• Title/Summary/Keyword: $In_2O_3$ coating

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Fabrication of oxide buffer layers for coated conductors (MOD 공정에 의한 산화물 완충층 제조)

  • Km Young-Kuk;Yoo Jai-Moo;Ko Jae-Woong;Chung Kuk-Chae
    • Progress in Superconductivity and Cryogenics
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    • v.8 no.3
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    • pp.37-40
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    • 2006
  • Oxide buffer layers for YBCO coated conductors were fabricated using MOD processing and development of microstructure and texture were investigated. A $CeO_2$ buffer layers were formed on RABiTS tape. Acetate-based precursor solution was employed to synthesize the precursor solution. Subsequently, the precursor solution was stabilized and modified with triethanolamine. $CeO_2$ precursor gel film was coated and annealed in $Ar/H_2$ atmosphere at high temperature. An annealed $CeO_2$ film shows mixed orientation with high (001) texturing. It was shown that (111) texture of $CeO_2$ layers were enhanced by multiple coating. This degradation was attributed to development of microcracks in the multiply coated $CeO_2$ films. Also discussed are the synthesis and the characterization of $La_2Zr_2O_7$ (LZO) buffer layers on RABiTS tape. A biaxially textured LZO buffer layer was fabricated with MOD processing method using metal alkoxide based precursor solution. It was shown that the LZO film were epitaxially grown on RABiTS tape and crack-free & uniform surface was obtained after annealing in $Ar/H_2$ atmosphere.

Fabrication of Graphene p-n Junction Field Effect Transistors on Patterned Self-Assembled Monolayers/Substrate

  • Cho, Jumi;Jung, Daesung;Kim, Yooseok;Song, Wooseok;Adhikari, Prashanta Dhoj;An, Ki-Seok;Park, Chong-Yun
    • Applied Science and Convergence Technology
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    • v.24 no.3
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    • pp.53-59
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    • 2015
  • The field-effect transistors (FETs) with a graphene-based p-n junction channel were fabricated using the patterned self-assembled monolayers (SAMs). The self-assembled 3-aminopropyltriethoxysilane (APTES) monolayer deposited on $SiO_2$/Si substrate was patterned by hydrogen plasma using selective coating poly-methylmethacrylate (PMMA) as mask. The APTES-SAMS on the $SiO_2$ surface were patterned using selective coating of PMMA. The APTES-SAMs of the region uncovered with PMMA was removed by hydrogen plasma. The graphene synthesized by thermal chemical vapor deposition was transferred onto the patterned APTES-SAM/$SiO_2$ substrate. Both p-type and n-type graphene on the patterned SAM/$SiO_2$ substrate were fabricated. The graphene-based p-n junction was studied using Raman spectroscopy and X-ray photoelectron spectroscopy. To implement low voltage operation device, via ionic liquid ($BmimPF_6$) gate dielectric material, graphene-based p-n junction field effect transistors was fabricated, showing two significant separated Dirac points as a signature for formation of a p-n junction in the graphene channel.

Antireflection Layer Coating for the Red Light Detecting Si Photodiode (적색검출 Si 포토다이오드의 광반사 방지막 처리)

  • Chang, Gee-Keun;Hwang, Yong-Woon;Cho, Jae-Uk;Yi, Sang-Yeoul
    • Korean Journal of Materials Research
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    • v.13 no.6
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    • pp.389-393
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    • 2003
  • The effect of antireflection layer on the reduction of optical loss has been investigated in Si photodiodes detecting red light with central wavelength of 670 nm. The theoretical analysis showed minimum reflection loss of 6% for the $SiO_2$thickness of about $1100∼1200\AA$ in the $SiO_2$-Si system with the single antireflection layer and no reflection loss for the X$N_3$N$_4$$SiO_2$thickness of $2000\AA$/$1200\AA$ in the $Si_3$$N_4$$SiO_2$-Si system with double antireflection layer. In our experiments, Si photodiodes with the web-patterned $p^{+}$-shallow diffusion region were fabricated by bipolar IC process technology and the devices were classified into three kinds according to the structure of $Si_3$$N_4$/$SiO_2$antireflection layer. The fabricated devices showed maximum spectral response in the optical spectrum of 650∼700 nm. The average photocurrents of the devices with the $Si_3$$N_4$$SiO_2$thickness of $1000\AA$/X$SiO\AA$, and $2000\AA$$1800\AA$ under the incident power, of -17 dBm were 3.2 uA, 3.5 uA and 3.1 uA, respectively.

Deposition of Micropattern using The Laser Direct Writing Method with a polymer coating layer (폴리머 코팅층 레이저 직접묘화법을 이용한 미세패턴증착)

  • Lee, Bong-Gu
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.15 no.12
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    • pp.6980-6985
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    • 2014
  • A micro-conductive pattern was fabricated on an insulating substrate ($SiO_2$) surface using a laser direct writing method. In the LIFT process, when the laser beam irradiates a thin metal film, the photon energy is absorbed by the film and converted to thermal energy, and the thermal decomposition reaction produced by the resulting heat conduction forms a deposit on the substrate. The resistivity of the micro-electrodes deposited through LIFT process with and without polymer coating was measured. The results showed that the electric conductivity of the micro-pattern and micro-structure can be increased approximatly two times when the deposited micropattern is fabricated through a LIFT process with a polymer coating, compared to the case without a polymer coating.

Damage Behaviors by Particle Impact Energy of $Al_2O_3-TiO_2$ Coated Glass Specimen ($Al_2O_3-TiO_2$ 용사코팅된 유리의 입자충격 에너지에 따른 손상거동)

  • Lee, Moon-Hwan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.6
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    • pp.107-114
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    • 2012
  • Fracture of brittle material due to dynamic load such a particle impact has been reported by many researchers as the fracture behavior by variation of stress for a short minute. Especially, the brittle material, such a ceramic, applied to the structural component of machine, is considered as the important project. In order to evaluate the improvement of impact resistance, the particle impact test for the $Al_2O_3-TiO_2$ coated glass is practiced. And then, the damage variation according to the impact energy of steel ball was evaluated. There was a large improvement by the ceramic coating on the surface of a glass substrate. The damage volume was especially imported to evaluate damage behavior in quantity. These data were plotted on logarithmic coordinate and experimental equations were induced by data analysis based on test results. And the variation of critical energy for crack initiation was analyzed with critical impact energy when each crack occurs.

The High Temperature Oxidation Behavior of Diffusion Aluminized MarM247 Superalloy

  • Matsunaga, Yasuo;Matsuoka, Akira;Nakagawa, Kiyokazu
    • Corrosion Science and Technology
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    • v.2 no.1
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    • pp.53-57
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    • 2003
  • The MarM247 based superalloy (8wt.%Cr- 9wt.%Co- 3wt.%Ta- 1.5wt.%Hf- 5.6%wt.Al- 9.5wt.%W- Bal. Ni) specimens were diffusion aluminized by for types of pack cementation methods, and their coating structure and their high temperature oxidation resistance were investigated. The coated specimens treated at 973K in high aluminum concentration pack had a coating layer containing large hafunium rich precipitates, which were originally included in substrate alloy. After the high temperature oxidation test in air containing 30 vol.% $H_2O$ at 1273K ~ 323K, the deep localized corrosion which reached to the substrate were observed along with these hafnium rich precipitates. On the other hand, the coated specimens treated at 1323K using low aluminum concentration pack showed the coating layer without the large hafunium rich precipitates, and after the high temperature oxidation test at 1273K for 1800 ksec, it did not show the deep localized corrosion. The nickel electroplating before the aluminizing forms thick hafnium free area, and its high temperature oxidation resistance were comparable to platinum modified aluminizing coatings at 1273K.

Synthesis of Solution-based Sb-doped SnO2 Thin Films

  • Koo, Bon-Ryul;An, Geon-Hyoung;Lee, Yu-jin;Ahn, Hyo-Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.367-367
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    • 2014
  • Transparent conductive oxides (TCOs) 박막은 가시광선영역에서의 높은 투과율과 낮은 저항 특성을 동시에 갖고 있어 최근 smart windows, solar cells, liquid crystal displays (LCD), organic light emitting devices (OLED)등과 같은 최첨단 기기에 필수적인 구성요소로 활발히 사용되고 있다. 따라서, 현재까지 FTO ($SnO_2:F$), ITO ($In_2O_3:Sn$), ATO ($SnO_2:Sb$)등과 같은 다양한 TCO들이 많은 연구자들에 의해 연구되고 있다. 그 중 ITO는 우수한 전기적(${\sim}10^{-4}{\Omega}cm$) 및 광학적(~85%) 특성 때문에 현재 상업적으로 활발히 응용되고 있는 대표적인 물질이다. 하지만 ITO의 주된 구성요소인 indium은 제한적인 매장량과 과도한 소비량 때문에 원가가 비싸다는 문제점이 있다. 반면에, ATO는 우수한 전기적(${\sim}10^{-3}{\Omega}cm$) 및 광학적(~80%) 특성뿐만 아니라 구성물질들의 매장량이 풍부하여 ATO의 원가가 저렴하다는 장점을 가지고 있어 현재 ITO을 대체 할 수 물질로 관심 받고 있다 [1]. 지금까지 우수한 특성을 갖는 ATO박막을 합성하는 방법으로 sol-gel spin coating, sputtering, spray pyrolysis, chemical vapor deposition (CVD)등이 알려져 있다. 이 중에서도, sol-gel spin coating과 spray pyrolysis은 solution기반의 합성법으로 분류되며 합성과정이 간단하고 비용이 저렴하다는 장점이 있고 현재까지 많은 연구가 보고되었다. 그러나, 진공기반이 아닌 우수한 특성을 갖는 solution기반의 ATO박막을 합성하기 위해서는 새로운 합성법의 개발이 학문적으로나 산업적으로도 매우 중요한 이슈이다. 따라서, 본 연구에서는 electrospray을 활용하여 solution기반의 ATO박막을 처음으로 합성하였다. 게다가 ATO박막에 열처리온도에 따른 구조, 화학, 전기, 광학적 특성을 확인하기 위하여 X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Scanning Electron Microscopy (SEM), transmission electron microscopy (TEM), Hall Effect Measurement System, UV spectrophotometer를 사용하였다. 이러한 실험 결과들을 바탕으로 electrospray을 통해 합성된 solution기반의 ATO박막에 자세한 특성을 본 학회에서 다루도록 하겠다.

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Preparation and ferroelectric properties of the $Pb(Zr_{0.52}Ti_{0.48})O_3$ thin film by Sol-Gel method (SoI-Gel법에 의한 $Pb(Zr_{0.52}Ti_{0.48})O_3$박막의 제조 및 강유전 특성)

  • 정장호;박인길;류기원;배선기;이영희
    • Electrical & Electronic Materials
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    • v.8 no.5
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    • pp.606-610
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    • 1995
  • In this study, Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_{3}$ ceramic thin films were fabricated from an alkoxide-based by Sol-Gel method. Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_{3}$ stock solution was made and spin-coated on the Pt/ $SiO_{2}$/Si substrate at 4000[rpm] for 30[sec.]. Coated specimens were chied at 400[.deg. C] for 10[min]. The coating process was repeated 6 times and then heat-treated at 500-800[.deg. C] and 1 hour. The final thickness of the thin films were about 4800[.angs.]. The ferroelectric perovskite phases precipitated under the sintering of 700[.deg. C] for 1 hour. Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_{3}$ thin films sintered at 700[.deg. C] for 1 hour showed good dielectric and ferroelectric properties.

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Addition of $B_2O_3$ precursors and their effect on texture and surface roughness of $La_2Zr_2O_7$ buffer layers

  • Kim, Young-Kuk;Yoo, Jai-Moo;Chung, Kook-Chae;Shin, Pyung-Woo
    • Progress in Superconductivity and Cryogenics
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    • v.10 no.2
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    • pp.20-23
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    • 2008
  • [ $La_2Zr_2O_7$] (LZO) buffer layers were deposited on biaxially textured Ni-W substrates by chemical solution deposition method (CSD). In this study, the effect of $B_2O_3$ addition on texture and surface roughness of LZO films was investigated. The alkoxide-based precursor solution was employed to synthesize the precursor solution of LZO and the solution was coated on biaxially textured Ni-W substrates and subsequently annealed at $900^{\circ}C$ for crystallization. The pure LZO film without $B_2O_3$ addition showed a (222) reflection in the X-ray diffraction (XRD) profile. The intensity of (222) reflection was enhanced and more rough surface was obtained after further repetition of coating. Contrary to this, the LZO film prepared by $B_2O_3$ added precursor solution shows well-developed (400) reflection peak in the XRD profile and excellent biaxial texture (${\Delta}{\theta}=4.3^{\circ}$, ${\Delta}{\phi}=6.8^{\circ}$). The surface roughness of LZO films were also improved by addition of $B_2O_3$ even after multicoating ($R_{rms}{\sim}3.1nm$). It was shown that the LZO film with smooth surface and biaxial texture was grown on the biaxially textured Ni-W substrates with addition of $B_2O_3$ in the precursor solution.

Corrosion of AI-Fe Coatings for Wet-Seal Area in Molten Carbonate Fuel Cells

  • Jun, JaeHo;Jun, JoongHwan;Kim, KyooYoung
    • Corrosion Science and Technology
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    • v.3 no.3
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    • pp.98-101
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    • 2004
  • The corrosion behavior of Al-Fe coatings was studied in the wet-seal atmosphere of molten carbonate fuel cells (MCFC). Fe-8Al, Fe-16Al, Fe-25Al, Fe-36Al, and Fe-70Al (in at.%) specimens were tested in Li/K carbonate at $650^{\circ}C$ by a single cell test and an immersion test. In general, the corrosion resistance of the Al-Fe coatings was enhanced due to the formation of a protective $LiAlO_2$ layer. However, when the Al-Fe coatings didn't have sufficient content of aluminum enough for maintaining the protective layer, the corrosion resistance of the Al-Fe coatings was severely degraded by the growth of non-protective scales like $LiAlO_2$. The test results revealed that the aluminum contents in the coatings should be higher than 25 at.% in order to form and maintain the protective $LiAlO_2$ layers.