• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.11a
• /
• pp.111-112
• /
• 2005

To obtain the single crystal thin films, $CuInSe_2$, mixed crystal was deposited on thoroughly etched semi-insulating GaAs(100) substrate by the hot wail epitaxy (HWE) system. The source and substrate temperatures were 620$^{\circ}C$ and 410$^{\circ}C$, respectively. The crystalline structure of the single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). The carrier density and mobilily of $CuInSe_2$ single crystal thin films measured with Hall effect by van der Pauw method are $9.62\times10^{16}$ $cm^{-3}$ and $296cm^2/V{\cdot}s$ at 293 K, respectively. The temperature dependence of the energy band gap of the CulnSe$_2$ obtained from the absorption spectra was well described by the Varshni's relation E$_g$(T) = 1.1851 eV - ($8.99\times10^{-4}$ ev/K)T$_2$/(T + 153K). After the as-grown $CuInSe_2$ single crystal thin films was annealed in Cu-, Se-, and In-atmospheres the origin of point defects of $CuInSe_2$ single crystal thin films has been investigated by the photoluminescence(PL) at 10 K. The nat ive defects of V$_{Cu}$, $V_{Se}$, Cu$_{int}$, and $Se_{int}$ obtained by PL measurements were classified as a donors or accepters type. And we concluded that the heat-treatment in the Cu-atmosphere converted $CuInSe_2$ single crystal thin films to an optical n-type. Also, we confirmed that In in $CuInSe_2$/GaAs did not form the native defects because In in $CuInSe_2$ single crystal thin films existed in the form of stable bonds.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.229.2-229.2
• /
• 2013

Yttrium oxide (Y2O3)는 band gap이 5.5 eV 정도로 상대적으로 넓고, 굴절상수가 1.8, 유전율이 10~15, Silicon 과의 격자 불일치가 작은 특성을 가지고 있다. 또한 녹는점이 높아 열적으로 안정하기 때문에 전자소자 및 광학소자에 다양하게 응용되는 물질이다. Y2O3 박막은 다양한 방법으로 증착할 수 있는데, 그 방법에는 e-beam evaporation, laser ablation, sputtering, thermal oxidation, metal-organic chemical vapor deposition, and atomic layer deposition (ALD) 등이 있다. ALD는 기판 표면에 흡착된 원자들의 자기 제한적 반응에 의하여 박막이 증착되기 때문에 박막 두께조절이 용이하고 step coverage와 uniformity 측면에서 큰 장점이 있다. 이전에는 Y(thd)3 and Y(CH3Cp)3 와 같은 금속 전구체를 이용하여 ALD를 진행하여, 증착 속도가 낮고 defect이 많아 non-stoichiometric한 조성의 박막이 증착되는 문제점이 있었다. 이번 연구에서는, (iPrCp)2Y(iPr-amd)와 탈이온수를 사용하여 Y2O3 박막을 증착하였다. Y2O3 박막 증착에 사용한 Y 전구체는 상온에서 액체이고 $192^{\circ}C$ 에서 1 Torr의 높은 증기압을 갖는다. Y2O3 박막 증착을 위하여 Y 전구체는 $150^{\circ}C$ 로 가열하여 N2 gas를 이용하여 bubbling 방식으로 공정 챔버 내로 공급하였다. Y2O3 박막의 ALD window는 $250{\sim}350^{\circ}C$ 였으며, Y 전구체의 공급시간이 5초에 다다르자 더 이상 증착 두께가 증가하지 않는 자기 제한적 반응을 확인할 수 있었다. 그리고 증착된 Y2O3 박막의 특성 분석을 위해 Atomic force microscopy (AFM)과 X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES) 를 진행하였다. 박막의 Surface morphology 는 매끄럽고 uniform 하였으며, 특히 고체 금속 전구체를 사용했을 때와 비교하여 수산화물이 거의 없는 박막을 얻을 수 있었다. 그리고 조성 분석을 통해 증착된 Y2O3 박막이 stoichiometric하다는 것을 알수 있었다. 또한 metal-insulator-metal (MIM) 구조 (Ru/Y2O3/Ru) 의 resistor 소자를 형성하여 저항 스위칭 특성을 확인하였다.

• The Journal of Engineering Research
• /
• v.5 no.1
• /
• pp.73-87
• /
• 2004

The synthesis and crystallization of amorphous calcium carbonate($CaCO_3$.$nH_2 O$) obtained from gas-liquid reaction between aqueous solution of calcium hydroxide and carbon dioxide at 15~$50^{\circ}C$ are investigated by electrical conductometry, XRD and TEM. The results are as follows: The initial reaction products prior to the formation of precipitated calcium carbonate is amorphous calcium carbonate. The electrical conductivity values in the slurry are decreased during the formation of amorphous calcium carbonate which covers particle surface of calcium hydroxide and retard the dissolution of calcium hydroxide into the solution. that amorphous calcium carbonate is unstable in the aqueous solution and crystallizes finally to calcite by the through-solution reaction. While amorphous calcium carbonate crystallizes into chain-like calcite, the conductivity values are recovered rapidly and the apparent viscosity of slurry containing higher concentration of calcium hydroxide increase. At below pH 9.5, chain-like calcite separates into individual particles to form precipitated calcium carbonate. The formation and synthetic temperature range of amorphous calcium carbonate is most suitable a primary decreasing step(a-step) at $15^{\circ}C$ in the electrical conductometry.

• Journal of Sensor Science and Technology
• /
• v.13 no.2
• /
• pp.157-167
• /
• 2004

A stoichiometric mixture of evaporating materials for $CuAlSe_{2}$ single crystal thin films was prepared from horizontal electric furnace. To obtain the single crystal thin films, $CuAlSe_{2}$ mixed crystal was deposited on thoroughly etched semi-insulating GaAs(100) substrate by the hot wall epitaxy (HWE) system. The source and substrate temperatures were $680^{\circ}C$ and $410^{\circ}C$, respectively. The crystalline structure of the single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). The carrier density and mobility of $CuAlSe_{2}$ single crystal thin films measured with Hall effect by van der Pauw method are $9.24{\times}10^{16}cm^{-3}$ and $295cm^{2}/V{\codt}s$ at 293 K, respectively. The temperature dependence of the energy band gap of the $CuAlSe_{2}$ obtained from the absorption spectra was well described by the Varshni's relation, $E_{g}(T)$ = 2.8382 eV - ($8.68{\circ}10^{-4}$ eV/K)$T^{2}$/(T + 155 K). The crystal field and the spin-orbit splitting energies for the valence band of the $CuAlSe_{2}$ have been estimated to be 0.2026 eV and 0.2165 eV at 10 K, respectively, by means of the photocurrent spectra and the Hopfield quasicubic model. These results indicate that the splitting of the ${\Delta}so$ definitely exists in the ${\Gamma}_{5}$ states of the valence band of the $CuAlSe_{2}$. The three photocurrent peaks observed at 10 K are ascribed to the $A_{1-}$, $B_{1-}$, and $C_{1-}$ exciton peaks for n = 1.

• Korean Journal of Dental Materials
• /
• v.44 no.2
• /
• pp.151-161
• /
• 2017

The purpose of this study was to examine the effect of shade and thickness of resin-nanoceramic CAD-CAM block (RNB) on the microhardness of dual-cured resin cement, as well as to measure the number of photons transmitted through RNBs of different thicknesses and colors. One dual-cured resin cement was used to prepare resin cement specimens. Resin cement specimens were light-cured for 40 seconds through 3 shades (A1, A2, A3 in HT (high translucency) and LT (low translucency) respectively) and four thicknesses (1, 2, 3, 4 mm) of RNB specimens. Vickers microhardness measurements of resin cement specimens were performed using a Vickers hardness tester. The light transmission of RNB specimens was measured using a spectrometer (SpectroPro-500, Acton Research, Acton, MA, U.S.A.), and the translucency parameter was calculated using the CIEL*a*b* system. Data were statistically analyzed by ANOVA and Tukey's test. There was a significant decrease of microhardness of resin cement specimen with an overlay of 4 mm of RNB thickness and A3 shade in comparison to A1 and 1 mm, respectively (p<0.05). The translucency parameter values and light transmission of RNBs tested differed significantly, according to the thicknesses of the specimen (p<0.05). Light transmission is decreased with increase in the thicknesses of RNBs. Shade A1 transmitted more light than darker blocks. A decrease in microhardness of resin cement specimens was observed with increasing thickness and shade (A1 to A3) of RNBs.