• Clean Technology
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• v.28 no.2
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• pp.131-137
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• 2022

The semiconductor process currently emits various by-products and unused gases. Emissions containing pollutants are generally classified into categories such as organic, acid, alkali, thermal, and cabinet exhaust. They are discharged after treatment in an atmospheric prevention facility suitable for each exhaust type. The main components of organic exhaust are volatile organic compounds (VOC), which is a generic term for oxygen-containing hydrocarbons, sulfur-containing hydrocarbons, and volatile hydrocarbons, while the main components of alkali exhaust include ammonia and tetramethylammonium hydroxide. The purpose of this study was to determine the combustion characteristics and analyze the NO_X reduction rate by maintaining a direct combustion and temperature to process organic and alkaline exhaust gases simultaneously. Acetone, isopropyl alcohol (IPA), and propylene glycol methyl ether acetate (PGMEA) were used as VOCs and ammonia was used as an alkali exhaust material. Independent and VOC-ammonia mixture combustion tests were conducted for each material. The combustion tests for the VOCs confirmed that complete combustion occurred at an equivalence ratio of 1.4. In the ammonia combustion test, the NO_X concentration decreased at a lower equivalence ratio. In the co-combustion of VOC and ammonia, NO was dominant in the NO_X emission while NO₂ was detected at approximately 10 ppm. Overall, the concentration of nitrogen oxide decreased due to the activation of the oxidation reaction as the reaction temperature increased. On the other hand, the concentration of carbon dioxide increased. Flameless combustion with an electric heat source achieved successful combustion of VOC and ammonia. This technology is expected to have advantages in cost and compactness compared to existing organic and alkaline treatment systems applied separately.

• Journal of the Korean Geographical Society
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• v.42 no.1 s.118
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• pp.133-155
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• 2007

The sustainable urban development has emerged as a new paradigm of urban studies in recent years. A review of the literature of land use and transport policies in relation to sustainable development reveals a consensus that the main objectives of sustainable strategy should decrease the numbers and length of journeys, and change the land use pattern towards mixed use and high density. However, there is a lack of empirical research as to what types of policies might influence effectively the reduction in the energy consumption and emission of $CO_2$. in order to sustain urban development. This paper tries to construct the conceptual structure of the PSS(planning support system), which is designed to the simulation of the probable effects of policies and planning of different kinds in cities, and evaluate the sustainablilty level according to construct the structure of the PSS(planning support system), which is designed to the simulation of the probable effects of policies and planning of different kinds in cities, and evaluate the sustainablilty level according to the alternative scenarios. The PSS is composed of three components (input-modeling-output). The core of PSS is integrating land use-transport-environment modeling. The advantages of integrating land use-transport-environment modeling are well known, but there are very few such integrated modeling packages in practice. So this paper tries to apply TRANUS software, which is an integrated land use and transport model. The TRANUS system was calibrated to city of Yongin for the base year. The purpose of the application of TRANUS to Yongin is to examine the operability of TRANUS system in Korea. From the outputs and results of operating the system, TRANUS may be effectively used to evaluate the effects of alternative sustainable urban development policies, since sustainablilty indicators can be extracted from several aspects such as land use consumption, total trips, distance and cost, energy consumption, ratio of transport split.