• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.2
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• pp.111-117
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• 2008

We have studied surface roughness, contamination of impurity, bonding with some gas element, reflectance and zeta potential on masks to be generated or changed during photolithography/dry or wet etching process. Mask surface roughness was not changed after photolithography/dry etching process. But surface roughness was changed on some area under MoSi film of Cr/MoSi/Qz. There was not detected any impurity on mask surface after plasma dry etching process. Reflectance of mask was increased after variable plasma etching treatment, especially when mask was treated with plasma including $O_2$ gas. Blank mask was positively charged when the mask was treated with Cr plasma etching gas($Cl_2:250$ sccm/He:20 $sccm/O_2:29$ seem, source power:100 W/bias power:20 W, 300 sec). But this positive charge was changed to negative charge when the mask was treated with $CF_4$ gas for MoSi plasma etching, resulting better wet cleaning. There was appeared with negative charge on MoSi/Qz mask treated with Cr plasma etching process condition, and this mask was measured with more negative after SC-1 wet cleaning process, resulting better wet cleaning. This mask was charged with positive after treatment with $O_2$ plasma again, resulting bad wet cleaning condition.

• Proceedings of the Membrane Society of Korea Conference
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• 1995.10a
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• pp.49-50
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• 1995

고분자분리막을 이용한 기체 혼합물의 분리방법은 심냉법(cryogenic process), 가압기체흡착법(Pressure adsorption)과 더불어 상업적으로 중요한 기체분리공정으로 부각되고 있다. 특히 고분자막 중 Polyimide 막은 열적, 화학적으로 안정하고 기체에 대한 선택성이 높으며 기계적 성질이 뛰어나 좋은 막소재로 알려져 있다. 그러나 투과도와 선택도사이에 일반적으로 Trade-off 현상이 있어서 투과도와 선택도를 동시에 향상 하려는 연구가 수행중에 있다. 본 연구에서는 높은 산소투과도를 갖는다고 보고된 6FDA-p-TeMPD막에 hexafluoropropene (HEP)으로 Plasma polymerization을 시키거나 CF$_4$, Ar기체가 플라즈마처리하여 투과특성을 개선시키고 이를 비교 고찰하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.194.1-194.1
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• 2009

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.12
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• pp.1078-1084
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• 2006

Impurity contamination induced by $CF_4\;and\;HBr/Cl_2/O_2$ plasma etching on Si surface was examined by using surface spectroscopes. XPS(x-ray photoelectron spectroscopy) surface analysis showed that F of 0.4 at % exists in the surface layer in the form of Si-F bonding but Br and Cl are below the detection limit $(0.1{\sim}1.0%)$ of the spectroscope. Static-SIMS(secondary ion mass spectrometry) surface analysis showed that the etched Si surface was contaminated with etching gas elements such as H, F, Cl and Br, and they existed to the depth of about $20{\sim}40nm$. The etched Si surface was treated with three different methods that were HF dip, thermal oxidation followed by HF dip and oxygen-plasma oxidation followed by HF dip. They showed an effect in reducing the impurity contamination and the oxygen-plasma oxidation followed by HF dipping method appears to be a little bit more effective.

• Preventive Nutrition and Food Science
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• v.6 no.3
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• pp.170-175
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• 2001

This study was designed to investigate the effect of different sources of $\omega$3 fatty acid in the diet with a similar polyunsaturated/saturated (P/S) fatty acid ratio and $\omega$6/$\omega$3 fatty acid ratio as well as excess DHA on the plasma fatty acid composition and cholesterol level of rats. Three experimental diets contained 10% (w/w) dietary lipids. The control diet and one treatment diet were corn oil-based diets with different $\omega$-3 fatty acid sources: perilla (CO) or fish oil (CF), respectively. In order to examine the effect of excess DHA, the other treatment diet (FO) was a fish oil-based diet with corn oil to supply essential fatty acids at the level of 1.8% (w/w) of the diet. Female Sprague Dawley rats were fed the experimental diets for 2 weeks prior to mating and throughout gestation and lactation. Pups were weaned to the same diet of dams at 21 days of age. Plasma fatty acid compositions and cholesterol contents were analyzed for pups at 3th, 7th and 10th week after birth. Plasma DHA concentrations increased significantly as the level of fish oil supplementation increased. Three-, seven- and ten-week old rats fed on CO diet which contained only $\alpha$-lino1enic acid as a $\omega$-3 fatty acid Source had Plasma DHA levels of 4.85%, 3.15% ana 2.47%, respectively, suggesting that rats at this period of development can convert $\alpha$-linolenic acid to DHA. But the ability to form DHA might be limited, since dietary DHA showed to be more effective in raising the plasma level of DHA. There was a significant negative correlation between DHA and cholesterol concentration of the rat plasma at 7th week (r=0.34, p<0.05) and l0th week after birth (r=036, p<0.05), proving the hypocholesterolemic effect of DHA.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.12
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• pp.824-828
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• 2016

In this study, effects of ICP (inductively coupled plasma) treatment on PAR thin film have been investigated. A maximum etch rate of the PAR thin films and the selectivity of PAR to PR were obtained as 110 nm/minand 1.1 in the $CF_4/O_2$ (5:15 sccm) gas mixture. We present the surface properties of PAR thin film with various treatment conditions. The surface morphology and cross section of the PAR thin film was observed by AFM (atomic force microscopy) and FE-SEM (filed emission scanning electron microscopy).

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.1111-1113
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• 2004

n+ etching process is investigated in the fabrication of TFF-LCD using low resistance data line of Mo/Al/Mo. Problems of consumption of upper Mo layer and contamination of channel area are resolved. Either of HCl or $Cl_2$ can be selected as a main etchant gas, and either of $SF_6$ or $CF_4$ can be selected as an additive. Plasma treatment after n+ etching process can reduce the off-current high problem.

• Asian-Australasian Journal of Animal Sciences
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• v.19 no.8
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• pp.1159-1163
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• 2006

This experiment was performed to examine the influences of high ambient temperature on milk production, nutrient digestibility, energy and protein sufficiency ratio, and plasma metabolites concentration in lactating cows. In a $2{\times}2$ crossover design, four multiparous lactating Holstein cows were maintained in a chamber under treatment of constant moderate ($18^{\circ}C$) ambient temperature (MT) or high ($28^{\circ}C$) ambient temperatures (HT). The DMI and milk protein yield were significantly lower in HT (p<0.05). The milk yield, milk lactose yield, and milk SNF yield tended to be lower in HT (p<0.10). No statistical differences for 4% fat-corrected milk and milk fat yield were observed. Rectal temperatures were significantly higher in HT than MT (p<0.05). The apparent DM, OM, ether extract, CF, and ash digestibility did not differ between treatments. On the other hand, the apparent CP digestibility was increased significantly (p<0.05) and nitrogen free extract tended to increase (p<0.10) in HT. The sufficiency ratio of ME and DCP intake for each requirement tended to be lower in HT than in MT (p<0.10). Concentrations of total protein (TP), albumin, and urea nitrogen in plasma did not differ between treatments. Plasma 3-methylhistidine (3MH) concentration as a marker of myofibrillar protein degradation tended to be higher in HT (p<0.15). In conclusion, high ambient temperature was associated with a lower energy and protein sufficiency ratio, and decreased milk protein production, even though the body protein mobilization tended to be higher.

• Applied Chemistry for Engineering
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• v.34 no.2
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• pp.170-174
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• 2023

CO₂ is known as one of the causes of global warming, and various studies are being conducted to capture it. In this study, a tetrafluoromethane (CF₄) plasma reaction was performed to improve the CO₂ adsorption of activated carbons (ACs) through changes in surface characteristics, and the adsorption characteristics according to the reaction time were considered. After the reaction, the micropore volume increased up to 1.03 cm³/g. In addition, as the reaction time increased, the fluorine content on the surface increased to 0.88%. It was possible to simultaneously control the pore properties and surface functional groups of the ACs through this experiment. Also, the CO₂ uptake of surface-treated ACs improved up to 7.44% compared to untreated ACs, showing the best performance at 3.90 mmol/g when the reaction time was 60 s. This is due to the synergy effect of the fluorine functional groups introduced on the surface of the ACs and the increased micropore volume caused by the etching effect. It was found that the micropore volume had a greater effect on CO₂ adsorption in the region where the CO₂ uptake was less than 3.67 mmol/g, while the added fluorine content had a greater effect in the region above that.