Sputtering yield and secondary electron emission coefficient ($\gamma$ ) of the MgO, $MgAl_2O_4$ and $MgAl_2O_4/MgO$ thin film grown on the Cu substrate by using the Focused Ion Beam
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- 한국정보디스플레이학회:학술대회논문집
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- 2006.08a
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- pp.877-881
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- 2006