• 제목/요약/키워드: $CHF_3$

검색결과 137건 처리시간 0.025초

AlCu 배선의 부식방지를 위한 fluorine 가스 처리연구 (A study of the fluorine treatment for the anti-corrosion after plasma etching of AlCu films)

  • 김창일;서용진;권광호;김태형;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.383-386
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    • 1998
  • After etching Al-Cu alloy films using SiC1$_4$/Cl$_2$/He/CHF$_3$ plasma, a corrosion phenomenon on the metal surface has been studied with XPS (X-ray photoelectron spectroscopy) and SEM (Scanning electron microscopy). In Al-Cu alloy system, the corrosion occurs rapidly on the etched surface by residual chlorine atoms. To prevent the corrosion, CHF$_3$ plasma treatment subsequent to the etched has been carried out. A passivation layer is formed by fluorine-related compounds on the etched Al-Cu surface after CHF$_3$ and SF$_{6}$ treatment, and the layer supresses effectively the corrosion on the surface as the CHF$_3$ and SF$_{6}$ treatment pressure increases. The corrosion could be suppressed successfully with CHF$_3$ and SF6 treatment in the pressure of 300mTorr.orr.

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CH4/CHF3/Air 예혼합 화염의 축소 반응 메카니즘 개발 (The Development of a Short Reaction Mechanism for Premixed CH4/CHF3/Air Flames)

  • 이기용
    • 한국연소학회지
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    • 제19권1호
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    • pp.39-44
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    • 2014
  • A short reaction mechanism for premixed $CH_4/CHF_3/Air$ flames was developed with a reduction method of the combined application of simulation error minimization (SEM) which included connectivity method and principal component analysis. It consisted of 43 species and 403 elementary reactions at the condition of less than 5% of maximum error. The calculation time operated with a short mechanism was over 5 times faster than one with a detailed reaction mechanism. Good agreement was found between the flame speeds calculated by the short reaction mechanism and those by the detailed reaction mechanism for the entire range of $CHF_3/CH_4$ mole ratios and equivalence ratios. In addition excellent agreements were determined for the profiles of temperature, species concentration, and the production rates of the various species. So the short reaction mechanism was able to accurately predict the flame structure for premixed $CH_4/CHF_3/Air$ flames.

Critical Heat Flux in Uniformly Heated Vertical Annulus Under a Wide Range of Pressures 0.57 to 15.0 MPa

  • Chun, Se-Young;Chung, Heung-June;Hong, Sung-Deok;Yang, Sun-Kyu;Chung, Moon-Ki
    • Nuclear Engineering and Technology
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    • 제32권2호
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    • pp.128-141
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    • 2000
  • The critical heat flux (CHF)experiments have been carried out in a wide range of pressures for an internally heated vertical annulus. The experimental conditions covered ranges of pressures from 0.57 to 15.01 MPa, mass fluxes of 0 kg/$m^2$s and from 200 to 650 kg/$m^2$s, and inlet subcoolings from 85 to 413 kJ/kg. The characteristics of the present data and the effect of pressure on CHF are discussed. Most of the CHFs were identified to dryout of the liquid film in the annular or annular-mist flow. For the mass flux of 200 kg/$m^2$s, there were the indications that the CHF occurred at the transition from annular to annular-mist How in the pressure range of 3~10 MPa. For the mass fluxes of 550 and 650 kg/$m^2$s, the CHFs had a maximum value at a pressure of 2~3 MPa, and the pressure at the maximum CHF values had a trend moving toward the pressure at the peak value of pool boiling CHF as the mass flux decreased. The CHF data under a zero mass flux condition indicate that both the effects of pressure and inlet subcooling on the CHF were smaller, compared with those on the CHF with net water upward flow.

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Si(100) 기판위에 성장된 3C-SiC의 RIE 특성 (Reactive ion Etching Characteristics of 3C-SiC Grown on Si(100) Wafers)

  • 정수용;우형순;진동우;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.892-895
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    • 2003
  • This paper describes on RIE(Reactive Ion Etching) characteristics of 3C-SiC(Silicon Carbide) grown on Si(100) wafers. During RIE of 3C-SiC films in this work, $CHF_3$ gas is used to form of polymer as a side wall for excellent anisotropy etching. From this process, etch rates are obtained a $60{\sim}980{\AA}/min$ by various conditions such as $CHF_3$ gas flux, $O_2$ addition ratio, RF power and electrode distance. Also, approximately $40^{\circ}$ mesa structures are successfully formed at 100 mTorr $CHF_3$ gas flow ratio, 200 W RF power and 30 mm electrode distance. Moreover, vertical side wall is fabricated by anisotropy etching with 50% $O_2$ addition ratio and 25 mm electrode distance. Therefore, RIE of 3C-SiC films using $CHF_3$ could be applicable as fabrication process technology for high-temperature 3C-SiC MEMS applications.

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2중관형 2상 열사이폰의 한계열유속 특성에 관한 연구 (A Study on Critical Heat Elux Characteristics in a Two-Phase Concentric-Tube Thermosyphon)

  • 김욱
    • 대한기계학회논문집B
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    • 제26권10호
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    • pp.1419-1426
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    • 2002
  • An experimental study was made to elucidate critical heat flux(CHF) characteristics in a two-phase concentric-tube thermosyphon. The experiment was performed by using saturated water, over the experimental range of configuration: inner diameter of heated outer tube D=12mm, outer diameter of unheated inner tube do=3 to 10mm and heated tube length L=100 to 1000mm. The experiment shows that the CHF is enhanced with increase in the inner tube diameter, and that the CHF decreases beyond a certain diameter of the inner tube. There is an optimum diameter for inner tube that maximizes the CHF, for each tube length and test liquid. The CHF maximum is about two to eight times as large as that without an inner tube. For a large inner tube, the CHF characteristics is similar to that for natural convective boiling in a vertical annular tube.

나노유체의 풀비등 임계열유속에 대한 실험적 연구 (Experimental Investigations on Pool Boiling CHE of Nano-Fluids)

  • 김형대;김무환
    • 대한기계학회논문집B
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    • 제31권11호
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    • pp.949-956
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    • 2007
  • Pool boiling critical heat flux (CHF) of nanofluids with oxide nanoparticles of $TiO_2$ or $Al_2O_3$ was experimentally investigated under atmospheric pressure. The results showed that a dispersion of oxide nanoparticles significantly enhances the CHF over that of pure water. Moreover it was found that nanoparticles were seriously deposited on the heater surface during pool boiling of nanofluids. CHF of pure water on a nanoparticle-deposited surface, which is produced during the boiling of nanofluids, was not less than that of nanofluids. The result reveals that the CHF enhancement of nanofluids is absolutely attributed to modification of the heater surface by the nanoparticle deposition. Then, the nanoparticle-deposited surface was characterized with parameters closely related to pool boiling CHF, such as surface roughness, contact angle, and capillary wicking. Finally, reason of the CHF enhancement of nanofluids is discussed based on the changes of the parameters.

Enhancement of critical heat flux with additive-manufactured heat-transfer surface

  • Tatsuya Kano;Rintaro Ono;Masahiro Furuya
    • Nuclear Engineering and Technology
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    • 제56권7호
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    • pp.2474-2479
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    • 2024
  • In-Vessel Retention (IVR) is a key technology to retain the molten core in the reactor vessel during severe accidents of Pressurized-water reactors (PWRs). In order to gain the safety margin of IVR, it is crucial to enhance the critical heat flux (CHF) of the reactor vessel, which is submerged in a water pool. To enhance the CHF, we have designed and additive-manufactured porous grid plates with a 3-D printer for design flexibility. We measured the CHF for the porous grid plate on the boiling heat transfer surface and found that the CHF was enhanced by 50 % more than that of the bare surface. The CHF enhanced more with a narrower grid pitch and a lower grid height. The visual observation study revealed that the vapor film was formed at the bottom of the grid plate.

THE EFFECT OF MICRO/NANOSCALE STRUCTURES ON CHF ENHANCEMENT

  • Ahn, Ho-Seon;Kim, Moo-Hwan
    • Nuclear Engineering and Technology
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    • 제43권3호
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    • pp.205-216
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    • 2011
  • Recently, many research studies have investigated the enormous critical heat flux (CHF) enhancement caused by nanofluids during pool boiling and flow boiling. One of the main reasons for this enhancement is nanoparticle deposition on the heated surface. However, in real applications, nanofluids create many problems when used as working fluids because of sedimentation and aggregation. Therefore, artificial surfaces on silicon and metal have been developed to create an effect similar to that of nanoparticle deposition. These modified surfaces have proved capable of greatly increasing the CHF during pool boiling, and good results have also been observed during flow boiling. In this study, we demonstrate that the wetting ability of a surface, i.e., wettability, and the liquid spreading ability (hydrophilic surface property), are key parameters for increasing the CHF during both pool and flow boiling. We also demonstrate that when the fuel surface in nuclear power plants is modified in a similar manner, it has the same effect, producing a large CHF enhancement.

19F NMR Investigation of F1-ATPase of Escherichia coli Using Fluorinated Ligands

  • Jung, Seun-Ho;Kim, Hyun-Won
    • BMB Reports
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    • 제31권1호
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    • pp.44-47
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    • 1998
  • Asymmetry amongst nucleotide binding sites of Escherichia coli $F_1$-ATPase was examined using $^{19}F$ NMR signal from fluorinated analogs of adenine nucleotides bound to nucleotide binding sites. ADP-$CF_2-{PO_3}^{2-}$ showed no inhibitory effect to $F_1$-ATPase. But ADP-CHF-${PO_3}^{2-}$ (racemic mixture) showed competitive inhibition of $F_1$-ATPase with $K_i$ of $60\;{\mu}m$. ADP-CHF-${PO_3}^{2-}$ shows only negligible binding to $EF_1$ in the absence of $Mg^2+$. With the addition of $Mg^2+$ to the medium, the $^{19}F$ resonance of free ADP-CHF-${PO_3}^{2-}$ disappeared and the new broad resonances appeared. Appearance of more than two new asymmetric resonances following the binding of ADP-CHF-${PO_3}^{2-}$ to $EF_1$ may indicate that at least one of the isomers showed split resonances. This may suggest that the region between ${\alpha}$-and ${\beta}$-phosphate of ADP-CHF-${PO_3}^{2-}$ which is bound to catalytic sites is experiencing a different environment at different sites.

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광범위한 압력조건하에서 균일 가열 수직 봉다발에서의 임계열유속 (Critical Heat Flux in Uniformly Heated Rod Bundle Under Wide Range of System Pressures)

  • 문상기;천세영;최기용
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집D
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    • pp.195-200
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    • 2001
  • An experimental study on critical heat flux (CHF) has been performed for water flow in a uniformly heated vertical 3 by 3 rod bundle under low flow and a wide range of pressure conditions. The objective of this study is to investigate the parametric trends of CHF with 3 by 3 rod bundle test section where three unheated rods exist. The general trends of the CHF are coincident with previous understandings. At low flow and system pressure above 3 MPa, some critical qualities are larger than 1.0 due to counter-current flow in test sections. Since there is a supply of water to the heated section from unheated section, the maximum CHFs at system pressure between 2 and 4 MPa are not shown.

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