• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1321-1322
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• 2007

$Ar/Cl_2$, $Ar/CH_4$ 및 $Ar/Cl_{2}/CH_{4}$ 유도결합 플라즈마의 가스 혼합비에 따른 BLT 박막의 식각 메커니즘과 선택비, 식각 후 박막 표면의 조성변화를 조사하였다. BLT 박막의 최대식각률은 $Ar/Cl_2$ 플라즈마에서의 Ar 가스 혼합비가 80%일 때 50.8 nm의 값을 보였다. 이 때, 1sccm의 $CH_4$ 첨가를 통하여 선택비와 식각률을 개선할 수 있었다. 박막 표면의 xPS 분석을 통해 BLT 박막 표면의 조성변화는 Cl 원자와의 반응에 의한 화학적 식각 손상이 H 원자와의 반응에 의한 그것보다 크다는 것을 알 수 있었다.

• Journal of the Korean Chemical Society
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• v.32 no.4
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• pp.318-322
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• 1988

We studied the aquation reaction of s-cis-$[Co(eee)Cl_2]^+$ and s-cis-$[Co(eee)Br_2]^+$ complex ions under the various temperatures and pressures. In these complexes eee is $NH_2-CH_2CH_2-S-CH_2CH_2-NH_2$. The rate law of the aquation reactions of these two complexes obeys $Rate = k_{obsd}$[CO(III)], where rate constants of s-cis-$Co(eee)Cl_2]^+$ and s-cis-$[Co(eee)Br_2]^+$ respectively are $0.687{\times}10^{-4}$ $sec^{-1}$ and $4.10{\times}10^{-4}$ $sec^{-1}$ in condition of 0.1M $HClO_4\;and\;40^{\circ}C$. In the same condition, the activation entropies of s-cis-[Co(eee)$Cl_2$]+ and s-cis-(Co(eee)Br_2$]+ complexes respectively are -15.5 eu and -7.54eu, and the activation volumes are $-4.6cm^3mole^{-1}$ and $-4.2cm^3mole^{-1}$. From these data, we could infer the mechanism of the aquation reaction as the interchange dissociation (Id) mechanism.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.249-249
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• 1999

GaN과 같은 III-nitride 반도체 관한 식각 기술의 연구는 blue-emitting laser diode(LD)를 위한 경면(mirror facet)의 형성뿐만아니라 새로운 display 용도의 light emitting diodes (LED), 고온에서 작동되는 광전소자 제조 등에도 그 중요성이 증대되고 있다. 최근에는 III-nitride 물질의 높은 식각속도와 미려하고 수직한 식각형상을 이루기 위하여 ECR(Electron Cyclotron Resonance)이나 ICP(Inductively Coupled Plasma)와 같은 고밀도 플라즈마 식각과 CAIBE(Chemically assisted ion beam etching)를 이용한 연구가 진행되고 있다. 현재 제조되어 지고 있는 LED 및 LD와 같은 광소자의 구조의 대부분은 p-GaN/AlGaN/InGaN(Q.W)/AlGaN/n-GaN 와 같은 여러 층의 형태로 이루어져 있다. 이중 InGaN는 광소자나 전자소자의 특성에 영향을 주는 가장 중요한 부분으로써 현재까지 보고된 식각연구는 undoped GaN에 대부분 집중되고 있고 이에 비해 소자 특성에 핵심을 이루는 InGaN의 식각특성에 관한 연구는 미흡한 상황이다. 본 연구에서는 고밀도 플라즈마원인 ICP 장비를 이용하여 InGaN를 식각하였고, 식각에는 Cl2/CH4, Cl2/Ar 플라즈마를 사용하였다. InGaN의 식각특성에 영향을 미치는 플라즈마의 특성을 관찰하기 위하여 quadrupole mass spectrometry(QMS)와 optical emission spectroscopy(PES)를 사용하였다. 기판 온도는 5$0^{\circ}C$, 공정 압력은 5,Torr에서 30mTorr로 변화시켰고 inductive power는 200~800watt, bias voltage는 0~-200voltage로 변화시켰으며 식각마스크로는 SiO2를 patterning 하여 사용하였다. n-GaN, p-GaN 층 이외에 광소자 제조시 필수적인 InGaN 층을 100% Cl2로 식각한 경우에 InGaN의 식각속도가 GaN에 비해 매우 낮은 식각속도를 보였다. Cl2 gas에 소량의 CH4나 Ar gas를 첨가하는 경우와 공정압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%Ar 플라즈마에서 공정 압력을 감소시키는 경우 식각속도는 증가하였고, Cl2/10%CHF3 와 Cl2/10%Ar 플라즈마에서 공정압력을 15mTorr로 감소시키는 경우 InGaN과 GaNrks의 선택적인 식각이 가능하였다. InGaN의 식각속도는 Cl2/Ar 플라즈마의 이온에 의한 Cl2/CHF3(CH4) 플라즈마에서의 CHx radical 형성에 의하여 증가하는 것으로 사료되어 진다.

• Bulletin of the Korean Chemical Society
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• v.18 no.12
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• pp.1308-1311
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• 1997

• Bulletin of the Korean Chemical Society
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• v.33 no.8
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• pp.2517-2522
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• 2012

New polynuclear poly(hexaaza macrocyclic) copper(II) complexes $[1](ClO_4)_{2n}{\cdot}(H_2O)_{2n}$, $[2](ClO_4)_{2n}{\cdot}(H_2O)_{2n}$, and $[3](ClO_4)_{2n}{\cdot}(H_2O)_{2n}$ have been prepared by the one-pot reaction of formaldehyde with ethylenediamine and 1,2-bis(2-aminoethoxy)ethane, 1,3-diaminopropane, or 1,6-diaminohexane in the presence of the metal ion. The polymer complexes contain fully saturated 14-membered hexaaza macrocyclic units (1,3,6,8,10,13-hexaazacyclotetradecane) that are linked by $N-(CH_2)_2-O-(CH_2)_2-O-(CH_2)_2-N$, $N-(CH_2)_3-N$, or $N-(CH_2)_6-N$ chains. The mononuclear complex $[Cu(H_2L^5)](ClO_4)_4$ ($H_2L^5$ = a protonated form of $L^5$) bearing two $N-(CH_2)_2-O-(CH_2)_2-O-(CH_2)_2-NH_2$ pendant arms has also been prepared by the metal-directed reaction of ethylenediamine, 1,2-bis(2-aminoethoxy)ethane, and formaldehyde. The polymer complexes were characterized employing elemental analyses, FT-IR and electronic absorption spectra, molar conductance, X-ray diffraction (XRD), thermogravimetric analysis (TGA), differential scanning calorimetry (DSC), and scanning electron micrograph (SEM). Electronic absorption spectra of the complexes show that each macrocyclic unit of them has square-planar coordination geometry with a 5-6-5-6 chelate ring sequence. The polymer complexes as well as $[Cu(H_2L^5)]^{4+}$ are quite stable even in concentrated $HClO_4$ solutions. Synthesis and characterization of the polynuclear and mononuclear copper(II) complexes are reported.

• Bulletin of the Korean Chemical Society
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• v.9 no.3
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• pp.161-164
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• 1988

Infrared multiphoton decompositions (IRMPD) of $BrCH_2CH_2CH_2CH_2Cl$ were studied by using the pulsed $CO_2$laser. At 0.3 J laser energy the experimentally observed product ratios could be reasonably explained by the RRKM calculation with initial excitation energy of ca. 80 Kcal/mol. The pressure dependence of product yields led us to conclude that the collisional deactivation by the inert gas decreased the yield of low energy dissociation channel more significantly.

• Bulletin of the Korean Chemical Society
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• v.8 no.4
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• pp.324-328
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• 1987

Reaction of Rh $(ClO_4)(CO)(PPh_3)_2$ (1) with trans-$C_6H_5CH = CHCH_2OH$ (2) produces a new cationic rhodium(Ⅰ) complex, $[Rh(trans-C_6H_5CH = CHCHO)(CO)(PPh_3)_2]ClO_4$ (3) where 2 is coordinated through the oxygen atom but not through the olefinic group. At room temperature under nitrogen, complex 1 catalyzes dehydrogenation, hydrogenolysis, and isomerization of 2 to give $trans-C_6H_5CH$ = CHCHO (4), trans-$C_6H_5CH = CHCH_3$ (5) and $C_6H_5CH_2CH_2CHO$ (6), respectively, and oligomerization of 2 whereas under hydrogen, complex 1 catalyzes hydrogenation of 2 to give $C_6H_5CH_2CH_2CH_2OH$ (7) and hydrogenolysis of 2 to 5 which is further hydrogenated to $C_6H_5CH_2CH_2CH_3$ (8). The dehydrogenation and hydrogenolysis of 2 with 1 suggest an interaction between the rhodium and the oxygen atom of 2, whereas the isomerization and hydrogenation of 2 with 1 indicate an interaction between the rhodium and the olefinic system of 2.

• Journal of the Korean Society of Food Science and Nutrition
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• v.31 no.5
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• pp.814-818
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• 2002

The effects of dichloromethane (CH$_2$C1$_2$), ethylacetate (EtOAc) or water ($H_2O$) fraction of Korean cabbage kimhi on accumulation of lipids in the heart, kidney and lung of rabbit fed 1% cholesterol diet for 16 weeks were studied. The amount of kimhi fraction added to the 100 g of diet was 8.3 mg of CHaC12.5.6 W of EtOAc, and 221.9 mg of $H_2O$, which are equivalent to 5% of freeze-dried kimhi added to the diet. Each group had 6 rabbits and rabbit was housed individually. Cholesterol and triglyceride concentrations of three organs were noticeably decreased due to these solvent fractions of kimhi but for phospholipid and total lipids, only CH$_2$C1$_2$ fraction group showed decreasing effects. In the heart, compared to the control, cholesterol concentrations for CE$_2$C1$_2$, EtOAc, and H2O fraction group were decreased by 42 (P<0.05),21 (P<0.05), and 8%, respectively, and triglyceride for these groups were decreased by 29 (p<0.05),4, and 11%, respectively. In kidney, cholesterol concentration for CH$_2$C1$_2$, EtOAc, and H2O fraction group were decreased by 23, 12, and 11%, respectively (p<0.05) and triglyceride concentration for CH$_2$Cl$_2$ and H2O fraction groups were significantly decreased by 51 and 21%, respectively (p<0.05). In lung, cholesterol concentrations for CItCIB, EtOAc, and H2O fraction groups were decreased by 37,20, and 22%, respectively (p<0.05) and triglyceride concentration of these groups were significantly decreased by 39, 28, and 28%, respectively (p<0.05). And phospholipid and total lipid of CH$_2$CI$_2$ fraction group were significantly decreased by 33 and 34% respectively (p<0.05). Among three organs the cholesterol content of lung was the highest followed kidney and heart. For triglyceride, heart, kidney and lung is in the order of showing the highest concentration. The phospholipid concentration was not significantly different among three organs. According to these results, we may conclude that CH$_2$C1$_2$, fraction of kimhi might have the most active component, which decreases cholesterol, triglyceride, phospholipid and total lipids concentrations in heart, kidney, and lung of rabbit fed high cholesterol diet.

• Journal of the Korean Chemical Society
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• v.25 no.1
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• pp.7-12
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• 1981

Solvolysis of $p-CH_3, p-H, p-Cl and p-NO_2$-benzenesulfonyl chlorides have heen studied in MeOH-MeCN mixtures. A nonlinear Hammett plot with a ratio order of p-NO_2 > p-CH_3 > p-H > p-Cl was obtained; the reaction was thought to proceed by an S_N1-S_N2 borderline mechanism. In all cases the reactivity was a maximum at 90∼95%(v) methanol, whereas methanol monomer selectivity defined as fi = \frac{k1}{ki}i (k1; observed pseudo-first order rate constant: ki; hypothetical rate constant for MeOH solution having the same polymer structure as in the pure MeOH) was a maximum at 80% methanol with a decreasing order of fi as p-NO_2 > p-Cl > p-H > p-CH_3.$ This was interpreted as the decrease in tightness of transition state; the larger the fi, the tighter is the MeOH attached to the substrate, and hence the more susceptible the substrate becomes to the approaching monomer methanol.

• Bulletin of the Korean Chemical Society
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• v.24 no.1
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• pp.60-64
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• 2003

The reactions of $[Pt(dppf)Cl_2]$ with thiophenol (PhSH), 1-propanethiol (n-PrSH), and 1,3-propanedithiol $(HSCH_2CH_2CH_2SH)$ gave the corresponding Pt-dppf-di(thiolato) compounds, $[Pt(dppf)(SPh)_2]\;(1),\;[Pt(dppf)(S-n-Pr)_2]\;(2),\;and [Pt(dppf)(SCH_2CH_2CH_2S)]\;(3)$, respectively. All products are monomeric and 4-coordinate square-planar compounds and were structurally characterized by X-ray diffraction. Electrochemical measurements (cyclovoltammograms) revealed that the oxidation potential of the dppf ligand appears to depend on the type of the group on the thiolato ligand.