysts. For both the N-doped and S-doped $TiO_2$, the photocatalytic oxidation (PCO) efficiency increased as the hydraulic diameter (HD) decreased. The degradation efficiency determined via a PCO system with visible-light induced $TiO_2$ was lower than that with UV-light induced unmodified $TiO_2$, which was obtained from previous studies. Nevertheless, it is noteworthy that for the photocatalytic annular reactor with the HD of 0.5 cm, PCO efficiency increased up to 52% for the N-doped $TiO_2$ and 60% for the S-doped $TiO_2$. Consequently, when combined with the advantage of visible light use over UV light use, it is suggested that with appropriate HD conditions, the visible-light-assisted photocatalytic systems can also become an important tool for improving IAQ.

• 한국분말재료학회지
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• 제24권6호
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• pp.477-482
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• 2017

Nitrogen-doped titanium dioxide (N-doped $TiO_2$) is attracting continuously increasing attention as a material for environmental photocatalysis. The N-atoms can occupy both interstitial and substitutional positions in the solid, with some evidence of a preference for interstitial sites. In this study, N-doped $TiO_2$ is prepared by the sol-gel method using $NH_4OH$ and $NH_4Cl$ as N ion doping agents, and the physical and photocatalytic properties with changes in the synthesis temperature and amount of agent are analyzed. The photocatalytic activities of the N-doped $TiO_2$ samples are evaluated based on the decomposition of methylene blue (MB) under visible-light irradiation. The addition of 5 wt% $NH_4Cl$ produces the best physical properties. As per the UV-vis analysis results, the N-doped $TiO_2$ exhibits a higher visible-light activity than the undoped $TiO_2$. The wavelength of the N-doped $TiO_2$ shifts to the visible-light region up to 412 nm. In addition, this sample shows MB removal of approximately 81%, with the whiteness increasing to +97 when the synthesis temperature is $600^{\circ}C$. The coloration and phase structure of the N-doped $TiO_2$ are characterized in detail using UV-vis, CIE Lab color parameter measurements, and powder X-ray diffraction (XRD).

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.189-189
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• 2016

In this study, the Al-rich AlTiSiN thin films that consisted of TiN/AlSiN nano-multilayers were deposited on the steel substrate by magnetron sputtering, and their high-temperature oxidation behavior was investigated, which has not yet been adequately studied to date. Since the oxidation behavior of the films depends sensitively on the deposition method and deposition parameters which affect their crystallinity, composition, stoichiometry, thickness, surface roughness, grain size and orientation, the oxidation studies under various conditions are imperative. AlTiSiN nano-multilayer thin films were deposited on a tool steel substrate, and their oxidation behavior of was investigated between 600 and $1000^{\circ}C$ in air. Since the amount of Al which had a high affinity for oxygen was the largest in the film, an ${\alpha}-Al_2O_3-rich$ scale formed, which provided good oxidation resistance. The outer surface scale consisted of ${\alpha}-Al_2O_3$ incoporated with a small amount of Ti, Si, and Fe. Below this outer surface scale, a thin ($Al_2O_3$, $TiO_2$, $SiO_2$)-intermixed scale formed by the inwardly diffusing oxygen. The film oxidized slower than the $TiO_2-forming$ kinetics and TiN films, but faster than ${\alpha}-Al_2O_3-forming$ kinetics. During oxidation, oxygen from the atmosphere diffused inwardly toward the reaction front, whereas nitrogen and the substrate element of iron diffused outwardly to a certain extent.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1998년도 하계종합학술대회논문집
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• pp.383-386
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• 1998

The microwave dielectric properties and sintering properties of the xCaTi $O_{3}$-yMgTi $O_{3}$-z(L $i_{1}$2/N $d_{1}$2/)Ti $O_{3}$ systems were investigated for the development of microwave dielectric materials. Dielectric constants decreased with increasing the amounts of MgTi $O_{3}$ and increased with reducing the amounts of MgTi $O_{3}$ and increased with reducing (L $i_{1}$2/N $d_{1}$2/)Ti $O_{3}$ contents. The microscopic structures were mixed phase with a little second phase. We found some compositions with .tau.$_{f}$ changed from positive to negative value with increasing MgTi $O_{3}$ or (L $i_{1}$2/N $d_{1}$2/)Ti $O_{3}$ contents. The microscopic strucstures were mixed phase with a little second phase. We found some compositions with .tau.$_{f}$ =0ppm/.deg.C. these compmsitions exhibited the stable dielectric properties on the various sintering temperatures.res.