• Title/Summary/Keyword: $H_{2}O$ Plasma

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A study on the characteristics of planar type inductively coupled plasma and its applications on the selective oxide etching (평면형 유도결합 플라즈마의 특성 및 선택적 산화막 식각 응용에 관한 연구)

  • 양일동;이호준;황기웅
    • Journal of the Korean Vacuum Society
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    • v.6 no.1
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    • pp.91-96
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    • 1997
  • The electrical characteristics and the plasma parameters of planar inductively coupled plasmas (ICP) have been measured. The resistance of the total load including the coil and the plasma varied from 1 to 4 W and the inductance from 1.5 m to 2 mH when the power was changed from 100 to 1000 W and the pressure from 1 to 10 mTorr. The density of electron measured by Langmuir probe was over $10^{11}/\textrm{cm}^3$ and the temperature varied between 3 and 5 eV as the process conditions were changed. Bias modulation was adopted as a new method to improve the selectivity of $SiO_2$on Si in $C_4F_8$ (octafluorocyclobutane) plasma. The selectivity was improved as the duty ratio decreased, but the etch rate of $SiO_2$decreased below 400$\AA$/min. $H_2$addition to $C_4F_8$ plasma showed that the etch selectivity could be higher than 50 and the etch rate of $SiO_2$over 2000$\AA$/min when 60% $H_2$was added.

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Non-thermal plasma를 이용한 VOCs의 제거기술

  • Song, Yeong-Hun;Sin, Wan-Ho;Kim, Gwan-Tae;Kim, Seok-Jun;Sim, Sun-Yong;Jang, Dong-Je
    • 한국연소학회:학술대회논문집
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    • 1998.10a
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    • pp.31-36
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    • 1998
  • An experimental study has been performed to characterize fundamental aspects of VOCs removal using non-thermal palsma technique. The removed VOCs in the present study are toluene ($C_6H_5CH_3$), ethene ($C_2H_4$), propene ($C_3H_6$) which are typical air pollutants generated from industry and automobile engines. The non-thermal plasma used in the present experiments has been produced in a wire-cylinder reactor with pulsed corona or a packed-bed reactor filled with ceramic bead. These differently generated non-thermal plasma have been visualized with an intensified CCD. The images of non-thermal plasma have been used for optimal design of a corona reactor used in the present study. The experimental results show that the removal efficiencies of VOCs with non-thermal plasma are dependant on the reactivity of VOCs with OH, O, and $O_3$. The results also show that the removal efficiencies of VOCs decrease significantly when VOCs are treated with NO that is also oxidized in the presence of OH, O, and $O_3$.

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Global Warming Gas Emission during Plasma Cleaning Process of Silicon Nitride Using C-C$_4$F$_8$O Feed Gas with Additive $N_2$

  • Kim, K.J.;Oh, C.H.;Lee, N.-E.;Kim, J.H.;Bae, J.W.;Yeom, G.Y.;Yoon, S.S.
    • Journal of the Korean institute of surface engineering
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    • v.34 no.5
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    • pp.403-408
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    • 2001
  • In this work, the cyclic perfluorinated ether (c-C$_4$F$_{8}$O) with very high destructive removal efficiency (DRE) than other alternative gases, such as $C_3$F$_{8}$, c-C$_4$F$_{8}$ and NF$_3$ was used as an alternative process chemical. The plasma cleaning of silicon nitride using gas mixtures of c-C$_4$F$_{8}$O/O$_2$ and c-C$_4$F$_{8}$O/O$_2$+ $N_2$ was investigated in order to evaluate the effects of adding $N_2$ to c-C$_4$F$_{8}$O/O$_2$ on the global warming effects. Under optimum condition, the emitted net perfluorocompounds (PFCs) during cleaning of silicon nitride were quantified and then the effects of additive $N_2$ by obtaining the destructive removal efficiency (DRE) and the million metric tons of carbon equivalent (MMT-CE) were calculated. DRE and MMTCE were obtained by evaluating the volumetric emission using. Fourier transform-infrared spectroscopy (FT-IR). During the cleaning using c-C$_4$F$_{8}$O/O$_2$+$N_2$, DRE values as high as (equation omitted) 98% were obtained and MMTCE values were reduced by as high as 70% compared to the case of $C_2$F$_{6}$O$_2$. Recombination characteristics were indirectly investigated by combining the measurements of species in the chamber using optical emission spectroscopy (OES), before and after the cleaning, in order to understand any correlation between plasma and emission characteristics as well as cleaning rate of silicon nitride.silicon nitride.

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The antidiabetic properties of fractions of Lycopus lucidic Turcz in streptozotocin diabetic rats (택란 분획물이 당뇨유발 흰쥐에서의 혈당강하에 미치는 영향)

  • 김명화
    • Korean journal of food and cookery science
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    • v.16 no.6
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    • pp.644-651
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    • 2000
  • This study was carried out to evaluate the effects of fractions of methanol(MeOH) extracts of Lycopus lucidic Turcz on hyperglycemia and energy metabolites in streptozotocin(STZ) diabetic rats. Diabetes mellitus was induced in male Sprague-Dawley rats weighing 200-220 g by an injection of STZ dissolved in a citrate buffer into the tail vein at a dose of 45 mg/kg of body weight, and the rats were divided into 7 groups, that is, one normal group and 6 diabetic groups: STZ-control, hexane, chloroform(CHCl$\sub$3/). ethylacetate(EtOAc), butanol(BuOH) and H$\sub$2/O fraction-fed groups. All groups were fed an AIN-93 diet and the fractions of Lycopus lucidic Turcz were administered orally with 2 % Tween 80 for 14 days after the STZ injection. Body weight, diet intake and organ weights were monitored. The plasma levels of blood glucose, insulin and protein were determined. The plasma concentrations of cholesterol, HDL-cholesterol, triglycerides and free fatty acid were assayed. The plasma activities of aspartate aminotransferase (AST) and alanine aminotransferase(ALT) were also measured. Body weight losses were observed by feeding the fractions of Lycopus lucidic Turcz in STZ experimental groups, and the kidney weight was increased. The extent of blood glucose decrement was significantly greater in the hexane and BuOH fraction-fed groups than STZ-control group. The plasma protein level was significantly lower in the H$\sub$2/O fraction-fed group. The plasma cholesterol level was decreased in BuOH and H$\sub$2/O fraction-fed groups compared with the STZ-control group. The levels of free fatty acids in the CHC1$\sub$3/ and H$\sub$2/O fraction-fed groups were significantly decreased(p<0.05). ALT activitiy of BuOH fraction-fed group was lower than control but it was not significantly different. These results suggest that the fractions of Lycopus lucidic Turcz are capable of lowering blood glucose and fat metabolites concentrations when administered to STZ-treated rats, and AST/ALT activity and insulin levels show the possibility of therapeutic use to diabetes mellitus.

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Spectral Line Identification and Emission Characteristics of the Laser-Induced Plasma in Pulsed Nd:YAG Laser Welding (펄스 YAG 레이저 용접시 유기하는 플라즈마의 스펙트럼선 동정과 발광특성)

  • 김종도
    • Journal of Advanced Marine Engineering and Technology
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    • v.23 no.3
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    • pp.360-368
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    • 1999
  • The paper describes spectroscopic characteristics of plasma induced in the pulsed YAG laser welding of alloys containing a large amount of volatile elements. The authors have conducted the spectroscopic analyses of laser induced Al-Mg alloys plasma in the air and argon atmosphere. In the air environment the identified spectra were atomic lines of Al, Mg, Cr, Mn, Cu, Fe and Zn and singly ionized Mg lines as well as the intense molecular spectra of ALO and MgO formed by chemi-cal reactions of evaporated Al and Mg atoms from the pool surface with oxygen in the air. In argon atmosphere MgO and AlO spectra vanished but AlH spectrum was detected. the hydrogen source was presumable hydrogen dissolved in the base metals water absorbed on the surface oxide layer or $H_2$ and $H_2O$ in the shielding gas. The resonant lines of Al and Mg were strongly self-absorbed in particular self-absorption of the Mg line was predominant. These results show that the laser induced plasma was made of metallic vapor with relatively low temperature and high density.

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Hydrogen peroxide inhibits Ca2+ efflux through plasma membrane Ca2+-ATPase in mouse parotid acinar cells

  • Kim, Min Jae;Choi, Kyung Jin;Yoon, Mi Na;Oh, Sang Hwan;Kim, Dong Kwan;Kim, Se Hoon;Park, Hyung Seo
    • The Korean Journal of Physiology and Pharmacology
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    • v.22 no.2
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    • pp.215-223
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    • 2018
  • Intracellular $Ca^{2+}$ mobilization is closely linked with the initiation of salivary secretion in parotid acinar cells. Reactive oxygen species (ROS) are known to be related to a variety of oxidative stress-induced cellular disorders and believed to be involved in salivary impairments. In this study, we investigated the underlying mechanism of hydrogen peroxide ($H_2O_2$) on cytosolic $Ca^{2+}$ accumulation in mouse parotid acinar cells. Intracellular $Ca^{2+}$ levels were slowly elevated when $1mM\;H_2O_2$ was perfused in the presence of normal extracellular $Ca^{2+}$. In a $Ca^{2+}-free$ medium, $1mM\;H_2O_2$ still enhanced the intracellular $Ca^{2+}$ level. $Ca^{2+}$ entry tested using manganese quenching technique was not affected by perfusion of $1mM\;H_2O_2$. On the other hand, $10mM\;H_2O_2$ induced more rapid $Ca^{2+}$ accumulation and facilitated $Ca^{2+}$ entry from extracellular fluid. $Ca^{2+}$ refill into intracellular $Ca^{2+}$ store and inositol 1,4,5-trisphosphate ($1{\mu}M$)-induced $Ca^{2+}$ release from $Ca^{2+}$ store was not affected by $1mM\;H_2O_2$ in permeabilized cells. $Ca^{2+}$ efflux through plasma membrane $Ca^{2+}-ATPase$ (PMCA) was markedly blocked by $1mM\;H_2O_2$ in thapsigargin-treated intact acinar cells. Antioxidants, either catalase or dithiothreitol, completely protected $H_2O_2-induced$ $Ca^{2+}$ accumulation through PMCA inactivation. From the above results, we suggest that excessive production of $H_2O_2$ under pathological conditions may lead to cytosolic $Ca^{2+}$ accumulation and that the primary mechanism of $H_2O_2-induced$ $Ca^{2+}$ accumulation is likely to inhibit $Ca^{2+}$ efflux through PMCA rather than mobilize $Ca^{2+}$ ions from extracellular medium or intracellular stores in mouse parotid acinar cells.

Synthesis of diamond thin film on WC-Co by RF PACVO (고주파 플라즈마 CVD에 의한 초경합금상에 다이아몬드 박막의 합성)

  • 김대일;이상희;박종관;박구범;조기선;박상현;이덕출
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.452-455
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    • 2000
  • Diamond thin films were synthesized on WC-Co substrate at various experimental parameters using 13.56MHz RF PACVD(radio frequency plasma-assisted chemical vapor deposition). In order to increase the nucleation density, the WC-Co substrate was polished with 3$\mu\textrm{m}$ diamond paste. And the WC-Co substrate was pretreated in HNO$_3$: H$_2$O = 1:1 and O$_2$ plasma. In H$_2$-CH$_4$gas mixture, the crystallinity of thin film increased with decreasing CH$_4$concentration at 800W discharge power and 20torr reaction pressure. In H$_2$-CH$_4$-O$_2$gas mixture, the crystallinity of thin film increased with increasing O$_2$concentration at 800W discharge power, 20torr reaction pressure and 4% CH$_4$concentration.

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Study on the Generation of Chemically Active Species Using Gas-liquid Mixing Plasma Discharging System (기-액 혼합 플라즈마 방전 시스템에서 화학적 활성종의 생성)

  • Kim, DongSeog;Park, YoungSeek
    • Journal of Korean Society on Water Environment
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    • v.30 no.4
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    • pp.394-402
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    • 2014
  • High-voltage dielectric discharges are an emerging technique in environmental pollutant degradation, which are characterized by the production of hydroxyl radicals as the primary degradation species. The initiation and propagation of the electrical discharges depends on several physical, chemical, and electrical parameters such as 1st and 2nd voltage of power, gas supply, conductivity and pH. These parameters also influence the physical and chemical characteristics of the discharges, including the production of reactive species such as OH, $H_2O_2$ and $O_3$. The experimental results showed that the optimum 1st voltage and oxygen flow rate for RNO (N-Dimethyl-4-nitrosoaniline, indicator of the generation of OH radical) degradation were 160 V (2nd voltage of is 15 kV) and 4 L/min, respectively. As the 2nd voltage (4 kV to 15 kV) was increase, RNO degradation was increased and, generated $H_2O_2$ and $O_3$ concentration were increased. The conductivity of the solution was not influencing the RNO degradation, $H_2O_2$ and $O_3$ generation. The pH effect on RNO degradation was not high. However, the lower pH and the conductivity, the higher $H_2O_2$ and $O_3$ generation were observed.

Separation Technology of Pure Zirconia from Zirconsand by the Ar-H2 Arc Plasma Fusion and Sulfuric Acid Leaching with Microwave Irradiation (Ar-H2플라즈마 건식제련과 마이크로웨이브침출을 통한 지르콘샌드로부터 고순도 지르코니아 분리)

  • Lee, Jeong-Han;Hong, Sung-Kil
    • Resources Recycling
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    • v.25 no.3
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    • pp.49-54
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    • 2016
  • In this study, zircon sand is separated into zirconia and silica by using the Ar-$H_2$ arc plasma refining. And then silica is removed from it by the microwave leaching method to produce a high pure zirconia. Plasma melting consist of two sequential processes; reduction process with Ar gas only followed by refining process with Ar-$H_2$ gas. After cooling in chamber. The solid phase obtained at $240^{\circ}C$ were found to be composed of 20% sulfuric acid solution. The solution was used as a leaching solution with microwave irradiation to obtain a high purity zirconia.