• 제목/요약/키워드: $CF_X$

검색결과 210건 처리시간 0.026초

Inductively Coupled Plasma에 의한 fluorocarbon 가스 플라즈마의 실리카 표면 반응 연구 (The Study of Silica Surface Reaction with Fluorocarbon Plasma Using Inductively Coupled Plasma)

  • 박상호;신장욱;정명영;최태구;권광호
    • 한국전기전자재료학회논문지
    • /
    • 제11권6호
    • /
    • pp.472-476
    • /
    • 1998
  • The surface reactions of silica film($SiO_2-P_2O_5-B_2O_3-GeO_2$) with fluorocarbon plasma has been studied by using angle -resolved x-ray photoelectron spectroscopy(XPS). It has been confirmed that residual carbon consists of C-C and C-CFx bonds and fluorine mainly binds silicon in the case of etched silica by using $CF_4$ gas plasma. The surface reaction of silica with various fluorocarbon gases, such as $CF_4,C_2F_6 and CHF_3$ were investigated. XPS results showed that though the etching gases were changed, the elements and binding states of the residual layers on the etched silica by using various fluorocarbon gas plasma were nearly the same . This seems to be due to the high volatility of byproducts, that is, $SiF_4 and CO_2$ etc..

  • PDF

Collimator Detector Response(CDR) 회복이 적용된 SPECT/CT에서 검출거리에 따른 정량적 정확성 평가 (The Evaluation of Quantitative Accuracy According to Detection Distance in SPECT/CT Applied to Collimator Detector Response(CDR) Recovery)

  • 김지현;손현수;이주영;박훈희
    • 핵의학기술
    • /
    • 제21권2호
    • /
    • pp.55-64
    • /
    • 2017
  • 최근 SPECT/CT의 보급과 함께 다양한 영상보정 방법들을 빠르고 정확하게 적용할 수 있게 되면서, 영상품질 향상과 더불어 정량적 정확성까지 기대할 수 있게 되었다. 그중 Collimator Detector Response (CDR) 회복(recovery)은 검출기면의 거리로부터 발생된 blurring 효과를 보상하여 분해능 회복을 목적으로 하는 보정방법이다. 본 연구에서는 SPECT/CT 영상에서 CDR recovery 가 적용되었을 때 검출거리 변화에 따른 정량적 변화를 알아보고자 하였다. 검출거리의 변화에 따른 획득 계수의 차이를 알아보고자 검출거리를 궤도방식(obit type)에 따라 Circular는 X, Y축 반경 30 cm, Non-Circular는 X, Y축 반경 21 cm, 10 cm, Non-Circular Auto(=Auto Body Contouring_ ABC, spacing limit 1 cm)로 설정하였고, 재구성 방법은 CDR recovery(CDRr)의 사용 유/무에 따른 계수 회복 차이를 알아보고자 OSEM (w/o CDRr)와 Astonish(3D-OSEM with CDRr)로 구분하여 적용하였다. 이 때 감쇠, 산란, 붕괴 보정은 모든 영상에 공통 적용하였다. 정량적 평가를 위해 교정인자(calibration factor_CF) 산출을 목적으로 교정영상(cylindrical phantom, $^{99m}TcO_4$ 123.3 MBq, 물 9293 ml)을 획득하였고, 팬텀 실험을 위하여 50 cc 주사기에 물 31 ml를 채우고 $^{99m}TcO_4$ 123.3 MBq를 설정하여 팬텀영상을 획득하였다. 팬텀 영상에서 주사기 전체 체적에 VOI(volume of interest)를 설정하여 각 조건별로 총 계수 값을 측정하였고, CF를 적용시켜 설정된 참값 대비 추정값의 오차를 구하여 보정에 따른 정량적 정확성을 확인하였다. 산출된 CF는 154.27 (Bq/ml/cps/ml)이며, 각 조건별 영상에서 참값 대비 추정값은 OSEM에서 Circular 86.5%, Non-Circular 90.1%, ABC 91.3% Astonish에서 Circular 93.6%, Non-Circular 93.6%, ABC 93.9%으로 분석되었다. OSEM은 검출거리가 가까울수록 정확성이 높아졌으며, Astonish의 경우에는 거리와 상관없이 거의 유사한 값을 나타내었다. 오차는 OSEM Circular(-13.5%)에서 가장 크고, Astonish ABC(-6.1%)에서 가장 적었다. SPECT/CT영상에서 CDR recovery 적용을 통한 거리보상이 이루어 졌을 때 검출거리가 먼 조건에서도 근접검출과 거의 동일한 정량적 정확성을 보였고, 검출거리의 변화에 영향을 받지 않고 정확한 보정이 가능한 것을 확인 할 수 있었다.

  • PDF

$Ar/Cl_{2}/CF_{4}$ 코밀도 플라즈마를 이용한 강유전체 $YMnO_3$의 건식식각 특성연구 (Dry Etch Characteristic of Ferroelectric $YMnO_3$ Thin Films Using High Density $Ar/Cl_{2}/CF_{4}$ $PAr/Cl_{2}/CF_{4}$)

  • 박재화;김창일;장의구;이철인;이병기
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
    • /
    • pp.213-216
    • /
    • 2001
  • Etching behaviors of ferroelectric YMn $O_3$ thin films were studied by an inductively coupled plasma (ICP). Etch characteristic on ferroelectric YMn $O_3$ thin film have been investigated in terms of etch rate, selectivity and etch profile. The maximum etch rate of YMn $O_3$ thin film is 300 $\AA$/min at Ar/C $l_2$ of 2/8, RF power of 800W, dc bias voltage of 200V, chamber pressure of 15mTorr and substrate temperature of 3$0^{\circ}C$. Addition of C $F_4$ gas decrease the etch rate of YMn $O_3$ thin film. From the results of XPS analysis, Y $F_{X}$ compunds were found on the surface of YMn $O_3$ thin film which is etched in Ar/C1/C $F_4$ plasma. The etch profile of YMn $O_3$ film is improved by addition of C $F_4$ gas into the Ar/C $l_2$ plasma. These results suggest that fluoride yttrium acts as a sidewall passivants which reduce the sticking coefficient of chlorine on YMn $O_3$.>.

  • PDF

Tetramethylene-1,4-bis(p-oxybenzylidene p-substituted aniline)의 합성과 액정성 (Preparation and Mesomorphic Properties of tetramethylene-1,4-bis (p-oxybenzylidene p-substituted aniline))

  • 최옥병;박주훈;이용섭;이환명;김기환;이은경;고경곤;이은상;소봉근;이창준;이수민
    • Korean Chemical Engineering Research
    • /
    • 제45권2호
    • /
    • pp.155-159
    • /
    • 2007
  • 말단에 두 개의 동일한 schiff base 메소젠과 중앙에 테트라메틸렌 유연격자를 갖는 새로운 이메소제닉 화합물을 합성하였다. 이들의 열적성질 및 액정성은 시차주사열분석기와 가열판이 부착된 편광현미경을 사용하여 조사하였다. X= -F, -Cl, -Br, -CN 및 $-OCH_3$ 화합물은 양방성 네마틱 액정이었으며, 이에 반하여 X= -I와 $-CF_3$ 화합물은 액정상을 형성하지 못하였다. 이 화합물들의 네마틱 그룹 효율은 -CN > $-OCH_3$ > -Br > -Cl > -F 순서이었다.

Kinetic Studies on the Nucleophilic Substitution Reaction of 4-X-Substituted-2,6-dinitrochlorobenzene with Pyridines in MeOH-MeCN Mixtures

  • Sung, Ryun-Youn;Choi, Ho-june;Lee, Jong-Pal;Park, Jong-Keun;Yang, Ki-Yull;Koo, In-Sun
    • Bulletin of the Korean Chemical Society
    • /
    • 제30권7호
    • /
    • pp.1579-1582
    • /
    • 2009
  • The reaction rates of 4-X-2,6-dinitrochlorobenzenes (X = $NO_2,\;CN,\;CF_3$) with Y-substituted pyridines (Y = 3-$OCH_3,\;H,\;3-CH_3,\;4-CH_3$) in methanol-acetonitrile mixtures were measured by conductometry at 25 ${^{\circ}C}$. It was observed that the rate constant increased in the order of X = 4-$NO_2\;>\;4-CN\;>\;4-CF_3$ and the rate constant also increased in the order of Y = 4-$CH_3\;>\;3-CH_3\;>\;H\;>\;3-OCH_3$. When the solvent composition was varied, the rate constant increased in order of MeCN > 50% MeOH > MeOH. The electrophilic catalysis by methanol may be ascribed to the formation of hydrogen bonds between alcoholic hydrogen and nitrogen of pyridines in ground state. Based on the transition parameters, ${\rho}_S,\;{\rho}_N,\;{\beta}_Y,\;{\rho}_{XY}$ and solvent effects, the reaction seems to proceed via $S_N$Ar-Ad.E mechanism. We also estimated the isokinetic solvent mixtures (${\rho}_{XY}$ = 0) based on cross-interaction constants, where the substituent effects of the substrate and nucleophile are compensated.

3차원 프린팅 기술을 이용한 차폐체 제작 및 유용성 평가 (Usefulness Evaluation and Fabrication of the Radiation Shield Using 3D Printing Technology)

  • 장희민;윤준
    • 한국방사선학회논문지
    • /
    • 제13권7호
    • /
    • pp.1015-1024
    • /
    • 2019
  • 최근 의료분야에서 X선은 질병의 진단 및 치료영역에서 필수적으로 요구되며, 영상의학 기술의 발전과 더불어 X선의 이용은 지속적으로 증가하는 추세지만, X선은 방사선 피폭의 단점을 가지고 있다. 방사선피폭을 방어하기 위해 임상에서는 납 방호도구를 사용하지만 납은 중금속으로 분류되어 납중독 등 인체에 유해한 반응을 일으킬 수 있다. 따라서 본 연구는 FDM(Fused Deposition Modeling)방식의 3차원 프린터의 재료를 이용하여 제작한 차폐체의 유용성을 알아보고자 한다. 필라멘트의 선감약계수를 확인하기 위해 PLA, XT-CF20, Wood, Glow, Brass를 이용해 팬텀을 제작 하고, CT scan을 하였다. 그리고 100 × 100 × 2 mm 크기의 차폐 시트를 모델링하고, 진단용 X선발생장치와 조사선량계를 이용하여 선량 및 차폐율을 측정하였으며, 납 방호도구와의 차폐율을 비교하였다. 실험결과 Brass의 CT number가 가장 높게 측정되어 Brass를 이용하여 차폐시트를 제작하였으며, 진단용 X선발생장치로 확인한 결과 100 kV, 40 mAs 조건으로 X선 조사 시 6 mm 두께의 차폐시트에서 차폐율이 90 % 이상으로 측정되어 apron 0.25 mmPb보다 차폐율이 높은 것을 확인하였다. 본 연구의 결과 3차원 프린팅 기술로 제작한 차폐체가 진단용 X선 영역에서 높은 차폐율을 보이는 것을 확인하였으며, 납 방호도구와의 비교를 통하여 납을 대체하여 방사선 방호도구로서의 가능성을 알 수 있었다.

Effects of electrochemical oxidation of carbon fibers on interfacial shear strength using a micro-bond method

  • Kim, Dong-Kyu;An, Kay-Hyeok;Bang, Yun Hyuk;Kwac, Lee-Ku;Oh, Sang-Yub;Kim, Byung-Joo
    • Carbon letters
    • /
    • 제19권
    • /
    • pp.32-39
    • /
    • 2016
  • In this work, we studied the effects of electrochemical oxidation treatments of carbon fibers (CFs) on interfacial adhesion between CF and epoxy resin with various current densities. The surface morphologies and properties of the CFs before and after electrochemical-oxidation-treatment were characterized using field emission scanning electron microscopy, atomic force microscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and single-fiber contact angle. The mechanical interfacial shear strength of the CFs/epoxy matrix composites was investigated by using a micro-bond method. From the results, electrochemical oxidation treatment introduced oxygen functional groups and increased roughness on the fiber surface. The mechanical interfacial adhesion strength also showed higher values than that of an untreated CF-reinforced composite.

Theoretical study on the dissociation reactions of C4F6 molecules

  • 최희철;박영춘;이윤섭
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
    • /
    • pp.36-36
    • /
    • 2010
  • Low-pressure fluorocarbon plasmas are widely used in microelectronics fabrication for a variety of surface modification purposes. In particular, fluorocarbon plasmas are used for the etching of dielectrics such as silicon dioxide and silicon nitride. Among the various fluorocarbons, this study focuses on C4F6 molecules (C4F6s) which are composed of hexafluorocyclobutene (c-C4F6), hexafluoro-1, 3-butadiene (1, 3-C4F6), and hexafluoro-2-butyne (2-C4F6). We have investigated the dissociation reactions of C4F6s, resulting in CF2, CF3, C2F3, and C3F3 fragments, by using the wB97X-D functional with various basis sets. In this presentation, the geometrical properties, energetics, and dissociation mechanisms of C4F6s will be suggested.

  • PDF

Vortex-induced vibration of a long flexible cylinder in uniform cross-flow

  • Ji, Chunning;Peng, Ziteng;Alam, Md. Mahbub;Chen, Weilin;Xu, Dong
    • Wind and Structures
    • /
    • 제26권5호
    • /
    • pp.267-277
    • /
    • 2018
  • Numerical simulations are performed of a long flexible cylinder undergoing vortex-induced vibration at a Reynolds number of 500. The cylinder is pinned at both ends, having an aspect ratio of 100 (cylinder length to cylinder diameter) and a mass ratio of 4.2 (structural mass to displaced fluid mass). Temporal and spatial information on the cross-flow (CF) and in-line (IL) vibrations is extracted. High modal vibrations up to the $6^{th}$ in the CF direction and the $11^{th}$ in the IL direction are observed. Both the CF and IL vibrations feature a multi-mode mixed pattern. Mode competition is observed. The $2^{nd}$ mode with a low frequency dominates the IL vibration and its existence is attributed to a wave group propagating back and forth along the span. Distributions of fluid force coefficients are correlated to those of the CF and IL vibrations along the span. Histograms of the x'-y motion phase difference are evaluated from the total simulation time and a complete vibration cycle representing the standing or travelling wave pattern. Correlations between the phase difference and the vibrations are discussed. Vortex structures behind the cylinder show an interwoven near-wake pattern when the standing wave pattern dominates, but an oblique near-wake pattern when the travelling wave pattern prevails.

Potential of Wood Vinegar in Enhancing Fruit Yield and Antioxidant Capacity in Tomato

  • Benzon, Hiyasmin Rose L.;Lee, Sang Chul
    • 한국자원식물학회지
    • /
    • 제29권6호
    • /
    • pp.704-711
    • /
    • 2016
  • Tomatoes are considered as one of the main components of daily meals in most households. Thus, it is important to invest in studies enhancing their yield and nutritional value. The study evaluated the effect of wood vinegar (WV) on tomato under greenhouse conditions. Data on fruit number, fruit weight, and plant height were recorded. Total phenolic content (TPC) and antioxidant activity of tomato were determined using the Folin-Ciocalteu reagent and 2, 2-diphenyl-1-picrylhydrazyl (DPPH) radical scavenging assay, respectively. FRR-CF+500x-WV significantly increased the fruit number (86.11%) and fruit weight (81.78%) over the control. Results were comparable to HRR-CF+250x-WV, indicating that conventional fertilizer and WV may have synergistic effect on each other. TPC and scavenging effect on DPPH radical was improved by 250x-WV application. The increase in the phenolic compounds can be attributed to WV as a direct source or as a factor triggering the plants to produce more secondary metabolites with the purpose of increasing natural defenses. The significant effect obtained by applying the full recommended rate of conventional fertilizer on the carotenoid content was due to the availability of the major nutrients needed by the plant. Correlation analysis showed that carotenoids have negative correlation with TPC and DPPH. However, TPC and DPPH showed that these are positively correlated with each other. Tomatoes are excellent source of antioxidants associated with the reduction of some human diseases and improved health. The results provided evidence that WV alone and/or its combination with conventional fertilizers has favorable effects on the quality of tomato.