• Journal of the Korean Vacuum Society
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• v.17 no.1
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• pp.16-22
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• 2008

We studied plasma etching of polycarbonate in $O_2/SF_6$, $O_2/N_2$ and $O_2/CH_4$. A capacitively coupled plasma system was employed for the research. For patterning, we used a photolithography method with UV exposure after coating a photoresist on the polycarbonate. Main variables in the experiment were the mixing ratio of $O_2$ and other gases, and RF chuck power. Especially, we used only a mechanical pump for in order to operate the system. The chamber pressure was fixed at 100 mTorr. All of surface profilometry, atomic force microscopy and scanning electron microscopy were used for characterization of the etched polycarbonate samples. According to the results, $O_2/SF_6$ plasmas gave the higher etch rate of the polycarbonate than pure $O_2$ and $SF_6$ plasmas. For example, with maintaining 100W RF chuck power and 100 mTorr chamber pressure, 20 sccm $O_2$ plasma provided about $0.4{\mu}m$/min of polycarbonate etch rate and 20 sccm $SF_6$ produced only $0.2{\mu}m$/min. However, the mixed plasma of 60 % $O_2$ and 40 % $SF_6$ gas flow rate generated about $0.56{\mu}m$ with even low -DC bias induced compared to that of $O_2$. More addition of $SF_6$ to the mixture reduced etch of polycarbonate. The surface roughness of etched polycarbonate was roughed about 3 times worse measured by atomic force microscopy. However examination with scanning electron microscopy indicated that the surface was comparable to that of photoresist. Increase of RF chuck power raised -DC bias on the chuck and etch rate of polycarbonate almost linearly. The etch selectivity of polycarbonate to photoresist was about 1:1. The meaning of these results was that the simple capacitively coupled plasma system can be used to make a microstructure on polymer with $O_2/SF_6$ plasmas. This result can be applied to plasma processing of other polymers.

• Membrane Journal
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• v.9 no.3
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• pp.157-162
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• 1999

In the crosslining reaction of poly(vinyl alcohoJ)(PVA) with sulfur-succinic acid which had been established in our previous work, reaction temperature, 15$0^{\circ}C$, was so high to collapse the pore struc¬tures in support membrane for the preparation of composite membrane. Therefore, the efforts have been focused on lowering of the reaction temperature to 100$^{\circ}$C by using a catalysis, HC!. The newly established crosslinking reaction was characterized through the analysis of the chemical and thermal properties. From these results, the optimum conditions for the membrane preparation couId be drawn as followings : (i) reac¬tion temperature, 100 $^{\circ}C$,(ii) reaction time, 90 min, (iii) the concentration of the catalysis (HCD, 1.5%. Com¬posite membranes were fabricated by coating a casting solution containing PYA, sulfur-succinic acid and HCl on a support membrane followed by crosslinking it at 10$0^{\circ}C$. The resulting membranes were applied to the pervaporation separation of methyl-tert-butyl ether(MTBE)/methanol (MeOH) mixtures at 30, 40, and 5O$^{\circ}C$. The flux of 5.09 g/$m^2$hr at 5O$^{\circ}C$ and the highest separation factor of 1622 were obtained, respectively.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.322-323
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• 2012

This study discussed the formation of phosphate conversion coatings on AZ31 Mg alloy (AZ31) from the zinc phosphating bath with various concentrations of sodium fluoride (NaF). The effects of NaF on the formation, structure, composition and electrochemical behavior of the phosphate coatings were examined using scanning electron microscopy (SEM), X-ray diffraction (XRD) weight balances, open circuit potential (OCP) transients, potentiodynamic polarization curves and immersion test. The coatings were composed of two layers: an outer $Zn_2(PO_4)_3.4H_2O$ (hopeite) crystal layer and an inner amorphous of $MgZn_2(PO_4)_2$. NaF concentration is emphasized to be highly effective in the formation of the hopeite crystal and etching and coating rates. Potentiodynamic polarization and immersion test showed that the coatings formed in the zinc phosphating bath with addition of NaF have much higher corrosion resistance than bare AZ31.

• Journal of Surface Science and Engineering
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• v.30 no.4
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• pp.272-280
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• 1997

The Thermal Barrier Coation(TBC) to improve the that barrier and wear resistant propenrty in high temperature ofthe aircraftength between the accumlation of the aircraft engine and the automobile engine has usually the two layer structure. One is a creamic top layer for heat insulation and the other is a metal bond layer to facilitate the bond strength between the top ceramic layer and the substrate. But, the coated layers should be peeled off because of the accumulation of the thermal stress by the differance of the thermal expantion coefficient between metal and ceramics in a hrat cyclic environment. In this study, the intermediate layer by plasm spray process was introduced to reduce the thermal stress. The powders of plasm spray coating were the Yttria Stabilized Zirconia (YSZ), the Magnesia Stabillized Zirconia(MSZ) and NiCrAlY. the intermediate layer was sprayed with the powders of the bond cast for the purpose of test were executed. The high temperature wear resistance tends to decreasnceee wear and thermal shock test were exeucuted. The high temperature were resistance of the YSZ TBC is better that of the MSZ TBC. The wearrsistance tends to decrease accoring to incresing the temperature between $400^{\circ}C$to $600^{\circ}C$. The thermal shock life of the 3 layer TBC with YSZ top casting was the most outstanding thermal shock rsisstasnce. This means that the intermediate layer should play an importnat roll to alleviate the diffrerence of the thermal expansion coef frcients between metallic layer and cermics layer.

• 한국신재생에너지학회:학술대회논문집
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• 2010.11a
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• pp.114.1-114.1
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• 2010

A highly performed Pd-based hydrogen membrane has prepared successfully on a modified porous nickel support. The porous nickel support modified by impregnation method of $Al(NO_3)_3{\cdot}9H_2O$ (Aldrich Co.) over the nickel powder showed a strong resistance to hydrogen embrittlement and thermal stability. Plasma surface modification treatment was introduced as a pre-treatment process instead of conventional HCl wet activation. Ceramic barrier was coated on the external surface of the prepared nickel supports to prevent intermetallic diffusion and to enhance the affinity between the support and membrane. Palladium and copper were deposited at thicknesses of $4\mu}m$ and $0.5{\mu}m$, respectively, on a barrier-coated support by DC sputtering process. The permeation measurement was performed in pure hydrogen at $400^{\circ}C$. The single gas permeation of our membrane was two times higher than that of the previous membrane which do not have ceramic barrier.

• Transactions on Electrical and Electronic Materials
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• v.7 no.3
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• pp.129-133
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• 2006

Ferroelectric PZT heterolayered thick films were fabricated by the alkoxide-based sol-gel method. PZT(20/80) and PZT(80/20) paste were made and alternately screen-printed on the alumina substrates. The coating and drying procedure was repeated 4 times to form the heterolayered thick films. The thickness of the PZT heterolayered thick films was approximately $60{\mu}m$. All PZT thick films showed the typical XRD patterns of a polycrystalline rhombohedral structure. And in the PZT thick films sintered at $1100^{\circ}C$, the pyrochlore phase was observed due to the evaporation of PbO. The relative dielectric constant and the dielectric loss of the PZT thick films sintered at $1050^{\circ}C$ were 445.2 and 1.90 % at 1 kHz, respectively. The remanent polarization and coercive field of the PZT thick films sintered at $1050^{\circ}C$ were $14.15{\mu}C/cm^2$ and 19.13 kV/cm, respectively.

• Macromolecular Research
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• v.11 no.3
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• pp.157-162
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• 2003

6FDA-based polyimides were prepared from the thermal imidization reaction of 6FDA with diamines of BAPAF, DAP, and DABA having a polar group of hydroxyL or carboxyl. Properties of the dense polyimide membranes were characterized and their gas permeation properties for H$_2$, $CO_2$, $O_2$, $N_2$, and CH$_4$ were investigated. Permeabilities, diffusion coefficients and diffusivity selectivities of polar group-containing polyimide membranes including 6FDA-BAPAF, 6FDA-DAP, and 6FDA-DABA polymer for the gases did not change largely. The separation properties of 6FDA-TrMPD polyimide membrane used as a reference polymer were compared with those of the polyimide membranes mentioned above. It was found that the polyimides of 6FDA-BAPAF, 6FDA-DAP, and 6FDA-DABA, which were soluble in alcohol or/and 2-methoxyethanol, could be applicable to the preparation of a dense composite membrane by dip-coating method.

• Journal of Surface Science and Engineering
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• v.52 no.6
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• pp.283-288
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• 2019

MCrAlY overaly coatings are used as oxidation barrier coatings to prevent degradation of the underlying substrate in high temperature and oxidizing environment of the hot section of gas turbines. Therefore, oxidation resistance in high temperature is important property of MCrAlY coatings. Also, coefficients of thermal expansion (CTE) of MCrAlY have middle value of that of Ni-based superalloys and oxides, which have the effect of preventing the delamination of the surface oxides. Cyclic oxidation test is one of the most useful methods for evaluating the high temperature durability of coatings used in gas turbines. In this study, NiCoCrAlY overlay coatings were formed on Inconel 792(IN 792) substrates by vacuum plasma spraying process. Vacuum plasma sprayed NiCoCrAlY coatings and IN 792 susbstrates were exposed to 1000℃ one-hour cyclic oxidation environment. NiCoCrAlY coatings showed lower weight gain in short-term oxidation. In long-term oxidation, IN 792 substrates showed higher weight loss due to delamination of surface oxide but NiCoCrAlY coatings showed lower weight loss. X-ray diffraction (XRD) analysis showed α-Al2O3 and NiCr₂O₄ was formed during the cyclic oxidation test. Through cross-section observation using scanning electron microscopy (SEM) and electron back scatter diffraction (EBSD) analysis, thermally grown oxide (TGO) layer composed of α-Al₂O₃ and NiCr₂O₄ was formed and the thickness of TGO increased during 1000℃ cyclic oxidation test. β phase in upper side of NiCoCrAlY coating was depleted due to oxidation of Al and outer beta depletion zone thickness also increased as the cyclic oxidation time increased.

• Applied Chemistry for Engineering
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• v.16 no.3
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• pp.385-390
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• 2005

In this study, nano sized colloidal Ag was made by using a seed sol method. Colloidal Ag solution was spouted on the surface of the inorganic pigment using the hybridizer system and spray nozzle. Then, the surface of the inorganic pigment was modified by $TiO_2$ to obtain the antibacterial ability. In the manufacturing process of nano sized colloidal Ag, it was confirmed that the size of particles increased by addition of $AgNO_3$ and increased the reaction time. The antibacterial measurement of the inorganic pigment showed that the growth of fungus decreased as the reaction time was increased. After the antibacterial ability appeared, in 5~7 h of the antibacterial inoculation experiment, it was measured that the antibacterial activity was excellent at a fixed time frame. The photodecomposition of benzene using $TiO_2$ as the photocatalyst showed 60~70% efficiency in about 80 min. reaction time. It was shown that more than 90% of this efficiency was achieved in the reaction time of about 30 min.

• Korean Chemical Engineering Research
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• v.53 no.1
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• pp.78-82
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• 2015

Hollow silica particles were prepared using sodium silicate and organic templates. Polystyrene latex (PSL) particles produced by dispersion polymerization were used as organic templates. PSL particles ranged from $1{\mu}m$ to $3{\mu}m$ in diameter were synthesized by adjusting the amount of 2,2'-azobisisobutyronitrile (AIBN). The PSL/$SiO_2$ core-shell particles were prepared by coating of silica nanoparticles originated from sodium silicate using sol-gel method. The organic templates were removed by the organic solvent, tetrahydrofuran (THF). Morphology of hollow silica particles was investigated with respect to types of the reaction medium and pH during the process. By changing the solvent from ethanol to water, hollow silica particles were successfully formed. Hollow silica particles with the uniform shell thickness were produced at low pH as well. The reflectivity of the as-prepared silica particles was measured in the range of the wavelength of UV and visible light. Hollow silica particles showed much better reflective properties than the commercial light reflector, Insuladd.