• Title/Summary/Keyword: $H_2O $

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Application of Hydrogen Peroxide for Alumina Slurry Stability in Cu CMP (구리CMP공정시 알루미나 슬러리 안정성을 위한 Hydrogen peroxide의 적용)

  • Lee, Do-Won;Kim, Nam-Hoon;Kim, In-Pyo;Kim, Sang-Yong;Kim, Tae-Hyoung;Seo, Yong-Jin;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.136-139
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    • 2003
  • Copper has attractive properties as a multi-level interconnection material due to lower resistivity and higher electromigration resistance as compared with Alumina and its alloy with Copper(0.5%). Among a variety of agents in Copper CMP slurry, $H_2O_2$ has commonly been used as the oxidizer However. $H_2O_2$ is so unstable that it requires stabilization to use as oxidizer Hence, stabilization of $H_2O_2$ is a vital process to get better yield in practical CMP process. In this article the stability of Hydrogen Peroxide as oxidizer of Copper CMP slurry has been investigated. When alumina abrasive was used, $\gamma$-particle Alumina C had a better stability than $\alpha$-particle abrasive. As adding KOH as pH buffering agent, $H_2O_2$ stability in slurry decreased. Urea hydrogen peroxide was used as oxidizer, an enhanced stability was gotten. When $H_3PO_4$ as $H_2O_2$ stabilizer was added, the decrease of $H_2O_2$ concentration in slurry became slower. Even though adding $H_2O_2$ in slurry after bead milling lead to better stability than in advance of bead milling, it had a lower dispersibility.

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A Study on the Reduction of Color in Dye Wastewaters by Physico-chemical Processes (물리, 화학적 처리방법에 의한 염색폐수의 색도제거에 관한 연구)

  • 이준석;김민호;김영규
    • Journal of Environmental Health Sciences
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    • v.19 no.3
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    • pp.29-35
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    • 1993
  • This study was performed to obtain optimal conditions for reduction of color in dye wastewaters using coagulation-sedimentation processes with redox reactions. The reduction of color as well as organic matters variation was observed after coagulation-sedimentation processes using FeSO$_4$ $\cdot$ 7H$_2$O and NaOCl. Coagulation-redox reaction was done with the dose of Coagulant and oxidant at various pH values. Redox reaction was done through jar-mixing and aeration. The results of study were as follows: 1. In the coagulation-sedimentation processes using FeSO$_4$ $\cdot$ 7H$_2$O, color reduction was heigher at pH 3. With variance of dosage of FeSO$_4$ $\cdot$ 7H$_2$O, color reduction was higher at 250 mg/l. When coagulation-sedimentation using FeSO$_4$ $\cdot$ 7H$_2$O 250 mg/l was added at pH 3, the reduction of color, COD$_{Mn}$, and COD$_{Cr}$ showed 47.6%, 21.3% and 22.1%, respectively. 2. When NaOCI was added at level of 100 ppm in raw wastewater at pH 3, the reduction of color, COD$_{Mn}$, and COD$_{Cr}$ showed 30.2%, 5.5% and 6.2%, respectively. 3. After coagulation-sedimentation processes by addition of FeSO$_4$ $\cdot$ 7H$_2$O, when NaOCl was added at level of 250 mg/l in supernant, color reduction was 47.8% in aeration and 37.5% in jar-mixing. 4. Color reduction by aeration was higher than that by jar-mixing.

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A Study on the Highly Effective Treatment of Spent Electroless Nickel Plating Solution by an Advanced Oxidation Process (고도산화공정을 이용한 고농도 무전해 니켈도금 폐액 처리방안 연구)

  • Seo, Minhye;Cho, Sungsu;Lee, Sooyoung;Kim, Jinho;Kang, Yong-Ho;Uhm, Sunghyun
    • Applied Chemistry for Engineering
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    • v.26 no.3
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    • pp.270-274
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    • 2015
  • We develop advanced oxidation processes for the treatment of spent electroless nickel plating solution. Apart form recovering nickel by leaching and enrichment, more emphasis is placed on rendering the waste water recyclable via oxidizing phosphite and hypophosphite into phosphate which can then be precipitated easily. $UV/H_2O_2$ process is employed and the conversion efficiency of COD and $PO_4-P$, and $H_2O_2$ consumption are analyzed. Furthermore, the $UV/H_2O_2/O_3$ process in conjunction with $O_3$ generator enables us to not only save the treatment time by 6 hours but also reduce $H_2O_2$ consumption by 30%.

Surface Potential Behavior of Nano $CeO_2$ Particles in Aqueous Media (수계분산매체에서 나노 $CeO_2$ 입자의 계면전위 거동)

  • 이태원;백운규;최성철;이상훈;임형섭;김철진
    • Journal of the Korean Ceramic Society
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    • v.37 no.7
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    • pp.721-725
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    • 2000
  • In this study, the dispersion stability of nano-sized CeO2 particles, synthesized by hydrothermal method in aqueous was evaluated from observing the surface potential behavior of CeO2 particle synthesized by solid state reaction. The isoelectric point(IEP) of nano-sized CeO2 synthesized by hydrothermal synthesis was found to be pH 9 contrary to the isoelectric point of micro-sized CeO2 synthesized by solid state reaction at pH 6.7. IEP was shifted to pH 2.0 as the addition of D-3019 from 0.1 to 1.0 wt%. The surface potential of CeO2 particles synthesized by hydrothermal synthesis was reduced as the addition of B-1001 used as a binder without change of IEP because the absorption of B-1001 polymer on the CeO2 particles shifted the shear plane of CeO2 particles outward away from the surface. This surface potential behavior was well correlated with the dispersion stability of slurry.

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Electrochemical Properties of LiMn$_2$O$_4$by the Sort of Mixing Materials and Variation of Mole ratios (합성 물질의 종류 및 몰비 변화에 따른 LiMn$_2$O$_4$의 전기화학적 특성)

  • 최형기;박현배;정인성;구할본
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.11a
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    • pp.286-289
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    • 1997
  • It was studied that the effect of the mixing materials and the mole ratios on electrochemical properties of LiMn$_2$O$_4$LiMn$_2$O$_4$is prepared by reacting stoichiometric mixture of LiOH.$H_2O$ and MnO$_2$(EMD or CMD) and heating at 80$0^{\circ}C$ for 36h. We obtained properties of crystal structure through X-ray diffraction. LiMn$_2$O was reversible at 4.5V~3.0V and displayed two reduction and oxidation. Optimum synthesis results were obtained by reacting with LiOH.$H_2O$ and MnO$_2$(EMD) at mole ratio 1:2.

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Gas desorption species and quantity from the hot cathode ionization gauges (열음극 전리 진공게이지의 기체이탈 특성)

  • ;;;I. Arakawa
    • Journal of the Korean Vacuum Society
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    • v.12 no.4
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    • pp.201-206
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    • 2003
  • A residual gas analyzer was used to study the outgassing behavior of stainless steel 304 chamber as a function of bake-out temperature up to $235 ^{\circ}C$ and to identify the gas species evolved during turn on and degassing of the three different types of hot cathode ionization gauges. It was found that $H_2O$, CO, and $H_2O$ were the dominent outgassing species in the vacuum chamber during bake-out but finally $H_2$ and CO(mass 28) persisted at room temperature. Dominant outgassing species were also $H_2$ and $H_2O$ while fuming on the ionizations and then $H_2$,$H_2O$ and CO were found to be the main species degassed gauges. It was appeared that the outgassing species and quantity were not agreed to the three different types of hot cathode ionization gauges.

Sensitivity Characteristics on the Composition Change of the Gas Sensing Materials based on $In_2O_3$ Semiconductor. ($In_2O_3$계 반도성 가스감지재료의 조성변화에 따른 감도특성)

  • 정형진;유광수
    • Journal of the Korean Ceramic Society
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    • v.22 no.4
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    • pp.54-60
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    • 1985
  • Gas sensing materials for detecting flammable gases such as $CH_4$, $C_3H_8$ and n-$C_4H_{10}$ were developed by util-izing $In_2O_3$ as the principal sensing material. The sensing materials were formulated by mixing $In_2O_3$ powder with one or two other chemicals such as $SnO_2$, $Y_2O_3$ and $Al_2O_3$ with a small addition of $PdCl_2$ as a catalyst. Sample of sensor were fabricated by coating each of the mixtures on a ceramic tube impregnating ethylsili-cate and firing at 75$0^{\circ}C$ Each material mixture was evaluated by measuring and comparing gas sensitivity(resistance in air/resistance with gas) to flammable gases such as $CH_4$, $C_3H-8$ and n-$C_4H_{10}$. It was found that among fifteen compositions tested three compositions as follows show the highest gas sensitivity and thus are very feasible for commercialization as the gas sensors ; o49.5 $In_2O_3$+50 Al2O3_0.5 PdCl2(wt%) o $20In_2O_3+29$ $SnO_2+50$ $Al_2O_3+1$ $PdCl_2$(wt%) o40 $In_2O_3$+9 $Y_2O_3+50$ $Al_2O_3+1$ $PdCl_2$(wt%)

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Preparation of $MgO-ZrO_2$ Fibers by Sol-Gel Method and Their Characterization (졸-겔법에 의한 $MgO-ZrO_2$ 섬유의 제조와 특성)

  • 황진명;은희태
    • Journal of the Korean Ceramic Society
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    • v.31 no.10
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    • pp.1147-1158
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    • 1994
  • From Zr(O-nC3H7)4-H2O-C2H5OH-HNO3 starting solutions, MgO-doped stabilized zirconia fibers with varying content of MgO (10~18 mol%) from different MgO sources were fabricated by sol-gel method. The MgO sources used are magnesium nitrate hexahydrate, magnesium acetate tetrahydrate, and magnesium ethylate. The phase transformation studies of a drawn MgO-ZrO2 fiber were carried out using X-ray diffraction, IR spectroscopy, and Raman spectroscopy. The microstructure, tensile strength, and microporosity of fibers were investigated using SEM, tensile strength test, and microporosimeter. Although various MgO sources such as magnesium nitrate, acetate, and ethylate were used, the crystallization behavior of MgO-ZrO2 fibers at different temperatures could be summarized as follows: CubiclongrightarrowMetastable TetragonallongrightarrowMonocliniclongrightarrowCoexistence of Monoclinic and CubiclongrightarrowCubic(trace of monoclinic). At 150$0^{\circ}C$, the phase transformation of MgO-ZrO2 fibers shows the following change depending on the amount of MgO[Mg(NO3)2.6H2O]: At 10 mol%, both monoclinic and cubic phase coexist, at 12 mol%, monoclinic phase decreases rapidly, and then at 14 mol%, only cubic phase remains. When the MgO-ZrO2 fibers containing 12 mol% magnesium nitrate were heated at 80$0^{\circ}C$ for 1hr, average tensile strength of fibers is 4.0 GPa at diameters of 20 to 30 ${\mu}{\textrm}{m}$. As the heat-treatment temperatures increase to 100$0^{\circ}C$ for 1 hr, tensile strength of MgO-ZrO2 fibers decreases rapidly to 0.7 GPa.

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The Photocatalytic Decomposition of Different Organic Dyes under UV Irradiation with and without H2O2 on Fe-ACF/TiO2 Photocatalysts

  • Zhang, Kan;Oh, Won-Chun
    • Journal of the Korean Ceramic Society
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    • v.46 no.6
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    • pp.561-567
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    • 2009
  • The Fe-ACF/$TiO_2$ composites were prepared by a sol-gel method and were characterized by nitrogen adsorption, Scanning Electron Microscopy (SEM), X-ray Diffraction (XRD), and Energy Dispersive X-ray (EDX). The Fe-ACF/$TiO_2$ composites were developed for the decomposition of organic dyes by using a UV lamp. The decomposition effect was investigated under various conditions, such as three selected non-biodegradable organic dyes like Methylene Blue (MB), Methyl Orange (MO), Rhodamine B (Rh.B), and in the presence of Fe and hydrogen peroxide ($H_2O_2$). The photocatalytic activity was derived from possible combination effects, such as (1) adsorption of ACF, (2) generation of electron/hole by $TiO_2$, (3) photo-Fenton reaction of Fe, and (4) oxidation of $Fe^{2+}\;to\;Fe^{3+}\;by\;H_2O_2$.

Antioxidant Effects of Gagam-jangwon-hwan(jiajianzhuangyuanwan) on Hydrogen Peroxide-Induced Oxidative Stress in PC 12 Cell Lines ($H_2O_2$로 유도된 산화적 스트레스에 대한 장원환가감방(壯元丸加減方)의 PC 12 cell 에서의 항산화 효과)

  • Park, Yong-Hoon;Son, Il-Hong;Lee, Sang-Won;Lim, Jung-Hyun;Kim, Tae-Heon;Lyu, Yeoung-Su;Kang, Hyung-Won
    • Journal of Oriental Neuropsychiatry
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    • v.20 no.2
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    • pp.19-29
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    • 2009
  • Objectives : Antioxidant effects of Gagam-jangwonhwan(LMK01 and 02) water extract against $H_2O_2$-induced oxidative damage and cell death were investigated in rat pheochromocytoma line PC 12. Methods : The cells were treated with LMK01 and 02 water extract and $H_2O_2$, oxidative damage-inducing materials for 24 h. The cellular viability was assessed by WST-1 assay, oxidative damages of the cells by 8-OHdG quantitation, apoptosis by Hoechst 33342 staining assay and activity of antioxidant enzymes by catalase and glutathione peroxidase assay. Results : 1. LMK01 and LMK02 water extracts improved significantly cell viability in $H_2O_2$-treated groups than $H_2O_2$-alone treated cells 2, LMK02 suppressed significantly oxidative damage in $H_2O_2$-treated groups than $H_2O_2$-alone treated cells but LMK01 didn't. Meanwhile, difference of oxidative damages in conditions treated with LMK01 or LMK02 was not significant, 3. The $H_2O_2$ induced-apoptosis in PC 12 cell lines was inhibited effectively by LMK01 and LMK02, and especially the features of apoptosis were obviously reduced in LMK02-treated cells. 4. LMK01 and LMK02 increased significantly activities of both catalase and glutathione peroxidase than those of $H_2O_2$-alone treated group and moreover, LMK02 showed significantly higher activities than those of LMK01. Conclusions : As shown, LMK01 and LMK02 suppressed $H_2O_2$-induced oxidative damage and cell death in PC 12 cell effectively. And they increased activity of major antioxidant enzymes in PC 12 cell line. Therefore, this study suggests the possibility of clinical usage over oxidative stress-induced neurodegenerative disease such as Alzheimer's disease.

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