Sensitivity Characteristics on the Composition Change of the Gas Sensing Materials based on $In_2O_3$ Semiconductor.

$In_2O_3$계 반도성 가스감지재료의 조성변화에 따른 감도특성

  • 정형진 (한국과학기술원 무기재료연구실) ;
  • 유광수 (한국과학기술원 무기재료연구실)
  • Published : 1985.04.01

Abstract

Gas sensing materials for detecting flammable gases such as $CH_4$, $C_3H_8$ and n-$C_4H_{10}$ were developed by util-izing $In_2O_3$ as the principal sensing material. The sensing materials were formulated by mixing $In_2O_3$ powder with one or two other chemicals such as $SnO_2$, $Y_2O_3$ and $Al_2O_3$ with a small addition of $PdCl_2$ as a catalyst. Sample of sensor were fabricated by coating each of the mixtures on a ceramic tube impregnating ethylsili-cate and firing at 75$0^{\circ}C$ Each material mixture was evaluated by measuring and comparing gas sensitivity(resistance in air/resistance with gas) to flammable gases such as $CH_4$, $C_3H-8$ and n-$C_4H_{10}$. It was found that among fifteen compositions tested three compositions as follows show the highest gas sensitivity and thus are very feasible for commercialization as the gas sensors ; o49.5 $In_2O_3$+50 Al2O3_0.5 PdCl2(wt%) o $20In_2O_3+29$ $SnO_2+50$ $Al_2O_3+1$ $PdCl_2$(wt%) o40 $In_2O_3$+9 $Y_2O_3+50$ $Al_2O_3+1$ $PdCl_2$(wt%)

Keywords

References

  1. 化學センサ- 請山哲郎外
  2. 電子材料 v.16 no.2 セラミッガス檢知索子 -ノ瀨昇外
  3. Denki Kagaku v.40 no.3 Gas Detection by Activated Semiconuctive Sensor T. Seiyma(et al.)
  4. 應用物理 v.48 no.10 羊導體ガスセンザ 新田正義外
  5. NTG-Fachber v.79 no.324-335 Supttered Tungsten Trioxide Thin Films as Semiconductor Gas Sensors for Reducing Gases Ludwig Trettinger(et al.)
  6. 工業材料 v.30 no.1 酸化インジウム系 羊導體, ガスセンサの 製造機術
  7. J. of Am. Ceram. Soc v.68 no.1 Gas Sensing Characteristics of Porous ZnO and Pt/ZnO Ceramics S. Saito(et al.)
  8. NihonDaigaku Seisankogakubu Hokoku v.10 no.1 SnO₂Based Gas Sensor used Thick film Technology(I). Gas Detective Properties T. Nagasaka(et al.)
  9. IEEE Transactions on Electron Devices v.ED26 no.3 Thick film CO Gas Sensors M. Nitta(et al.)
  10. Proceedings of the International Meeting on Chemical Sensors v.17 no.18-23 Development of Tin Oxide Gas Sensor and Monitoring System T. Oyabu(et al.)
  11. ibid v.17 no.101-107 Catalyst Effect on Zinc Oxide Seniconductor Gas Sensor M. Katsura(et al.)
  12. J. of Electronic Materials v.6 no.6 The Effects of CO, Water Vapor and Surface Temperature on the Conductivity of a SnO₂Gas Sensor J.F. Boylc(et al.)
  13. Proceedings of the International Meeting on chemical Sensors v.17 no.62-66 Methane Sensitive Semiconductor and Detector Li Peide(et al.)
  14. Nihon Daigaku Seisankogakubu Hokoku v.10 no.2 SnO₂-Based Gas Sensors used Thick Film Technology-Dielectric Properties H. Fukuyo(et al.)
  15. Proceedings of the International Meeting on chemical Sensors v.17 no.12-17 Development of Tin-Oxide Gas Sensor and Monitorings System T. Oyabu(et al.)
  16. 電子材料 v.16 no.5 ガスセンザ 武田義章
  17. 昭和 55年度 電氣化學協會 棚橋賞受賞 記念講演文 五百歲弘典
  18. J. of Chem. Soc v.71 no.461-472 Tin Oxide Surfaces E.W. Thoronton(et al.)
  19. Nihon Dangaku Seisankogakubu Hokoku v.9 no.2 Gas Detector(5), The Effect of ThO₂on the Selective Detection M. Nitta(et al.)
  20. Japan KoKai Tokkyo Koho 83~198751
  21. Japan KoKai Tokkyo Koho 80~166035
  22. Nihon Daigaku Seisanko gakubu Hokoku v.10 no.2 SnO₂-Based Gas Sensors used Thick film, Technology(II), The Effect of Hydrophobic Silica-Sol T. Nagasaka(et al.)