• Title/Summary/Keyword: $In_2O_3$ gas sensor

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Fabrication and Characterization of Portable Electronic Nose System using Gas Sensor Array and Artificial Neural Network (가스센서 어레이와 인공 신경망을 이용한 소형 전자코 시스템의 제작 및 특성)

  • 홍형기;권철한;윤동현;김승렬;이규정
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.99-102
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    • 1997
  • An electronic nose system is an instrument designed far mimicking human olfactory system. It consists generally of gas (odor) sensor array corresponding to olfactory receptors of human nose and artificial neural network pattern recognition technique based on human biological odor sensing mechanism. Considerable attempts to develop the electronic nose system have been made far applications in the fields of floods, drinks, cosmetics, environment monitoring, etc. A portable electronic nose system has been fabricated by using oxide semiconductor gas sensor array and pattern recognition technique such as principal component analysis (PCA) and back propagation artificial neural network The sensor array consists of six thick film gas sensors whose sensing layers are Pd-doped WO$_3$ Pt-doped SnO$_2$ TiO$_2$-Sb$_2$O$_3$-Pd-doped SnO$_2$ TiO$_2$-Sb$_2$O$_{5}$-Pd-doped SnO$_2$+Pd filter layer, A1$_2$O$_3$-doped ZnO and PdCl$_2$-doped SnO$_2$. As an application the system has been used to identify CO/HC car exhausting gases and the identification has been successfully demonstrated.d.

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Classification of Chemical Warfare Agents Using Thick Film Gas Sensor Array (후막 센서 어레이를 이용한 화학 작용제 분류)

  • Kwak Jun-Hyuk;Choi Nak-Jin;Bahn Tae-Hyun;Lim Yeon-Tae;Kim Jae-Chang;Huh Jeung-Soo;Lee Duk-Dong
    • Journal of the Korea Institute of Military Science and Technology
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    • v.7 no.2 s.17
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    • pp.81-87
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    • 2004
  • Semiconductor thick film gas sensors based on tin oxide are fabricated and their gas response characteristics are examined for four simulant gases of chemical warfare agent (CWA)s. The sensing materials are prepared in three different sets. 1) The Pt or Pd $(1,\;2,\;3\;wt.\%)$ as catalyst is impregnated in the base material of $SnO_2$ by impregnation method.2) $Al_2O_3\;(0,\;4,\;12,\;20\;wt.\%),\;In_2O_3\;(1,\;2,\;3\;wt.\%),\;WO_3\;(1,\;2,\;3\;wt.\%),\;TiO_2\;(3,\;5,\;10\;wt.\%)$ or $SiO_2\;(3,\;5,\;10\;wt.\%)$ is added to $SnO_2$ by physical ball milling process. 3) ZnO $(1,\;2,\;3,\;4,\;5\;wt.\%)$ or $ZrO_2\;(1,\;3,\;5\;wt.\%)$ is added to $SnO_2$ by co-precipitation method. Surface morphology, particle size, and specific surface area of fabricated sensing films are performed by the SEM, XRD and BET respectively. Response characteristics are examined for simulant gases with temperature in the range 200 to $400^{\circ}C$, with different gas concentrations. These sensors have high sensitivities more than $50\%$ at 500ppb concentration for test gases and also have shown good repetition tests. Four sensing materials are selected with good sensitivity and stability and are fabricated as a sensor array A sensor array Identities among the four simulant gases through the principal component analysis (PCA). High sensitivity is acquired by using the semiconductor thick film gas sensors and four CWA gases are classified by using a sensor array through PCA.

Detection of Blood Agent Gas Using $SnO_2$ Thin Film Gas Sensor

  • Choi, Nak-Jin;Kwak, Jun-Hyuk;Lim, Yeon-Tae;Joo, Byung-Su;Lee, Duk-Dong;Bahn, Tae-Hyun
    • Journal of Korean Society for Atmospheric Environment
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    • v.20 no.E2
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    • pp.69-75
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    • 2004
  • In this study, thin film gas sensor based on tin oxide was fabricated to examine its characteristics. Target gas is acetonitrile ($CH_3$CN) which is a blood simulant for the chemical warfare agent. Sensing materials are SnO$_2$ SnO$_2$/Pt, and Sn/Pt with thickness from 1000 to 3000 $\AA$. The sensor consists of a sensing electrode with inter-digit (IDT) type in front side and a heater in rear side. Resistance changes of sensing materials are monitored on real time basis using a data acquisition board with a 12-bit analog to digital converter. Sensitivities are measured at different operating temperatures also with different gas concentrations and film thickness. The high sensitivity is obtained for Sn (3000 $\AA$)/Pt (30 $\AA$) at 30$0^{\circ}C$ for 3 ppm. Response and recovery times were about 40 and 160 s, respectively. Repetition measurements showed very good results with $\pm$3% in full scale range.

Characteristics of Catalytic Combustible Gas Sensor Based on Planar Technology (평탄형 접촉 연소식 가스 센서의 특성)

  • Kim, Yeong-Bok;Noh, Hyo-Sub;Park, Jin-Seong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.9
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    • pp.812-817
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    • 2008
  • A catalytic combustible sensor for LPG/LNG detection was fabricated on $Al_2O_3$ substrate using planar technology. The catalysts of Pd and Pt were added to ${\alpha}$- and ${\gamma}-Al_2O_3$ powders. The mixture of Pt, Pd and $Al_2O_3$ were homogenized by using a three roll mixer. TCR characteristics of Pt heater were optimized with the heat treatment temperature. Sensing properties were investigated as a function of the microstructure of $Al_2O_3$, the gas concentration and the variation of input voltage. ${\alpha}-Al_2O_3$ sintered at 500 $^{\circ}C$ is more suitable as LPG/LNG sensor due to good grain shape and size distribution of about 300 nm than that of ${\gamma}-Al_2O_3$ which is in irregular shape and with a particle size of 5-30 ${\mu}m$. The sensor has shown maximum output voltage of 14 mV for 1000 ppm $C_4H_{10}$ and 3.8 mV for 1000 ppm $CH_4$ at 5.0 V input voltage.

The Sensor Response for CO Gas of $LaMO_3$ and $LaFe_{1-x}CO_xO_3$ in Perovskite Type Oxides (Perovskite형 산화물 $LaMO_3$$LaFe_{1-x}CO_xO_3$의 일산화탄소가스에 대한 센서 응답 특성)

  • 임병오;손태원;권동혁
    • Journal of the Korean Society of Safety
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    • v.3 no.1
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    • pp.7-13
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    • 1988
  • The oxides in perovskite type, $LaMO_3$ (M=Ni, Cr, Fe, Co), compared with gas sensors which have been used, were synthesised and then examined sensor response comparatively in order to make a thick film gas sensor having a good gas selectivity, durability and simple manufacturing. The oxides in perovskite type, $LaFe_{1-x}O_3$ (x=0.2, 0.4, 0.6, 0.8), which a part of Fe was replaced with Co, were examined with regard to their electric resistance with variable temperature and sensor response for carbon monoxide gas.

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Xylene Sensor Using Cr-doped Cr-Co3O4 Nanoparticles Prepared by Flame Spray Pyrolysis (화염 분무 열분해법으로 합성된 Cr-Co3O4 나노입자 자일렌 가스센서)

  • Jeong, Seong-Yong;Jo, Young-Moo;Kang, Yun Chan;Lee, Jong-Heun
    • Journal of Sensor Science and Technology
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    • v.29 no.2
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    • pp.112-117
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    • 2020
  • Xylene is a hazardous volatile organic compound that should be precisely measured to monitor indoor air quality. However, the selective and sensitive detection of ppm-level xylene using oxide-semiconductor gas sensors remains a challenge. In this study, pure and Cr-doped Co3O4 nanoparticles (NPs) were prepared using flame spray pyrolysis, and their gas-sensing characteristics to 5-ppm xylene at 250 ℃ were investigated. The 4 at% Cr-doped Co3O4 NPs exhibited a high gas response to 5-ppm xylene (resistance ratio to gas and air = 39.1) and negligible cross-responses to other representative and ubiquitous indoor pollutants such as ethanol, benzene, formaldehyde, carbon monoxide, and ammonia. In this paper, the enhancement of the gas response and selectivity of Co3O4 NPs to xylene by Cr doping was discussed in relation to the catalytic promotion of the gas-sensing reaction. This sensor can be used to monitor indoor xylene.

Highly sensitive xylene sensors using Fe2O3-ZnFe2O4 composite spheres

  • Chan, Jin Fang;Jeon, Jae Kyoung;Moon, Young Kook;Lee, Jong-Heun
    • Journal of Sensor Science and Technology
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    • v.30 no.4
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    • pp.191-195
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    • 2021
  • Pure ZnFe2O4 and Fe2O3-ZnFe2O4 hetero-composite spheres were prepared by ultrasonic spray pyrolysis of a solution containing Zn- and Fe-nitrates. Additionally, the sensing characteristics of these spheres in the presence of 5 ppm ethanol, benzene, p-xylene, toluene, and CO (within the temperature range of 275-350 ℃) were investigated. The Fe2O3-ZnFe2O4 hetero-composite sensor with a cation ratio of [Zn]:[Fe]=1:3 exhibited a high response (resistance ratio = 140.2) and selectivity (response to p-xylene/response to ethanol = 3.4) to 5 ppm p-xylene at 300 ℃, whereas the pure ZnFe2O4 sensor showed a comparatively lower gas response and selectivity. The reasons for the superior response and selectivity to p-xylene in Fe2O3-ZnFe2O4 hetero-composite sensor were discussed in relation to the electronic sensitization due to charge transfer at Fe2O3-ZnFe2O4 interface and Fe2O3-induced catalytic promotion of gas sensing reaction. The sensor can be used to monitor harmful volatile organic compounds and indoor air pollutants.

Characteristics and Preparation of Gas Sensor Using Nano-ZnO Powders (나노 ZnO 분말을 이용한 가스센서 제작 및 특성연구)

  • Yu, Il
    • Korean Journal of Materials Research
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    • v.25 no.6
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    • pp.300-304
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    • 2015
  • Nanorod ZnO and spherical nano ZnO for gas sensors were prepared by hydrothermal reaction method and hydrazine method, respectively. The nano-ZnO gas sensors were fabricated by a screen printing method on alumina substrates. The gas sensing properties were investigated for hydrocarbon gas. The effects of Co concentration on the structural and morphological properties of the nano ZnO:Co were investigated by X-ray diffraction and scanning electron microscope (SEM), respectively. XRD patterns revealed that nanorod and spherical ZnO:Co with a wurtzite structure were grown with (100), (002), (101) peaks. The sensitivity of nanorod and spherical ZnO:Co sensors was measured for 5 ppm $CH_4$ and $CH_3CH_2CH_3$ gas at room temperature by comparing the resistance in air with that in target gases. The highest sensitivity to the $CH_4$ and $CH_3CH_2CH_3$ gas of spherical nano ZnO:Co sensors was observed at Co 6 wt%. The spherical nano ZnO:Co sensor exhibited a higher sensitivity to hydrocarbon gas than nanorod ZnO.

Preparation of $SnO_2$ Semiconducting Gas Sensor by Wet Process (습식방법에 의한 $SnO_2$ 반도체 가스센사 제조)

  • 전병식;김홍대;최병현;최성근
    • Journal of the Korean Ceramic Society
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    • v.23 no.3
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    • pp.53-61
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    • 1986
  • A gas sensor which has been made by wet process had fabricated by coating each of the mixture on alumina tube and firing at 85$0^{\circ}C$ for 3hrs. A gas concentration such $H_2$, CO, $C_3H_8$, $C_2H_2$ and $CH_4$ vs its detection voltage characteristics has been in-vestigated on $SnO_2-In_2O_3-MgO$ system doped with PdO, $La_2O_3$, $ThO_2$, NiO and $Nb_2O_5$ The optimum sensitivity composition for various gases were 90w/o $SnO_2$-9w/o $In_2O_3$-1w/o MgO for $H_2$, $C_2H_2$ CO and $C_3H_8$ and 95w/o $SnO_2$-4w/o $In_2O_3$-1w/o MgO for $CH_4$. The sample which has been made by wet process than dry process had predominated sensitivity for each gases and particle size of the sample coprecipitated with PH=9 was 0.1${\mu}{\textrm}{m}$ The $SnO_2$-In2_O_3-MgO$ system doped with 2w/o $Nb_2O_5$ and NiO was the most sensitive for $H_2$ and $C_2H_2$ gas. In $SnO_2$-In2_O_3-MgO$ system doped with $ThO_2$ the sensitivity of $H_2$ gas was decreased but CO gas was in-creased when dopant con was increased.

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Fabrication and Gas Sensing Properties of WO$_3$Thick Film Gas Sensor Dependent on Heat-Treatment Condition (소성 조건에 따른 WO$_3$계 후막센서소자의 제조 및 응답특성)

  • 정용근;엄우식;이희수;최성철
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.2
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    • pp.63-68
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    • 1999
  • We have fabricated $WO_3$ thick film gas sensor under various firing conditions in order to study gas sensing properties in terms of the variation of microstructure and non-stoichiometric structure of gas sensing layer. $WO_3$ paste mixed homogeneously with organic vehicle was coated by screen printing method on alumina substrate composed of Au electrode and $RuO_2$heater on each side. To change filing condition, sensing materials were fared at 600-$800^{\circ}C$ for 1 hour and refired at $700^{\circ}C$ for 1 hour in the mixtures of $_Ar/O2$gas. In the result of heat-treatment, $WO_3$ gas sensor fared at $700^{\circ}C$ showed best gas sensing properties of 210 gas sensitivity and 2 second response time and the best firing environment was 40-50% of $Ar/O_2$gas.

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